Probe card for inspecting electric properties of an object
    1.
    发明授权
    Probe card for inspecting electric properties of an object 有权
    用于检查物体的电气特性的探针卡

    公开(公告)号:US07679385B2

    公开(公告)日:2010-03-16

    申请号:US11822577

    申请日:2007-07-09

    IPC分类号: G01R31/02

    摘要: In the present invention, an inspection contact structure is attached to a lower surface side of a circuit board of a probe card. The inspection contact structure has a silicon substrate, and sheets attached to upper and lower surfaces of the silicon substrate. Each of the sheets is elastic and has conductive portions in a projecting shape. The silicon substrate is formed with current-carrying paths passing through the substrate in a vertical direction so that the conductive portions of the sheets and the current-carrying paths of the silicon substrate are in contact with each other. The upper and lower sheets are fixed to the silicon substrate, and the sheet on the upper surface is fixed to a circuit board.

    摘要翻译: 在本发明中,检查接点结构安装在探针卡的电路板的下表面侧。 检查接触结构具有硅衬底,以及附着到硅衬底的上表面和下表面的片。 每个片是弹性的并且具有突出形状的导电部分。 硅衬底形成有沿垂直方向穿过衬底的载流路径,使得片的导电部分和硅衬底的通电路径彼此接触。 上下板固定在硅基板上,上表面的片固定在电路板上。

    Probe Card
    2.
    发明申请
    Probe Card 审中-公开
    探头卡

    公开(公告)号:US20080048698A1

    公开(公告)日:2008-02-28

    申请号:US11630004

    申请日:2005-06-29

    IPC分类号: G01R1/073 H01L21/66

    摘要: It is an object of the present invention to conduct highly reliable inspection by adjusting a contactor of a probe card and an inspection object in a prober to a parallel state even if the contactor and the inspection object become not parallel to each other. The present invention is a probe card mounted in a prober via a holder, the probe card including: a contactor; a circuit board electrically connected to the contactor; a reinforcing member reinforcing the circuit board; and a parallelism adjustment mechanism adjusting a degree of parallelism between the contactor and an inspection object disposed in the prober.

    摘要翻译: 本发明的目的是即使接触器和检查对象彼此不平行,也可以通过将探针卡和探测器中的检查对象的接触器调节到平行状态来进行高度可靠的检查。 本发明是一种通过支架安装在探测器中的探针卡,探针卡包括:接触器; 电连接到所述接触器的电路板; 增强电路板的加强构件; 以及平行度调节机构,其调节接触器和设置在探测器中的检查对象之间的平行度。

    Fluororubber base sealant composition and fluororubber base sealant
    3.
    发明授权
    Fluororubber base sealant composition and fluororubber base sealant 失效
    氟橡胶基础密封剂组合物和氟橡胶基础密封剂

    公开(公告)号:US07199198B2

    公开(公告)日:2007-04-03

    申请号:US10544296

    申请日:2004-02-05

    IPC分类号: C08F16/24

    摘要: A fluororubber sealant composition includes 100 parts by weight of a fluororubber, which is a copolymer having a cross-linking site derived from a bromine-containing and/or iodine-containing compound, capable of crosslinking with peroxide and having a component unit composition comprising 20 to 23% by mol of a perfluoromethyl vinylether component unit, 60 to 70% by mol of a vinylidene fluoride component unit, 10 to 20% by mol of a tetrafluoroethylene component unit, 0 to 10% by mol of hexafluoropropylene component unit (based on 100% of the total of the above component units), and a small amount of a bromide and/or iodide unsaturated fluorohydrocarbon component unit as a crosslinking site based on 100% by mol of the total of the above component units; and further comprising, based on 100 parts by weight of the fluororubber, 2 to 50 parts by weight of a bituminous fine powder; 0.5 to 6 parts by weight of an organoperoxide; and 1 to 10 parts by weight of a polyfunctional monomer. A sealant is prepared by vulcanizing the above composition. The composition has not only excellent ordinary physical properties but also excellent heat resistance, freeze resistance and fuel oil resistance so that it is suitably used as sealants for automobile fuel.

