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公开(公告)号：US5908981A
公开(公告)日：1999-06-01
申请号：US708446
申请日：1996-09-05
CPC分类号： G01Q20/02 , B82Y35/00 , Y10S977/87 , Y10S977/873
摘要： A deflection sensor for a microcantilever includes two sets of interdigitated fingers, one (reference) set being attached to the substrate from which the microcantilever extends and the other (movable) set being attached to the tip of the microcantilever. Together the interdigitated fingers form an optical phase grating. The deflection of the microcantilever is measured by directing a light beam against the optical phase grating and detecting the intensity of the reflected light in the first (or other) component of the resulting diffraction pattern. As the microcantilever deflects, the reference and movable fingers move relative to one another creating large variations in the intensity of the zeroth and first order components of the diffraction pattern. To eliminate "1/f" noise the deflection of the microcantilever can be measured using an AC signal.
摘要翻译： 用于微悬臂梁的偏转传感器包括两组交叉指状物，一个（参考）组附接到基体上，微型悬臂从该基底延伸，另一组（可移动）组附接到微悬臂梁的尖端。 交叉指状物一起形成光学相位光栅。 通过将光束引导到光学相位光栅并检测所得衍射图案的第一（或其它）分量中的反射光的强度来测量微悬臂梁的偏转。 当微悬臂梁偏转时，参考和可动指状物相对于彼此移动，从而产生衍射图案的第零级和第一级分量的强度的大变化。 为了消除“1 / f”噪声，可以使用AC信号测量微悬臂梁的偏转。
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公开(公告)号：US07451638B1
公开(公告)日：2008-11-18
申请号：US11187991
申请日：2005-07-22
申请人： Ozgur Sahin , Abdullah Atalar , Calvin F. Quate , Olav Solgaard
发明人： Ozgur Sahin , Abdullah Atalar , Calvin F. Quate , Olav Solgaard
IPC分类号： H01J37/00
CPC分类号： G01Q60/38 , G01Q60/34 , G01Q70/10 , Y10S977/873
摘要： A harmonic cantilever for use in an atomic force microscope includes a cantilever arm and a probe tip. The cantilever arm has a shape selected to tune the fundamental resonance frequency or a resonance frequency of a selected higher order mode so that the fundamental and higher-order resonance frequencies have an integer ratio or near integer ratio. In one embodiment, the cantilever arm can be shaped to tune the fundamental resonance frequency. Alternately, the cantilever arm can include a geometric feature for tuning the resonance frequency of the fundamental mode or the selected higher order mode. An imaging method using the harmonic cantilever is disclosed whereby signals at the higher harmonics are measured to determine the material properties of a sample. In other embodiment, a cantilever includes a probe tip positioned at a location of minimum displacement of unwanted harmonics for suppressing signals associated with the unwanted harmonics.
摘要翻译： 用于原子力显微镜的谐波悬臂包括悬臂和探针尖。 悬臂臂具有选择的形状来调谐基本共振频率或所选高阶模式的谐振频率，使得基波和高次谐振频率具有整数比或接近整数比。 在一个实施例中，悬臂可以成形为调谐基本共振频率。 或者，悬臂可以包括用于调谐基本模式或选择的较高阶模式的谐振频率的几何特征。 公开了使用谐波悬臂的成像方法，其中测量高次谐波的信号以确定样品的材料性质。 在另一个实施例中，悬臂包括位于最小位移处的不需要的谐波的探针尖端，用于抑制与不需要的谐波相关联的信号。
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公开(公告)号：US06935167B1
公开(公告)日：2005-08-30
申请号：US10801394
申请日：2004-03-15
申请人： Ozgur Sahin , Abdullah Atalar , Calvin F. Quate , Olav Solgaard
发明人： Ozgur Sahin , Abdullah Atalar , Calvin F. Quate , Olav Solgaard
CPC分类号： G01Q60/38 , G01Q60/34 , G01Q70/10 , Y10S977/873
摘要： A harmonic cantilever for use in a tapping-mode atomic force microscope includes a cantilever arm and a probe tip. The cantilever arm has a shape selected to tune the fundamental resonance frequency or a resonance frequency of a selected higher order mode so that the fundamental and higher-order resonance frequencies have an integer ratio or near integer ratio. In one embodiment, the cantilever arm can be shaped to tune the fundamental resonance frequency. Alternately, the cantilever arm can include a geometric feature for tuning the resonance frequency of the fundamental mode or the selected higher order mode. An imaging method using the harmonic cantilever is disclosed whereby signals at the higher harmonics are measured to determine the material properties of a sample. In other embodiment, a cantilever includes a probe tip positioned at a location of minimum displacement of unwanted harmonics for suppressing signals associated with the unwanted harmonics.
