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1.发明授权公开(公告)号：US08491095B2
公开(公告)日：2013-07-23
申请号：US13041793
申请日：2011-03-07
IPC分类号： B41J2/16
CPC分类号： B41J2/1404 , B41J2002/14403 , Y10T29/49401
摘要： Disclosed is a fluid ejection device that includes a nozzle plate. The nozzle plate includes a plurality of nozzles for fluid ejection. Further, the fluid ejection device includes a substrate disposed below the nozzle plate. The substrate includes a top surface adapted to adhere to the nozzle plate. The substrate also includes at least one fluid via configured within the substrate for providing fluid to the plurality of nozzles of the nozzle plate. Furthermore, the fluid ejection device includes at least one supporting structure configured within each fluid via of the at least one fluid via. The at least one supporting structure is further configured at a predetermined depth from the top surface of the substrate to regulate the flow of the fluid from the at least one fluid via to the plurality of nozzles. Further, disclosed is a method to fabricate the fluid ejection device.
摘要翻译： 公开了一种包括喷嘴板的流体喷射装置。 喷嘴板包括用于流体喷射的多个喷嘴。 此外，流体喷射装置包括设置在喷嘴板下方的基板。 衬底包括适于粘附到喷嘴板的顶表面。 衬底还包括至少一个流体通路，该流体通孔被配置在衬底内，用于向喷嘴板的多个喷嘴提供流体。 此外，流体喷射装置包括至少一个配置在至少一个流体通路的每个流体通路内的支撑结构。 所述至少一个支撑结构进一步构造在距离所述基板的顶表面的预定深度处以调节所述流体从所述至少一个流体通道到所述多个喷嘴的流动。 此外，公开了制造流体喷射装置的方法。
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公开(公告)号：US07654637B2
公开(公告)日：2010-02-02
申请号：US11361732
申请日：2006-02-24
申请人： Sean T. Weaver , Rich Wells
发明人： Sean T. Weaver , Rich Wells
CPC分类号： B41J2/162 , B41J2/1603 , B41J2/1631 , B41J2/1645
摘要： Nozzle members, such as for a micro-fluid ejection head, micro-fluid ejection heads, and a method for making the same. One such nozzle member includes a negative photoresist composition derived from a first di-functional epoxy compound, a relatively high molecular weight polyhydroxy ether, a photoacid generator devoid of aryl sulfonium salts, an adhesion enhancer, and an aliphatic ketone solvent. The nozzle member has a thickness ranging from about 10 microns to about 30 microns.
摘要翻译： 喷嘴构件，例如微流体喷射头，微流体喷射头及其制造方法。 一个这样的喷嘴构件包括衍生自第一二官能环氧化合物，相对高分子量的多羟基醚，不含芳基锍盐的光酸产生剂，粘附增强剂和脂族酮溶剂的负性光致抗蚀剂组合物。 喷嘴构件具有约10微米至约30微米的厚度。
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公开(公告)号：US07470505B2
公开(公告)日：2008-12-30
申请号：US11234421
申请日：2005-09-23
IPC分类号： B41J2/16
CPC分类号： B41J2/1433 , B41J2/1603 , B41J2/162 , B41J2/1623 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1635 , B41J2/1639 , B41J2/1645 , Y10S430/146
摘要： Methods of making micro-fluid ejection head structures. One of the methods includes providing a substrate having a plurality fluid ejection actuators on a device surface thereof. The device surface of the substrate also has a thick film layer comprising at least one of fluid flow channels and fluid ejection chambers therein. A removable anti-reflective material is applied to at least one or more exposed portions of the device surface of the substrate. A nozzle layer is applied adjacent to the thick film layer. The nozzle layer is imaged to provide a plurality of nozzles in the nozzle layer, and the non-reflective material is removed from the exposed portions of the device surface of the substrate.
