摘要:
A method of fabricating an electromechanical transducer film includes applying a precursor solution on a support substrate, heating the substrate at a first temperature to form a ceramic thin-film in amorphous state, applying a sol-gel solution onto the ceramic thin-film, and heating the ceramic thin-film at a second temperature to form an electromechanical transducer thin-film in amorphous state. The method further includes heating the ceramic and transducer thin-films at a third temperature to thermally decompose an organic substance in the sol-gel solution and form a unitary thin-film, processing the unitary thin-film to form a patterned unitary thin-film, modifying an area on which the patterned film is not formed, discharging the sol-gel solution onto a surface of the patterned film by a liquid discharge head to apply the sol-gel solution to the surface of the patterned film, and heating the patterned film at a fourth temperature to crystallize the patterned film.
摘要:
An electronic device includes a substrate; and a plurality of thin-film elements formed on the substrate. Further, the thin-film element includes a thin-film section having a function selected from a group including piezoelectric effect, inverse piezoelectric effect, charge storage, semiconductivity, and conductivity, and the plurality of thin-film elements includes the thin-film sections having two or more different functions.
摘要:
A precursor sol-gel solution is provided that has been subjected to a partial hydrolysis process and is used for forming an oxide dielectric film having a perovskite structure represented by the general formula ABO3. The precursor sol-gel solution is subjected to a stabilization process for controlling a viscosity change resulting from the partial hydrolysis process to be less than or equal to 50%, and water contained in the precursor sol-gel solution is controlled to be greater than or equal to 0.50 times and less than or equal to 10 times by molar ratio with respect to a B site atom contained in the precursor sol-gel solution.
摘要:
An electromechanical transducer element includes a first electrode on a substrate, an electromechanical transducer film on the first electrode, and a second electrode on the electromechanical transducer film. The electromechanical transducer film includes a thin line pattern. The thin line pattern includes a plurality of thin lines that are spaced away from each other.
摘要:
A functional ink that includes a precursor sol-gel solution and a solvent is provided. The precursor sol-gel solution is used for forming an oxide dielectric film having a perovskite structure represented by a general formula ABO3, and has been subjected to a partial hydrolysis process in which a viscosity change resulting from the partial hydrolysis process is controlled to be less than or equal to 50%, and water contained in the precursor sol-gel solution is controlled to be greater than or equal to 0.50 times and less than or equal to 10 times by molar ratio with respect to a B site atom contained in the precursor sol-gel solution. The functional ink has a metal oxide concentration and a viscosity that renders the functional ink suitable for being discharged from a nozzle of a liquid droplet discharge apparatus included in a thin film fabrication apparatus.
摘要:
An actuator includes a base member and an electro-mechanical transducer element including a first electrode, an electro-mechanical transducer film, and a second electrode. Further, the base member includes a thin wall part having a concave shape, the electro-mechanical transducer film is formed in a manner such that a film thickness of the electro-mechanical transducer film is gradually reduced from a center part of the electro-mechanical transducer film to both end parts of the electro-mechanical transducer film in at least one direction crossing a film thickness direction of the electro-mechanical transducer film.
摘要:
An electromechanical transducer element includes a first electrode; an electromechanical transducer film stacked on one surface of the first electrode; a second electrode stacked on the electromechanical transducer film; and wiring formed on the second electrode. In an at least one cross section, each of a boundary, on a second electrode side, of the electromechanical transducer film and a boundary, on a side opposite to the electromechanical transducer film, of the second electrode is a curved shape protruding away from the first electrode. In the at least one cross section, each of a film thickness of the electromechanical transducer film and a film thickness of the second electrode becomes thinner toward end portions from a maximum height portion.
摘要:
An applying liquid is applied to a first electrode by ejecting from a nozzle the applying liquid including a raw material for forming an elecromechanical transducer film, and a film of the applying liquid applied onto the first electrode is dried. The dried film is thermally decomposed and crystallized. At this time, a voltage is applied to an accompanying droplet collecting electrode for collecting a small accompanying droplet accompanying a chief droplet. The accompanying droplet is electrostatically attracted and collected by the accompanying droplet collecting electrode before reaching the first electrode. At this time, the voltage is applied to the accompanying droplet collecting electrode by the voltage applying part after a predetermined period of time has elapsed from when a droplet of the applying liquid has been ejected from the nozzle.
摘要:
A first acceleration gear ratio is acquired for accelerating a host vehicle in a first acceleration zone following a first zone ahead of the host vehicle, and a second acceleration gear ratio is acquired for accelerating the host vehicle in a second acceleration zone following a second zone ahead of the first zone. A control is executed to set the gear ratio of the host vehicle to the first acceleration gear ratio in a first deceleration zone in order to decelerate the host vehicle before entering the first zone. A control is executed to set the gear ratio of the host vehicle to the second acceleration gear ratio when the host vehicle must decelerate with respect to the second zone while traveling in the first acceleration gear ratio.
摘要:
According to one embodiment, a protective relaying device includes a phase difference calculating unit configured to calculate a phase difference between a phase obtained by shifting a phase of first current data by 180°, and a phase of second current data, a setting unit configured to calculate a target value of elimination of a sampling synchronization error caused by a difference between a transmission delay time of up-transmission, and a transmission delay time of down-transmission on the basis of the phase difference, and to set the calculated target value, and a sampling synchronization control unit configured to carry out control of sampling synchronization such that a difference between a time TM and a time TF.