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    METHOD FOR SHRINK AND TUNE TRENCH/VIA CD
    2.
    发明申请
    METHOD FOR SHRINK AND TUNE TRENCH/VIA CD 审中-公开
    用于收缩和调节TRENCH / VIA CD的方法

    公开(公告)号：US20140030893A1

    公开(公告)日：2014-01-30

    申请号：US13556541

    申请日：2012-07-24

    Applicant: Ming-Shu KUO ,  Siyi LI ,  Monica TITUS ,  Srikanth RAGHAVAN ,  Tae Won KIM ,  Gowri KAMARTHY

    Inventor： Ming-Shu KUO ,  Siyi LI ,  Monica TITUS ,  Srikanth RAGHAVAN ,  Tae Won KIM ,  Gowri KAMARTHY

    IPC: H01L21/302

    CPC classification number: H01L21/31116 ,  H01J37/32146 ,  H01J2237/334 ,  H01L21/0338 ,  H01L21/31138 ,  H01L21/31144 ,  H01L21/76816

    Abstract: A method for etching with CD reduction, an etch layer disposed below a silicon containing mask layer under a patterned organic mask with features with a first CD. Features are opened in the silicon containing mask layer using the patterned organic mask, comprising providing an opening gas with an etchant component and polymerizing component, forming the opening gas into a plasma, and providing a pulsed bias with a pulse frequency between 10 Hz and 1 kHz, which etches features through the silicon containing mask layer with a second CD, which is less than half the first CD, forming a pattern in the silicon containing mask layer. The pattern of the silicon containing mask layer is transferred to the etch layer.

    Abstract translation: 一种用于CD减少蚀刻的方法，在具有第一CD的特征的图案化有机掩模下方的位于含硅掩模层下方的蚀刻层。 使用图案化的有机掩模在含硅掩模层中打开特征，包括提供具有蚀刻剂组分和聚合组分的开口气体，将开口气体形成等离子体，并提供脉冲频率在10Hz和1之间的脉冲偏压 kHz，其通过含硅掩模层的特征蚀刻，其具有小于第一CD的一半的第二CD，在含硅掩模层中形成图案。 含硅掩模层的图案被转移到蚀刻层。

    Optical fiber with low second order distortion
    4.
    发明申请
    Optical fiber with low second order distortion 失效
    具有低二阶失真的光纤

    公开(公告)号：US20070189769A1

    公开(公告)日：2007-08-16

    申请号：US11357277

    申请日：2006-02-16

    Applicant: John Mauro ,  Srikanth Raghavan

    Inventor： John Mauro ,  Srikanth Raghavan

    IPC: H04J14/00

    CPC classification number: H04J14/0298 ,  H04B10/2525 ,  H04B10/272 ,  H04N7/22

    Abstract: An optical fiber system comprising: (i) a dispersion pre-compensator including dispersion compensating fiber DCF characterized by the overall dispersion value DDCF at the operating wavelength λ; and (ii) a passive optical network (PON) including a plurality of transmission paths provided by a plurality of optical fibers, said plurality of transmission paths having a minimum and maximum dispersion value DMIN and DMAX; wherein the dispersion pre-compensator includes an output port operatively coupled to an input port of the a passive optical network and −DMAX

    Abstract translation: 一种光纤系统，包括：（i）色散预补偿器，包括以工作波长λ为特征的色散补偿光纤DCF，其特征在于总色散值D DCF < 和（ii）包括由多根光纤提供的多个传输路径的无源光网络（PON），所述多个传输路径具有最小和最大色散值D MIN和D MAX ; 其中所述色散预补偿器包括可操作地耦合到所述无源光网络的输入端口的输出端口，并且具有D＆lt; MAX＆lt; D＆gt; 。

    Optical transmitter with enhanced SBS threshold power capability
    6.
    发明申请
    Optical transmitter with enhanced SBS threshold power capability 审中-公开
    具有增强SBS阈值功率能力的光发射机

    公开(公告)号：US20070140704A1

    公开(公告)日：2007-06-21

    申请号：US11314106

    申请日：2005-12-20

    Applicant: John Mauro ,  Srikanth Raghavan

    Inventor： John Mauro ,  Srikanth Raghavan

    IPC: H04B10/04

    CPC classification number: H04B10/2575 ,  H04B10/2537

    Abstract: An optical transmitter (8) having enhanced stimulated Brillouin scattering (SBS) threshold power (PSBS) capability is disclosed. The transmitter includes a light source (12) adapted to emit a continuous-wave (CW) light beam (16). A phase modulator (20) is optically coupled to the light source and to a plurality n of radio-frequency (RF) signal drivers (22) adapted to generate a corresponding plurality of sinusoidal RF drive signals having respective modulation amplitudes An, modulation frequencies fn, and modulation phases φn. The phase modulator phase modulates the light beam based on the plurality of sinusoidal RF drive signals to form a phase-modulated carrier light beam (16′). The modulation phases φn are chosen to increase the SBS threshold power relative to a baseline threshold power when the phase-modulated carrier light beam travels over an optical fiber (50). Modulation frequencies fn are also chosen to suppress combined second-order (CSO) distortion.

