Latent-image control of lithography tools
    1.
    发明授权
    Latent-image control of lithography tools 失效
    LITHOGRAPHY工具的专利图像控制

    公开(公告)号:US5124927A

    公开(公告)日:1992-06-23

    申请号:US488342

    申请日:1990-03-02

    摘要: Measurement apparatus and procedure for use with lithographic equipment is provided for the construction of electronic and other devices wherein a photoresist is deposited as a layer upon a substrate. A Nomarski differential interference contrast microscope in conjunction with a scanned image detector is employed to examine verification marks produced by projection of an overlay, such as the mask or reticle, upon the photoresist layer. The projection results in a production of verification marks in the form of a latent image which, while invisible with conventional viewing means, can be viewed by phase-contrast imaging employing differential phase shift. Various characteristics of the resultant image are employed to align secondary verification marks with primary verification marks previously provided on the substrate, and to allow for a checking of line width, dosage, focusing, temperature control, and global alignment. Observation of the photoresist is accomplished with radiation at lower frequency than the exposure radiation, the latter being significantly absorbed, by the photoresist, the photoresist being transparent to the observation radiation to permit reflection from top and bottom surfaces of the photoresist.

    Method of and apparatus for simultaneously packaging linear bundles of
filaments into individual packages
    2.
    发明授权
    Method of and apparatus for simultaneously packaging linear bundles of filaments into individual packages 失效
    将线状线束同时包装到各个包装中的方法和装置

    公开(公告)号:US4436258A

    公开(公告)日:1984-03-13

    申请号:US373087

    申请日:1982-04-29

    摘要: The disclosure embraces a method of and apparatus for simultaneously winding linear bundles of filaments, such as strands of glass filaments, in a filament-forming operation into two or more packages on a driven rotatable collet and the linear bundles or strands traversed by guide members axially of the packages, the progressively increasing sizes of the packages normally intermittently moving the traverse guide members away from the packages, and wherein an undersized package activates an instrumentality, indication or signal warning the operator of such condition and interrupting movement of the traverse means away from the packages.

    摘要翻译: 本公开包括一种方法和装置,用于在灯丝成型操作中将线状丝束(例如玻璃丝束)同时卷绕成可驱动的可旋转夹头上的两个或更多个包装,以及由导向件轴向穿过的线性束或股线 包装的逐渐增加的尺寸通常间歇性地将横向导向件远离包装件移动,并且其中,尺寸过小的包装件激活工具,指示或信号,警告操作者这种状况并阻止横动装置的移动远离 包装。

    Pan type metal door
    3.
    发明授权
    Pan type metal door 失效
    泛型金属门

    公开(公告)号:US5570560A

    公开(公告)日:1996-11-05

    申请号:US461325

    申请日:1995-06-05

    IPC分类号: E04C2/08 E06B3/82 E04C2/34

    CPC分类号: E04C2/08 E06B3/827

    摘要: A panel assembly that may be used in doors, particularly hollow metal doors, and other types of panels such as interior and exterior walls, room partitions, and the like. The panel assembly exemplified by a hollow or filled metal door is constructed from a deep pan and a shallow pan made from unitary pieces of sheet metal sheet and each pan includes top, bottom, and two opposing side flanges extending from rectangular face members. The flanges of the deep pan are substantially perpendicular to its rectangular face member and higher than those of the shallow pan. Side flanges of one of the pans have first latch members formed along free side edges of their side flanges remote from their respective face member and side flanges of the other pan have second mating latch members formed along free side edges of their side flanges remote from their respective face members. The top and bottom flanges have doubly bent edges that are formed along free side edges of their top and bottom flanges remote from their respective face members. The free side edges of the top and bottom flanges are doubly bent so as to be in overlapping abutting relationship or shiplapped with corresponding ones of the front and rear plans. The first latch member of each pan is secured to the second latch member of the other pan such that the pans are secured and form the panel.

    摘要翻译: 可用于门中的面板组件,特别是中空金属门,以及其他类型的面板,例如内墙和外墙,房间隔板等。 由中空或填充的金属门示例的面板组件由深盘和由整体的金属片制成的浅盘构成,并且每个盘包括从矩形面构件延伸的顶部,底部和两个相对的侧面凸缘。 深盘的凸缘基本上垂直于其矩形面构件并且高于浅盘的凸缘。 一个盘的侧凸缘具有第一闩锁构件,其沿着它们的侧凸缘的远离其相应的面构件的自由侧边缘形成,并且另一个盘的侧凸缘具有第二配合闩锁构件,该第二配合闩锁构件沿着远离它们的侧凸缘的自由侧边缘形成 各自的面部成员。 顶部和底部凸缘具有双边弯曲边缘,其沿着其顶部和底部凸缘的远离其相应面部构件的自由侧边缘形成。 顶部和底部凸缘的自由侧边缘被双重弯曲,以便处于重叠的邻接关系中,或者与前面和后面图案中相应的一个相对应。 每个盘的第一闩锁构件固定到另一个盘的第二闩锁构件,使得盘被固定并形成面板。

