公开(公告)号：US20140356663A1

公开(公告)日：2014-12-04

申请号：US14460122

申请日：2014-08-14

Applicant: Applied Materials, Inc.

Inventor： Gregory J. WILSON ,  Kyle M. HANSON

IPC: H01M8/18 ,  H01M4/42 ,  H01M12/08

CPC classification number: H01M8/186 ,  H01M4/42 ,  H01M8/0232 ,  H01M8/0245 ,  H01M8/188 ,  H01M8/20 ,  H01M12/08 ,  H01M2250/00 ,  Y02E60/528

Abstract: Embodiments of the invention generally provide for flow battery cells and systems containing a plurality of flow battery cells, and methods for improving metal plating within the flow battery cell, such as by flowing and exposing the catholyte to various types of cathodes. In one embodiment, a flow battery cell is provided which includes a cathodic half cell and an anodic half cell separated by an electrolyte membrane, wherein the cathodic half cell contains a plurality of cathodic wires extending perpendicular or substantially perpendicular to and within the catholyte pathway and in contact with the catholyte, and each of the cathodic wires extends parallel or substantially parallel to each other. In some examples, the plurality of cathodic wires may have at least two arrays of cathodic wires, each array contains at least one row of cathodic wires, and each row extends along the catholyte pathway.

Abstract translation: 本发明的实施例通常提供了包含多个流动电池单元的流动电池单元和系统，以及用于改善流动电池单元内的金属电镀的方法，例如通过将阴极电解液流过和暴露于各种类型的阴极。 在一个实施例中，提供了流动电池单元，其包括阴极半电池和由电解质膜分离的阳极半电池，其中阴极半电池包含垂直于或基本垂直于阴极电解液通道延伸的多个阴极线， 与阴极电解液接触，并且每个阴极线彼此平行或基本平行延伸。 在一些示例中，多个阴极线可以具有至少两个阴极线阵列，每个阵列包含至少一排阴极线，并且每排沿着阴极电解液通道延伸。

公开(公告)号：US20180217504A1

公开(公告)日：2018-08-02

申请号：US15940388

申请日：2018-03-29

Applicant: Applied Materials, Inc.

Inventor： Kyle M. HANSON ,  Gregory J. WILSON ,  Viachslav BABAYAN

IPC: G03F7/38 ,  H01L21/67 ,  C23C16/54 ,  C23C16/56 ,  H01L21/677

CPC classification number: G03F7/38 ,  C23C16/54 ,  C23C16/56 ,  H01L21/67011 ,  H01L21/6719 ,  H01L21/67751

Abstract: Embodiments described herein relate to methods and apparatus for performing immersion field guided post exposure bake processes. Embodiments of apparatus described herein include a chamber body defining a processing volume. Electrodes may be disposed adjacent the process volume and process fluid is provided to the process volume via a plurality of fluid conduits to facilitate immersion field guided post exposure bake processes. A post process chamber for rinsing, developing, and drying a substrate is also provided.

公开(公告)号：US20230215722A1

公开(公告)日：2023-07-06

申请号：US17569629

申请日：2022-01-06

Applicant: Applied Materials, Inc.

Inventor： Ying WANG ,  Guan Huei SEE ,  Gregory J. WILSON

IPC: H01L21/02 ,  H01L21/683 ,  H01L21/67 ,  B08B3/02

CPC classification number: H01L21/02076 ,  H01L21/6836 ,  H01L21/67051 ,  B08B3/02

Abstract: Methods, systems, and apparatus for cleaning and drying a tape-frame substrate are provided. In embodiments, an apparatus for supporting a tape-frame substrate includes a chuck having a first side and a second side opposite the first side, the first side having a convex surface configured to support the tape-frame substrate; and a plurality of channels extending through the chuck and having outlets along the first side, wherein the plurality of channels are configured to dispense fluid from the outlets along the convex surface of the first side. In embodiments, a support system includes the chuck and a holder configured to mount a tape-frame substrate to the chuck. The plurality of channels are configured to dispense fluid from the outlets and between the tape-frame substrate and the convex surface of the chuck when the tape-frame substrate is mounted to the chuck.

