HIGH UTILIZATION ROTATABLE TARGET USING CERAMIC TITANIUM OXIDE RING
    3.
    发明申请
    HIGH UTILIZATION ROTATABLE TARGET USING CERAMIC TITANIUM OXIDE RING 审中-公开
    使用陶瓷氧化钛环的高利用可旋转目标

    公开(公告)号:US20100300877A1

    公开(公告)日:2010-12-02

    申请号:US12476936

    申请日:2009-06-02

    IPC分类号: C23C14/06 B29C65/48

    摘要: A sputtering target assembly and its manufacturing method are provided for sputtering ceramic material on a substrate. The sputtering target assembly comprises a backing tube having a central portion, a first end and a second end; at least one cylindrical sputtering target member comprising a first ceramic material; and at least one collar comprising a second ceramic material different than the first ceramic material. The cylindrical sputtering target member is coupled to the backing tube at the central portion, and the collar is coupled to the backing tube at an area between one of the first and second ends and the cylindrical sputtering target member. In one embodiment, the sputtering rate of the collar is less than or equal to the sputtering rate of the cylindrical sputtering target member.

    摘要翻译: 溅射靶组件及其制造方法用于在衬底上溅射陶瓷材料。 溅射靶组件包括具有中心部分,第一端和第二端的背衬管; 至少一个圆柱形溅射靶构件,包括第一陶瓷材料; 以及包括不同于第一陶瓷材料的第二陶瓷材料的至少一个轴环。 圆柱形溅射靶构件在中心部分处连接到背衬管,并且套环在第一和第二端之一与圆柱形溅射靶构件之间的区域处联接到背衬管。 在一个实施例中,套环的溅射速率小于或等于圆柱形溅射靶构件的溅射速率。