    Pan type metal door
    4.
    发明授权
    Pan type metal door 失效
    泛型金属门

    公开(公告)号:US5448872A

    公开(公告)日:1995-09-12

    申请号:US113077

    申请日:1993-08-30

    IPC分类号: E04C2/08 E06B3/82 E04C2/34

    CPC分类号: E04C2/08 E06B3/827

    摘要: A panel assembly that may be used in doors, particularly hollow metal doors, and other types of panels such as interior and exterior walls, room partitions, and the like. The panel assembly exemplified by a hollow or filled metal door is constructed from a deep pan and a shallow pan made from unitary pieces of sheet metal sheet and each pan includes top, bottom, and two opposing side flanges extending from rectangular face members. The flanges of the deep pan are substantially perpendicular to its rectangular face member and higher than those of the shallow pan. Side flanges of one of the pans have first latch members formed along free side edges of their side flanges remote from their respective face member and side flanges of the other pan have second mating latch members formed along free side edges of their side flanges remote from their respective face members. The top and bottom flanges have doubly bent edges that are formed along free side edges of their top and bottom flanges remote from their respective face members. The free side edges of the top and bottom flanges are doubly bent so as to be in overlapping abutting relationship or shiplapped with corresponding ones of the front and rear pans. The first latch member of each pan is secured to the second latch member of the other pan such that the pans are secured and form the panel.

    摘要翻译: 可用于门中的面板组件,特别是中空金属门,以及其他类型的面板,例如内墙和外墙,房间隔板等。 由中空或填充的金属门示例的面板组件由深盘和由整体的金属片制成的浅盘构成,并且每个盘包括从矩形面构件延伸的顶部,底部和两个相对的侧面凸缘。 深盘的凸缘基本上垂直于其矩形面构件并且高于浅盘的凸缘。 一个盘的侧凸缘具有第一闩锁构件,其沿着它们的侧凸缘的远离其相应的面构件的自由侧边缘形成,并且另一个盘的侧凸缘具有第二配合闩锁构件,该第二配合闩锁构件沿着远离它们的侧凸缘的自由侧边缘形成 各自的面部成员。 顶部和底部凸缘具有双边弯曲边缘,其沿着其顶部和底部凸缘的远离其相应面部构件的自由侧边缘形成。 顶部和底部凸缘的自由侧边缘被双重弯曲,以便处于重叠的邻接关系中,或者与相应的前置和后部平底锅相对应。 每个盘的第一闩锁构件固定到另一个盘的第二闩锁构件,使得盘被固定并形成面板。

    Polishing apparatus
    5.
    发明授权
    Polishing apparatus 有权
    抛光设备

    公开(公告)号:US06358126B1

    公开(公告)日:2002-03-19

    申请号:US09576717

    申请日:2000-05-23

    IPC分类号: B24B700

    CPC分类号: B24B37/345

    摘要: A polishing apparatus is used for polishing a workpiece such as a semiconductor wafer to a flat mirror finish. The polishing apparatus includes a turntable having a polishing surface, a top ring for holding a workpiece and pressing the workpiece against the polishing surface to polish the workpiece. The polishing apparatus further includes a rotary transporter disposed in a position which can be accessed by the top ring and having a plurality of stages positioned on a predetermined circumference from a center of rotation of the rotary transporter for holding the workpieces. The polishing apparatus further includes a plurality of support tables removably held by the respective stages of the rotary transporter for supporting the workpieces, and a pusher for transferring the workpiece between the support table and the top ring.

    摘要翻译: 抛光装置用于将诸如半导体晶片的工件抛光到平面镜面。 抛光装置包括具有抛光表面的转台,用于保持工件的顶环,并将工件压靠在抛光表面上以抛光工件。 抛光装置还包括旋转输送器,其设置在可由顶环接近的位置,并且具有从旋转运送器的用于保持工件的旋转中心定位在预定圆周上的多个台阶。 抛光装置还包括多个支撑台,可移动地由旋转运送器的各个台可移动地保持,用于支撑工件;以及推动器,用于在支撑台和顶环之间传送工件。

    Model generation system having closed-loop extrusion nozzle positioning
    6.
    发明授权
    Model generation system having closed-loop extrusion nozzle positioning 失效
    具有闭环挤出喷嘴定位的模型生成系统

