公开(公告)号：US5393977A

公开(公告)日：1995-02-28

申请号：US69573

申请日：1993-06-01

申请人： Akimitsu Okura ,  Mitsugu Sato ,  Osamu Yamada ,  Yasushi Nakaizumi ,  Eiichi Hazaki

发明人： Akimitsu Okura ,  Mitsugu Sato ,  Osamu Yamada ,  Yasushi Nakaizumi ,  Eiichi Hazaki

IPC分类号： H01J37/22 ,  G01Q30/02 ,  G01Q30/04 ,  G01Q60/10 ,  H01J37/252 ,  H01J37/26 ,  H01J37/28

CPC分类号： H01J37/265

摘要： A specimen is scanned with an electron beam so as to generate a signal characteristic of the specimen to thereby produce an image thereof on the basis of the generated signal. A memory is provided for storing operating conditions of a scanning electron microscope which are associated with identification information for specifying the specimen. The identification information is designated so that thereby at least one operating condition corresponding to the designated identification information is read out from the memory, and the read out operating condition is automatically set so that the scanning electron microscope is operated under the set operating condition.

摘要翻译： 用电子束扫描样本，以产生样本的信号特征，从而根据产生的信号产生图像。 提供了一种存储器，用于存储与用于指定样本的识别信息相关联的扫描电子显微镜的操作条件。 指定识别信息，从而从存储器读出与指定的识别信息相对应的至少一个操作条件，并且自动设置读出操作条件，使得扫描电子显微镜在设定的操作条件下操作。

公开(公告)号：US5256876A

公开(公告)日：1993-10-26

申请号：US696787

申请日：1991-05-07

申请人： Eiichi Hazaki ,  Osamu Yamada ,  Yasushi Nakaizumi ,  Shigeyuki Hosoki ,  Sumio Hosaka ,  Akira Hashimoto

发明人： Eiichi Hazaki ,  Osamu Yamada ,  Yasushi Nakaizumi ,  Shigeyuki Hosoki ,  Sumio Hosaka ,  Akira Hashimoto

IPC分类号： G01B7/34 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q30/02 ,  G01Q60/10 ,  H01J37/20 ,  H01J37/28

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q30/02 ,  Y10S977/861

摘要： A scanning tunnel microscope comprising: a SEM stage provided in a specimen chamber of a SEM and having a mechanism for moving in a two dimensional manner along a surface perpendicular to an electron beam; a specimen stage provided on the SEM stage and provided with a mechanism for holding a specimen so that a surface of the specimen makes an angle of 45.degree. with the electron beam and for moving the specimen in a two dimensional manner in directions of the specimen surface; an STM scanning mechanism provided on the SEM stage and provided with a probe held perpendicularly to the specimen surface, a coarse movement mechanism for making the probe approach to a position at a desired distance from the specimen surface, and a probe fine movement mechanism for making the probe scan along the specimen surface; and a display unit for displaying an image by the SEM together with an image of the probe on the basis of signal obtained from a secondary electron detector provided in a specimen chamber and for displaying an image by the STM on the basis of signals from the probe fine movement mechanism.

公开(公告)号：US5081353A

公开(公告)日：1992-01-14

申请号：US653245

申请日：1991-02-11

申请人： Osamu Yamada ,  Yasushi Nakaizumi ,  Eiichi Hazaki

发明人： Osamu Yamada ,  Yasushi Nakaizumi ,  Eiichi Hazaki

IPC分类号： G01B7/34 ,  G01N37/00 ,  G01Q10/00 ,  G01Q30/02 ,  G01Q60/10 ,  H01J37/28

CPC分类号： G01Q30/02 ,  B82Y35/00 ,  G01Q10/06 ,  G01Q30/04 ,  G01Q60/16 ,  H01J37/28 ,  Y10S977/861

摘要： A sample is mounted on a support table adjacent a probe of a scanning tunnelling microscope, the support table permitting the sample to move relative to the probe. The probe is also movable in a direction generally perpendicular to the sample surface, between a withdrawn position and a scanning separation. A scanning electron microscope is located adjacent the sample and probe, and its electron beam scans both the sample and the probe and generates an image on a display from electrons from the sample detected by a detector. In order that that operator can position the probe on a target of a sample, for scanning by the probe, a marker is generated on the display by a graphics display unit, which marker indicates the probe-to-sample separation and preferably indicates the probe-to-sample approach point and the direction of movement of the probe towards the sample. The graphics display unit may alternatively, or in addition, generate a marker representing the scan area of the probe when it is moved to a scanning separation from the sample.

公开(公告)号：US6031235A

公开(公告)日：2000-02-29

申请号：US339300

申请日：1999-06-24

申请人： Yasuhiko Ishida ,  Minoru Hiroki ,  Toshiaki Kobari ,  Osamu Satou ,  Yasushi Nakaizumi ,  Akimitsu Okura ,  Hideiti Kimura

发明人： Yasuhiko Ishida ,  Minoru Hiroki ,  Toshiaki Kobari ,  Osamu Satou ,  Yasushi Nakaizumi ,  Akimitsu Okura ,  Hideiti Kimura

IPC分类号： C09K3/10 ,  F16J15/10 ,  F16K51/02 ,  G01N23/00

CPC分类号： F16K51/02

摘要： A vacuum container is evacuated to be kept at an ultra-high vacuum. Valve means is provided for connecting and disconnecting the inside of the vacuum container with and from the outside thereof, and includes a vacuum-tight seal made of a high polymer having a water absorptivity of 0.1% and less and an outgassing rate of 2.times.10.sup.-6 (Torr.multidot.l/sec/cm.sup.2 :at 200.degree. C.) and less.

