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公开(公告)号：US20080000505A1
公开(公告)日：2008-01-03
申请号：US11832968
申请日：2007-08-02
IPC分类号： B08B13/00
CPC分类号： H01L21/31133 , B08B3/12 , B08B7/0021 , C11D7/241 , C11D7/261 , C11D7/263 , C11D7/264 , C11D7/3209 , C11D7/3263 , C11D7/3281 , C11D7/5013 , C11D7/5022 , C11D11/007 , G03F1/82 , H01L21/02052 , H01L21/02101 , H01L21/6704 , H01L21/67057
摘要： Apparatus for processing an article with a single-phase supercritical dense processing fluid in a processing chamber while applying ultrasonic energy during processing. The single-phase supercritical dense fluid may be generated in a separate pressurization vessel and transferred to the processing chamber, or alternatively may be generated directly in the processing chamber. A processing agent may be added to the pressurization vessel, to the processing chamber, or to the single-phase supercritical dense fluid during transfer from the pressurization vessel to the processing chamber. The ultrasonic energy may be generated continuously at a constant frequency or at variable frequencies. Alternatively, the ultrasonic energy may be generated intermittently.
摘要翻译： 用于在处理室中处理具有单相超临界致密处理流体的制品的设备，同时在处理期间施加超声波能量。 单相超临界致密流体可以在单独的加压容器中产生并转移到处理室，或者可以直接在处理室中产生。 在从加压容器转移到处理室的过程中，可将加工剂加入到加压容器中，或加入到单相超临界稠密流体中。 超声能量可以以恒定频率或以可变频率连续生成。 或者，可以间歇地产生超声波能量。
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2.发明申请System and method comprising same for measurement and/or analysis of particles in gas stream 有权包含相同的系统和方法用于测量和/或分析气流中的颗粒公开(公告)号：US20060172428A1
公开(公告)日：2006-08-03
申请号：US11340641
申请日：2006-01-27
申请人： Wayne McDermott , Richard Ockovic , Dean Roth
发明人： Wayne McDermott , Richard Ockovic , Dean Roth
IPC分类号： G01N33/48
CPC分类号： G01N1/2205 , G01N1/34 , G01N15/00 , G01N15/0205 , G01N15/0606 , Y10T436/25 , Y10T436/25125 , Y10T436/25375 , Y10T436/255 , Y10T436/25875
摘要： A system and method comprising same for measuring and analyzing particles within a gas feed stream. In one aspect, the system comprises a particle counter and a particle capture filter that are arranged in parallel. In another aspect, the system comprises a purifying device to remove trace molecular impurities from a gas feed stream to reduce the presence of impurities.
摘要翻译： 一种用于测量和分析气体进料流中的颗粒的系统和方法。 一方面，该系统包括平行布置的颗粒计数器和颗粒捕获过滤器。 另一方面，该系统包括净化装置以从气体进料流中除去痕量分子杂质以减少杂质的存在。
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3.发明申请Apparatus and method for removal of surface oxides via fluxless technique involving electron attachment and remote ion generation 有权通过涉及电子附着和远程离子生成的无通量技术去除表面氧化物的装置和方法公开(公告)号：US20060164784A1
公开(公告)日：2006-07-27
申请号：US11389772
申请日：2006-03-27
申请人： Chun Dong , Wayne McDermott , Richard Patrick , Alexander Schwarz
发明人： Chun Dong , Wayne McDermott , Richard Patrick , Alexander Schwarz
IPC分类号： H01T23/00
CPC分类号： C23G5/00 , B08B7/00 , B23K1/0016 , B23K1/008 , B23K1/012 , B23K1/206 , H05K3/3489 , H05K2203/095
摘要： The present invention provides a method and apparatus for the dry fluxing of at least one component and/or solder surface via electron attachment. In one embodiment, there is provided a method for removing oxides from the surface of a component comprising: providing a component on a substrate wherein the substrate is grounded or has a positive electrical potential to form a target assembly; passing a gas mixture comprising a reducing gas through an ion generator comprising a first and a second electrode; supplying an amount of voltage to at least one of the first and second electrodes sufficient to generate electrons wherein the electrons attach to at least a portion of the reducing gas and form a negatively charged reducing gas; and contacting the target assembly with the negatively charged reducing gas to reduce the oxides on the component.
