公开(公告)号：US09455125B2

公开(公告)日：2016-09-27

申请号：US13070115

申请日：2011-03-23

申请人： Akihiro Yoshimura ,  Tetsuji Sato ,  Masato Horiguchi ,  Nobuhiro Wada ,  Makoto Kobayashi ,  Hiroshi Tsujimoto ,  Jun Tamura ,  Mamoru Naoi

发明人： Akihiro Yoshimura ,  Tetsuji Sato ,  Masato Horiguchi ,  Nobuhiro Wada ,  Makoto Kobayashi ,  Hiroshi Tsujimoto ,  Jun Tamura ,  Mamoru Naoi

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  H01J37/32

CPC分类号： H01J37/32091 ,  H01J37/32568

摘要： Disclosed is a substrate processing apparatus capable of suppressing generation of plasma in the space between a moving electrode and an end wall at one side of a cylindrical chamber. The substrate processing apparatus includes a cylindrical chamber to receive a wafer, a shower head movable along a central axis of the chamber inside the chamber, a susceptor opposing the shower head in the chamber, and a flexible bellows connecting the shower head to a cover of the chamber, wherein a high frequency power is applied to a processing space presented between the shower head and the susceptor, processing gas is introduced into the processing space, the shower head and the side wall of the chamber are non-contact to each other, and a bypass member is installed electrically connecting the shower head and the cover or the side wall of the chamber.

摘要翻译： 公开了一种能够抑制在圆筒形室的一侧的移动电极与端壁之间的空间中产生等离子体的基板处理装置。 基板处理装置包括用于容纳晶片的圆柱形室，可沿着室内的室的中心轴线移动的喷头，与腔室中的淋浴喷头相对的基座，以及柔性波纹管，其将淋浴头连接到 所述室，其中向所述淋浴喷头和所述基座之间呈现的处理空间施加高频功率，将处理气体引入所述处理空间中，所述淋浴喷头和所述室的侧壁彼此不接触， 并且旁路部件被安装成电连接淋浴头和盖子或室的侧壁。

公开(公告)号：US08592319B2

公开(公告)日：2013-11-26

申请号：US13167574

申请日：2011-06-23

申请人： Nobuhiro Wada ,  Makoto Kobayashi ,  Hiroshi Tsujimoto ,  Jun Tamura ,  Mamoru Naoi ,  Jun Oyabu

发明人： Nobuhiro Wada ,  Makoto Kobayashi ,  Hiroshi Tsujimoto ,  Jun Tamura ,  Mamoru Naoi ,  Jun Oyabu

IPC分类号： H01L21/3065

CPC分类号： H01J37/04 ,  H01J37/32091 ,  H01J37/3255 ,  H01J37/32568

摘要： A substrate processing apparatus includes a chamber accommodating a wafer, a susceptor disposed inside the chamber and on which the wafer is held, an upper electrode facing the susceptor, and a second high frequency power source connected to the susceptor, wherein the upper electrode is electrically connected to a ground and is moveable with respect to the susceptor. The substrate processing apparatus divides a potential difference between plasma generated in a processing space and the ground into a potential difference between the plasma and a dielectric and a potential difference between the dielectric and the ground by burying the dielectric in the upper electrode, and changes a gap between the upper electrode and the susceptor. Accordingly, plasma density between the upper electrode and the susceptor is changed.

摘要翻译： 基板处理装置包括容纳晶片的室，设置在室内并且晶片保持在其上的基座，与基座相对的上电极和连接到基座的第二高频电源，其中上电极电 连接到地面并且可相对于基座移动。 基板处理装置将处理空间中产生的等离子体和地面之间的等离子体与电介质之间的电位差和电介质与地之间的电位差通过上电极中的电介质分离，并将a 上电极和基座之间的间隙。 因此，改变了上电极和基座之间的等离子体密度。

