利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

23 条记录 (耗时 0.032 秒)

    Substrate transport container
    1.
    发明授权
    Substrate transport container 失效
    基材运输容器

    公开(公告)号：US06770109B2

    公开(公告)日：2004-08-03

    申请号：US10094615

    申请日：2002-03-12

    申请人： Akira Tanaka ,  Kazuo Okubo ,  Yoko Suzuki

    发明人： Akira Tanaka ,  Kazuo Okubo ,  Yoko Suzuki

    IPC分类号： B65D8500

    CPC分类号： H01L21/67772 ,  H01L21/67393

    摘要： A substrate transport container having a carrier box including a container body and a door hermetically sealably covering an opening provided in the front of the container body. Partitions form a circulating flow path in the carrier box. The circulating flow path has a flow path in which air flows toward substrates and a flow path in which air flows toward a fan. A substrate carrying section is disposed in the flow path in which air flows toward the substrates to carry the substrates in such a way that the principal surfaces of the substrates are approximately parallel to the flow path in which air flows toward the substrates. A particle removing filter and a gaseous impurity trapping filter are placed on the upstream side of the substrate carrying section in the flow path in which air flows toward the substrates. A fan motor for driving the fan is incorporated in the carrier box to form an air current for circulating through the circulating flow path.

    摘要翻译： 一种基材输送容器，其具有载体盒，该载体盒包括容器主体和门，其密封地密封地覆盖设置在容器主体前部的开口。 分区在载体箱中形成循环流动路径。 循环流路具有空气朝向基板流动的流路和空气朝向风扇流动的流路。 衬底承载部分设置在空气朝向衬底流动的流动路径中，以便衬底的主表面近似平行于空气流向衬底的流动路径。 颗粒去除过滤器和气态杂质捕获过滤器被放置在空气流向基板的流动路径中的基板承载部分的上游侧。 用于驱动风扇的风扇电动机被并入载体箱中以形成用于循环通过循环流路的气流。

    Substrate container and method of dehumidifying substrate container
    2.
    发明授权
    Substrate container and method of dehumidifying substrate container 失效
    底物容器及基体容器除湿方法

    公开(公告)号：US06547953B2

    公开(公告)日：2003-04-15

    申请号：US09769308

    申请日：2001-01-26

    申请人： Yoko Suzuki ,  Akira Tanaka ,  Kazuo Okubo

    发明人： Yoko Suzuki ,  Akira Tanaka ,  Kazuo Okubo

    IPC分类号： B01D5326

    CPC分类号： H01L21/67772 ,  H01L21/67366 ,  H01L21/67393

    摘要： A substrate container includes a container housing having an opening for storing a substrate therethrough and a cover sealingly covering the opening, a fan motor mounted in the container housing for producing a circulating path of air in contact with the substrate in the container housing, and a particle removing filter and a gaseous impurity trapping filter which are disposed in the a portion of the circulating path which extends toward the substrate. A dehumidifying unit for dehumidifying a space in the container housing comprises a solid polymer electrolyte film disposed in the circulating path and voltage applying means for applying a voltage to the solid polymer electrolyte film to decompose water in air flowing in the circulating path thereby to dehumidify a space in the container housing.

    摘要翻译： 基板容器包括容器壳体，其具有用于存储基板的开口和密封地覆盖开口的盖，安装在容器壳体中的风扇马达，用于产生与容器壳体中的基板接触的空气的循环路径，以及 颗粒去除过滤器和气态杂质捕集过滤器，其设置在朝向衬底延伸的循环路径的一部分中。 用于除湿容器壳体中的空间的除湿单元包括设置在循环路径中的固体聚合物电解质膜和用于向固体聚合物电解质膜施加电压以分解在循环路径中流动的空气中的水的电压施加装置，从而除湿 容器外壳空间。

    Substrate transport container
    3.
    发明授权
    Substrate transport container 失效
    基材运输容器

    公开(公告)号：US06364922B1

    公开(公告)日：2002-04-02

    申请号：US09611669

    申请日：2000-07-06

    申请人： Akira Tanaka ,  Kazuo Okubo ,  Yoko Suzuki

    发明人： Akira Tanaka ,  Kazuo Okubo ,  Yoko Suzuki

    IPC分类号： B65D8538

    CPC分类号： H01L21/67772 ,  H01L21/67393

    摘要： A substrate transport container having a carrier box including a container body and a door hermetically sealably covering an opening provided in the front of the container body. Partitions form a circulating flow path in the carrier box. The circulating flow path has a flow path in which air flows toward substrates and a flow path in which air flows toward a fan. A substrate carrying section is disposed in the flow path in which air flows toward the substrates to carry the substrates in such a way that the principal surfaces of the substrates are approximately parallel to the flow path in which air flows toward the substrates. A particle removing filter and a gaseous impurity trapping filter are placed on the upstream side of the substrate carrying section in the flow path in which air flows toward the substrates. A fan motor for driving the fan is incorporated in the carrier box to form an air current for circulating through the circulating flow path.

