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1.发明申请公开(公告)号：US20070014656A1
公开(公告)日：2007-01-18
申请号：US11480313
申请日：2006-06-29
申请人： Randy Harris , Daniel Woodruff , Paul Wirth , David Mattson , James Erickson
发明人： Randy Harris , Daniel Woodruff , Paul Wirth , David Mattson , James Erickson
IPC分类号： B66C23/00
CPC分类号： H01L21/67742 , H01L21/68707
摘要： End-effectors and associated control and guidance systems and methods are disclosed. A transfer device in one embodiment includes a base unit, an arm carried by the base unit and movable relative to the base unit, and an end-effector carried by the arm and rotatable relative to the arm. The end-effector includes two grippers, at least one being movable toward and away from the other between a grip position and a release position. A transmission is coupled between a motor and the movable gripper to receive an input force from the motor and apply an output force to the gripper that increases as the gripper moves to the grip position.
摘要翻译： 公开了终端效应器和相关的控制和引导系统和方法。 在一个实施例中的传送装置包括基座单元，由基座单元承载并可相对于基座单元运动的臂，以及由臂承载并可相对于臂旋转的端部执行器。 末端执行器包括两个夹持器，至少一个可在夹持位置和释放位置之间朝向和远离另一个移动。 传动装置联接在电动机和可动夹具之间以接收来自电动机的输入力，并且向夹具施加输出力，该夹持器随着夹持器移动到把手位置而增加。
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2.发明申请Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems 有权集成工具，可互换的湿加工部件，用于加工微型工件和自动校准系统公开(公告)号：US20050034809A1
公开(公告)日：2005-02-17
申请号：US10861240
申请日：2004-06-03
申请人： Daniel Woodruff , Jeffry Davis , Randy Harris , David Mattson , James Erickson , Matthew Egloff
发明人： Daniel Woodruff , Jeffry Davis , Randy Harris , David Mattson , James Erickson , Matthew Egloff
IPC分类号： B24B20060101 , C12N15/31 , C23F1/00 , H01L21/00
CPC分类号： H01L21/6719
摘要： An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.
摘要翻译： 集成的工具和自动校准系统，使湿化学处理室，提升 - 旋转单元和其他硬件能够快速互换，而无需重新校准运输系统或其他组件到更换项目。 预计这些工具可以减少与修理或维护处理室和/或提升旋转单元相关联的停机时间，从而使工具能够保持高通量。 这些工具的几个方面对于具有严格性能要求的应用程序特别有用，因为组件更有可能需要更频繁的维护，并且减少与维护这些组件相关联的停机时间将显着增强集成工具。
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公开(公告)号：US20070104559A1
公开(公告)日：2007-05-10
申请号：US11635848
申请日：2006-12-08
IPC分类号： B65H1/00
CPC分类号： H01L21/67259 , H01L21/68707 , Y10S294/907
摘要： End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutments. An alternative end-effector includes at least three abutments, at least one of which is resiliently connected to an actuator for movement between a retracted position and a deployed position wherein it engages a workpiece.
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4.发明申请Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces 失效具有自动校准系统的集成工具和可互换的湿加工部件，用于加工微型工件公开(公告)号：US20050109088A1
公开(公告)日：2005-05-26
申请号：US10860385
申请日：2004-06-03
申请人： Daniel Woodruff , David Mattson , James Erickson , Matthew Egloff
发明人： Daniel Woodruff , David Mattson , James Erickson , Matthew Egloff
CPC分类号： H01L21/6723 , B01D61/425 , C25D17/00 , H01L21/67005 , H01L21/6719 , H01L21/67742 , H01L21/68707
摘要： An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.