    摘要翻译: 氟橡胶密封剂组合物包括100重量份的氟橡胶,其是具有衍生自含溴和/或含碘化合物的交联位点的共聚物,其能够与过氧化物交联并且具有包含20的组分单元组成 至23摩尔%的全氟甲基乙烯基醚单元,60〜70摩尔%的偏二氟乙烯成分单元,10〜20摩尔%的四氟乙烯成分单元,0〜10摩尔%的六氟丙烯成分单元(基于 相对于上述成分单元的总量的100%)和少量的溴化物和/或碘化物不饱和氟代烃组分作为交联部位,基于100摩尔% 并且还包括基于100重量份的氟橡胶,2至50重量份的沥青细粉末; 0.5〜6重量份的有机过氧化物; 和1至10重量份的多官能单体。 通过硫化上述组合物制备密封剂。 该组合物不仅具有优异的普通物理性能,而且具有优异的耐热性,耐冻结性和耐燃油性,因此适合用作汽车燃料用密封剂。

    Inspection contact structure and probe card

    公开(公告)号:US07701234B2

    公开(公告)日:2010-04-20

    申请号:US11819274

    申请日:2007-06-26

    IPC分类号: G01R31/02 G01R31/26 H01R12/00

    摘要: In the present invention, an inspection contact structure is attached to the lower surface side of a circuit board in a probe card. In the inspection contact structure, elastic sheets with protruding conductive portions are respectively attached to both surfaces of a silicone substrate. The silicone substrate is formed with current-carrying paths passing therethrough in the vertical direction, and the sheet conductive portions are in contact with the current-carrying paths from above and below. The conductive portions on the upper side are in contact with connecting terminals of the circuit board. At the time of inspection of electric properties of a wafer, electrode pads on the wafer are pressed against the conductive portions on the lower side and thereby brought into contact with them.

    Probe card and probe device for inspection of a semiconductor device
    5.
    发明授权
    Probe card and probe device for inspection of a semiconductor device 失效
    用于半导体器件检测的探针卡和探针装置

    公开(公告)号:US07692435B2

    公开(公告)日:2010-04-06

    申请号:US11701379

    申请日:2007-02-02

    IPC分类号: G01R31/02

    CPC分类号: G01R1/07307

    摘要: The probe card is configured such that the outline of the probe card is formed almost round shape and a plurality of connectors for being electrically connected with a tester are provided on the upper surface thereof along the outline. A substrate with many probes arranged thereon is provided on the bottom surface of the probe card. The substrate and the connectors are connected with one another via a flexible print wiring board.

    摘要翻译: 探针卡被构造为使得探针卡的轮廓形成为大致圆形,并且沿着轮廓在其上表面上设置有用于与测试器电连接的多个连接器。 在探针卡的底面设置有布置有多个探针的基板。 基板和连接器通过柔性印刷电路板相互连接。

    Epdm Composition
    6.
    发明申请
    Epdm Composition 审中-公开
    Epdm组成

    公开(公告)号:US20090171000A1

    公开(公告)日:2009-07-02

    申请号:US11922864

    申请日:2006-06-21

    IPC分类号: C08K3/34 C08F4/34 C08K3/04

    摘要: An EPDM composition, which comprises 100 parts by weight of EPDM having an ethylene content of 50-58 wt. %, and a Mooney viscosity ML1+4 (100° C.) of 10-48, and 0.2-4.0 parts by weight of an organic peroxide as a cross-linking agent, has a distinguished blister resistance in a mixed state of chlorofluorocarbon gas/refrigerator oil, which has been a problem in practical use, and a distinguished moldability, as a rubber material for molding sealing materials for chlorofluorocarbon refrigerant including R134a. Sealing materials made from the EPDM composition by vulcanization-molding can provide EPDM-made sealing materials having less permeation leakage amount of chlorofluorocarbon refrigerant than that of hydrogenated NBR so far used as sealing materials in shaft sealing devices in compressors of automobile air conditioners.

    摘要翻译: EPDM组合物,其包含100重量份的乙烯含量为50-58重量%的EPDM。 %,门磁粘度ML1 + 4(100℃)为10-48,以及0.2-4.0重量份作为交联剂的有机过氧化物,在氯氟烃气体的混合状态下具有显着的耐起泡性 作为用于成型包含R134a的氯氟烃制冷剂的密封材料的橡胶材料,其在实际应用中已经成为实际应用中的问题,并且具有突出的成型性。 通过硫化成型由EPDM组合物制成的密封材料可以提供与目前用作汽车空调压缩机的轴封装置中的密封材料的氢化NBR相比,具有较少的氯氟烃制冷剂渗漏泄漏量的EPDM制成的密封材料。

