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    FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCER FILM, FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCER ELEMENT, ELECTROMECHANICAL TRANSDUCER ELEMENT, LIQUID EJECTION HEAD, AND IMAGE FORMING APPARATUS
    4.
    发明申请
    FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCER FILM, FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCER ELEMENT, ELECTROMECHANICAL TRANSDUCER ELEMENT, LIQUID EJECTION HEAD, AND IMAGE FORMING APPARATUS 有权
    机电传感器膜的制造方法，机电传感器元件的制造方法，机电传感器元件，液体喷射头和图像形成装置

    公开(公告)号：US20160049579A1

    公开(公告)日：2016-02-18

    申请号：US14827902

    申请日：2015-08-17

    申请人： Akira SHIMOFUKU ,  Atsushi TAKEUCHI ,  Osamu MACHIDA

    发明人： Akira SHIMOFUKU ,  Atsushi TAKEUCHI ,  Osamu MACHIDA

    IPC分类号： H01L41/332 ,  H01L41/08 ,  H01L41/25 ,  B41J2/14

    CPC分类号： H01L41/332 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1629 ,  B41J2/164 ,  B41J2/1645 ,  H01L41/0805 ,  H01L41/1876 ,  H01L41/25 ,  H01L41/318 ,  H01L41/331

    摘要： A method of fabricating an electromechanical transducer film includes applying a precursor solution on a support substrate, heating the substrate at a first temperature to form a ceramic thin-film in amorphous state, applying a sol-gel solution onto the ceramic thin-film, and heating the ceramic thin-film at a second temperature to form an electromechanical transducer thin-film in amorphous state. The method further includes heating the ceramic and transducer thin-films at a third temperature to thermally decompose an organic substance in the sol-gel solution and form a unitary thin-film, processing the unitary thin-film to form a patterned unitary thin-film, modifying an area on which the patterned film is not formed, discharging the sol-gel solution onto a surface of the patterned film by a liquid discharge head to apply the sol-gel solution to the surface of the patterned film, and heating the patterned film at a fourth temperature to crystallize the patterned film.

    摘要翻译： 制造机电换能器膜的方法包括将前体溶液施加在支撑基板上，在第一温度下加热基板以形成非晶状态的陶瓷薄膜，将溶胶 - 凝胶溶液施加到陶瓷薄膜上，以及 在第二温度下加热陶瓷薄膜以形成非晶态的机电换能器薄膜。 该方法还包括在第三温度下加热陶瓷和换能器薄膜以热分解溶胶 - 凝胶溶液中的有机物质并形成整体薄膜，处理整体薄膜以形成图案化单一薄膜 对未形成图案化膜的区域进行修饰，通过液体排出头将溶胶 - 凝胶溶液排出到图案化膜的表面上，将溶胶 - 凝胶溶液涂布到图案化膜的表面，并加热图案化膜 膜在第四温度下结晶图案化膜。

    PIEZOELECTRIC ACTUATOR, METHOD OF PRODUCING PIEZOELECTRIC ACTUATOR, AND LIQUID DISCHARGE HEAD
    9.
    发明申请
    PIEZOELECTRIC ACTUATOR, METHOD OF PRODUCING PIEZOELECTRIC ACTUATOR, AND LIQUID DISCHARGE HEAD 有权
    压电致动器，制造压电致动器的方法和液体放电头