摘要翻译： 制造微流体喷射头结构的方法。 一种方法包括在其装置表面上提供具有多个流体喷射致动器的基板。 衬底的器件表面还具有包括流体流动通道和流体喷射室中的至少一个的厚膜层。 可移除的抗反射材料被施加到衬底的器件表面的至少一个或多个暴露部分。 在厚膜层附近施加喷嘴层。 喷嘴层被成像以在喷嘴层中提供多个喷嘴，并且从基板的装置表面的暴露部分去除非反射材料。
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4.发明申请公开(公告)号：US20120229569A1
公开(公告)日：2012-09-13
申请号：US13041793
申请日：2011-03-07
CPC分类号： B41J2/1404 , B41J2002/14403 , Y10T29/49401
摘要： Disclosed is a fluid ejection device that includes a nozzle plate. The nozzle plate includes a plurality of nozzles for fluid ejection. Further, the fluid ejection device includes a substrate disposed below the nozzle plate. The substrate includes a top surface adapted to adhere to the nozzle plate. The substrate also includes at least one fluid via configured within the substrate for providing fluid to the plurality of nozzles of the nozzle plate. Furthermore, the fluid ejection device includes at least one supporting structure configured within each fluid via of the at least one fluid via. The at least one supporting structure is further configured at a predetermined depth from the top surface of the substrate to regulate the flow of the fluid from the at least one fluid via to the plurality of nozzles. Further, disclosed is a method to fabricate the fluid ejection device.
摘要翻译： 公开了一种包括喷嘴板的流体喷射装置。 喷嘴板包括用于流体喷射的多个喷嘴。 此外，流体喷射装置包括设置在喷嘴板下方的基板。 衬底包括适于粘附到喷嘴板的顶表面。 衬底还包括至少一个流体通路，该流体通孔被配置在衬底内，用于向喷嘴板的多个喷嘴提供流体。 此外，流体喷射装置包括至少一个配置在至少一个流体通路的每个流体通路内的支撑结构。 所述至少一个支撑结构进一步构造在距离所述基板的顶表面的预定深度处以调节所述流体从所述至少一个流体通道到所述多个喷嘴的流动。 此外，公开了制造流体喷射装置的方法。
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公开(公告)号：US08007990B2
公开(公告)日：2011-08-30
申请号：US12496786
申请日：2009-07-02
申请人： Girish S. Patil , Sean T. Weaver , Rich Wells
发明人： Girish S. Patil , Sean T. Weaver , Rich Wells
IPC分类号： G03F7/26
CPC分类号： B41J2/1603 , B41J2/1631 , B41J2/1645
摘要： Thick film layers for a micro-fluid ejection head, micro-fluid ejection heads, and methods for making micro-fluid ejection head and thick film layers. One such thick film layer is derived from a difunctional epoxy component having a weight average molecular weight ranging from about 2500 to about 4000 Daltons, a photoacid generator, an aryl ketone solvent, and an adhesion enhancing component. One such thick film layer has a cross-link density upon curing that increases the dimensional stability of the thick film layer sufficient to provide flow features therein having substantially vertical walls.
摘要翻译： 用于微流体喷射头，微流体喷射头和用于制造微流体喷射头和厚膜层的方法的厚膜层。 一种这样的厚膜层衍生自重均分子量为约2500至约4000道尔顿的双官能环氧组分，光酸产生剂，芳基酮溶剂和粘合增强组分。 一个这样的厚膜层在固化时具有交联密度，这增加了厚膜层的尺寸稳定性，足以提供具有基本垂直壁的流动特征。
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6.发明授权公开(公告)号：US07954927B2
公开(公告)日：2011-06-07
申请号：US12024346
申请日：2008-02-01
IPC分类号： B41J2/14
CPC分类号： B41J2/1603 , B41J2/162 , B41J2/1631 , B41J2/1645
摘要： An improved photoimaged nozzle plate for a micro-fluid ejection head, a micro-fluid ejection head containing the nozzle plate, and methods for making a micro-fluid ejection head. The improved nozzle plate is provided by a photoresist nozzle plate layer applied to a thick film layer on a semiconductor substrate containing fluid ejector actuators. The photoresist nozzle plate layer has a plurality of nozzle holes therein. Each of the nozzle holes are formed in the nozzle plate layer from an exit surface of the nozzle plate layer to an entrance surface of the nozzle plate layer. Each of the nozzle holes has a reentrant hole profile with a wall angle greater than about 4° up to about 30° measured from an axis orthogonal to a plane defined by the exit surface of the nozzle plate layer.
