INSPECTION SYSTEM AND METHOD WITH MULTI-IMAGE PHASE SHIFT ANALYSIS
    3.
    发明申请
    INSPECTION SYSTEM AND METHOD WITH MULTI-IMAGE PHASE SHIFT ANALYSIS 有权
    检测系统和方法与多图像相位移动分析

    公开(公告)号:US20100296104A1

    公开(公告)日:2010-11-25

    申请号:US12469893

    申请日:2009-05-21

    IPC分类号: G01B11/24

    摘要: An inspection system is provided. The inspection system comprises a light source, a grating, a phase shifting unit, an imager, and a processor. The light source is configured to generate light. The grating is in a path of the generated light and is configured to produce a grating image after the light passes through the grating. The phase shifting unit is configured to form and reflect a plurality of phase shifted patterns of the grating image onto an object surface to form a plurality of projected phase shifting patterns. The imager is configured to obtain image data of the projected phase shifted patterns. The processor is configured to reconstruct the object surface from the image data. An inspection method and a phase shifting projector are also presented.

    摘要翻译: 提供检查系统。 检查系统包括光源,光栅,相移单元,成像器和处理器。 光源被配置为产生光。 光栅处于所生成的光的路径中,并且被配置为在光通过光栅之后产生光栅图像。 相移单元被配置为将光栅图像的多个相移图案形成并反射到物体表面上以形成多个投影相移图案。 成像器被配置为获得投影的相移图案的图像数据。 处理器被配置为从图像数据重建物体表面。 还提出了检测方法和移相投影机。

    OPTICAL GAGE AND THREE-DIMENSIONAL SURFACE PROFILE MEASUREMENT METHOD
    4.
    发明申请
    OPTICAL GAGE AND THREE-DIMENSIONAL SURFACE PROFILE MEASUREMENT METHOD 审中-公开
    光栅和三维表面轮廓测量方法

    公开(公告)号:US20130057650A1

    公开(公告)日:2013-03-07

    申请号:US13257268

    申请日:2009-03-19

    IPC分类号: H04N13/02 G06K9/00

    CPC分类号: G01B11/2527

    摘要: An optical gage (10) with a small field of view for three-dimensional surface profile measurement includes a projector (20) having a light source (22) and projection optics (28, 30, 42) that guide light along a projection light path. An optical grating device (34) is arranged in the projection light path and modifies the projection light distribution to project a structured light pattern (46). A phase shifting apparatus (47) shifts the structured light pattern to at least three positions with desired phase shift on said surface (80) to be measured. A viewer (50) includes viewing optics with a viewing light path that is non-parallel to the projection light path, a light sensing array (58) for sensing images of diffuse reflections of the structured light patterns from said surface, and a camera (57) for recording the images. The optical gage further includes a computer (61) which comprises data input communication with the camera and a processor for modeling the surface being profiled based on surface contour information provided by the images.

    摘要翻译: 具有用于三维表面轮廓测量的小视野的光学计(10)包括具有光源(22)和投影光学器件(28,30,42)的投影仪(20),其沿着投影光路 。 光栅装置(34)布置在投影光路中并修改投影光分布以投影结构光图案(46)。 相移装置(47)将结构化光图案移动到要测量的所述表面(80)上期望的相移的至少三个位置。 观察器(50)包括具有不平行于投影光路的观察光路的观察光学器件,用于感测来自所述表面的结构化光图案的漫反射的图像的光感测阵列(58)和相机 57)用于记录图像。 光学计进一步包括计算机(61),其包括与相机的数据输入通信,以及处理器,用于基于由图像提供的表面轮廓信息来对正在被轮廓的表面进行建模。

    Inspection system and methods with autocompensation for edge break gauging orientation
    5.
    发明授权
    Inspection system and methods with autocompensation for edge break gauging orientation 失效
    用于边缘断裂测量方向的自动补偿检测系统和方法

    公开(公告)号:US07925075B2

    公开(公告)日:2011-04-12

    申请号:US11745010

    申请日:2007-05-07

    IPC分类号: G06K9/00 G06K9/48 G06C9/00

    CPC分类号: G01B11/25 G01B21/20

    摘要: A method for inspecting a feature of a part is provided. The method includes obtaining a profile corresponding to the feature using a sensor and projecting the profile onto a compensation plane normal to the feature for generating an updated profile. The method also includes using the updated profile for reducing a measurement error caused by an orientation of the sensor. An inspection system is also provided. The inspection system includes a sensor configured to capture a fringe image of a feature on a part. The inspection system further includes a processor configured to process the fringe image to obtain an initial profile of the feature and to project the initial profile onto a compensation plane normal to the feature.

    摘要翻译: 提供了一种用于检查零件特征的方法。 该方法包括使用传感器获得与特征对应的轮廓,并将轮廓投影到与该特征垂直的补偿平面上,以生成更新轮廓。 该方法还包括使用更新的轮廓来减少由传感器的取向引起的测量误差。 还提供检查系统。 检查系统包括被配置为捕获部件上的特征的条纹图像的传感器。 检查系统还包括处理器,其被配置为处理边缘图像以获得特征的初始轮廓并且将初始轮廓投影到垂直于特征的补偿平面上。

    INSPECTION SYSTEM AND METHODS WITH AUTOCOMPENSATION FOR EDGE BREAK GAUGING ORIENTATION
    7.
    发明申请
    INSPECTION SYSTEM AND METHODS WITH AUTOCOMPENSATION FOR EDGE BREAK GAUGING ORIENTATION 失效
    检查系统和方法与自动化的边缘测量方向

    公开(公告)号:US20080281543A1

    公开(公告)日:2008-11-13

    申请号:US11745010

    申请日:2007-05-07

    IPC分类号: G01C25/00 G01B21/02 G01B21/16

    CPC分类号: G01B11/25 G01B21/20

    摘要: A method for inspecting a feature of a part is provided. The method includes obtaining a profile corresponding to the feature using a sensor and projecting the profile onto a compensation plane normal to the feature for generating an updated profile. The method also includes using the updated profile for reducing a measurement error caused by an orientation of the sensor. An inspection system is also provided. The inspection system includes a sensor configured to capture a fringe image of a feature on a part. The inspection system further includes a processor configured to process the fringe image to obtain an initial profile of the feature and to project the initial profile onto a compensation plane normal to the feature.

