公开(公告)号：US08508033B2

公开(公告)日：2013-08-13

申请号：US13067154

申请日：2011-05-12

申请人： Satoshi Kageyama ,  Yuichi Nakao

发明人： Satoshi Kageyama ,  Yuichi Nakao

IPC分类号： H01L23/52 ,  H01L23/48

CPC分类号： H01L23/528 ,  H01L23/5283 ,  H01L23/53238 ,  H01L2924/0002 ,  H01L2924/00

摘要： The semiconductor device according to the present invention includes a semiconductor layer, an interlayer dielectric film formed on the semiconductor layer, a wire formed on the interlayer dielectric film with a metallic material to have a width of not more than 0.4 μm, and a broad portion integrally formed on the wire to extend from the wire in the width direction thereof.

摘要翻译： 根据本发明的半导体器件包括半导体层，形成在半导体层上的层间电介质膜，在具有宽度不大于0.4μm的金属材料的层间绝缘膜上形成的导线，以及广泛部分 一体形成在金属丝上，从金属丝沿其宽度方向延伸。

公开(公告)号：US08227922B2

公开(公告)日：2012-07-24

申请号：US12289985

申请日：2008-11-07

申请人： Satoshi Kageyama

发明人： Satoshi Kageyama

IPC分类号： H01L23/48

CPC分类号： H01L23/53238 ,  H01L23/53295 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device includes a lower layer wiring made of a conductive material; an etching stopper film laminated on the lower layer wiring and having a laminated structure including an SiCO layer and an SiCN layer; an interlayer insulating film laminated on the etching stopper film; an intermediate film laminated on the interlayer insulating film and made of a material having an etching selectivity with respect to a material of the etching stopper film; an upper wiring layer laminated on the intermediate film and having an upper groove formed in a top surface thereof; an upper layer wiring embedded in the upper groove and made of a metal material having Cu as a main component; and a via electrically connecting the lower layer wiring and the upper layer wiring and disposed in a via hole penetrating through the interlayer insulating film and the intermediate film.

摘要翻译： 半导体器件包括由导电材料制成的下层布线; 层压在下层布线上并具有包括SiCO层和SiCN层的叠层结构的蚀刻阻挡膜; 层压在所述蚀刻停止膜上的层间绝缘膜; 中间膜，层压在层间绝缘膜上，由相对于蚀刻停止膜的材料具有蚀刻选择性的材料制成; 层叠在中间膜上并具有形成在其上表面中的上槽的上布线层; 上层布线，嵌入在上槽中，由以Cu为主要成分的金属材料制成; 以及通过电连接下层布线和上层布线并且布置在贯穿层间绝缘膜和中间膜的通孔中的通孔。

公开(公告)号：US08125050B2

公开(公告)日：2012-02-28

申请号：US12155229

申请日：2008-05-30

申请人： Satoshi Kageyama

发明人： Satoshi Kageyama

IPC分类号： H01L29/00

CPC分类号： H01L27/0805 ,  H01L23/5223 ,  H01L28/60 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device is described includes a wiring layer, an insulating layer stacked on the wiring layer, a trench formed by digging down the insulating layer from the surface thereof, a film-shaped lower electrode formed along the inner surface of the trench, a capacitor film formed along the surface of the lower electrode, and an upper electrode opposed to the lower electrode with the capacitor film sandwiched therebetween.