摘要翻译： 用于微流体喷射头的改进的光刻喷嘴板，包含喷嘴板的微流体喷射头以及用于制造微流体喷射头的方法。 改进的喷嘴板由涂覆在包含流体喷射器致动器的半导体衬底上的厚膜层上的光致抗蚀剂喷嘴板层提供。 光致抗蚀剂喷嘴板层中具有多个喷嘴孔。 每个喷嘴孔从喷嘴板层的出射面到喷嘴板层的入射面形成在喷嘴板层中。 每个喷嘴孔具有从垂直于由喷嘴板层的出射表面限定的平面的轴测量的壁角大于约4°至多约30°的折入孔轮廓。
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公开(公告)号：US07784919B2
公开(公告)日：2010-08-31
申请号：US11241220
申请日：2005-09-30
申请人： Sean T. Weaver
发明人： Sean T. Weaver
CPC分类号： B41J2/1603 , B41J2/14129 , B41J2/1623 , B41J2/1626 , B41J2/1631 , B41J2/1634
摘要： Methods for improving fluid flow in one or more flow features of a micro-fluid ejection head and micro-fluid ejection heads having improved fluid flow. One method includes bonding a substrate having a flow feature layer to an ejection head body using a relatively low stress, substantially flexible adhesive containing a relatively volatile polar organic compound. The adhesive is cured under conditions sufficient to induce outgassing of at least a portion of the relatively volatile polar organic compound on at least a portion of a flow feature surface sufficient to increase fluid wetting of the flow feature surface.
摘要翻译： 具有改善的流体流动的用于改进微流体喷射头和微流体喷射头的一个或多个流动特征中的流体流动的方法。 一种方法包括使用相对低应力，基本上柔性的含有相对挥发性极性有机化合物的粘合剂将具有流动特征层的基底结合到喷射头本体。 粘合剂在足以引起至少一部分相对挥发性极性有机化合物在流动特征表面的至少一部分上排气的条件下固化，足以增加流动特征表面的流体润湿。
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公开(公告)号：US07600858B2
公开(公告)日：2009-10-13
申请号：US11754715
申请日：2007-05-29
申请人： Johnathan L. Barnes , Craig M. Bertelsen , Brian C. Hart , Gary R. Williams , Sean T. Weaver , Girish S. Patil
发明人： Johnathan L. Barnes , Craig M. Bertelsen , Brian C. Hart , Gary R. Williams , Sean T. Weaver , Girish S. Patil
IPC分类号： B41J2/05
CPC分类号： B41J2/1628 , B41J2/14024 , B41J2/1404 , B41J2/14072 , B41J2/1603 , B41J2/1623 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1635 , B41J2/1639 , B41J2/1645 , Y10T29/49135 , Y10T29/49139 , Y10T29/4914 , Y10T29/49401 , Y10T29/4979 , Y10T29/49798
摘要： A method of making a micro-fluid ejection head structure for a micro-fluid ejection device. The method includes applying a removable mandrel material to a semiconductor substrate wafer containing fluid ejection actuators on a device surface thereof. The mandrel material is shaped to provide fluid chamber and fluid channel locations on the substrate wafer. A micro machinable material is applied to the shaped mandrel and the device surface of the wafer to provide a nozzle plate and flow feature layer on the shaped mandrel and wafer. A plurality of nozzle holes are formed in the nozzle plate and flow feature layer. The shaped mandrel material is then removed from the device surface of the substrate wafer to provide fluid chambers and fluid channels in the nozzle plate and flow feature layer.
