Particle suppression systems and methods

    公开(公告)号:US11204558B2

    公开(公告)日:2021-12-21

    申请号:US16629349

    申请日:2018-07-18

    Abstract: An object stage that includes a first structure and a second structure movable relative to the first structure. The second structure is configured to support an object. The object stage also includes a seal plate movably coupled to the first structure or the second structure, but not both. Further, the object stage includes an actuator configured to move the seal plate such that a substantially constant gap is defined between the seal plate and the first structure or second structure that is not coupled to the seal plate.

Patent Agency Ranking