摘要翻译： 一种半导体装置的特征在于，包括布线层，层叠在布线层上的绝缘层，从其表面挖出绝缘层而形成的沟槽，沿沟槽内表面形成的膜状下电极，电容器 沿着下电极的表面形成的膜，以及与电极膜夹在其间的与下电极相对的上电极。

公开(公告)号：US08110504B2

公开(公告)日：2012-02-07

申请号：US12536472

申请日：2009-08-05

申请人： Yuichi Nakao ,  Satoshi Kageyama

发明人： Yuichi Nakao ,  Satoshi Kageyama

IPC分类号： H01L21/44

CPC分类号： H01L21/76844 ,  H01L21/76831 ,  H01L21/7684 ,  H01L21/76862 ,  H01L21/76864 ,  H01L21/76867 ,  H01L21/76877 ,  H01L21/76883 ,  H01L2221/1089

摘要： The method of manufacturing a semiconductor device according to the present invention includes: an insulating layer forming step of forming an insulating layer made of an insulating material containing Si and O; a groove forming step of forming a groove in the insulating layer; a metal film applying step of covering the inner surface of the groove with a metal film made of MnOx (x: a number greater than zero) by sputtering; and a wire forming step of forming a Cu wire made of a metallic material mainly composed of Cu on the metal film.

摘要翻译： 根据本发明的制造半导体器件的方法包括：绝缘层形成步骤，形成由包含Si和O的绝缘材料制成的绝缘层; 在所述绝缘层中形成槽的槽形成工序; 通过溅射用MnO x（x：数大于零）的金属膜覆盖槽的内表面的金属膜施加步骤; 以及在金属膜上形成由主要由Cu构成的金属材料制成的Cu线的线形成工序。

公开(公告)号：US20100035428A1

公开(公告)日：2010-02-11

申请号：US12535665

申请日：2009-08-04

申请人： Yuichi NAKAO ,  Satoshi Kageyama ,  Yoshihisa Takada

发明人： Yuichi NAKAO ,  Satoshi Kageyama ,  Yoshihisa Takada

IPC分类号： H01L21/768

CPC分类号： H01L21/76843 ,  H01L21/2855 ,  H01L21/32051 ,  H01L21/76831 ,  H01L21/76844 ,  H01L21/76846 ,  H01L21/76864 ,  H01L21/76865 ,  H01L21/76867 ,  H01L21/76873 ,  H01L23/53238 ,  H01L23/5329 ,  H01L23/53295 ,  H01L2221/1089 ,  H01L2924/0002 ,  H01L2924/00

摘要： The method of manufacturing a semiconductor device according to the present invention includes: a groove forming step of forming a groove in an insulating layer made of an insulating material containing Si and O; an alloy film applying step of covering the side surface and the bottom surface of the groove with an alloy film made of an alloy material containing Cu and Mn by sputtering; a thinning step of reducing the thickness of a portion of the alloy film covering the bottom surface of the groove; a wire forming step of forming a Cu wire made of a metallic material mainly composed of Cu in the groove after the thinning step; and a barrier film forming step of forming a barrier film made of MnSiO between the Cu wire and the insulating layer by heat treatment.

摘要翻译： 根据本发明的制造半导体器件的方法包括：沟槽形成步骤，在由含有Si和O的绝缘材料制成的绝缘层中形成沟槽; 合金膜施加步骤，用溅射对含有Cu和Mn的合金材料制成的合金膜覆盖槽的侧面和底面; 减薄覆盖槽的底面的合金膜的一部分的厚度的薄化步骤; 线形成步骤，在所述变薄步骤之后，在所述槽中形成由主要由Cu构成的金属材料制成的Cu线; 以及通过热处理在Cu线和绝缘层之间形成由MnSiO制成的阻挡膜的阻挡膜形成步骤。

公开(公告)号：US20090032953A1

公开(公告)日：2009-02-05

申请号：US12155229

申请日：2008-05-30

申请人： Satoshi Kageyama

发明人： Satoshi Kageyama

IPC分类号： H01L23/48 ,  H01L21/44

CPC分类号： H01L27/0805 ,  H01L23/5223 ,  H01L28/60 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device is described includes a wiring layer, an insulating layer stacked on the wiring layer, a trench formed by digging down the insulating layer from the surface thereof, a film-shaped lower electrode formed along the inner surface of the trench, a capacitor film formed along the surface of the lower electrode, and an upper electrode opposed to the lower electrode with the capacitor film sandwiched therebetween.