    Abstract translation: 公开了具有增强的受激布里渊散射（SBS）阈值功率（PSBS）能力的光发射机（8）。 发射机包括适于发射连续波（CW）光束（16）的光源（12）。 相位调制器（20）光耦合到光源和多个n个射频（RF）信号驱动器（22），其适于产生具有相应调制幅度A N的对应的多个正弦RF驱动信号 调制频率f n n n和调制相位φn n。 相位调制器基于多个正弦RF驱动信号调制光束，以形成相位调制载波光束（16'）。 当相位调制的载波光束在光纤（50）上行进时，选择调制相位phi N以提高相对于基线阈值功率的SBS阈值功率。 还选择调制频率f N n N以抑制组合二阶（CSO）失真。

    Unipolar electrical to CSRZ optical converter
    8.
    发明授权
    Unipolar electrical to CSRZ optical converter 失效
    单极电气到CSRZ光转换器

    公开(公告)号：US06842125B2

    公开(公告)日：2005-01-11

    申请号：US10435981

    申请日：2003-05-12

    Applicant: John C. Mauro ,  Salvatore Morasca ,  Valerio Pruneri ,  Srikanth Raghavan

    Inventor： John C. Mauro ,  Salvatore Morasca ,  Valerio Pruneri ,  Srikanth Raghavan

    IPC: H03M7/02 ,  H04B10/155 ,  H03M7/12

    CPC classification number: H04J14/08 ,  H03M7/02 ,  H04B10/505 ,  H04B10/508

    Abstract: A conversion method for converting a unipolar voltage data stream into a carrier-suppressed return-to-zero (CSRZ) optical data stream includes modulating a continuous optical wave with an encoded nonreturn-to-zero (NRZ) voltage data stream for providing a CSRZ optical data stream of full-width at half-maximum (FWHM) pulse width less than one-half of the transition time of the encoded nonreturn-to-zero (NRZ) voltage data stream between logical states for a reduced pulse width. The modulating circuit is either a duobinary modulator driven with a swing of ±2Vπ or an optical time domain multiplexed plurality of nonreturn-to-zero (NRZ) modulators with phase shifting and differential encoding.

    Abstract translation: 将单极性电压数据流转换为载波抑制归零（CSRZ）光数据流的转换方法包括用编码的非归零（NRZ）电压数据流调制连续光波，以提供CSRZ 半宽度（FWHM）脉冲宽度的光学数据流小于在减小的脉冲宽度的逻辑状态之间编码的非返回到零（NRZ）电压数据流的转换时间的一半。 调制电路是以±2Vpi的摆幅驱动的双二进制调制器或具有相移和差分编码的光时域多路复用多个非归零（NRZ）调制器。

    Optical fiber with low second order distortion
    10.
    发明授权
    Optical fiber with low second order distortion 失效
    具有低二阶失真的光纤

    公开(公告)号：US07512346B2

    公开(公告)日：2009-03-31

    申请号：US11357277

    申请日：2006-02-16

    Applicant: John Christopher Mauro ,  Srikanth Raghavan

    Inventor： John Christopher Mauro ,  Srikanth Raghavan

    IPC: H04B10/12

    CPC classification number: H04J14/0298 ,  H04B10/2525 ,  H04B10/272 ,  H04N7/22

    Abstract: An optical fiber system comprising: (i) a dispersion pre-compensator including dispersion compensating fiber DCF characterized by the overall dispersion value DDCF at the operating wavelength λ; and (ii) a passive optical network (PON) including a plurality of transmission paths provided by a plurality of optical fibers, said plurality of transmission paths having a minimum and maximum dispersion value DMIN and DMAX; wherein the dispersion pre-compensator includes an output port operatively coupled to an input port of the a passive optical network and −DMAX

    Abstract translation: 一种光纤系统，包括：（i）色散预补偿器，包括色散补偿光纤DCF，其特征在于工作波长λ处的总色散值DDCF; 和（ii）包括由多根光纤提供的多个传输路径的无源光网络（PON），所述多个传输路径具有最小和最大色散值DMIN和DMAX; 其中所述色散预补偿器包括可操作地耦合到无源光网络的输入端口和-DMAX

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