公开(公告)号：US12016092B2

公开(公告)日：2024-06-18

申请号：US17106735

申请日：2020-11-30

申请人： APPLIED MATERIALS, INC.

发明人： Pingyan Lei ,  Dien-Yeh Wu ,  Jallepally Ravi ,  Manjunatha Koppa ,  Ambarish Toorihal ,  Sandesh Yadamane ,  Vinod Konda Purathe ,  Xiaoxiong Yuan

IPC分类号： H05B3/48 ,  C23C14/54 ,  C23C16/455 ,  C23C16/458 ,  H05B3/14

CPC分类号： H05B3/48 ,  C23C14/541 ,  C23C16/45565 ,  C23C16/4586 ,  H05B3/141

摘要： Embodiments of a lid heater for a deposition chamber are provided herein. In some embodiments, a lid heater for a deposition chamber includes a ceramic heater body having a first side opposite a second side, wherein the ceramic heater body includes a first plurality of gas channels extending from one or more first gas inlets on the first side, wherein each of the one or more first gas inlets extend to a plurality of first gas outlets on the second side; a heating element embedded in the ceramic heater body; and an RF electrode embedded in the ceramic heater body proximate the second side, wherein the first plurality of gas channels extend through the RF electrode.

公开(公告)号：USD997893S1

公开(公告)日：2023-09-05

申请号：US29809529

申请日：2021-09-28

申请人： Applied Materials, Inc.

设计人： Zubin Huang ,  Srinivas Tokur Mohana ,  Shreyas Patil Shanthaveeraswamy ,  Sandesh Yadamane ,  Jallepally Ravi ,  Harpreet Singh ,  Manjunatha Koppa

摘要： FIG. 1 is a back isometric top left-side view of a shadow ring lift.
FIG. 2 is a back isometric bottom left-side view thereof.
FIG. 3 is a top plan view thereof.
FIG. 4 is a bottom plan view thereof.
FIG. 5 is a back-side view thereof.
FIG. 6 is a front-side view thereof.
FIG. 7 is a left-side view thereof; and,
FIG. 8 is a right-side view thereof.
The broken lines in the drawings illustrate portions of the shadow ring lift plate that form no part of the claimed design.

公开(公告)号：US20180197760A1

公开(公告)日：2018-07-12

申请号：US15863295

申请日：2018-01-05

申请人： Applied Materials, Inc.

发明人： Deepak Jadhav ,  Jallepally Ravi ,  Manjunatha Koppa ,  Vinod Konda Purathe ,  Sandesh Yadamane

IPC分类号： H01L21/67 ,  H01J37/32 ,  H01L21/677 ,  H01L21/687

CPC分类号： H01L21/67167 ,  H01J37/32357 ,  H01J37/32449 ,  H01J37/32743 ,  H01J37/32788 ,  H01J37/32816 ,  H01J37/32834 ,  H01J37/32862 ,  H01J37/32889 ,  H01J37/32899 ,  H01L21/67017 ,  H01L21/6719 ,  H01L21/67742 ,  H01L21/68707

摘要： Processing platforms comprising a central transfer station having at least one robot and a dual chamber processing chamber connected to a side of the central transfer station through a gate valve are described. The dual chamber processing chamber comprises a first processing volume and a second processing volume connected to a shared vacuum pump.

公开(公告)号：USD1009817S1

公开(公告)日：2024-01-02

申请号：US29809532

申请日：2021-09-28

申请人： Applied Materials, Inc.

设计人： Zubin Huang ,  Srinivas Tokur Mohana ,  Shreyas Patil Shanthaveeraswamy ,  Sandesh Yadamane ,  Jallepally Ravi ,  Harpreet Singh ,  Manjunatha Koppa

摘要： FIG. 1 is a front isometric top left-side view of a shadow ring lift pin.
FIG. 2 is a front isometric bottom left-side view thereof.
FIG. 3 is a left-side view thereof.
FIG. 4 is a front-side view thereof.
FIG. 5 is a right-side view thereof.
FIG. 6 is a back-side view thereof.
FIG. 7 is a top plan view thereof.
FIG. 8 is a bottom plan view thereof; and,
FIG. 9 is an enlarged partial view of the section 9 shown in FIG. 4.
The broken lines in the drawings illustrate portions of the shadow ring lift pin that form no part of the claimed design.

公开(公告)号：USD997894S1

公开(公告)日：2023-09-05

申请号：US29809534

申请日：2021-09-28

申请人： Applied Materials, Inc.

设计人： Zubin Huang ,  Srinivas Tokur Mohana ,  Shreyas Patil Shanthaveeraswamy ,  Sandesh Yadamane ,  Jallepally Ravi ,  Harpreet Singh ,  Manjunatha Koppa

摘要： FIG. 1 is a back isometric top left-side view of a shadow ring lift assembly.
FIG. 2 is a back isometric bottom left-side view thereof.
FIG. 3 is a top plan view thereof.
FIG. 4 is a bottom plan view thereof.
FIG. 5 is a back-side view thereof.
FIG. 6 is a front-side view thereof.
FIG. 7 is a left-side view thereof; and,
FIG. 8 is a right-side view thereof.
The broken lines in the drawings illustrate portions of the shadow ring lift assembly that form no part of the claimed design.