摘要翻译： 本发明提供了一种用于通过电子附件干燥熔化至少一种组分和/或焊料表面的方法和装置。 在一个实施方案中，提供了从组分表面去除氧化物的方法，包括：在基底上提供组分，其中所述基底接地或具有正电位以形成靶组件; 使包含还原气体的气体混合物通过包括第一和第二电极的离子发生器; 向所述第一和第二电极中的至少一个电极供应足以产生电子的电压，其中所述电子附着到所述还原气体的至少一部分并形成带负电荷的还原气体; 并将目标组件与带负电荷的还原气体接触以减少部件上的氧化物。
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4.发明申请公开(公告)号：US20060011217A1
公开(公告)日：2006-01-19
申请号：US10890502
申请日：2004-07-13
申请人： Wayne McDermott , Gene Parris , Dean Roth , Hoshang Subawalla
发明人： Wayne McDermott , Gene Parris , Dean Roth , Hoshang Subawalla
IPC分类号： B08B3/12
CPC分类号： B08B7/0021 , B08B1/00 , B08B3/02 , B08B3/12 , Y10S134/902
摘要： Method for removing flux residue and defluxing residue from an article using a dense processing fluid and a dense rinse fluid is disclosed herein. In one embodiment, there is provided a method comprising: introducing the article comprising contaminants into a processing chamber; contacting the article with a dense processing fluid comprising a dense fluid, at least one processing agent, and optionally a cosolvent to provide a partially treated article; and contacting the partially treated article with a dense rinse fluid comprising the dense fluid and optionally the cosolvent to provide a treated article wherein an agitation source is introducing during at least a portion of the first and/or the second contacting step.
摘要翻译： 本文公开了使用致密加工流体和致密冲洗流体从制品中除去助熔剂残余物和脱硫残渣的方法。 在一个实施方案中，提供了一种方法，包括：将包含污染物的制品引入处理室; 使所述制品与包含致密流体，至少一种加工剂和任选的共溶剂的致密加工流体接触以提供部分处理的制品; 以及使所述部分处理的制品与包含所述致密流体和任选的共溶剂的致密冲洗流体接触以提供经处理的制品，其中在所述第一和/或所述第二接触步骤的至少一部分期间引入搅拌源。
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公开(公告)号：US4694281A
公开(公告)日：1987-09-15
申请号：US789754
申请日：1985-10-21
摘要： A lighting device for a room environment, in a form of a table, ceiling or swag unitary fixture, provides primary illumination for general living and working activities within the space of a room, subject to the on-off control of persons therein; flashing illumination occurring at repetition rates designated for alerting persons, including individuals having impaired hearing abilities, to specific fire, burglar or other alarm conditions, responsive to local or supervised control sensors; and supplemental signaling illumination for communicating instructional information.
摘要翻译： 用于房间环境的照明装置，以桌子，天花板或舷窗整体装置的形式，为房间内的一般生活和工作活动提供初级照明，并受到其中人员的开关控制; 响应于本地或受监督的控制传感器，以指定用于警报人员（包括具有听力障碍的个人），特定火灾，防盗或其他警报条件的重复率发生闪烁照明; 以及用于传达教学信息的补充信号照明。
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公开(公告)号：US20070227357A1
公开(公告)日：2007-10-04
申请号：US11395409
申请日：2006-03-31
申请人： Wayne McDermott
发明人： Wayne McDermott
IPC分类号： B01D45/12
CPC分类号： F04D19/042 , B01D53/24
摘要： System for separating a gas mixture comprising a plurality of separation stages, each having a reference number n from 1 to N, inclusive. Each stage has a housing, a turbomolecular pump assembly therein having inlet and outlet ends, a first chamber adjacent the inlet end and having an inlet port and a first outlet port, and a second chamber adjacent the outlet end and having a second outlet port. The inlet port of a separation stage n is connected with the first outlet port of an adjacent stage n+1, and the second outlet port of the stage n is connected with the inlet port of the stage n+1. The inlet port of any stage may serve as a feed port. The first chamber of stage n=1 and the second chamber of stage n=N have first and second product outlets, respectively.
摘要翻译： 用于分离包含多个分离级的气体混合物的系统，每个分离级具有从1到N的参考数n，包括端值。 每个阶段具有壳体，其中具有入口端和出口端的涡轮分子泵组件，与入口端相邻的第一腔室，具有入口端口和第一出口端口，以及邻近出口端并具有第二出口的第二腔室。 分离级n的入口与相邻级n + 1的第一出口连接，级n的第二出口与级n + 1的入口连接。 任何级的入口可以用作进料口。 阶段n = 1的第一室和阶段n = N的第二室分别具有第一和第二产品出口。
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7.发明申请Dense fluid compositions and processes using same for article treatment and residue removal 审中-公开密集流体组合物和使用它们的方法用于制品处理和残留物去除公开(公告)号：US20060081273A1
公开(公告)日：2006-04-20
申请号：US10969595
申请日：2004-10-20
申请人： Wayne McDermott , Hoshang Subawalla , Madhukar Rao , Dean Roth , Keith Fabregas
发明人： Wayne McDermott , Hoshang Subawalla , Madhukar Rao , Dean Roth , Keith Fabregas
IPC分类号： B08B3/00
CPC分类号： B08B7/0021 , G03F7/422 , H01L21/02057 , H01L21/02063 , H01L21/02101 , H05K3/26
摘要： A method for removing contaminants from an article is described herein. In one embodiment, there is provided a method comprising loosening at least a portion of the contaminants by treating the article with a treatment method involving a processing fluid and/or dense processing fluid to provide a partially treated article comprising loosened contaminants; contacting the partially treated article with a dense rinse fluid comprising a dense fluid, optionally a co-solvent, and optionally an entrainer to remove liquid-based contaminants; and removing at least a portion of the loosened contaminants by exposing the partially treated article with at least one exposure method to provide a treated article wherein the selection of the at least one exposure method depends upon whether the loosened contaminants are wet or dry.