公开(公告)号：US08383000B2

公开(公告)日：2013-02-26

申请号：US12958877

申请日：2010-12-02

申请人： Hiroshi Tsujimoto ,  Makoto Kobayashi ,  Jun Tamura ,  Nobuhiro Wada

发明人： Hiroshi Tsujimoto ,  Makoto Kobayashi ,  Jun Tamura ,  Nobuhiro Wada

IPC分类号： G01L21/30 ,  G01R31/00

CPC分类号： G01B21/16 ,  H01J37/32091 ,  H01J37/32568 ,  H01L21/68742

摘要： A distance between electrodes can be accurately measured by using a lifter. A substrate processing apparatus includes an upper electrode 120 and a lower electrode 310 facing each other within a processing chamber 102; a lift pin 332 that is protrusible from and retractable below the lower electrode and lifts up a substrate mounted on the lower electrode to be separated from the lower electrode; a lifter 330 that elevates the lift pin up and down; and a controller 400 that elevates the lift pin upward and brings the lift pin into contact with the upper electrode by driving the lifter while the substrate is not mounted on the lower electrode and measures a distance between the electrodes based on a moving distance of the lifter.

摘要翻译： 可以通过使用升降器来精确地测量电极之间的距离。 基板处理装置包括在处理室102内彼此面对的上电极120和下电极310; 升降销332，其能够从下部电极下方伸出并收缩，并提升安装在下部电极上的与下部电极分离的基板; 升降器330，其升降销升降; 以及控制器400，其通过驱动升降器而将升降销向上升高并使提升销与上电极接触，同时基板未安装在下电极上并且基于升降器的移动距离来测量电极之间的距离 。

公开(公告)号：US20110132873A1

公开(公告)日：2011-06-09

申请号：US12958877

申请日：2010-12-02

申请人： Hiroshi Tsujimoto ,  Makoto Kobayashi ,  Jun Tamura ,  Nobuhiro Wada

发明人： Hiroshi Tsujimoto ,  Makoto Kobayashi ,  Jun Tamura ,  Nobuhiro Wada

IPC分类号： H01L21/02 ,  B05C11/00 ,  C23F1/00 ,  C23C16/52

CPC分类号： G01B21/16 ,  H01J37/32091 ,  H01J37/32568 ,  H01L21/68742

摘要： A distance between electrodes can be accurately measured by using a lifter. A substrate processing apparatus includes an upper electrode 120 and a lower electrode 310 facing each other within a processing chamber 102; a lift pin 332 that is protrusible from and retractable below the lower electrode and lifts up a substrate mounted on the lower electrode to be separated from the lower electrode; a lifter 330 that elevates the lift pin up and down; and a controller 400 that elevates the lift pin upward and brings the lift pin into contact with the upper electrode by driving the lifter while the substrate is not mounted on the lower electrode and measures a distance between the electrodes based on a moving distance of the lifter.

摘要翻译： 可以通过使用升降器来精确地测量电极之间的距离。 基板处理装置包括在处理室102内彼此面对的上电极120和下电极310; 升降销332，其能够从下部电极下方伸出并收缩，并提升安装在下部电极上的与下部电极分离的基板; 升降器330，其升降销升降; 以及控制器400，其通过驱动升降器而将升降销向上升高并使提升销与上电极接触，同时基板未安装在下电极上并且基于升降器的移动距离来测量电极之间的距离 。

公开(公告)号：US09242201B2

公开(公告)日：2016-01-26

申请号：US14241029

申请日：2012-08-30

申请人： Li Bao ,  Makoto Kobayashi ,  Jun Morita ,  Tatsumi Sakano ,  Osamu Kitayama ,  Satoshi Hara ,  Hitoshi Niinuma

发明人： Li Bao ,  Makoto Kobayashi ,  Jun Morita ,  Tatsumi Sakano ,  Osamu Kitayama ,  Satoshi Hara ,  Hitoshi Niinuma

IPC分类号： B01D46/52 ,  B01D39/16 ,  B01D46/54 ,  B32B5/02 ,  B32B5/26 ,  B32B7/12

CPC分类号： B01D46/523 ,  B01D39/16 ,  B01D39/1623 ,  B01D39/1692 ,  B01D46/52 ,  B01D46/521 ,  B01D46/54 ,  B01D46/543 ,  B32B5/022 ,  B32B5/26 ,  B32B7/12 ,  B32B2262/0238 ,  B32B2262/0253 ,  B32B2262/0261 ,  B32B2262/0284 ,  B32B2262/0292 ,  B32B2307/724

摘要： A filter medium for an air filter collecting dust in an air flow has a principal collection layer including a porous polytetrafluoroethylene film. A surface of the filter medium is provided with a plurality of embossed projections. Preferably, a processed filter medium maintains a zigzag shape by pleating an unprocessed filter medium to create mountain folds and valley folds. Preferably, an air filter unit includes such a processed filter medium and a frame body holding the processed filter medium.

