公开(公告)号：US09012336B2

公开(公告)日：2015-04-21

申请号：US13858922

申请日：2013-04-08

Applicant: Applied Materials, Inc.

Inventor： Heng Pan ,  Matthew Scott Rogers ,  Johanes F. Swenberg ,  Christopher S. Olsen ,  Wei Liu ,  David Chu ,  Malcom J. Bevan

IPC: H01L21/469 ,  H01L21/31 ,  H01L21/02

CPC classification number: H01L21/02252 ,  H01L21/02112 ,  H01L21/02159 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/02181 ,  H01L21/02323 ,  H01L21/02329 ,  H01L21/0234

Abstract: Disclosed are apparatus and methods for processing a substrate. The substrate having a feature with a layer thereon is exposed to an inductively coupled plasma which forms a substantially conformal layer.

Abstract translation: 公开了用于处理基板的装置和方法。 具有其上具有层的特征的衬底暴露于形成基本上保形层的电感耦合等离子体。

公开(公告)号：US09109754B2

公开(公告)日：2015-08-18

申请号：US13653952

申请日：2012-10-17

Applicant: Applied Materials, Inc.

Inventor： Joseph Yudovsky ,  Mei Chang ,  Faruk Gungor ,  Paul F. Ma ,  David Chu ,  Chien-Teh Kao ,  Hyman Lam ,  Dien-Yeh Wu

IPC: F16K11/20 ,  F17D3/00

CPC classification number: F17D3/00 ,  Y10T137/7833

Abstract: Provided are gas distribution apparatus with a delivery channel having an inlet end, an outlet end and a plurality of apertures spaced along the length. The inlet end is connectable to an inlet gas source and the outlet end is connectable with a vacuum source. Also provided are gas distribution apparatus with spiral delivery channels, intertwined spiral delivery channels, splitting delivery channels, merging delivery channels and shaped delivery channels in which an inlet end and outlet end are configured for rapid exchange of gas within the delivery channels.

Abstract translation: 提供了具有输送通道的气体分配设备，其具有入口端，出口端和沿着该长度间隔开的多个孔。 入口端可连接到入口气体源，出口端可与真空源连接。 还提供了具有螺旋输送通道的气体分配设备，缠绕在一起的螺旋输送通道，分流输送通道，合并输送通道和成形输送通道，其中入口端和出口端构造成用于在输送通道内快速交换气体。

公开(公告)号：USRE48994E1

公开(公告)日：2022-03-29

申请号：US16432928

申请日：2019-06-06

Applicant: Applied Materials, Inc.

Inventor： Joseph Yudovsky ,  Mei Chang ,  Faruk Gungor ,  Paul F. Ma ,  David Chu ,  Chien-Teh Kao ,  Hyman W. H. Lam ,  Dien-Yeh Wu

IPC: C23C16/455 ,  C23C16/44 ,  F17D3/00

Abstract: Provided are gas distribution apparatus with a delivery channel having an inlet end, an outlet end and a plurality of apertures spaced along the length. The inlet end is connectable to an inlet gas source and the outlet end is connectable with a vacuum source. Also provided are gas distribution apparatus with spiral delivery channels, intertwined spiral delivery channels, splitting delivery channels, merging delivery channels and shaped delivery channels in which an inlet end and outlet end are configured for rapid exchange of gas within the delivery channels.

公开(公告)号：US20200350157A1

公开(公告)日：2020-11-05

申请号：US16403312

申请日：2019-05-03

Applicant: Applied Materials, Inc.

Inventor： David Chu ,  Steven C. Hung ,  Malcolm J. Bevan ,  Charles Chu ,  Tatsuya E. Sato ,  Shih-Chung Chen ,  Patricia M. Liu ,  Johanes Swenberg

IPC: H01L21/02 ,  H01L21/28

Abstract: Processing methods may be performed to produce semiconductor structures that may include a high-k dielectric material. The methods may include delivering a nitrogen-containing precursor or an oxygen-containing precursor to a substrate contained in a semiconductor processing chamber. The methods may include forming reactive ligands on an exposed surface of the substrate with the nitrogen-containing precursor or the oxygen-containing precursor. The methods may also include forming a high-k dielectric material overlying the substrate.

公开(公告)号：USRE47440E1

公开(公告)日：2019-06-18

申请号：US15678883

申请日：2017-08-16

Applicant: Applied Materials, Inc.

Inventor： Joseph Yudovsky ,  Mei Chang ,  Faruk Gungor ,  Paul F. Ma ,  David Chu ,  Chien-Teh Kao ,  Hyman Lam ,  Dien-Yeh Wu

IPC: F17D3/00 ,  F16K11/20

Abstract: Provided are gas distribution apparatus with a delivery channel having an inlet end, an outlet end and a plurality of apertures spaced along the length. The inlet end is connectable to an inlet gas source and the outlet end is connectable with a vacuum source. Also provided are gas distribution apparatus with spiral delivery channels, intertwined spiral delivery channels, splitting delivery channels, merging delivery channels and shaped delivery channels in which an inlet end and outlet end are configured for rapid exchange of gas within the delivery channels.