摘要翻译： 将真空容器抽真空以保持在超高真空度。 提供阀装置用于将真空容器的内部与外部连接和断开，并且包括由具有0.1％以下的吸水率和2×10 -6以下的吸气率的高聚物制成的真空密封 （Torrxl / sec / cm 2：200℃）以下。

公开(公告)号：US20080116665A1

公开(公告)日：2008-05-22

申请号：US10589667

申请日：2005-02-14

申请人： Yasushi Nakaizumi ,  Hiroshi Kayukawa

发明人： Yasushi Nakaizumi ,  Hiroshi Kayukawa

IPC分类号： B60B35/10

CPC分类号： B62K5/01 ,  B60G2300/40 ,  B62D21/14 ,  B62D31/006 ,  B62K15/00 ,  B62K17/00

摘要： The front wheels of the vehicle having an adjustable wheel base are joined to the front portion of a main frame, on which a vehicle seat is mounted. The upper ends of a pair of rotating arms are rotatably joined to the main frame. The lower ends of the rotating arms are rotatably joined to the rear wheels. The upper arms and the lower arm are provided rotatably connected together such that the main frame and the rear wheels are joined at the back of the rotating arms. The operating portion of the operating apparatus, on which the main frame is installed, is joined via the operating links to the rotating arms. By operating the operating apparatus, the rotating arms are rotated by the operating links and the rear wheels are moved with respect to the front wheels. Simultaneously, the inclination of the main frame is changed.

摘要翻译： 具有可调节车轮底座的车辆的前轮与安装有车辆座椅的主框架的前部接合。 一对旋转臂的上端可旋转地接合到主框架。 旋转臂的下端可旋转地接合到后轮。 上臂和下臂设置为可旋转地连接在一起，使得主框架和后轮在旋转臂的后部接合。 安装有主框架的操作装置的操作部分经由操作连杆连接到旋转臂。 通过操作操作装置，旋转臂通过操作连杆旋转，后轮相对于前轮移动。 同时，改变主框架的倾斜度。

公开(公告)号：US4059783A

公开(公告)日：1977-11-22

申请号：US758794

申请日：1977-01-12

申请人： Yasushi Nakaizumi ,  Yukichi Ueno ,  Masahide Okumura

发明人： Yasushi Nakaizumi ,  Yukichi Ueno ,  Masahide Okumura

IPC分类号： H01J1/304 ,  H01J1/30 ,  H01J37/073 ,  H01J37/24 ,  H05B41/36 ,  H02H7/20

CPC分类号： H01J37/073 ,  H01J37/243

摘要： An electron producing apparatus of the field emission type wherein instantaneous values of an emitted current are sequentially measured to store a relative minimum value of the emitted current which is obtained in such a manner that one instantaneous value which is stored is then replaced by another instantaneous value which is even smaller in magnitude than the previously stored one, and at the same time the instantaneous values are sequentially compared with the stored relative minimum value so that the electron producing apparatus is deenergized when an instantaneous value assumes a certain magnitude relative to the stored relative minimum value.

摘要翻译： 一种场发射型的电子产生装置，其中顺序地测量发射电流的瞬时值，以存储所发射电流的相对最小值，所述相对最小值以使得存储的一个瞬时值被另一瞬时值替换的方式获得 其幅度比先前存储的幅度更小，并且同时将瞬时值顺序地与所存储的相对最小值进行比较，使得当瞬时值相对于所存储的相对值为一定幅度时，电子产生装置被断电 最小值。

公开(公告)号：US4658136A

公开(公告)日：1987-04-14

申请号：US828309

申请日：1985-12-06

申请人： Tadashi Ohtaka ,  Yasushi Nakaizumi ,  Katsuhiro Kuroda

发明人： Tadashi Ohtaka ,  Yasushi Nakaizumi ,  Katsuhiro Kuroda

IPC分类号： G01N23/225 ,  H01J37/244

CPC分类号： H01J37/244 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/24507

摘要： The present invention relates to an apparatus for detecting the secondary electrons which are obtained from a sample (4) when the sample is irradiated with an electron beam (2). When this electron beam (2) is subjected to a low acceleration voltage, it is desirable to detect the secondary electrons efficiently without interfering with the deflection of the electron beam (2). In order to solve this subject matter, there is used a means (7) for generating an electric field and a magnetic field which are so perpendicular to each other that they apply deflecting forces in the direction common to the secondary electrons while applying no deflecting force to the electron beam as a whole.

摘要翻译： PCT No.PCT / JP85 / 00170 Sec。 371日期1985年12月6日第 102（e）1985年12月6日PCT PCT。 公开号WO85 / 04757 1985年10月24日的日期。本发明涉及一种当用电子束（2）照射样品时从样品（4）获得的用于检测二次电子的装置。 当该电子束（2）经受低加速电压时，期望在不干扰电子束（2）的偏转的情况下有效地检测二次电子。 为了解决这个问题，使用了一种用于产生彼此垂直的电场和磁场的装置（7），它们在不施加偏转力的同时施加与二次电子共同的方向的偏转力 作为整体的电子束。