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    READING DEVICE FOR A RECORD CARRIER
    1.
    发明申请
    READING DEVICE FOR A RECORD CARRIER 审中-公开
    用于记录载体的读取装置

    公开(公告)号：US20090296556A1

    公开(公告)日：2009-12-03

    申请号：US11721495

    申请日：2005-12-15

    申请人： Alexander Marc Van Der Lee ,  Willem Marie Julia Marcel Coene ,  Andries Pieter Hekstra

    发明人： Alexander Marc Van Der Lee ,  Willem Marie Julia Marcel Coene ,  Andries Pieter Hekstra

    IPC分类号： G11B7/00

    CPC分类号： G11B7/1369 ,  G11B7/1353 ,  G11B7/14

    摘要： The invention provides an efficient reading device in which, even if one radiation beam should fail, no information is lost and the information can still be read out without time-consuming recurring operations. The present invention solves this problem by providing a reading device (FIG. 5A) and a means (FIG. 4) for forming read-out spots (A, B, C, D, E) that are built up by multiple radiation beams from the radiation source (4). This has the advantage that each read-out spot will have energy contributions from different radiation beams and, should one radiation beam break down, the intensity of some of the read-out spots may indeed diminish, but the information can still be read out thanks to the contributions from other radiation beams.

    摘要翻译： 本发明提供了一种有效的读取装置，其中即使一个辐射束发生故障，也不会丢失信息，并且仍然可以读出信息而不需要耗费时间的循环操作。 本发明通过提供一种用于形成由多个辐射束构成的读出点（A，B，C，D，E）的读取装置（图5A）和装置（图4）来解决这个问题， 辐射源（4）。 这具有的优点是，每个读出的点将具有来自不同辐射束的能量贡献，并且如果一个辐射束分解，一些读出点的强度可能确实减小，但是仍然可以读出信息 对其他辐射束的贡献。

    Coder and a Method of Coding For Codes With a Parity-Complementary Word Assignment Having a Constraint of D1=,R=2
    2.
    发明申请
    Coder and a Method of Coding For Codes With a Parity-Complementary Word Assignment Having a Constraint of D1=,R=2 有权
    编码器和编码代码的方法，其中具有约束D1 =，R = 2的奇偶互补字分配

    公开(公告)号：US20090015446A1

    公开(公告)日：2009-01-15

    申请号：US12097570

    申请日：2006-12-08

    申请人： Willem Marie Julia Marcel Coene ,  Andries Pieter Hekstra ,  Hiroyuki Yamagishi ,  Makoto Noda

    发明人： Willem Marie Julia Marcel Coene ,  Andries Pieter Hekstra ,  Hiroyuki Yamagishi ,  Makoto Noda

    IPC分类号： H03M7/00

    CPC分类号： G11B20/1426 ,  G11B20/10055 ,  G11B20/10296 ,  G11B2020/1453 ,  G11B2020/1457 ,  H03M5/145 ,  H03M7/40 ,  H03M13/29 ,  H03M13/31 ,  H03M13/3761 ,  H03M13/3972 ,  H03M13/41

    摘要： Presently known d=1 codes have long trains consisting of consecutive 2T runs and an overall high frequency of occurrence of the shortest 2T runs that reduce the performance of the bit detector By using a code with an MTR constraint of 2 an improvement in the bit detection is achieved. A code constructed in a systematic way that provides an MTR constraint of 2 is presented. A variation of such a code is disclosed where one sub-code is used, where coding states are divided into coding classes and where code words are divided into code word types. Then, for a given sub-code, an code word of type t can be concatenated with an code word of the next sub-code if said subsequent code word of said next sub-code belongs to one of coding states of the coding class with index Tmax+1 t. In the code according to the invention the overall code has the property that the respective channel bit sequences that are encoded from the same message-bit sequence, starting from any possible state of the finite-state-machine, for each of the two values of a DC-control bit, that is part of a given user word have opposite parities for the sequences generated from the starting state up to the state where both encoder paths merge. For the case that the encoder paths do not merge, there is no such constraint. Finally, a new d=1, k=10 sliding-block decodable RLL code is disclosed with the following properties: (i) it has an r=2 constraint which is the lowest MTR value that is compatible with a rate R=⅔; (ii) it enables practical SISO-RLL decoding because of its compact 2-to-3 mapping; and (iii) the new code uses a parity-complementary word assignment4 (PCWA) for DC-control.

    摘要翻译： 目前已知的d = 1代码具有由连续的2T运行组成的长列，并且总体出现最短的2T运行的频率，从而降低位检测器的性能通过使用MTR约束为2的代码，改进了位检测 已完成。 提出了一种以系统方式构建的代码，其提供MTR约束为2的代码。 公开了这样的代码的变型，其中使用一个子代码，其中编码状态被分为编码类别以及代码字被分成代码字类型。 然后，对于给定子码，如果所述下一子码的所述后续码字属于编码类的编码状态之一，则可以将类型t的码字与下一子码的码字连接， 指数Tmax + 1t。 在根据本发明的代码中，总代码具有以下特性：从相同消息比特序列编码的各个信道比特序列，从有限状态机的任何可能状态开始，对于两个值的 作为给定用户字的一部分的DC控制位对于从起始状态直到两个编码器路径合并的状态产生的序列具有相反的奇偶校验。 对于编码器路径不合并的情况，没有这样的限制。 最后，公开了一种新的d = 1，k = 10滑块可解码的RLL码，具有以下特性：（i）它具有r = 2约束，其是与速率R = 2 / 3; （ii）由于其紧凑的2对3映射，它使实用的SISO-RLL解码成为可能; 和（iii）新的代码使用奇偶互补字分配4（PCWA）进行DC控制。