摘要翻译： 集成的工具和自动校准系统，使湿化学处理室，提升 - 旋转单元和其他硬件能够快速互换，而无需重新校准运输系统或其他组件到更换项目。 预计这些工具可以减少与修理或维护处理室和/或提升旋转单元相关联的停机时间，从而使工具能够保持高通量。 这些工具的几个方面对于具有严格性能要求的应用程序特别有用，因为组件更有可能需要更频繁的维护，并且减少与维护这些组件相关联的停机时间将显着增强集成工具。
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公开(公告)号：US20050155864A1
公开(公告)日：2005-07-21
申请号：US11081030
申请日：2005-03-10
申请人： Daniel Woodruff , Kyle Hanson , Steve Eudy , Curtis Weber , Randy Harris
发明人： Daniel Woodruff , Kyle Hanson , Steve Eudy , Curtis Weber , Randy Harris
CPC分类号： H01L21/6723 , C25D7/123 , C25D17/001 , C25D17/10 , H01L21/6719 , H01L21/67751
摘要： An electrochemical processing chamber which can be modified for treating different workpieces and methods for so modifying electrochemical processing chambers. In one particular embodiment, an electrochemical processing chamber 200 includes a plurality of walls 510 defining a plurality of electrode compartments 520, each electrode compartment having at least one electrode 600 therein, and a virtual electrode unit 530 defining a plurality of flow conduits, with at least one of the flow conduits being in fluid communication with each of the electrode compartments. This first virtual electrode unit 530 may be exchanged for a second virtual electrode unit 540, without modification of any of the electrodes 600, to adapt the processing chamber 200 for treating a different workpiece.
摘要翻译： 一种电化学处理室，可用于处理不同的工件和改性电化学处理室的方法。 在一个特定实施例中，电化学处理室200包括限定多个电极隔室520的多个壁510，每个电极室中具有至少一个电极600，以及限定多个流动管道的虚拟电极单元530， 至少一个流动管道与每个电极隔室流体连通。 第一虚拟电极单元530可以被替换为第二虚拟电极单元540，而不改变任何电极600，以使处理室200适应于处理不同的工件。
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公开(公告)号：US20060037855A1
公开(公告)日：2006-02-23
申请号：US11111672
申请日：2005-04-20
申请人： Kyle Hanson , Steve Eudy , Thomas Ritzdorf , Gregory Wilson , Daniel Woodruff , Randy Harris , Curtis Weber , Tim McGlenn , Timothy Anderson , Daniel Bexten
发明人： Kyle Hanson , Steve Eudy , Thomas Ritzdorf , Gregory Wilson , Daniel Woodruff , Randy Harris , Curtis Weber , Tim McGlenn , Timothy Anderson , Daniel Bexten
IPC分类号： C25D17/00
CPC分类号： C25D21/12 , C23C18/1632 , C25D7/123 , C25D17/001 , C25D17/008 , H01L21/67005 , H01L21/6723
摘要： Processing tools, components of tools, and methods of making and using such devices for electrochemical processing of microelectronic workpieces. One aspect of the invention is directed toward reaction vessels for electrochemical processing of microelectronic workpieces, processing stations including such reaction vessels, and methods for using these devices. For example, one embodiment of a reaction vessel includes an outer container having an outer wall, a first outlet configured to introduce a primary fluid flow into the outer container, and at least one second outlet configured to introduce a secondary fluid flow into the outer container separate from the primary fluid flow. The reaction vessel can also include at least one electrode, and it can also have a field shaping unit. The field shaping unit, for example, can be a dielectric assembly coupled to the second outlet to receive the secondary flow and configured to contain the secondary flow separate from the primary flow through at least a portion of the outer container. The field shaping unit can also have at least one electrode compartment through which the secondary flow can pass separately from the primary flow. The electrode is positioned in the electrode compartment.