摘要翻译： 一种半导体器件的描述包括布线层，堆叠在布线层上的绝缘层，通过从其表面挖出绝缘层形成的沟槽，沿沟槽内表面形成的膜状下电极，电容器 沿着下电极的表面形成的膜，以及与电极膜夹在其间的与下电极相对的上电极。

公开(公告)号：US20070173725A1

公开(公告)日：2007-07-26

申请号：US10590407

申请日：2005-02-22

申请人： Takayuki Souta ,  Katsuo Aizawa ,  Atsushi Nakamura ,  Satoshi Kageyama ,  Shinya Ohtsubo ,  Fumihiko Ichikawa

发明人： Takayuki Souta ,  Katsuo Aizawa ,  Atsushi Nakamura ,  Satoshi Kageyama ,  Shinya Ohtsubo ,  Fumihiko Ichikawa

IPC分类号： A61B5/00

CPC分类号： A61B5/444 ,  A61B5/0059 ,  A61B5/0075

摘要： A method of processing skin surface observation measuring data able to address various sicknesses and reduce an error in sickness detection, and a measuring apparatus requiring no filter with a simple structure. The measuring apparatus comprises a means of applying a white light to a biological surface as a sample, a means of detecting the spectra of the white light reflected off a plurality of positions on the biological surface, a means of plotting the absorbances of the above spectra to a light spectrum multi-dimensional space, a means of subjecting data in the spectrum multi-dimension space obtained from the plurality of positions to multivariate analysis to determine the eigenvectors of at least first, second and third principal components, and a means of projecting data at respective positions in respective eigenvector directions to display their magnitudes on a two-dimension display screen on a gray scale or in colors corresponding to the magnitudes; and a measuring method by the apparatus.

摘要翻译： 一种处理皮肤表面观察测量数据的方法，能够解决各种疾病并减少疾病检测中的误差，以及不需要具有简单结构的过滤器的测量装置。 测量装置包括将白光作为样品施加到生物表面的手段，检测从生物表面上的多个位置反射的白光的光谱的方法，绘制上述光谱的吸光度的方法 对于光谱多维空间，将从多个位置获得的光谱多维空间中的数据进行多变量分析的装置，以确定至少第一，第二和第三主要分量的特征向量，以及投影装置 在各个特征向量方向的各个位置处的数据在灰度或二维显示画面上显示其对应于幅度的颜色的幅度; 以及该装置的测量方法。

公开(公告)号：US4813004A

公开(公告)日：1989-03-14

申请号：US42242

申请日：1987-04-24

申请人： Arisa Fujioka ,  Satoshi Kageyama

发明人： Arisa Fujioka ,  Satoshi Kageyama

IPC分类号： G01G19/02 ,  G08G1/015 ,  G08B21/00 ,  G06K9/00

CPC分类号： G07B15/063 ,  G01G19/022 ,  G08G1/015

摘要： A correlogram is initially prepared which represents a relation between the gross volume of all tries and the maximum gross weight of a motor vehicle. The maximum gross weight of the vehicle is one of important factors for determining a charge for a vehicle to be run on the toll road. In the method of this invention the outer diameter and rim diameter of the respective wheels of the vehicle are found through the processing of the side profile image of the vehicle as obtained by a TV camera. According to this invention the total volume of all the tires is calculated from the outer diameter, rim diameter, width and total number of the wheels. In this way, the maximum gross weight of the vehicle is calculated based on the correlogram.