    Inspection contact structure and probe card

    公开(公告)号:US20080211523A1

    公开(公告)日:2008-09-04

    申请号:US11819274

    申请日:2007-06-26

    IPC分类号: G01R31/02

    摘要: In the present invention, an inspection contact structure is attached to the lower surface side of a circuit board in a probe card. In the inspection contact structure, elastic sheets with protruding conductive portions are respectively attached to both surfaces of a silicone substrate. The silicone substrate is formed with current-carrying paths passing therethrough in the vertical direction, and the sheet conductive portions are in contact with the current-carrying paths from above and below. The conductive portions on the upper side are in contact with connecting terminals of the circuit board. At the time of inspection of electric properties of a wafer, electrode pads on the wafer are pressed against the conductive portions on the lower side and thereby brought into contact with them.

    Inspection contact structure and probe card
    8.
    发明授权
    Inspection contact structure and probe card 有权
    检查接触结构和探针卡

    公开(公告)号:US07267551B2

    公开(公告)日:2007-09-11

    申请号:US11270444

    申请日:2005-11-10

    IPC分类号: H01R12/00

    摘要: In the present invention, an inspection contact structure is attached to the lower surface side of a circuit board in a probe card. In the inspection contact structure, elastic sheets with protruding conductive portions are respectively attached to both surfaces of a silicone substrate. The silicone substrate is formed with current-carrying paths passing therethrough in the vertical direction, and the sheet conductive portions are in contact with the current-carrying paths from above and below. The conductive portions on the upper side are in contact with connecting terminals of the circuit board. At the time of inspection of electric properties of a wafer, electrode pads on the wafer are pressed against the conductive portions on the lower side and thereby brought into contact with them.

    摘要翻译: 在本发明中,在探针卡的电路基板的下表面侧安装有检查接触结构。 在检查接触结构中,具有突出导电部分的弹性片分别安装在硅树脂基底的两个表面上。 硅基板在垂直方向上形成有通过其的通电路径,并且片状导电部分从上方和下方与导流路径接触。 上侧的导电部与电路基板的连接端子接触。 在检查晶片的电性的时候,晶片上的电极焊盘被压在下侧的导电部分上,从而与它们接触。

    Probe card and probe device
    9.
    发明申请
    Probe card and probe device 失效
    探头卡和探头装置

    公开(公告)号:US20070182431A1

    公开(公告)日:2007-08-09

    申请号:US11701379

    申请日:2007-02-02

    IPC分类号: G01R31/02

    CPC分类号: G01R1/07307

    摘要: The probe card is configured such that the outline of the probe card is formed almost round shape and a plurality of connectors for being electrically connected with a tester are provided on the upper surface thereof along the outline. A substrate with many probes arranged thereon is provided on the bottom surface of the probe card. The substrate and the connectors are connected with one another via a flexible print wiring board.

    摘要翻译: 探针卡被构造成使得探针卡的轮廓形成为大致圆形,并且沿着轮廓在其上表面上设置有用于与测试器电连接的多个连接器。 在探针卡的底面设置有布置有多个探针的基板。 基板和连接器通过柔性印刷电路板相互连接。

    Inspection contact structure and probe card
    10.
    发明申请
    Inspection contact structure and probe card 有权
    检查接触结构和探针卡

    公开(公告)号:US20060154497A1

    公开(公告)日:2006-07-13

    申请号:US11270444

    申请日:2005-11-10

    IPC分类号: H01R12/00

    摘要: In the present invention, an inspection contact structure is attached to the lower surface side of a circuit board in a probe card. In the inspection contact structure, elastic sheets with protruding conductive portions are respectively attached to both surfaces of a silicon substrate. The silicon substrate is formed with current-carrying paths passing therethrough in the vertical direction, and the sheet conductive portions are in contact with the current-carrying paths from above and below. The conductive portions on the upper side are in contact with connecting terminals of the circuit board. At the time of inspection of electric properties of a wafer, electrode pads on the wafer are pressed against the conductive portions on the lower side and thereby brought into contact with them.

    摘要翻译: 在本发明中,在探针卡的电路基板的下表面侧安装有检查接触结构。 在检查接触结构中,具有突出导电部分的弹性片分别安装在硅衬底的两个表面上。 硅基板在垂直方向上形成有通过其的通电路径,并且片状导电部分从上下方向与导流路径接触。 上侧的导电部与电路基板的连接端子接触。 在检查晶片的电性的时候,晶片上的电极焊盘被压在下侧的导电部分上,从而与它们接触。