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公开(公告)号:US20200052137A1
公开(公告)日:2020-02-13
申请号:US16535874
申请日:2019-08-08
发明人: AYMERIC MAROS , FERRAN SUAREZ , JACOB THORP , MICHAEL SHELDON , TING LIU
IPC分类号: H01L31/0304 , H01S5/183 , H01S5/30 , H01L31/02 , H01L31/0232 , H01L31/0725 , H01L31/18 , H01L33/06 , H01L33/00 , H01L33/10 , H01L33/12 , H01L33/32 , H01L33/46 , H01L33/60
摘要: Semiconductor devices and methods of fabricating semiconductor devices having a dilute nitride active layer and at least one semiconductor material overlying the dilute nitride active layer are disclosed. Hybrid epitaxial growth and the use of hydrogen diffusion barrier layers to minimize hydrogen diffusion into the dilute nitride active layer are used to fabricate high-efficiency multijunction solar cells and photonic devices. Hydrogen diffusion barriers can be formed through the use of layer thickness, composition, doping and/or strain.