摘要翻译： 用于攻丝模式原子力显微镜的谐波悬臂包括悬臂和探针尖。 悬臂臂具有选择的形状来调谐基本共振频率或所选高阶模式的谐振频率，使得基波和高次谐振频率具有整数比或接近整数比。 在一个实施例中，悬臂可以成形为调谐基本共振频率。 或者，悬臂可以包括用于调谐基本模式或选择的较高阶模式的谐振频率的几何特征。 公开了使用谐波悬臂的成像方法，其中测量高次谐波的信号以确定样品的材料性质。 在另一个实施例中，悬臂包括位于最小位移处的不需要的谐波的探针尖端，用于抑制与不需要的谐波相关联的信号。
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公开(公告)号：US5115414A
公开(公告)日：1992-05-19
申请号：US581721
申请日：1990-09-12
申请人： Abdullah Atalar , Hayrettin Koeymen
发明人： Abdullah Atalar , Hayrettin Koeymen
CPC分类号： G01N29/2487 , G01N29/06 , G01N29/2437 , G10K11/30 , G01N2291/0422
摘要： A conical ultrasonic wave deflection system has an ultrasonic transducer for ultrasonic microscopy using surface waves and/or Lamb waves in an object. A conical wave front is directed onto the object via a deflection element. An inactive axial circular disk is provided between the ultrasonic transducer and the object to minimize unnecessary interference from undeflected waves. A frustoconical lens with a blocked top face, or a conical metal reflector with a ring transducer on the transducer side can be provided as the deflection element. The arrangement is highly compatible with ultrasonic microscopes. Matching to a critical angle .theta. of the object is achieved by selection of the appropriate ultrasonic frequency.
摘要翻译： 锥形超声波偏转系统具有使用物体中的表面波和/或兰姆波的超声波显微镜的超声波换能器。 锥形波前经由偏转元件引导到物体上。 在超声波换能器和物体之间提供无效的轴向圆盘，以最小化来自未偏转波的不必要的干扰。 可以提供具有阻挡顶面的截头圆锥形透镜或者在换能器侧具有环形换能器的锥形金属反射器作为偏转元件。 该装置与超声显微镜高度兼容。 通过选择适当的超声波频率来实现与物体的临界角θ的匹配。
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公开(公告)号：US6070468A
公开(公告)日：2000-06-06
申请号：US842381
申请日：1997-04-23
CPC分类号： G01N29/022 , G10K11/28 , G10K11/36 , G10K15/04 , G01N2291/0421 , G01N2291/0428
摘要： A method is disclosed for selecting characteristics (i.e. thickness-frequency product, length and material) of leakage plates used in ultrasonic transducers that transfer ultrasonic energy via leakage to fluid media with low acoustic impedances. High leakage efficiency and wide bandwidths are achieved by exciting the low order antisymmetric Lamb wave mode (A0) at the selected frequency in the leakage plate. Various actuator configurations that can be used to excite and detect the A0 mode in the leakage plate are described. Some embodiments employ reflector structures to intercept the leaky waves and reform them into beams normal to the plane of the leakage plate.
摘要翻译： 公开了一种用于选择在超声波换能器中使用的泄漏板的特性（即厚度 - 频率乘积，长度和材料）的方法，该超声换能器通过泄漏将超声波能量传递到具有低声阻抗的流体介质。 通过在泄漏板中激励选定频率的低阶反对称兰姆波模式（A0）来实现高泄漏效率和宽带宽。 描述了可用于激发和检测泄漏板中的A0模式的各种致动器配置。 一些实施例采用反射器结构来拦截泄漏波并将其重新变换成垂直于泄漏板的平面的光束。
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6.发明授权公开(公告)号：US06493288B2
公开(公告)日：2002-12-10
申请号：US09728713
申请日：2000-11-30
IPC分类号： H04R1900
摘要： A wide frequency band micromachined microphone including a plurality of micromachined cells of the type including electrodes carried by a membrane supported above a common electrode with conductive lines interconnecting the electrodes is described. A method of operating a microphone array is also described.