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7.发明申请Integrated tool assemblies with intermediate processing modules for processing of microfeature workpieces 有权具有用于处理微型工件的中间处理模块的集成工具组件公开(公告)号：US20070009344A1
公开(公告)日：2007-01-11
申请号：US11178250
申请日：2005-07-07
申请人： Paul Wirth , Daniel Woodruff
发明人： Paul Wirth , Daniel Woodruff
IPC分类号： H01L21/677
CPC分类号： H01L21/67201 , H01L21/6719 , H01L21/67775
摘要： An intermediate module comprising a dimensionally stable mounting module and a first device attached to the dimensionally stable mounting module. The dimensionally stable mounting module can include a front docking unit with front alignment elements for connecting the mounting module to a load/unload module, and a rear docking unit with rear alignment elements for connecting the mounting module to a main processing unit. The mounting module can further include a deck between the front docking unit and the rear docking unit, positioning elements at the deck, and attachment elements at the deck. The first device can be a processing chamber, an annealing station, a metrology station, a buffer station, or another type of component for holding or otherwise performing a function on a workpiece. The first device has a device interface member engaged with one of the positioning elements and a device fastener engaged with one of the attachment elements so that the first device is positioned precisely at a known location in a fixed reference frame defined by the mounting module.
摘要翻译： 一种中间模块，包括尺寸稳定的安装模块和附接到尺寸稳定的安装模块的第一装置。 尺寸稳定的安装模块可以包括具有用于将安装模块连接到装载/卸载模块的前对准元件的前对接单元和具有用于将安装模块连接到主处理单元的后对准元件的后对接单元。 安装模块还可以包括在前对接单元和后对接单元之间的甲板，位于甲板处的定位元件和甲板上的附接元件。 第一装置可以是处理室，退火站，计量站，缓冲站或用于在工件上保持或以其他方式执行功能的另一类型的部件。 所述第一装置具有与所述定位元件中的一个接合的设备接口构件和与所述附接元件中的一个接合的设备紧固件，使得所述第一设备精确地定位在由所述安装模块限定的固定参考框架中的已知位置处。
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8.发明申请Paddles and enclosures for enhancing mass transfer during processing of microfeature workpieces 有权用于在微型工件加工过程中增强传质的鞍座和外壳公开(公告)号：US20050006241A1
公开(公告)日：2005-01-13
申请号：US10734098
申请日：2003-12-11
IPC分类号： C25D5/00
CPC分类号： C25D5/006 , C25D5/08 , C25D17/001 , C25D17/008 , C25D17/10 , C25D17/12 , C25D21/10 , C25D21/12 , H01L21/6723
摘要： Paddles and enclosures for processing microfeature workpieces are disclosed. A paddle device having multiple paddles is positioned in an enclosure to reciprocate back and forth along a generally linear path. The clearances between the paddles, the workpiece and the walls of the chamber are relatively small to increase the flow agitation at the surface of the workpiece and enhance the mass transfer process occurring there. The paddles are shaped to reduce or eliminate electrical shadowing effects created at the surface of the workpiece during electrochemical processing. Paddles on the same paddle device may have different shapes to reduce the likelihood for creating three-dimensional effects in the flow field proximate to the surface of the workpiece. The reciprocation stroke of the paddles may shift to further reduce shadowing.
摘要翻译： 公开了用于处理微特征工件的鞍座和外壳。 具有多个桨叶的桨装置定位在外壳中，沿着大致线性的路径往复运动。 桨叶，工件和室壁之间的间隙相对较小，以增加工件表面的流动搅拌并增强在那里发生的传质过程。 桨叶的形状可减少或消除在电化学处理期间在工件表面产生的电阴影效应。 相同桨装置上的桨叶可以具有不同的形状，以减少在靠近工件表面的流场中产生三维效应的可能性。 桨叶的往复行程可能会转移以进一步减少阴影。
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9.发明授权Processing apparatus including a reactor for electrochemically etching a microelectronic workpiece 失效包括用于电化学蚀刻微电子工件的反应器的处理装置公开(公告)号：US06773559B2
公开(公告)日：2004-08-10
申请号：US09782216
申请日：2001-02-13
IPC分类号： C25D1700
CPC分类号： H01L21/67086 , C25D5/08 , C25D7/123 , C25D17/001 , C25D17/007 , C25D21/10 , H01L21/67005 , H01L21/67023 , H01L21/67057 , H01L21/6723
摘要： Although there are several inventions disclosed herein, the present application is directed to a reactor for electrochemically processing a microelectronic workpiece. The reactor comprises a movable electrode assembly that is disposed for movement along a motion path. The motion path includes at least a portion thereof over which the electrode assembly is positioned for processing at least one surface of the microelectronic workpiece. A cleaning electrode is located along the motion path of the movable electrode assembly. In one embodiment, a programmable controller is connected to direct the movable electrode assembly to move to the cleaning electrode during a cleaning cycle. At that time, the programmable controller connects the movable electrode assembly as an anode and the cleaning electrode as a cathode for cleaning of the movable electrode assembly. The cleaning electrode may be disposed along a position of the motion path that is beyond the range of motion required to process the microelectronic workpiece so that the programmable controller may be programmed to conduct a cleaning cycle while a microelectronic workpiece is present in the reactor for processing.