    公开(公告)号：US20120236084A1

    公开(公告)日：2012-09-20

    申请号：US13416055

    申请日：2012-03-09

    申请人： Yasuhiro WATANABE ,  Osamu MACHIDA ,  Akira SHIMOFUKU ,  Ryoh TASHIRO

    发明人： Yasuhiro WATANABE ,  Osamu MACHIDA ,  Akira SHIMOFUKU ,  Ryoh TASHIRO

    IPC分类号： B41J2/045 ,  H01L41/22 ,  H01L41/047

    CPC分类号： B41J2/14233 ,  H01L41/0973 ,  H01L41/317 ,  H01L41/33

    摘要： Disclosed is a method of producing a piezoelectric actuator including a first electrode film forming process; a monomolecular film forming process; a pattering process of removing a monomolecular film having a rectangular shape; an application process of applying a precursor solution to the first electrode film exposed in the rectangular shape; a piezoelectric film forming process of converting the applied precursor solution into a piezoelectric film; and a second electrode film forming process. Materials of the precursor solution, the first electrode film, and the monomolecular film are adjusted so that the first electrode film is lyophilic and the monomolecular film is lyophobic to the precursor solution. The piezoelectric film forming process includes a drying and thermally decomposing process of drying and thermally decomposing the precursor solution; and a crystallizing process of crystallizing a thermally decomposed piezoelectric material.

    摘要翻译： 公开了一种制造包括第一电极膜形成工艺的压电致动器的方法; 单分子成膜工艺; 去除具有矩形形状的单分子膜的图案化方法; 将前体溶液施加到以矩形形状暴露的第一电极膜的施加方法; 将所施加的前体溶液转化成压电膜的压电膜形成方法; 和第二电极膜形成工艺。 调节前体溶液，第一电极膜和单分子膜的材料，使得第一电极膜是亲液性的，并且单分子膜与前体溶液疏液。 压电薄膜形成方法包括干燥和热分解前体溶液的热分解过程; 以及结晶热分解压电材料的结晶过程。

    METHOD OF FORMING ELECTROMECHANICAL TRANSDUCER FILM, ELECTROMECHANICAL TRANSDUCER FILM, ELECTROMECHANICAL TRANSDUCER ELEMENT, AND LIQUID DISCHARGE HEAD
    10.
    发明申请
    METHOD OF FORMING ELECTROMECHANICAL TRANSDUCER FILM, ELECTROMECHANICAL TRANSDUCER FILM, ELECTROMECHANICAL TRANSDUCER ELEMENT, AND LIQUID DISCHARGE HEAD 审中-公开
    形成机电传感器膜的方法，机电传感器膜，机电传感器元件和液体放电头

    公开(公告)号：US20140210913A1

    公开(公告)日：2014-07-31

    申请号：US14243177

    申请日：2014-04-02

    申请人： Akira SHIMOFUKU ,  Osamu MACHIDA ,  Ryoh TASHIRO ,  Yasuhiro WATANABE

    发明人： Akira SHIMOFUKU ,  Osamu MACHIDA ,  Ryoh TASHIRO ,  Yasuhiro WATANABE

    IPC分类号： B41J2/14 ,  H01L41/047

    CPC分类号： B41J2/14201 ,  B41J2/161 ,  B41J2/164 ,  H01L41/047 ,  H01L41/318 ,  H01L41/331

    摘要： Disclosed is an electromechanical transducer film forming method including a surface modification process; an application process; and processes of drying, thermally decomposing, and crystallizing sol-gel solution applied to a portion of a surface of a first electrode. An electromechanical transducer film is formed on a desired pattern area on the surface of the first electrode by repeating the above processes. In the application process, each of dots of the sol-gel solution applied by the inkjet method drops onto both a first area inside the desired pattern area and a second area outside the desired pattern area. The first area is a hydrophilic area on the surface of the first electrode, and the second area is a hydrophobic area on the surface of the first electrode. The hydrophilic area and the hydrophobic area have been modified by the surface modification process.

    摘要翻译： 公开了一种包括表面改性工艺的机电换能器成膜方法; 申请流程; 以及施加到第一电极的表面的一部分上的溶胶 - 凝胶溶液的干燥，热分解和结晶过程。 通过重复上述过程，在第一电极的表面上的期望图案区域上形成机电换能器膜。 在涂布过程中，通过喷墨法施加的溶胶 - 凝胶溶液的每个点落在期望图案区域内的第一区域和期望图案区域外的第二区域上。 第一区域是第一电极表面上的亲水区域，第二区域是第一电极表面上的疏水区域。 亲水区域和疏水区域已经通过表面改性过程进行了修饰。