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    Robot for in-vacuum use
    5.
    发明授权
    Robot for in-vacuum use 有权
    用于真空使用的机器人

    公开(公告)号：US08614786B2

    公开(公告)日：2013-12-24

    申请号：US12936465

    申请日：2009-04-22

    申请人： Robert Gabriël Maria Lansbergen ,  George Hilary Harrold ,  Matthew James Van Doren

    发明人： Robert Gabriël Maria Lansbergen ,  George Hilary Harrold ,  Matthew James Van Doren

    IPC分类号： G03B27/60 ,  G03B27/58

    CPC分类号： G03F7/7075 ,  G03F7/70741 ,  H01L21/67225 ,  H01L21/67742 ,  H01L21/67748

    摘要： A robot positions a workpiece within a vacuum chamber of a lithographic apparatus. A first component of the robot is located within a vacuum chamber to position a workpiece along a translational axis. A shaft supports the first component such that an axis of symmetry of the shaft is perpendicular to the translational axis, and a second component rotates the shaft about the axis of symmetry and moves the shaft in a direction parallel to the axis of symmetry. The second component includes a gas bearing configured to introduce gas along a circumferential surface of the shaft and a scavenging seal configured to evacuate the gas introduced by the second component gas bearing. The robot substantially reduces, or eliminates the out-gassing of hydrocarbon molecules in a range from about 0 to 200 a.m.u., thus rendering the robot suitable for use in extreme ultra-violet (EUV) photolithography applications.

    摘要翻译： 机器人将工件放置在光刻设备的真空室内。 机器人的第一部件位于真空室内，以沿着平移轴定位工件。 轴支撑第一部件，使得轴的对称轴线垂直于平移轴线，第二部件使轴围绕对称轴旋转，并使轴沿平行于对称轴线的方向移动。 第二部件包括构造成沿着轴的圆周表面引入气体的气体轴承和被构造成抽空由第二部件气体轴承引入的气体的扫气密封件。 机器人基本上减少或消除烃分子在约0至200微米的范围内的排气，从而使机器人适用于极紫外（EUV）光刻应用。

    Robot For In-Vacuum Use
    6.
    发明申请
    Robot For In-Vacuum Use 有权
    机器人用于真空使用

    公开(公告)号：US20110032505A1

    公开(公告)日：2011-02-10

    申请号：US12936465

    申请日：2009-04-22

    申请人： Robert Gabriël Maria Lansbergen ,  George Hilary Harrold ,  Matthew James Van Doren

    发明人： Robert Gabriël Maria Lansbergen ,  George Hilary Harrold ,  Matthew James Van Doren

    IPC分类号： G03B27/60 ,  H01L21/677

    CPC分类号： G03F7/7075 ,  G03F7/70741 ,  H01L21/67225 ,  H01L21/67742 ,  H01L21/67748

    摘要： A robot positions a workpiece within a vacuum chamber of a lithographic apparatus. A first component of the robot is located within a vacuum chamber to position a workpiece along a translational axis. A shaft supports the first component such that an axis of symmetry of the shaft is perpendicular to the translational axis, and a second component rotates the shaft about the axis of symmetry and moves the shaft in a direction parallel to the axis of symmetry. The second component includes a gas bearing configured to introduce gas along a circumferential surface of the shaft and a scavenging seal configured to evacuate the gas introduced by the second component gas bearing. The robot substantially reduces, or eliminates the out-gassing of hydrocarbon molecules in a range from about 0 to 200 a.m.u., thus rendering the robot suitable for use in extreme ultra-violet (EUV) photolithography applications.

    摘要翻译： 机器人将工件定位在光刻设备的真空室内。 机器人的第一部件位于真空室内，以沿着平移轴定位工件。 轴支撑第一部件，使得轴的对称轴线垂直于平移轴线，第二部件使轴围绕对称轴旋转，并使轴沿平行于对称轴线的方向移动。 第二部件包括构造成沿着轴的圆周表面引入气体的气体轴承和被构造成抽空由第二部件气体轴承引入的气体的扫气密封件。 机器人基本上减少或消除烃分子在约0至200微米的范围内的排气，从而使机器人适用于极紫外（EUV）光刻应用。