摘要翻译： 用于收集空气流中的灰尘的空气过滤器的过滤介质具有包括多孔聚四氟乙烯膜的主要收集层。 过滤介质的表面设置有多个压花突起。 优选地，加工的过滤介质通过打褶未加工的过滤介质来保持锯齿形，以产生山褶皱和谷折。 优选地，空气过滤器单元包括这种处理的过滤介质和保持处理的过滤介质的框体。

公开(公告)号：US08957352B2

公开(公告)日：2015-02-17

申请号：US13533291

申请日：2012-06-26

申请人： Makoto Kobayashi

发明人： Makoto Kobayashi

IPC分类号： H05B3/06 ,  H01L21/67 ,  F27D5/00

CPC分类号： H01L21/67103 ,  H01L21/67109

摘要： Provided is a heat treatment furnace, which includes a processing vessel configured to accommodate at least one object to be processed, a heat insulating member configured to cover a periphery of the processing vessel, and a heating unit configured to be arranged along an inner peripheral surface of the heat insulating member. The heat insulating member includes an inner heat insulating member and an outer heat insulating member formed independently of the inner heat insulating member. The outer heat insulating member contains a finely-powdered compressed silica material, and at least an outer surface thereof is covered with an anti-scattering member configured to prevent the finely-powdered compressed silica material from being scattered.

摘要翻译： 本发明提供一种热处理炉，其包括配置成容纳至少一个待处理物体的处理容器，构造成覆盖处理容器周围的绝热构件和构造成沿着内周面 的绝热构件。 绝热构件包括内绝热构件和独立于内绝热构件形成的外绝热构件。 外绝热构件包含细粉状压缩二氧化硅材料，并且至少其外表面覆盖有防止粉碎的压缩二氧化硅材料分散的抗散射构件。

公开(公告)号：US08915672B2

公开(公告)日：2014-12-23

申请号：US13376146

申请日：2010-06-04

申请人： Hirofumi Inagaki ,  Yasuhiro Iida ,  Keiji Kanai ,  Makoto Kobayashi ,  Akira Sakaguchi ,  Taro Arikawa ,  Hirohide Kimura ,  Hisanobu Nagatomo ,  Kazuyoshi Kihara

发明人： Hirofumi Inagaki ,  Yasuhiro Iida ,  Keiji Kanai ,  Makoto Kobayashi ,  Akira Sakaguchi ,  Taro Arikawa ,  Hirohide Kimura ,  Hisanobu Nagatomo ,  Kazuyoshi Kihara

IPC分类号： E02B3/06

CPC分类号： E02B3/06 ,  Y02A10/15

摘要： The present invention provides a movable breakwater that can do with a small amount of compressed air supplied to raise the buoyant steel pipe. The buoyant steel pipe 6 includes a buoyancy tank 6d in which gas is filled, an air chamber 6e provided above the buoyancy tank 6d, a penetration pipe 19 that penetrates through the buoyancy tank 6d and feeds compressed air supplied from a pressure accumulator tank 13 to the air chamber 6e, and an open chamber 6f, whose top side is open, provided above the air chamber 6e and in the buoyant steel pipe 6 at the upper end portion thereof.