摘要翻译： 一种宽频带微机械麦克风，包括多个微加工单元，其类型包括由支撑在公共电极上的膜承载的电极，导电线与互连电极。 还描述了操作麦克风阵列的方法。
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公开(公告)号：US4779241A
公开(公告)日：1988-10-18
申请号：US877752
申请日：1986-06-24
申请人： Abdullah Atalar , Hayrettin Koeymen
发明人： Abdullah Atalar , Hayrettin Koeymen
IPC分类号： G01N29/28 , G01N29/06 , G01N29/24 , G01N29/26 , G10K11/28 , G10K11/30 , G10K11/36 , G10K15/00 , G01S9/68
摘要： An acoustic lens arrangement having at least one transducer for the generation and/or for the reception of a plane acoustic wavefield. The arrangement includes a focusing surface for focusing the acoustic wavefield in an object region and at least one medium for the low-loss transmission of the acoustic wavefield between a transducer, the focusing surface and the object region to be investigated. The longitudinal axis of the focusing surface is inclined relative to the direction of the normal to the acoustic wavefield in such a manner that when the longitudinal axis is positioned normal to the surface of the object region, the acoustic beams incident thereon form a critical angle .theta..sub.R with the normal to the surface of the object.
摘要翻译： 一种具有至少一个用于产生和/或接收平面声波场的换能器的声透镜装置。 该装置包括用于将物体区域中的声波场聚焦的聚焦表面和用于在要调查的换能器，聚焦表面和物体区域之间的声波场的低损耗透射的至少一种介质。 聚焦表面的纵向轴线相对于声波场法线的方向倾斜，使得当纵向轴线垂直于物体区域的表面定位时，入射到其上的声束形成临界角θ R与对象表面的法线正交。
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公开(公告)号：US4706048A
公开(公告)日：1987-11-10
申请号：US712108
申请日：1985-03-15
申请人： Abdullah Atalar
发明人： Abdullah Atalar
CPC分类号： H03H7/38
摘要： Wide-band network for matching a signal-conducting line having a characteristic impedance of 50 ohms to a piezoelectric transmitter having a capacitance C.sub.o and a reactance X.sub.o for a center frequency f.sub.o of the frequency band to be transmitted. Various circuit arrangements and dimensioning rules for the circuit elements are specified as a function of the reactance X.sub.o. The transmitter is a part of an acoustic lens arrangement.
摘要翻译： 宽带网络，用于将具有50欧姆特性阻抗的信号导线与具有要传输的频带的中心频率fo的电容Co和电抗Xo匹配的压电发射机匹配。 电路元件的各种电路布置和尺寸规则被规定为电抗Xo的函数。 发射机是声透镜装置的一部分。
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9.发明授权Method and apparatus for detecting the distance between an object and an ultrasonic objective 失效用于检测物体和超声波物镜之间的距离的方法和装置
公开(公告)号：US4645937A
公开(公告)日：1987-02-24
申请号：US670914
申请日：1984-11-13
摘要： Method and apparatus for detecting the distance between an ultrasonic objective and an object to be imaged in order to prevent contact between the two. For this purpose, light rays, after entering into an immersion means (water) between the objective and the object, being reflected by the object, and emanating from the immersion means are fed through the ultrasonic objective to a photo-receiver and converted into electric signals. The front face of the lens body of the ultrasonic objective is provided with an opaque ring zone. This arrangement makes it possible simultaneously to illuminate the object.
摘要翻译： 用于检测超声波物镜与待成像物体之间的距离的方法和装置，以防止两者之间的接触。 为此目的，在进入物体和物体之间的浸没装置（水）中的光线被物体反射并且从浸没装置发出的光线通过超声波物镜馈送到光接收器并转换成电 信号。 超声波物镜的镜体的前表面设置有不透明的环形区域。 这种布置使得可以同时照亮物体。
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公开(公告)号：US4603585A
公开(公告)日：1986-08-05
申请号：US712110
申请日：1985-03-15
申请人： Abdullah Atalar
发明人： Abdullah Atalar
CPC分类号： G01N29/348 , G01N29/041 , G01N29/0681 , G01N29/221 , G01N29/2456 , G01N29/26 , G01N2291/015 , G01N2291/0423 , G01N2291/0426 , G01N2291/044 , G01N2291/101 , G01N2291/2632
摘要： A method for representing elastic parameters of object surfaces by scanning the object surface with a focused acoustic beam and detection of the interferences between the ultrasonic beams specularly reflected at the object surface and the ultrasonic beams emitted from the object surface after excitation of surface waves in which either two raster-shaped scannings of the object surface are carried out at different focus positions relative to the object surface or successive scannings are carried out with acoustic beams of different frequency. Reflection signals associated with identical raster points form a difference signal which is used for representing the image.
摘要翻译： 一种通过用聚焦声束扫描物体表面来表示物体表面的弹性参数的方法，以及检测在物体表面反射的超声波束和在激发表面波之后从物体表面发射的超声波束之间的干涉的检测，其中 物体表面的两个光栅形扫描在相对于物体表面的不同焦点位置处执行，或者以不同频率的声束执行连续扫描。 与相同光栅点相关联的反射信号形成用于表示图像的差分信号。
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