    摘要翻译： 一种基材输送容器，其具有载体盒，该载体盒包括容器主体和门，其密封地密封地覆盖设置在容器主体前部的开口。 分区在载体箱中形成循环流动路径。 循环流路具有空气朝向基板流动的流路和空气朝向风扇流动的流路。 衬底承载部分设置在空气朝向衬底流动的流动路径中，以便衬底的主表面近似平行于空气流向衬底的流动路径。 颗粒去除过滤器和气态杂质捕获过滤器被放置在空气流向基板的流动路径中的基板承载部分的上游侧。 用于驱动风扇的风扇电动机被并入载体箱中以形成用于循环通过循环流路的气流。

    Substrate transport apparatus, pod and method
    4.
    发明授权
    Substrate transport apparatus, pod and method 失效
    基板运输装置，吊架和方法

    公开(公告)号：US06758876B2

    公开(公告)日：2004-07-06

    申请号：US10000304

    申请日：2001-12-04

    申请人： Yoko Suzuki ,  Akira Tanaka ,  Takashi Kishi

    发明人： Yoko Suzuki ,  Akira Tanaka ,  Takashi Kishi

    IPC分类号： B01D4600

    CPC分类号： H01L21/67366 ,  H01L21/67017 ,  H01L21/67379 ,  H01L21/67393 ,  H01L21/67396 ,  H01L21/67772 ,  H01L21/67775

    摘要： A method of using a substrate transport pod is provided, which is suitable for manufacturing semiconductor devices with copper wiring and low dielectric insulating film having dielectric constants of less than 3. The method is based on loading the substrates into a pod from an atmosphere of a first process, and circulating a gaseous atmosphere through interior of the pod in such a way to selectively remove at least one contaminant including moisture, particulate substances or chemical substances, and to expose the substrates to a controlled atmosphere intermittently or continually while the substrates are held in the pod before they are unloaded from the pod and introduced into a second process. For a pod that is used to house the substrates for the purpose of retaining or transporting, the pod has a pod main body and a door that provides a hermetic sealing seal, and the pod is made primarily of a materiel that has moisture absorption factor of less than 0.1%, a the pod can contact the substrates directly or indirectly and has a conductive area so as to enable static charges to be guided out of the pod.

    摘要翻译： 提供了一种使用基板传输盒的方法，其适用于制造具有铜布线的半导体器件和具有小于3的介电常数的低介电绝缘膜。该方法基于将基板从 第一工序，并且通过荚的内部循环气体气氛以选择性地去除至少一种包含水分，颗粒物质或化学物质的污染物，并且在保持基板的同时将基板间断地或连续地暴露于可控气氛 在pod中，从pod中卸载并引入第二个进程。 对于用于容纳基材以保持或运输的荚，荚具有荚主体和提供气密密封的门，荚主要由具有湿气吸收系数的材料制成 小于0.1％，荚可以直接或间接接触衬底，并具有导电区域，以使静电荷能够被引导出荚。

    Gas removal method and gas removal filter
    5.
    发明授权
    Gas removal method and gas removal filter 失效
    气体去除方法和气体去除过滤器

    公开(公告)号：US06723151B2

    公开(公告)日：2004-04-20

    申请号：US10254537

    申请日：2002-09-26

    申请人： Akira Tanaka ,  Yoko Suzuki ,  Takashi Kishi

    发明人： Akira Tanaka ,  Yoko Suzuki ,  Takashi Kishi

    IPC分类号： B01D5304

    CPC分类号： B01D53/0454

    摘要： A gas removal filter has an ion exchanger for adsorbing a gas and at least a pair of electric resistance measuring electrodes disposed on the ion exchanger. By measuring a change in the electric resistance between at least the pair of electric resistance measuring electrodes disposed on the ion exchanger, it is possible to estimate an ion exchange group consumption ratio of the ion exchanger. The ion exchange group consumption ratio of the ion exchanger can be detected in a short period of time, and a remaining adsorption capability of the ion exchanger can be known with ease.

    摘要翻译： 气体去除过滤器具有用于吸附气体的离子交换器和设置在离子交换器上的至少一对电阻测量电极。 通过测量设置在离子交换器上的至少一对电阻测量电极之间的电阻变化，可以估计离子交换组的离子交换组消耗比。 可以在短时间内检测离子交换剂的离子交换组消耗比，容易地知道离子交换剂的剩余吸附能力。