公开(公告)号：US20120005516A1

公开(公告)日：2012-01-05

申请号：US13170466

申请日：2011-06-28

申请人： Tobias BERGMANN ,  Ralf LUDEWIG ,  Tobias WEBEL ,  Ulrich WEISS

发明人： Tobias BERGMANN ,  Ralf LUDEWIG ,  Tobias WEBEL ,  Ulrich WEISS

IPC分类号： G06F1/12

CPC分类号： G06F1/12 ,  G06F1/3237 ,  Y02D10/128

摘要： A computer system is provided which includes a plurality of nodes, which include chips of different types. In each node, one of the chips is configured as a master chip, which is connected to one or more slave chips via two or more multi-drop nets (e.g., checkstop, clockrun). The master chip and the slave chips are connected to a reference clock, and event triggering information is transmitted via the multi-drop nets (checkstop, clockrun) to the slave chips. Event trigger commands are submitted by the master chip when it receives a request, and internal offset counters are used to adjust both the receiving cycle and the cycle when the command is propagated to the units on the chips. In operation, the offset counters are synchronized by a reference clock.

摘要翻译： 提供一种计算机系统，其包括多个节点，其包括不同类型的芯片。 在每个节点中，一个芯片被配置为主芯片，其通过两个或更多个多点网络（例如，checkstop，clockrun）连接到一个或多个从芯片。 主芯片和从芯片连接到参考时钟，事件触发信息通过多点网络（checkstop，clockrun）发送到从芯片。 事件触发命令由主芯片在接收到请求时提交，内部偏移计数器用于在命令传播到芯片上的单元时调整接收周期和周期。 在运行中，偏移计数器由参考时钟同步。

公开(公告)号：US20110104627A1

公开(公告)日：2011-05-05

申请号：US12612633

申请日：2009-11-04

申请人： Michael SCHAEFER ,  Tobias BERGMANN ,  Josef HOFFMANN ,  Andreas SAUER ,  Juergen HENRICH ,  Andreas GEISS

发明人： Michael SCHAEFER ,  Tobias BERGMANN ,  Josef HOFFMANN ,  Andreas SAUER ,  Juergen HENRICH ,  Andreas GEISS

IPC分类号： F27D3/00

CPC分类号： H01L21/67706 ,  C03B35/183 ,  C03B35/184 ,  C03B35/189

摘要： A substrate transport system adapted for transporting a substrate moving in a substrate transport direction in a processing chamber is provided. The substrate transport system includes a plurality of transport rollers each having a transport shaft and a transport wheel. The transport shaft and the transport wheel are adapted for supporting the moving substrate. A heating means is arranged between the position of the moving substrate and the transport shaft and is adapted for heating the moving substrate.

摘要翻译： 提供了一种适于传送在处理室中沿基板输送方向移动的基板的基板输送系统。 基板输送系统包括多个输送辊，每个输送辊具有输送轴和输送轮。 输送轴和输送轮适于支撑移动的基板。 在移动基板的位置和输送轴之间设置加热装置，并且适于加热移动的基板。

公开(公告)号：US08868960B2

公开(公告)日：2014-10-21

申请号：US13170466

申请日：2011-06-28

申请人： Tobias Bergmann ,  Ralf Ludewig ,  Tobias Webel ,  Ulrich Weiss

发明人： Tobias Bergmann ,  Ralf Ludewig ,  Tobias Webel ,  Ulrich Weiss

IPC分类号： G06F1/04 ,  G06F1/12 ,  G06F15/16 ,  G06F1/32

CPC分类号： G06F1/12 ,  G06F1/3237 ,  Y02D10/128

摘要： A computer system is provided which includes a plurality of nodes, which include chips of different types. In each node, one of the chips is configured as a master chip, which is connected to one or more slave chips via two or more multi-drop nets (e.g., checkstop, clockrun). The master chip and the slave chips are connected to a reference clock, and event triggering information is transmitted via the multi-drop nets (checkstop, clockrun) to the slave chips. Event trigger commands are submitted by the master chip when it receives a request, and internal offset counters are used to adjust both the receiving cycle and the cycle when the command is propagated to the units on the chips. In operation, the offset counters are synchronized by a reference clock.

摘要翻译： 提供一种计算机系统，其包括多个节点，其包括不同类型的芯片。 在每个节点中，一个芯片被配置为主芯片，其通过两个或更多个多点网络（例如，checkstop，clockrun）连接到一个或多个从芯片。 主芯片和从芯片连接到参考时钟，事件触发信息通过多点网络（checkstop，clockrun）发送到从芯片。 事件触发命令由主芯片在接收到请求时提交，内部偏移计数器用于在命令传播到芯片上的单元时调整接收周期和周期。 在运行中，偏移计数器由参考时钟同步。

公开(公告)号：US20120052201A1

公开(公告)日：2012-03-01

申请号：US12876801

申请日：2010-09-07

申请人： Annemarie Flock ,  Andreas Sauer ,  Josef Hoffmann ,  Tobias Bergmann ,  Susanne Schlafer

发明人： Annemarie Flock ,  Andreas Sauer ,  Josef Hoffmann ,  Tobias Bergmann ,  Susanne Schlafer

IPC分类号： C23C14/22 ,  C23C14/24 ,  B25B11/00 ,  C23C14/34

CPC分类号： H01L21/67754

摘要： Pallets suited to accommodate thermal gradients during processing. In one aspect, a pallet includes a pair of elongate members, a fixed elongate lateral cross member fixedly coupled to each of the elongate members, and an elongate floating lateral cross member floatingly coupled to the elongate members. The floating lateral cross member displaced from the fixedly coupled lateral cross member to define a gap therebetween.

摘要翻译： 托盘适用于加工过程中的热梯度。 在一个方面，托盘包括一对细长构件，固定地连接到每个细长构件的细长横向横向构件以及与细长构件浮动连接的细长浮动横向横向构件。 浮动横向横向构件从固定联接的横向横向构件移位以限定其间的间隙。

公开(公告)号：US20120121816A1

公开(公告)日：2012-05-17

申请号：US12954007

申请日：2010-11-24

申请人： Josef Hoffmann ,  Tobias Bergmann ,  Soenke Groth ,  Horst Alt

发明人： Josef Hoffmann ,  Tobias Bergmann ,  Soenke Groth ,  Horst Alt

IPC分类号： B65D19/38 ,  C23C14/34

CPC分类号： H01L21/673 ,  H01L21/67748 ,  H01L21/67754

摘要： A generally planar substrate pallet having an front, a back, and pair of sides. The distance between the front and the back and the distance between the sides are significantly longer than the thickness of the substrate pallet. The ratio of vertical deflection of the substrate pallet to the distance between the sides at temperatures used in high temperature processing systems relative to room temperature is less than 1%.

摘要翻译： 具有前部，后部和一对侧面的大致平面的基板托盘。 前后的距离和两边之间的距离明显长于基板托盘的厚度。 在高温处理系统中使用的温度相对于室温的情况下，基板托盘的垂直偏转比与侧面之间的距离小于1％。