摘要翻译： 本文描述了从制品中除去污染物的方法。 在一个实施方案中，提供了一种方法，包括通过用涉及加工流体和/或致密加工流体的处理方法处理制品来松散至少一部分污染物，以提供包含松散的污染物的部分处理的制品; 使部分处理的制品与致密的流体，任选的助溶剂和任选的夹带剂一起使用，以除去液体基的污染物; 以及通过用至少一种曝光方法暴露所述部分处理的制品来除去所述松散的污染物的至少一部分，以提供经处理的制品，其中所述至少一种曝光方法的选择取决于松散的污染物是湿的还是干的。
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公开(公告)号：US20050183739A1
公开(公告)日：2005-08-25
申请号：US10785298
申请日：2004-02-24
申请人： Wayne McDermott , Dean Roth , Richard Ockovic
发明人： Wayne McDermott , Dean Roth , Richard Ockovic
摘要： Ultrasonic probe comprising an elongate body having a first end and a second end, an ultrasonic transducer attached to the probe at or adjacent the first end, and an enlarged support section intermediate the ultrasonic transducer and the second end, wherein the enlarged support section has an equivalent diameter greater than an equivalent diameter of the body at any location between the enlarged support section and the ultrasonic transducer. The probe may be used to introduce ultrasonic energy into ultrasonic cleaning systems.
摘要翻译： 超声波探头包括具有第一端和第二端的细长主体，在第一端处或邻近第一端附接到探针的超声波换能器，以及位于超声波换能器和第二端之间的扩大的支撑部分，其中扩大的支撑部分具有 等效直径大于在扩大的支撑部分和超声波换能器之间的任何位置处的本体的等效直径。 探头可用于将超声波能量引入超声波清洗系统。
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9.发明申请公开(公告)号：US20070261559A1
公开(公告)日：2007-11-15
申请号：US11430614
申请日：2006-05-09
申请人： Peter Maroulis , Suhas Ketkar , Wayne McDermott
发明人： Peter Maroulis , Suhas Ketkar , Wayne McDermott
IPC分类号： B01D46/00
CPC分类号： C23C16/4402 , G01N1/2205 , G01N2001/105
摘要： An improved process for supplying to a processing apparatus a gas containing at least one impurity that reacts and/or nucleates to form contaminating particles suspended in the gas is disclosed. The improvement includes sampling a flow of the gas upstream of the processing apparatus with a particle counter and/or particle capture filter to detect an amount of the contaminating particles in the flow of the gas, and generating a signal when the amount of particles is in excess of a predetermined amount. An apparatus for performing the process includes: a supply source; at least one processing tool; a particle counter upstream of the processing tool and downstream of the supply source; a microprocessor in electrical communication with at least the particle counter; and optionally a particle capture filter in parallel with the particle counter. The process and apparatus are useful in the manufacture of integrated circuits.
摘要翻译： 公开了一种用于向处理装置供应包含至少一种使得在气体中悬浮的污染颗粒反应和/或成核以形成杂质的气体的改进方法。 该改进包括用颗粒计数器和/或颗粒捕获过滤器在处理装置上游对气体进行采样，以检测气体流中的污染颗粒的量，并且当颗粒的量处于 超过预定量。 一种用于执行该处理的装置，包括：供应源; 至少一个处理工具; 处理工具上游的粒子计数器，并在供给源的下游; 至少与微粒计数器电通信的微处理器; 以及任选地与颗粒计数器平行的颗粒捕获过滤器。 该方法和装置在集成电路的制造中是有用的。
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公开(公告)号：US20070217967A1
公开(公告)日：2007-09-20
申请号：US11743925
申请日：2007-05-03
IPC分类号： B01D50/00
CPC分类号： F17C11/00 , Y10T137/0396
摘要： The invention relates to an improvement in apparatus and process for effecting storage and delivery of a gas. The storage and delivery apparatus is comprised of a storage and dispensing vessel containing a medium capable of storing a gas and permitting delivery of the gas stored in the medium from the vessel, the improvement comprising: (a) a reactive liquid having Lewis acidity or basicity; (b) a gas liquid complex in a reversible reacted state formed under conditions of pressure and temperature by contacting the gas having Lewis acidity with the reactive liquid having Lewis basicity or the gas having Lewis basicity with the reactive liquid having Lewis acidity; (c) a non-reactive wick medium holding and dispersing the reactive liquid and the gas liquid complex therein.
摘要翻译： 本发明涉及用于实现气体的储存和输送的设备和方法的改进。 储存和输送装置由储存和分配容器组成，储存和分配容器含有能够储存气体并允许从容器中输送存储在介质中的气体的介质，其改进包括：（a）具有路易斯酸度或碱度的反应性液体 ; （b）在压力和温度条件下通过使具有路易斯酸度的气体与具有路易斯碱性的反应性液体或具有路易斯碱性的气体与具有路易斯酸度的反应性液体接触而形成的可逆反应状态的气液络合物; （c）保持并分散其中的反应性液体和气体液体络合物的非反应性芯吸介质。
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