公开(公告)号：US09305780B2

公开(公告)日：2016-04-05

申请号：US14561525

申请日：2014-12-05

Applicant: Applied Materials, Inc. ,  The Regents of the University of California

Inventor： Mary Edmonds ,  Andrew C. Kummel ,  Atif M. Noori

IPC: H01L21/02 ,  C23C16/24 ,  C23C16/455

CPC classification number: H01L23/3171 ,  C23C16/24 ,  C23C16/45523 ,  H01L21/02123 ,  H01L21/0228 ,  H01L21/02381 ,  H01L21/02387 ,  H01L21/02532 ,  H01L21/0262 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Methods for depositing silicon on a semiconductor or metallic surface include cycling dosing of silane and chlorosilane precursors at a temperature between 50° C. and 300° C., and continuing cycling between three and twenty three cycles until the deposition self-limits via termination of surface sites with Si—H groups. Methods of layer formation include depositing a chlorosilane onto a substrate to form a first layer, wherein the substrate is selected from the group consisting of InxGa1-xAs, InxGa1-xSb, InxGa1-xN, SiGe, and Ge, wherein X is between 0.1 and 0.99. The methods may include pulsing a silane to form a silicon monolayer and cycling dosing of the chlorosilane and the silane. Layered compositions include a first layer selected from the group consisting of InxGa1-xAs, InxGa1-xSb, InxGa1-xN, SiGe, and Ge, wherein X is between 0.1 and 0.99, and a second layer, wherein the second layer comprises Si—H and Si—OH.

Abstract translation: 在半导体或金属表面上沉积硅的方法包括在50℃和300℃之间的温度下循环给予硅烷和氯代硅烷前体，并在三到二十三个循环之间持续循环，直到通过终止 具有Si-H基团的表面位点。 层形成方法包括在衬底上沉积氯硅烷以形成第一层，其中衬底选自In x Ga 1-x As，In x Ga 1-x Sb，In x Ga 1-x N，Si Ge和Ge，其中X在0.1和 0.99。 所述方法可以包括脉动硅烷以形成硅单层并循环给予氯硅烷和硅烷。 层状组合物包括选自In x Ga 1-x As，In x Ga 1-x Sb，In x Ga 1-x N，Si Ge和Ge中的第一层，其中X为0.1至0.99，第二层为第二层，其中第二层包含Si-H 和Si-OH。

公开(公告)号：US10297441B2

公开(公告)日：2019-05-21

申请号：US15674108

申请日：2017-08-10

Applicant: Applied Materials, Inc. ,  The Regents of the University of California

Inventor： Steven Wolf ,  Mary Edmonds ,  Andrew C. Kummel ,  Srinivas D. Nemani ,  Ellie Y. Yieh

IPC: H01L21/44 ,  H01L21/31 ,  H01L21/469 ,  H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119 ,  H01L21/02 ,  H01L29/51 ,  C23C16/46 ,  C23C16/455 ,  C23C16/34

Abstract: Methods of the disclosure include a BN ALD process at low temperatures using a reactive nitrogen precursor, such as thermal N2H4, and a boron containing precursor, which allows for the deposition of ultra thin (less than 5 nm) films with precise thickness and composition control. Methods are self-limiting and provide saturating atomic layer deposition (ALD) of a boron nitride (BN) layer on various semiconductors and metallic substrates.

公开(公告)号：US10262858B2

公开(公告)日：2019-04-16

申请号：US15496982

申请日：2017-04-25

Applicant: Applied Materials, Inc. ,  The Regents of the University of California

Inventor： Naomi Yoshida ,  Lin Dong ,  Andrew Kummel ,  Jessica Kachian ,  Mary Edmonds ,  Steve Wolf

IPC: H01L21/02

Abstract: Embodiments described herein relate to semiconductor and metal substrate surface preparation and controlled growth methods. An example application is formation of an atomic layer deposition (ALD) control layer as a diffusion barrier or gate dielectric layer and subsequent ALD processing. Embodiments described herein are believed to be advantageously utilized concerning gate oxide deposition, diffusion barrier deposition, surface functionalization, surface passivation, and oxide nucleation, among other processes. More specifically, embodiments described herein provide for silicon nitride ALD processes which functionalize, passivate, and nucleate a SiNx monolayer at temperatures below about 300° C.

公开(公告)号：US09824889B2

公开(公告)日：2017-11-21

申请号：US14686870

申请日：2015-04-15

Applicant: Applied Materials, Inc. ,  The Regents of the University of California

Inventor： Andrew C. Kummel ,  Mary Edmonds ,  Mei Chang ,  Jessica S. Kachian

IPC: C23C16/24 ,  H01L21/02

CPC classification number: H01L21/0262 ,  H01L21/02387 ,  H01L21/02532 ,  H01L21/02658

Abstract: Methods for depositing silicon include cycling dosing between 1 and 100 cycles of one or more first chlorosilane precursors on a III-V surface at a temperature between 300° C. and 500° C. to form a first layer. Methods may include desorbing chlorine from the first layer by treating the first layer with atomic hydrogen to form a second layer. Methods may include forming a silicon multilayer on the second layer by cycling dosing between 1 and 100 cycles of one or more second chlorosilane precursors and atomic hydrogen at a temperature between 300° C. and 500° C. A layered composition includes a first layer selected from the group consisting of InxGa1-xAs, InxGa1-xSb, InxGa1-xN, SiGe, and Ge, wherein X is between 0.1 and 0.99, and a second layer, wherein the second layer comprises Si—H and Si—OH.