    公开(公告)号:US5402351A

    公开(公告)日:1995-03-28

    申请号:US183512

    申请日:1994-01-18

    摘要: Disclosed are methods and apparatus for fabricating a three-dimensional object in accordance with a computer-generated definition of the object that is stored within a memory. A method includes the steps of (a) evaluating the stored definition of the object to locate any un-supported features of the object; in response to locating an un-supported feature, (b) defining a support structure for the un-supported feature; (c) generating a fabrication tool movement list expressive of movements required by a fabrication tool to fabricate the object and any defined support structures; and (d) translating the fabrication tool in accordance with the generated fabrication tool movement list to fabricate the object and any defined support structures. The step of translating includes the steps of, generating a feedback signal that is indicative of at least one characteristic of a most recently fabricated portion of the object; and monitoring the feedback signal to detect a deviation of at least a location of the most recently fabricated portion of the object from a corresponding location as expressed in the associated portion of the fabrication tool movement list. Also disclosed are methods and apparatus for anti-aliasing aliased surface features of the object, representing the object definition in a vector format, generating a bit-mapped representation of the object, and an analysis of the definition of the object to identify and subsequently compensate for a region of the object that has a potential to retain heat during fabrication.

    摘要翻译: 公开了根据计算机生成的存储在存储器内的对象的定义来制造三维物体的方法和装置。 一种方法包括以下步骤:(a)评估存储的对象的定义以定位对象的任何不支持的特征; 响应于定位未支撑的特征,(b)为所述不支持的特征定义支撑结构; (c)产生制造工具运动列表,其表达制造工具所需的运动以制造物体和任何限定的支撑结构; 以及(d)根据生成的制造工具移动列表翻译制造工具以制造物体和任何定义的支撑结构。 转换步骤包括以下步骤:产生指示物体的最近制造的部分的至少一个特征的反馈信号; 以及监视所述反馈信号以检测所述物体的最近制造的部分的至少一个位置与所述制造工具运动列表的相关联部分中表示的对应位置的偏差。 还公开了用于消除对象的混叠表面特征的方法和装置,以矢量格式表示对象定义,生成对象的位映射表示,以及对对象的定义的分析以识别和随后的补偿 对于在制造期间具有保持热量的潜力的物体的区域。

    Method and apparatus for advancing strand
    8.
    发明授权
    Method and apparatus for advancing strand 失效
    推进链条的方法和装置

    公开(公告)号:US4050639A

    公开(公告)日:1977-09-27

    申请号:US646740

    申请日:1976-01-05

    申请人: Robert R. Jackson

    发明人: Robert R. Jackson

    IPC分类号: B65H51/10 B65H54/86 B65H54/02

    摘要: Method and apparatus for advancing continuous glass strand during times the strand is not being collected into a package by a winder. A pair of cooperating rolls having a plurality of helical teeth are rotated to advance the strand therebetween.

    摘要翻译: 在线束未被收卷机收集到包装中期间推进连续玻璃纤维束的方法和装置。 一对具有多个螺旋齿的配合辊被转动以使绞合线前进。

    Method and apparatus for solid prototyping
    10.
    发明授权
    Method and apparatus for solid prototyping 失效
    固体原型的方法和装置

    公开(公告)号:US5764521A

    公开(公告)日:1998-06-09

    申请号:US556583

    申请日:1995-11-13

    摘要: An improved extrusion-based manufacturing system includes one or more extruders, with each extruder containing at least two stages of increasing pressurization. In a preferred embodiment, a first stage of pressurization is created by the motion of a solid wafer of thermoplastic through an orifice into a heater chamber. In another preferred embodiment, the wafers are stored in removable, electronically tagged, cassettes and are removed therefrom by a stapler mechanism which feeds the wafers from the cassette to a tractor feed mechanism on demand. In each embodiment, a second stage of pressurization is provided by a pump, with the first stage pressurization maintaining a flow of thermoplastic to the pump under all expected pump rates.

    摘要翻译: 改进的基于挤出的制造系统包括一个或多个挤出机,每个挤出机包含增加加压的至少两个阶段。 在一个优选实施例中,通过将热塑性塑料的固体晶片通过孔口运动到加热器室中而产生加压的第一阶段。 在另一个优选实施例中,晶片被存储在可拆卸的,电子标签的盒中,并且通过订制器机构从其中移除,所述订书机机构根据需要将所述晶片从所述盒馈送到拖拉机进给机构。 在每个实施例中,通过泵提供第二阶段的加压,其中第一阶段加压在所有预期的泵送速率下保持热塑性塑料流向泵的流动。