    摘要翻译: 提供了一种用于检查零件特征的方法。 该方法包括使用传感器获得与特征对应的轮廓,并将轮廓投影到与该特征垂直的补偿平面上,以生成更新轮廓。 该方法还包括使用更新的轮廓来减少由传感器的取向引起的测量误差。 还提供检查系统。 检查系统包括被配置为捕获部件上的特征的条纹图像的传感器。 检查系统还包括处理器,其被配置为处理边缘图像以获得特征的初始轮廓并且将初始轮廓投影到垂直于特征的补偿平面上。

    Inspection system and method with multi-image phase shift analysis
    8.
    发明授权
    Inspection system and method with multi-image phase shift analysis 有权
    多图像相移分析检测系统及方法

    公开(公告)号:US08045181B2

    公开(公告)日:2011-10-25

    申请号:US12469893

    申请日:2009-05-21

    IPC分类号: G01B11/24

    摘要: An inspection system is provided. The inspection system comprises a light source, a grating, a phase shifting unit, an imager, and a processor. The light source is configured to generate light. The grating is in a path of the generated light and is configured to produce a grating image after the light passes through the grating. The phase shifting unit is configured to form and reflect a plurality of phase shifted patterns of the grating image onto an object surface to form a plurality of projected phase shifting patterns. The imager is configured to obtain image data of the projected phase shifted patterns. The processor is configured to reconstruct the object surface from the image data. An inspection method and a phase shifting projector are also presented.

    摘要翻译: 提供检查系统。 检查系统包括光源,光栅,相移单元,成像器和处理器。 光源被配置为产生光。 光栅处于所生成的光的路径中,并且被配置为在光通过光栅之后产生光栅图像。 相移单元被配置为将光栅图像的多个相移图案形成并反射到物体表面上以形成多个投影相移图案。 成像器被配置为获得投影的相移图案的图像数据。 处理器被配置为从图像数据重建物体表面。 还提出了检测方法和移相投影机。

    Inspection device and method thereof
    9.
    发明授权
    Inspection device and method thereof 有权
    检验装置及其方法

    公开(公告)号:US09188543B2

    公开(公告)日:2015-11-17

    申请号:US13448691

    申请日:2012-04-17

    摘要: An optical system configured to visually inspect a target having a variable position with respect to the optical system is provided. The optical system includes a polarizer configured to convert an incident light reflected or diffused from the target into linearly polarized light; a light modulating element configured to modulate a polarization state of the linearly polarized light in response to control signals; and a lens group comprising at least one birefringent element, the birefringent element configured to refract or reflect the modulated linearly polarized light with a first polarization state under a first refraction index to enable inspection of the target at a first object position, and the birefringent element further configured to refract or reflect the modulated linearly polarized light with a second polarization state under a second refraction index to enable inspection of the target at a second object position.

    摘要翻译: 提供一种被配置为目视检查相对于光学系统具有可变位置的目标的光学系统。 光学系统包括:偏振器,被配置为将从目标反射或扩散的入射光转换成线偏振光; 光调制元件,被配置为响应于控制信号调制所述线偏振光的偏振状态; 以及包括至少一个双折射元件的透镜组,所述双折射元件被配置为在第一折射率下折射或反射具有第一偏振态的调制线偏振光,以使得能够在第一物体位置检查所述目标,并且所述双折射元件 还被配置为在第二折射率下折射或反射具有第二偏振状态的经调制的线性偏振光,以使得能够在第二物体位置检查目标。

    Fringe projection system and method for a probe using a coherent fiber bundle
    10.
    发明授权
    Fringe projection system and method for a probe using a coherent fiber bundle 有权
    边缘投影系统和使用相干光纤束的探针的方法

    公开(公告)号:US07812968B2

    公开(公告)日:2010-10-12

    申请号:US12042740

    申请日:2008-03-05

    IPC分类号: G01B9/02 G01B11/02

    摘要: A probe is presented that includes a light source, a coherent fiber bundle, and a pattern selector. The pattern selector is disposed between the light source and the proximal end of the coherent fiber bundle. The pattern selector includes at least one patterned zone through which light from the light source passes to project at least one fringe set onto a surface. Each of the at least one fringe sets has a structured-light pattern. The probe further includes an imager for obtaining at least one image of the surface and a processing unit that is configured to perform phase-shift analysis on the at least one image. A method for projecting a plurality of fringe sets suitable for phase-shift analysis on a surface using a probe is presented.

    摘要翻译: 提出了一种包括光源,相干光纤束和图案选择器的探针。 图案选择器设置在光源和相干光纤束的近端之间。 图案选择器包括至少一个图案化区域,光源通过该图案区域将至少一个边缘组投影到表面上。 至少一个边缘组中的每一个具有结构化光图案。 探头还包括用于获得表面的至少一个图像的成像器和被配置为对至少一个图像执行相移分析的处理单元。 提出了一种用于使用探针在表面上投影适合于相移分析的多个边缘组的方法。