公开(公告)号：US07544952B2

公开(公告)日：2009-06-09

申请号：US11576945

申请日：2005-04-08

申请人： Makoto Sakurai ,  Fumiharu Nakajima ,  Takunori Fukumoto ,  Nobuyuki Nakamura ,  Shunsuke Ohtani ,  Shinro Mashiko

发明人： Makoto Sakurai ,  Fumiharu Nakajima ,  Takunori Fukumoto ,  Nobuyuki Nakamura ,  Shunsuke Ohtani ,  Shinro Mashiko

IPC分类号： H01J27/20

CPC分类号： H01J27/205 ,  H01J37/04 ,  H01J37/08 ,  H01J37/3056 ,  H01J2237/057 ,  H01J2237/061 ,  H01J2237/0815 ,  H01J2237/16 ,  H01J2237/31701 ,  H01J2237/31735

摘要： A multicharged ions generating source that is easy to manufacture, excellent in controllability and maintainability, high in degree of ionization and large in beam intensity and a charged particle beam apparatus using the same are disclosed. The multicharged ions generating source includes an ion source electrode (3) comprising an electron source (4), a drift tube (5) that constitutes an ion trapping region and a collector (6), a superconducting magnet (11) for ion entrapment, an ion infeed means (20, 22), a first vacuum chamber (2) receiving the ion source electrode (3), a second vacuum chamber (10) receiving the superconducting magnet (11), and a vacuum pumping unit (15, 16) provided for each of the first and second vacuum chambers. The first and the second vacuum chambers (2) and (10) are made removable from each other, and only the ion source electrode (3) to be held at extremely high vacuum can be baked for degassing.

摘要翻译： 公开了易于制造的多电荷离子产生源，可控性和可维护性优异，电离度高和束强度大的带电粒子束装置。 多电荷离子产生源包括离子源电极（3），其包括电子源（4），构成离子捕获区域的漂移管（5）和集电体（6），用于离子俘获的超导磁体（11） 离子馈入装置（20,22），接收离子源极（3）的第一真空室（2），接收超导磁体（11）的第二真空室（10）和真空泵送单元 ）设置在第一和第二真空室中。 第一和第二真空室（2）和（10）可以相互脱离，只能保持在极高真空的离子源电极（3）进行脱气。

公开(公告)号：US08541738B2

公开(公告)日：2013-09-24

申请号：US12937253

申请日：2009-04-07

申请人： Masahide Tona ,  Shunsuke Ohtani ,  Makoto Sakurai

发明人： Masahide Tona ,  Shunsuke Ohtani ,  Makoto Sakurai

IPC分类号： G01N23/225

CPC分类号： G01N23/2258 ,  G01N23/2255 ,  H01J37/244 ,  H01J37/256 ,  H01J49/142 ,  H01J2237/08 ,  H01J2237/2448 ,  H01J2237/24585 ,  H01J2237/2527

摘要： A surface analyzer 1 includes: a sample stage 6 for placing a sample 5; a source for generating multicharged ions 3 for irradiating a beam 4 of multicharged ions having a valence of 15 or higher to the sample 5 placed on the sample stage 6; a mass analyzer 8 for detecting secondary ions 7 generated as a result of irradiating the beam of multicharged ions 4 to the sample 5; a secondary electron detector 10 for detecting secondary electrons 9 generated as a result of irradiating the beam of multicharged ions 4 to the sample 5; and a controller of mass analyzer 12 for generating analysis start signals in response to the secondary electron signals received, and transmitting the start signals to the mass analyzer. The surface analyzer 1 enables high-quality analysis of the surface of the sample in short time by using the multicharged ions.

摘要翻译： 表面分析仪1包括：样品台6，用于放置样品5; 用于产生多电荷离子3的源，用于向放置在样品台6上的样品5照射具有15或更高的化合价的多电荷离子束4; 用于检测作为将多电荷离子束4照射到样品5的结果产生的二次离子7的质量分析器8; 用于检测作为将多电荷离子束4照射到样品5的结果产生的二次电子的二次电子检测器10; 以及用于响应于接收到的二次电子信号产生分析开始信号的质量分析器12的控制器，并将起始信号发送到质量分析器。 表面分析仪1可以通过使用多电荷离子在短时间内对样品的表面进行高质量的分析。