摘要翻译： 虽然本文公开了几个发明，但是本申请涉及用于电化学处理微电子工件的反应器。 反应器包括可移动电极组件，其被设置为沿着运动路径移动。 运动路径至少包括一部分，电极组件定位在该部分上用于处理微电子工件的至少一个表面。 沿着可动电极组件的运动路径设置清洁电极。 在一个实施例中，连接可编程控制器以在清洁循环期间引导可移动电极组件移动到清洁电极。 此时，可编程控制器将作为阳极的可动电极组件和作为用于清洁可动电极组件的阴极的清洁电极连接起来。 清洁电极可以沿着运动路径的位置设置，该位置超出处理微电子工件所需的运动范围，使得可编程控制器可以被编程以在微电子工件存在于反应器中进行清洁循环以进行处理 。
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10.发明授权Processing apparatus including a reactor for electrochemically etching microelectronic workpiece 失效包括用于电化学蚀刻微电子工件的反应器的处理装置公开(公告)号：US07524406B2
公开(公告)日：2009-04-28
申请号：US10745190
申请日：2003-12-23
CPC分类号： H01L21/67086 , C25D5/08 , C25D7/123 , C25D17/001 , C25D17/007 , C25D21/10 , H01L21/67005 , H01L21/67023 , H01L21/67057 , H01L21/6723
摘要： Although there are several inventions disclosed herein, the present application is directed to a reactor for electrochemically processing a microelectronic workpiece. The reactor comprises a movable electrode assembly that is disposed for movement along a motion path. The motion path includes at least a portion thereof over which the electrode assembly is positioned for processing at least one surface of the microelectronic workpiece. A cleaning electrode is located along the motion path of the movable electrode assembly. In one embodiment, a programmable controller is connected to direct the movable electrode assembly to move to the cleaning electrode during a cleaning cycle. At that time, the programmable controller connects the movable electrode assembly as an anode and the cleaning electrode as a cathode for cleaning of the movable electrode assembly. The cleaning electrode may be disposed along a position of the motion path that is beyond the range of motion required to process the microelectronic workpiece so that the programmable controller may be programmed to conduct a cleaning cycle while a microelectronic workpiece is present in the reactor for processing.
摘要翻译： 虽然本文公开了几个发明，但是本申请涉及用于电化学处理微电子工件的反应器。 反应器包括可移动电极组件，其被设置为沿着运动路径移动。 运动路径至少包括一部分，电极组件定位在该部分上用于处理微电子工件的至少一个表面。 沿着可动电极组件的运动路径设置清洁电极。 在一个实施例中，连接可编程控制器以在清洁循环期间引导可移动电极组件移动到清洁电极。 此时，可编程控制器将作为阳极的可动电极组件和作为用于清洁可动电极组件的阴极的清洁电极连接起来。 清洁电极可以沿着运动路径的位置设置，该位置超出处理微电子工件所需的运动范围，使得可编程控制器可以被编程以在微电子工件存在于反应器中进行清洁循环以进行处理 。
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