Microelectromechanical component and method for the production thereof
    1.
    发明授权
    Microelectromechanical component and method for the production thereof 有权
    微机电部件及其制造方法

    公开(公告)号:US07462919B2

    公开(公告)日:2008-12-09

    申请号:US10558114

    申请日:2004-05-24

    IPC分类号: H01L29/84

    摘要: A microelectromechanical component and to a method for the production thereof is disclosed. In one embodiment, the microelectromechanical component has a pressure-sensitive semiconductor chip, which is covered in its pressure-sensitive region by a rubber-elastic layer and is arranged in a cavity housing and covered by a rubber-elastic covering. This rubber-elastic covering has a greater thickness than the rubber-elastic layer on the pressure-sensitive region.

    摘要翻译: 公开了一种微机电部件及其制造方法。 在一个实施例中,微电子机械部件具有压敏半导体芯片,该压敏半导体芯片通过橡胶弹性层在其压敏区域被覆盖,并且被布置在腔室中并由橡胶弹性覆盖物覆盖。 该橡胶弹性覆盖物的厚度比压敏区域上的橡胶弹性层厚。