公开(公告)号：US10553425B2

公开(公告)日：2020-02-04

申请号：US15714162

申请日：2017-09-25

Applicant: Applied Materials, Inc. ,  The Regents of the University of California

Inventor： Jessica S. Kachian ,  Naomi Yoshida ,  Mei Chang ,  Mary Edmonds ,  Andrew C. Kummel ,  Sang Wook Park ,  Hyunwoong Kim

IPC: H01L21/02

Abstract: Embodiments described herein provide a self-limiting and saturating Si—Ox bilayer process which does not require the use of a plasma or catalyst and that does not lead to undesirable substrate oxidation. Methods of the disclosure do not produce SiO2, but instead produce a saturated Si—Ox film with —OH termination to make substrate surfaces highly reactive towards metal ALD precursors to seed high nucleation and growth of gate oxide ALD materials.

公开(公告)号：US10373824B2

公开(公告)日：2019-08-06

申请号：US15727351

申请日：2017-10-06

Applicant: Applied Materials, Inc.

Inventor： Andrew C. Kummel ,  Mary Edmonds ,  Mei Chang ,  Jessica S. Kachian

IPC: C23C16/24 ,  H01L21/02

Abstract: Methods for depositing silicon include cycling dosing between 1 and 100 cycles of one or more first chlorosilane precursors on a III-V surface at a temperature between 300° C. and 500° C. to form a first layer. Methods may include desorbing chlorine from the first layer by treating the first layer with atomic hydrogen to form a second layer. Methods may include forming a silicon multilayer on the second layer by cycling dosing between 1 and 100 cycles of one or more second chlorosilane precursors and atomic hydrogen at a temperature between 300° C. and 500° C. A layered composition includes a first layer selected from the group consisting of InxGa1−xAs, InxGa1−xSb, InxGa1−xN, SiGe, and Ge, wherein X is between 0.1 and 0.99, and a second layer, wherein the second layer comprises Si—H and Si—OH.

公开(公告)号：US09773663B2

公开(公告)日：2017-09-26

申请号：US15230218

申请日：2016-08-05

Applicant: Applied Materials, Inc. ,  The Regents of the University of California

Inventor： Jessica S. Kachian ,  Naomi Yoshida ,  Mei Chang ,  Mary Edmonds ,  Andrew C. Kummel ,  Sang Wook Park ,  Hyunwoong Kim

IPC: H01L21/02

CPC classification number: H01L21/0228 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/02178 ,  H01L21/022 ,  H01L21/02205 ,  H01L21/02211 ,  H01L21/02271 ,  H01L21/02299 ,  H01L21/02301 ,  H01L21/02304

Abstract: Embodiments described herein provide a self-limiting and saturating Si—Ox bilayer process which does not require the use of a plasma or catalyst and that does not lead to undesirable substrate oxidation. Methods of the disclosure do not produce SiO2, but instead produce a saturated Si—Ox film with —OH termination to make substrate surfaces highly reactive towards metal ALD precursors to seed high nucleation and growth of gate oxide ALD materials.

公开(公告)号：US09607920B2

公开(公告)日：2017-03-28

申请号：US15060795

申请日：2016-03-04

Applicant: Applied Materials, Inc. ,  The Regents of the University of California

Inventor： Mary Edmonds ,  Andrew C. Kummel ,  Atif M. Noori

IPC: H01L21/02 ,  H01L23/31 ,  C23C16/24 ,  C23C16/455

CPC classification number: H01L23/3171 ,  C23C16/24 ,  C23C16/45523 ,  H01L21/02123 ,  H01L21/0228 ,  H01L21/02381 ,  H01L21/02387 ,  H01L21/02532 ,  H01L21/0262 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Methods for depositing silicon on a semiconductor or metallic surface include cycling dosing of silane and chlorosilane precursors at a temperature between 50° C. and 300° C., and continuing cycling between three and twenty three cycles until the deposition self-limits via termination of surface sites with Si—H groups. Methods of layer formation include depositing a chlorosilane onto a substrate to form a first layer, wherein the substrate is selected from the group consisting of InxGa1-xAs, InxGa1-xSb, InxGa1-xN, SiGe, and Ge, wherein X is between 0.1 and 0.99. The methods may include pulsing a silane to form a silicon monolayer and cycling dosing of the chlorosilane and the silane. Layered compositions include a first layer selected from the group consisting of InxGa1-xAs, InxGa1-xSb, InxGa1-xN, SiGe, and Ge, wherein X is between 0.1 and 0.99, and a second layer, wherein the second layer comprises Si—H and Si—OH.