摘要翻译： 一种制造用于微流体喷射装置的微流体喷射头结构的方法。 该方法包括将可移除的心轴材料施加到在其装置表面上含有流体喷射致动器的半导体衬底晶片。 心轴材料成型为在衬底晶片上提供流体室和流体通道位置。 将微加工材料施加到成形心轴和晶片的装置表面，以在成形心轴和晶片上提供喷嘴板和流动特征层。 在喷嘴板和流动特征层中形成多个喷嘴孔。 然后将成形的心轴材料从衬底晶片的器件表面移除，以在喷嘴板和流动特征层中提供流体室和流体通道。
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9.发明授权公开(公告)号：US07364268B2
公开(公告)日：2008-04-29
申请号：US11239799
申请日：2005-09-30
IPC分类号： B41J2/14
CPC分类号： B41J2/1603 , B41J2/162 , B41J2/1631 , B41J2/1645
摘要： An improved photoimaged nozzle plate for a micro-fluid ejection head, a micro-fluid ejection head containing the nozzle plate, and methods for making a micro-fluid ejection head. The improved nozzle plate is provided by a photoresist nozzle plate layer applied to a thick film layer on a semiconductor substrate containing fluid ejector actuators. The photoresist nozzle plate layer has a plurality of nozzle holes therein. Each of the nozzle holes are formed in the nozzle plate layer from an exit surface of the nozzle plate layer to an entrance surface of the nozzle plate layer. Each of the nozzle holes has a reentrant hole profile with a wall angle greater than about 4° up to about 30° measured from an axis orthogonal to a plane defined by the exit surface of the nozzle plate layer.
摘要翻译： 用于微流体喷射头的改进的光刻喷嘴板，包含喷嘴板的微流体喷射头以及用于制造微流体喷射头的方法。 改进的喷嘴板由涂覆在包含流体喷射器致动器的半导体衬底上的厚膜层上的光致抗蚀剂喷嘴板层提供。 光致抗蚀剂喷嘴板层中具有多个喷嘴孔。 每个喷嘴孔从喷嘴板层的出射面到喷嘴板层的入射面形成在喷嘴板层中。 每个喷嘴孔具有从垂直于由喷嘴板层的出射表面限定的平面的轴测量的壁角大于约4°至多约30°的折入孔轮廓。
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公开(公告)号：US07275815B2
公开(公告)日：2007-10-02
申请号：US11000763
申请日：2004-12-01
申请人： Craig M. Bertelsen , Kin M. Kwan , Sean T. Weaver
发明人： Craig M. Bertelsen , Kin M. Kwan , Sean T. Weaver
IPC分类号： B41J2/175
CPC分类号： B41J2/1753 , B41J2/17513
摘要： A micro-fluid ejection device structure, a multi-fluid cartridge containing the ejection device structure, and methods for making the ejection device structure and cartridge. The micro-fluid ejection device structure includes a fluid supply body containing at least three fluid supply slots therein. An ejection head substrate having fluid feed slots therein is attached to the fluid supply body. Each of the fluid supply slots in the body is in flow communication with at least one of the fluid feed slots in the substrate. A plurality of adhesive bond lines adhesively attach the ejection head substrate and the fluid supply body to one another. Each of the adhesive bond lines have a width of less than about 600 microns and are located between adjacent ones of the fluid supply slots in the body.
摘要翻译： 微流体喷射装置结构，包含喷射装置结构的多流体盒，以及用于制造喷射装置结构和盒的方法。 微流体喷射装置结构包括其中包含至少三个流体供应槽的流体供应主体。 其中具有流体供给槽的喷射头基板附接到流体供应体。 身体中的每个流体供应槽与衬底中的至少一个流体供给槽流动连通。 多个粘合剂粘合线将喷射头基板和流体供给体彼此粘合地附接。 每个粘合剂粘合线具有小于约600微米的宽度，并且位于身体中相邻的流体供应槽之间。
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