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1.发明授权
公开(公告)号：US5099791A
公开(公告)日：1992-03-31
申请号：US560928
申请日：1990-07-31
CPC分类号： C23C14/221 , H05H3/00
摘要： An apparatus for depositing, through evaporation, a thin film on a substrate disposed in a vacuum vessel by ionizing a beam of clusters emitted from an evaporation source and causing the ionized cluster beam to impinge on the substrate, comprises a thermionic emission portion for emitting thermoelectrons disposed in a plane orthogonal to the center axis of the cluster beam, a shield plate for preventing the cluster beam from striking the thermionic emission portion, and a reflection electrode for directing the thermoelectrons emitted from the thermionic emission portion toward the center axis of the cluster beam.
摘要翻译： 一种用于通过蒸发沉积在设置在真空容器中的基底上的薄膜的装置，其通过离子化从蒸发源发射的聚束束并使得离子化的聚束束撞击在基底上，包括用于发射热电子的热离子发射部分 设置在与簇束的中心轴正交的平面中，用于防止簇束撞击热离子发射部的屏蔽板和用于将从热离子发射部射出的热电子朝向簇的中心轴引导的反射电极 光束。
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公开(公告)号：US4684782A
公开(公告)日：1987-08-04
申请号：US774735
申请日：1985-09-11
申请人： Hidenobu Murakami , Seiji Yasunaga
发明人： Hidenobu Murakami , Seiji Yasunaga
IPC分类号： H01J37/315 , B23K15/00 , B23K15/02 , H01J37/06 , H01J37/24 , H01J37/248
CPC分类号： H01J37/243
摘要： A feedback signal of a beam accelerating voltage, which is input into a feedback control system is fixed at a predetermined value corresponding to a signal under the condition before generation of arcing, when the arcing is generated, and thereafter, the fixed feedback signal is released to continue a feedback control.
摘要翻译： 输入到反馈控制系统中的光束加速电压的反馈信号，在产生电弧时，在产生电弧之前的条件下固定为对应于信号的预定值，之后，释放固定反馈信号 继续反馈控制。
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公开(公告)号：US08552323B2
公开(公告)日：2013-10-08
申请号：US13100547
申请日：2011-05-04
申请人： Seiji Yasunaga , Masatsugu Takeuchi
发明人： Seiji Yasunaga , Masatsugu Takeuchi
IPC分类号： H01H13/14
CPC分类号： H01H13/85 , H01H2215/006
摘要： A push switch includes a first fixed contact and a second fixed contact disposed apart from the first fixed contact. Furthermore, the push switch includes a dome-shaped metallic movable contact facing the first fixed contact with a space therebetween, and a protrusion disposed above a center of the movable contact. When the protrusion is pressed, the movable contact is elastically reversed, and the first fixed contact and the second fixed contact become electrically conductive with each other via the movable contact.
摘要翻译： 按钮开关包括第一固定触点和与第一固定触点分开设置的第二固定触点。 此外，按钮开关包括面对第一固定触点的圆顶形金属可动触头和它们之间的空间，以及设置在可动触头中心上方的突起。 当突起被按压时，可动触点弹性地反转，并且第一固定触点和第二固定触头经由可动触点彼此导电。
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公开(公告)号：US4811690A
公开(公告)日：1989-03-14
申请号：US173597
申请日：1988-03-25
CPC分类号： C23C14/221 , H01J27/20
摘要： A thin film deposition apparatus includes an ionizing means for ionizing part of clusters from a vapor generating source by the cluster ion beam method. The ionizing means has an ionizing filament for emitting thermoelectrons to ionize the clusters, an electron extracting electrode for accelerating the thermoelectrons toward the clusters, and an electron controlling electrode disposed on the side of the electron extracting electrode for controlling the presence of the thermoelectrons at the center of the ionizing section. The thermoelectrons are substantially eliminated in the vicinity of the center of the ionizing portion due to the provision of the thermoelectron extracting electrode, thereby substantially eliminating the cluster ions generated in the vicinity of the center of the ionizing portion and reducing the quantity of clusters that concentrate on the center of a substrate. This makes the ion distribution on the substrate uniform so as to enable formation of a thin film which is uniform in terms of film thickness and film quality.
摘要翻译： 薄膜沉积设备包括用于通过簇离子束法从蒸汽发生源离子化部分簇的离子化装置。 电离装置具有用于发射热电子以离子化的电离丝，用于将热电子朝向簇加速的电子提取电极，以及设置在电子吸引电极一侧的电子控制电极，用于控制热电子的存在 电离部分的中心。 由于提供了热电子提取电极，所以在离子化部分的中心附近基本上消除了热电子，从而基本上消除了在离子化部分的中心附近产生的团簇离子并且减少了集中的聚集体的数量 在基板的中心。 这使得基板上的离子分布均匀，从而能够形成膜厚度和膜质量均匀的薄膜。
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公开(公告)号：US20110284357A1
公开(公告)日：2011-11-24
申请号：US13100547
申请日：2011-05-04
申请人： Seiji Yasunaga , Masatsugu Takeuchi
发明人： Seiji Yasunaga , Masatsugu Takeuchi
IPC分类号： H01H13/14
CPC分类号： H01H13/85 , H01H2215/006
摘要： A push switch includes a first fixed contact and a second fixed contact disposed apart from the first fixed contact. Furthermore, the push switch includes a dome-shaped metallic movable contact facing the first fixed contact with a space therebetween, and a protrusion disposed above a center of the movable contact. When the protrusion is pressed, the movable contact is elastically reversed, and the first fixed contact and the second fixed contact become electrically conductive with each other via the movable contact.
摘要翻译： 按钮开关包括第一固定触点和与第一固定触点分开设置的第二固定触点。 此外，按钮开关包括面对第一固定触点的圆顶形金属可动触头和它们之间的空间，以及设置在可动触头中心上方的突起。 当突起被按压时，可动触点弹性地反转，并且第一固定触点和第二固定触头经由可动触点彼此导电。
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公开(公告)号：US4812326A
公开(公告)日：1989-03-14
申请号：US14318
申请日：1987-02-13
CPC分类号： C23C14/221 , B05B1/24 , B05B5/025 , C23C14/243
摘要： An evaporation source in which an evaporation material is vaporized and jetted through a nozzle having a gradually opening cross-section, whereby the size of atom clusters of the jetted vapor can be controlled.
摘要翻译： 一种蒸发源，其中蒸发材料通过具有逐渐开放的横截面的喷嘴蒸发并喷射，由此可以控制喷射蒸气的原子簇的尺寸。
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公开(公告)号：US5532434A
公开(公告)日：1996-07-02
申请号：US278167
申请日：1994-07-21
摘要： An insulated wire having a conductor coated with insulating material wherein a light absorbing layer is provided between the conductor and the insulating material, thereby an insulating coating can be easily peeled off by means of laser.
摘要翻译： 一种绝缘电线，其具有涂覆有绝缘材料的导体，其中在导体和绝缘材料之间设置有光吸收层，由此可以通过激光容易地剥离绝缘涂层。
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