    Coder and a method of coding for codes having a Repeated Maximum Transition Run constraint of 2
    6.
    发明授权
    Coder and a method of coding for codes having a Repeated Maximum Transition Run constraint of 2 失效
    编码器和编码具有重复最大转换运行约束的代码的方法2

    公开(公告)号：US07403138B2

    公开(公告)日：2008-07-22

    申请号：US11575079

    申请日：2005-09-08

    申请人： Willem Marie Julia Marcel Coene

    发明人： Willem Marie Julia Marcel Coene

    IPC分类号： H03M5/00

    CPC分类号： G11B20/1426 ,  G11B2020/1453 ,  H03M5/145

    摘要： Presently known codes have long trains consisting of 2T runs that reduce the performance of the bit detector. By using a code with an RMTR constraint of 2 an improvement in the bit detection is achieved. A code constructed is a systematic way that provides an RMTR constraint of 2 is presented. Several variations of such a code are disclosed where one or more sub-codes are used, where coding states are divided into coding classes and where code words are divided into code word types. Then, for a given sub-code, a code word type t can be concatenated with a code word of the next sub-code if the subsequent code word of the next sub-code belongs to one of coding states of the coding class with index Tmax+1−t.

    摘要翻译： 目前已知的代码具有由2T运行组成的长列车，降低了位检测器的性能。 通过使用RMTR约束为2的代码，实现了位检测的改进。 构建的代码是提供RMTR约束为2的系统方法。 公开了这样的代码的几个变型，其中使用一个或多个子代码，其中编码状态被分为编码类别以及代码字被划分为代码字类型。 然后，对于给定的子代码，如果下一子代码的后续代码字属于具有索引的编码类的编码状态之一，则代码字类型t可以与下一子代码的代码字连接 最大+ 1-t。

    Substrate, an inspection apparatus, and a lithographic apparatus
    8.
    发明授权
    Substrate, an inspection apparatus, and a lithographic apparatus 有权
    基板，检查装置和光刻设备

    公开(公告)号：US09081304B2

    公开(公告)日：2015-07-14

    申请号：US13059408

    申请日：2009-07-09

    申请人： Hendrik Jan Hidde Smilde ,  Willem Marie Julia Marcel Coene

    发明人： Hendrik Jan Hidde Smilde ,  Willem Marie Julia Marcel Coene

    IPC分类号： G03B27/42 ,  G03F7/20

    CPC分类号： G03F7/70683 ,  G03F7/70625 ,  G03F7/70633 ,  Y10T428/24802

    摘要： A target for measuring an overlay error or a critical dimension of a substrate comprises a grating. In one example, lines of the grating are arranged at an angle of about 45° with respect to edges of the target. As a consequence, the diffraction order of the grating reflection has its sub-maxima not aligned along the line on which the other diffraction orders are positioned, and overlap of intensity with other diffraction orders is reduced.

    摘要翻译： 用于测量衬底的重叠误差或临界尺寸的目标包括光栅。 在一个示例中，光栅的线相对于目标的边缘以大约45°的角度布置。 因此，光栅反射的衍射级别具有沿其它衍射级所在的线不对准的亚极大值，并且强度与其他衍射级的重叠减小。

    Calibration Method and Apparatus
    9.
    发明申请
    Calibration Method and Apparatus 有权
    校准方法和装置

    公开(公告)号：US20110178785A1

    公开(公告)日：2011-07-21

    申请号：US12973248

    申请日：2010-12-20

    申请人： Patricius Aloysius Jacobus TINNEMANS ,  Henricus Petrus Maria Pellemans ,  Gerbrand Van Der Zouw ,  Willem Marie Julia Marcel Coene

    发明人： Patricius Aloysius Jacobus TINNEMANS ,  Henricus Petrus Maria Pellemans ,  Gerbrand Van Der Zouw ,  Willem Marie Julia Marcel Coene

    IPC分类号： G06F17/10

    CPC分类号： G01N21/93 ,  G01N21/4785 ,  G01N21/4788

    摘要： Calibration of an angularly resolved scatterometer is performed by measuring a target in two or more different arrangements. The different arrangements cause radiation being measured in an outgoing direction to be different combinations of radiation illuminating the target from ingoing directions. A reference mirror measurement may also be performed. The measurements and modeling of the difference between the first and second arrangements is used to estimate separately properties of the ingoing and outgoing optical systems. The modeling may account for symmetry of the respective periodic target. The modeling typically accounts for polarizing effects of the ingoing optical elements, the outgoing optical elements and the respective periodic target. The polarizing effects may be described in the modeling by Jones calculus or Mueller calculus. The modeling may include a parameterization in terms of basis functions such as Zernike polynomials.

    摘要翻译： 角度分辨散射仪的校准是通过以两种或多种不同布置测量目标进行的。 不同的布置导致在输出方向上测量的辐射是将目标与入射方向照射的辐射的不同组合。 还可以执行参考镜测量。 使用第一和第二布置之间的差异的测量和建模来分别估计输入和输出光学系统的特性。 建模可以考虑相应周期性目标的对称性。 该模型通常考虑入射光学元件，输出光学元件和相应周期性靶的偏振效应。 极化效应可以在由琼斯微积分或米勒微积分建模中描述。 该建模可以包括基于诸如Zernike多项式的基函数的参数化。