公开(公告)号：US20170178929A1

公开(公告)日：2017-06-22

申请号：US15321701

申请日：2015-07-09

Applicant: Agency for Science, Technology and Research

Inventor： Vivek CHIDAMBARAM ,  Sunil WICKRAMANAYAKA ,  Jinghui XU ,  Zhipeng DING ,  Li Yan SIOW

IPC: H01L21/50 ,  H01L23/488 ,  B23K35/00

CPC classification number: H01L21/50 ,  B23K35/00 ,  B23K35/002 ,  H01L23/488 ,  H01L25/0652 ,  H01L25/50 ,  H01L2224/94 ,  H01L2225/06513 ,  H01L2225/06541 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method for bonding wafers is provided. The method comprises the steps of providing a first wafer having an exposed first layer, the first layer comprising a first metal; and providing a second wafer having an exposed second layer, the second layer comprising a second metal, the first metal and the second metal capable of forming a eutectic mixture having a eutectic melting temperature. The method further comprises the steps of contacting the first layer with the second layer; and applying a predetermined pressure at a predetermined temperature to form a solid-state diffusion bond between the first layer and the second layer, wherein the predetermined temperature is below the eutectic melting temperature.

公开(公告)号：US20150145374A1

公开(公告)日：2015-05-28

申请号：US14553023

申请日：2014-11-25

Applicant: Agency for Science, Technology and Research

Inventor： Jinghui XU ,  Hongbin YU ,  Liang LOU ,  Alex Yuandong GU

IPC: B06B1/06 ,  H01L41/31 ,  B06B1/02

CPC classification number: B06B1/0644 ,  B06B1/0651 ,  G10K9/122 ,  H01L41/053 ,  H01L41/0973 ,  H01L41/1138 ,  Y10T29/42

Abstract: A transducer is provided, which includes a substrate, wherein a cavity is defined at least partially through the substrate, at least one stopper structure arranged within the cavity, a support layer arranged over the at least one stopper structure and the cavity to seal the cavity, and a piezoelectric functional arrangement arranged on the support layer. According to further embodiments of the present invention, a method for forming a transducer is also provided.

Abstract translation: 提供了一种换能器，其包括基底，其中空腔至少部分地限定穿过基底，布置在空腔内的至少一个塞子结构，布置在至少一个塞子结构和空腔上的支撑层，以密封腔 以及布置在支撑层上的压电功能装置。 根据本发明的另外的实施例，还提供了一种用于形成换能器的方法。

公开(公告)号：US20150304777A1

公开(公告)日：2015-10-22

申请号：US14442800

申请日：2013-12-06

Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH

Inventor： Jinghui XU ,  Julius Ming Lin TSAI

IPC: H04R7/04 ,  H04R29/00 ,  H04R1/00

CPC classification number: H04R29/004 ,  H04R1/04 ,  H04R1/326 ,  H04R3/00 ,  H04R3/005 ,  H04R19/005 ,  H04R31/003 ,  H04R2201/003 ,  H04R2499/11

Abstract: According to embodiments of the present invention, a transducer is provided. The transducer includes a substrate, and a diaphragm suspended from the substrate, wherein the diaphragm is displaceable in response to an acoustic signal impinging on the diaphragm, wherein the transducer is configured, in a first mode of operation, to determine a direction of the acoustic signal based on a first displacement of the diaphragm in the first mode of operation, and to decide to accept or reject the acoustic signal based on at least one predetermined parameter and the determined direction of the acoustic signal, and in a second mode of operation, to sense the acoustic signal based on a second displacement of the diaphragm in the second mode of operation if the acoustic signal is accepted in the first mode of operation.

Abstract translation: 根据本发明的实施例，提供了一种换能器。 所述换能器包括衬底和从所述衬底悬挂的隔膜，其中所述隔膜响应于撞击所述隔膜的声学信号而移位，其中所述换能器被配置为在第一操作模式中以确定所述声学的方向 基于第一操作模式中的振膜的第一位移的信号，并且基于至少一个预定参数和所确定的声信号的方向来决定接受或拒绝声信号，并且在第二操作模式中， 如果在第一操作模式中接受声信号，则基于第二操作模式中的振膜的第二位移来感测声信号。