公开(公告)号：US20120061564A1

公开(公告)日：2012-03-15

申请号：US12937253

申请日：2009-04-07

申请人： Masahide Tona ,  Shunsuke Ohtani ,  Makoto Sakurai

发明人： Masahide Tona ,  Shunsuke Ohtani ,  Makoto Sakurai

IPC分类号： H01J37/26 ,  B01J19/08

CPC分类号： G01N23/2258 ,  G01N23/2255 ,  H01J37/244 ,  H01J37/256 ,  H01J49/142 ,  H01J2237/08 ,  H01J2237/2448 ,  H01J2237/24585 ,  H01J2237/2527

摘要： A surface analyzer 1 includes: a sample stage 6 for placing a sample 5; a source for generating multicharged ions 3 for irradiating a beam 4 of multicharged ions having a valence of 15 or higher to the sample 5 placed on the sample stage 6; a mass analyzer 8 for detecting secondary ions 7 generated as a result of irradiating the beam of multicharged ions 4 to the sample 5; a secondary electron detector 10 for detecting secondary electrons 9 generated as a result of irradiating the beam of multicharged ions 4 to the sample 5; and a controller of mass analyzer 12 for generating analysis start signals in response to the secondary electron signals received, and transmitting the start signals to the mass analyzer. The surface analyzer 1 enables high-quality analysis of the surface of the sample in short time by using the multicharged ions.

摘要翻译： 表面分析仪1包括：样品台6，用于放置样品5; 用于产生多电荷离子3的源，用于向放置在样品台6上的样品5照射具有15或更高的化合价的多电荷离子束4; 用于检测作为将多电荷离子束4照射到样品5的结果产生的二次离子7的质量分析器8; 用于检测作为将多电荷离子束4照射到样品5的结果产生的二次电子的二次电子检测器10; 以及用于响应于接收到的二次电子信号产生分析开始信号的质量分析器12的控制器，并将起始信号发送到质量分析器。 表面分析仪1可以通过使用多电荷离子在短时间内对样品的表面进行高质量的分析。

公开(公告)号：US20080087842A1

公开(公告)日：2008-04-17

申请号：US11576945

申请日：2005-04-08

申请人： Makoto Sakurai ,  Fumiharu Nakajima ,  Takunori Fukumoto ,  Nobuyuki Nakamura ,  Shunsuke Ohtani ,  Shinro Mashiko

发明人： Makoto Sakurai ,  Fumiharu Nakajima ,  Takunori Fukumoto ,  Nobuyuki Nakamura ,  Shunsuke Ohtani ,  Shinro Mashiko

IPC分类号： H01J27/00

CPC分类号： H01J27/205 ,  H01J37/04 ,  H01J37/08 ,  H01J37/3056 ,  H01J2237/057 ,  H01J2237/061 ,  H01J2237/0815 ,  H01J2237/16 ,  H01J2237/31701 ,  H01J2237/31735

摘要： A multicharged ions generating source that is easy to manufacture, excellent in controllability and maintainability, high in degree of ionization and large in beam intensity and a charged particle beam apparatus using the same are disclosed. The multicharged ions generating source includes an ion source electrode (3) comprising an electron source (4), a drift tube (5) that constitutes an ion trapping region and a collector (6), a superconducting magnet (11) for ion entrapment, an ion infeed means (20, 22), a first vacuum chamber (2) receiving the ion source electrode (3), a second vacuum chamber (10) receiving the superconducting magnet (11), and a vacuum pumping unit (15, 16) provided for each of the first and second vacuum chambers. The first and the second vacuum chambers (2) and (10) are made removable from each other, and only the ion source electrode (3) to be held at extremely high vacuum can be baked for degassing.

摘要翻译： 公开了易于制造的多电荷离子产生源，可控性和可维护性优异，电离度高和束强度大的带电粒子束装置。 多电荷离子产生源包括离子源电极（3），其包括电子源（4），构成离子捕获区域的漂移管（5）和集电体（6），用于离子俘获的超导磁体（11） 离子馈入装置（20,22），接收离子源极（3）的第一真空室（2），接收超导磁体（11）的第二真空室（10）和真空泵送单元 ）设置在第一和第二真空室中。 第一和第二真空室（2）和（10）可以相互脱离，只能保持在极高真空的离子源电极（3）进行脱气。