摘要翻译： 本发明提供一种可移动防波堤，其可以用少量供应的压缩空气来提升浮力钢管。 浮力钢管6包括填充有气体的浮力槽6d，设置在浮力罐6d上方的空气室6e，贯通浮力罐6d并从压力容器13供给的压缩空气的贯通管19， 空气室6e和顶侧敞开的开放室6f，设置在空气室6e的上方和上端部的浮力钢管6中。

公开(公告)号：US20140047995A1

公开(公告)日：2014-02-20

申请号：US13985542

申请日：2011-12-08

申请人： Makoto Kobayashi

发明人： Makoto Kobayashi

IPC分类号： B61B3/00

CPC分类号： B61B3/00 ,  H01L21/67733

摘要： An overhead transport vehicle comprises a travelling unit that travels on a rail, a conveying unit that moves and conveys an article and a swing inhibiting member that moves between a pushing position and a retracting position. The swing inhibiting members includes a pushing member that pushes a side surface of the article, lever members that support the pushing member at a first end side and are pivotally supported by the conveying unit at a second end side, and a biasing member that biases the pushing member toward the article. The pushing member includes a main body member pivotally supported by the lever members, slide members slidably supported by a main body member, and elastic bodies arranged between the main body member and the slide member that slide elastically the slide member.

摘要翻译： 架空运输车辆包括在轨道上行进的行进单元，移动和运送物品的输送单元和在推动位置和缩回位置之间移动的摆动禁止构件。 摆动抑制构件包括：推动构件的侧面的推动构件，在第一端侧支撑推动构件的杆构件，并且在第二端侧由输送单元枢转地支撑;以及偏压构件， 推动会员朝向文章。 推动构件包括由杠杆构件可枢转地支撑的主体构件，由主体构件可滑动地支撑的滑动构件，以及布置在主体构件和滑动构件之间弹性滑动滑动构件的弹性体。

公开(公告)号：US08351608B2

公开(公告)日：2013-01-08

申请号：US12434389

申请日：2009-05-01

申请人： Makoto Kobayashi

发明人： Makoto Kobayashi

IPC分类号： H04L9/00

CPC分类号： G06F21/10 ,  G06F2221/0777 ,  H04L2209/603

摘要： When a function inactivation process is instructed on an MFP A, all the functions are inactivated and a function inactivation certification key is issued, and then resources related to the functions are transmitted to an MFP-B. When reception of the resources is completed on the MFP-B, a function duplication completion certification key is issued. When these keys are input to a licensing server, a database is updated, and a function activation key is issued. When the function activation key is input to the MFP B, the functions related to the transmitted resources are carried out.

摘要翻译： 当在MFP A上指示功能失活过程时，所有功能都被禁用，并且发出功能失效认证密钥，然后将与功能相关的资源传送到MFP-B。 当在MFP-B上完成对资源的接收时，发出功能复制完成认证密钥。 当这些密钥输入到许可服务器时，更新数据库，并发出功能激活密钥。 当功能激活键被输入到MFP B时，执行与传送的资源相关的功能。

公开(公告)号：US20120098853A1

公开(公告)日：2012-04-26

申请号：US13276377

申请日：2011-10-19

申请人： Makoto Kobayashi ,  Takaaki Ozawa

发明人： Makoto Kobayashi ,  Takaaki Ozawa

IPC分类号： G09G5/00 ,  G09G5/02

CPC分类号： G03B21/006 ,  H04N9/317 ,  H04N9/3185

摘要： A projector including: a light source; a light modulation device modulating a light emitted from the light source in accordance with an image signal for each of colored lights for color display; a projection optical system projecting each of the colored lights modulated by the light modulation device; an operation accepting section; a registration adjustment section performing correction of the image signal corresponding to each of the colored lights based on an operation accepted by the operation accepting section so that a displacement occurring in at least one of a horizontal direction and a vertical direction in a projection screen between the colored lights is reduced, and supply the light modulation device with the image signal corrected if the displacement occurs; and a correction direction display control section displaying a correction direction, in which the correction of the image signal is performed, as an icon indicating a direction.

摘要翻译： 一种投影仪，包括：光源; 光调制装置，根据用于彩色显示的每个彩色光的图像信号调制从光源发射的光; 投影光学系统，其投射由所述光调制装置调制的各色光; 操作接受部; 登记调整部，基于由操作接受部接受的操作，对与各个着色光对应的图像信号进行校正，使得在投影画面中的水平方向和垂直方向中的至少一个处发生位移 减少彩色光，并且如果发生位移，则向光调制装置提供校正的图像信号; 以及校正方向显示控制部分，显示执行图像信号的校正的校正方向作为指示方向的图标。