公开(公告)号：US20180004094A1

公开(公告)日：2018-01-04

申请号：US15196725

申请日：2016-06-29

Applicant: Applied Materials, Inc.

Inventor： Kyle M. HANSON ,  Gregory J. WILSON ,  Viachslav BABAYAN

IPC: G03F7/38

CPC classification number: G03F7/38 ,  C23C16/54 ,  C23C16/56 ,  H01L21/67011 ,  H01L21/6719 ,  H01L21/67751

Abstract: Embodiments described herein relate to methods and apparatus for performing immersion field guided post exposure bake processes. Embodiments of apparatus described herein include a chamber body defining a processing volume. Electrodes may be disposed adjacent the process volume and process fluid is provided to the process volume via a plurality of fluid conduits to facilitate immersion field guided post exposure bake processes. A post process chamber for rinsing, developing, and drying a substrate is also provided.

公开(公告)号：US20240071745A1

公开(公告)日：2024-02-29

申请号：US18383617

申请日：2023-10-25

Applicant: Applied Materials, Inc.

Inventor： Ying WANG ,  Guan Huei SEE ,  Gregory J. WILSON

IPC: H01L21/02 ,  B08B3/02 ,  H01L21/67 ,  H01L21/683

CPC classification number: H01L21/02076 ,  B08B3/02 ,  H01L21/67051 ,  H01L21/6836

Abstract: Methods, systems, and apparatus for cleaning and drying a tape-frame substrate are provided. In embodiments, an apparatus for supporting a tape-frame substrate includes a chuck having a first side and a second side opposite the first side, the first side having a convex surface configured to support the tape-frame substrate; and a plurality of channels extending through the chuck and having outlets along the first side, wherein the plurality of channels are configured to dispense fluid from the outlets along the convex surface of the first side. In embodiments, a support system includes the chuck and a holder configured to mount a tape-frame substrate to the chuck. The plurality of channels are configured to dispense fluid from the outlets and between the tape-frame substrate and the convex surface of the chuck when the tape-frame substrate is mounted to the chuck.

公开(公告)号：US20180277864A1

公开(公告)日：2018-09-27

申请号：US15992332

申请日：2018-05-30

Applicant: Applied Materials, Inc.

Inventor： Joseph Grover GORDON, II ,  Alan J. GOTCHER ,  Godfrey SIKHA ,  Gregory J. WILSON

IPC: H01M8/04186 ,  H01M8/20 ,  H01M8/18 ,  H01M2/38

CPC classification number: H01M8/04186 ,  H01M2/38 ,  H01M8/188 ,  H01M8/20

Abstract: High performance flow batteries, based on alkaline zinc/ferro-ferricyanide rechargeable (“ZnFe”) and similar flow batteries, may include one or more of the following improvements. First, the battery design has a cell stack comprising a low resistance positive electrode in at least one positive half cell and a low resistance negative electrode in at least one negative half cell, where the positive electrode and negative electrode resistances are selected for uniform high current density across a region of the cell stack. Second, a flow of electrolyte, such as zinc species in the ZnFe battery, with a high level of mixing through at least one negative half cell in a Zn deposition region proximate a deposition surface where the electrolyte close to the deposition surface has sufficiently high zinc concentration for deposition rates on the deposition surface that sustain the uniform high current density.

公开(公告)号：US20180107119A1

公开(公告)日：2018-04-19

申请号：US15844137

申请日：2017-12-15

Applicant: Applied Materials, Inc.

Inventor： Kyle M. HANSON ,  Gregory J. WILSON ,  Viachslav BABAYAN

IPC: G03F7/38

Abstract: Embodiments described herein relate to methods and apparatus for performing immersion field guided post exposure bake processes. Embodiments of apparatus described herein include a chamber body defining a processing volume. Electrodes may be disposed adjacent the process volume and process fluid is provided to the process volume via a plurality of fluid conduits to facilitate immersion field guided post exposure bake processes. A post process chamber for rinsing, developing, and drying a substrate is also provided.