摘要翻译： 最初准备了一个相关图，代表了所有尝试的总体积与机动车的最大总重量之间的关系。 车辆的最大总重量是确定车辆在收费公路上行驶的费用的重要因素之一。 在本发明的方法中，车辆的相应车轮的外径和轮辋直径是通过TV摄像机获得的车辆侧面轮廓图像的处理来确定的。 根据本发明，所有轮胎的总体积根据车轮的外径，轮辋直径，宽度和总数计算。 以这种方式，基于相关图来计算车辆的最大总重量。

公开(公告)号：US4149142A

公开(公告)日：1979-04-10

申请号：US826053

申请日：1977-08-19

申请人： Satoshi Kageyama ,  Keiji Takeuchi ,  Keisuke Ogi

发明人： Satoshi Kageyama ,  Keiji Takeuchi ,  Keisuke Ogi

IPC分类号： H03M7/00 ,  H04J1/00 ,  H04L1/16 ,  H04L1/18 ,  H04N1/32 ,  H04N7/00 ,  H04N19/00 ,  G08C25/02

CPC分类号： H04L1/16 ,  H04N1/32619 ,  H04L1/1809

摘要： A signal transmission system embodying this invention which can control errors comprises a selective automatic repeat request (ARQ) system for controlling errors occurring in transmission of data on telephone data communication channels. With this selective ARQ system, an error-controlling signal conducted through a backward channel does not contain a check bit for detection or correction of errors, thereby preventing a time loss which might occur if a error-control signal was repeatedly issued between the transmission and receiving sides. The subject signal-transmitting apparatus is adapted to be used in a static image transmission having a large amount of data and has such a circuit arrangement as attains the efficient transmission of data and the display of an error-free image of good picture quality.

摘要翻译： 体现本发明的可以控制误差的信号传输系统包括一个选择性自动重复请求（ARQ）系统，用于控制电话数据通信信道上的数据传输中发生的错误。 利用这种选择性ARQ系统，通过反向信道传输的误差控制信号不包含用于检测或校正错误的校验位，从而防止在传输和传输之间重复发出错误控制信号时可能发生的时间损失 接收方。 主体信号发送装置适用于具有大量数据的静态图像传输，并且具有实现数据的有效传输和良好图像质量的无差错图像的显示的电路结构。

公开(公告)号：US4110558A

公开(公告)日：1978-08-29

申请号：US764073

申请日：1977-01-31

申请人： Satoshi Kageyama ,  Kunihiko Sekiya

发明人： Satoshi Kageyama ,  Kunihiko Sekiya

IPC分类号： H04L1/00 ,  H04L1/16 ,  H04L1/18 ,  H04L7/00 ,  H04L7/10 ,  H04L29/08

CPC分类号： H04L1/245 ,  H04L1/0002 ,  H04L1/0015 ,  H04L1/1607 ,  H04L1/1803 ,  H04L7/10 ,  H04L1/0025 ,  H04L1/0061

摘要： A data-transmission system using a continuous ARQ system, wherein a block (word) synchronization code is transmitted through a transmission line from a transmitter to a receiver repeatedly at a predetermined time interval, until the transmitter receives a signal (ACK) denoting the detection of the synchronization code from the receiver. Upon receipt of the synchronization code detection signal, the transmitter issues data blocks each having a fixed length to the receiver continuously from the point of time at which the succeeding synchronization code is to be transmitted. In the invention a predetermined number of test data blocks are further transmitted to the receiver in succession to the synchronization code. The receiver examines a block error rate concerning the test data blocks and supplies the transmitter with not only the synchronization code detection signal but also a data rate-specifying signal. The transmitter delivers data at a rate dependent on the data rate-specifying signal.

摘要翻译： 一种使用连续ARQ系统的数据传输系统，其中通过传输线以预定的时间间隔重复地从发射机到接收机传输块（字）同步码，直到发射机接收到表示检测的信号（ACK） 的来自接收器的同步码。 在接收到同步码检测信号时，发射机从发送后续同步码的时间点连续向接收机发送每个具有固定长度的数据块。 在本发明中，预定数量的测试数据块被连续地发送到接收机，同步码。 接收机检查与测试数据块相关的块错误率，并向发送器提供不仅同步码检测信号，而且提供数据速率指定信号。 发射机以取决于数据速率指定信号的速率传送数据。