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公开(公告)号:US20190203009A1
公开(公告)日:2019-07-04
申请号:US16311888
申请日:2017-06-21
Applicant: BASF SE
Inventor: Uwe KEPPELER , Juergen BARTL , Juergen AHLERS , Christian DAESCHLEIN , Peter GUTMANN , Frank PRISSOK
CPC classification number: C08J9/18 , B29C44/3453 , B29C44/3461 , B29K2077/00 , B29K2101/12 , B29K2995/0063 , C08G69/40 , C08J9/122 , C08J9/141 , C08J9/232 , C08J2201/032 , C08J2201/034 , C08J2300/22 , C08J2300/26 , C08J2377/00 , C08J2377/06
Abstract: A process for producing foam particles composed of thermoplastic elastomers having polyamide segments, comprising the steps:(a) production of a suspension of pellets of the thermoplastic elastomer in a suspension medium, (b) addition of a blowing agent, (c) impregnation of the pellets with the blowing agent by heating of the suspension in a pressure vessel to an impregnation temperature IMT at an impregnation pressure IMP, depressurization of the suspension by emptying of the pressure vessel via a depressurization device and work-up of the foam particles obtained, and also foam particles obtainable by the process.
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公开(公告)号:US20190144781A1
公开(公告)日:2019-05-16
申请号:US16307191
申请日:2017-05-31
Applicant: BASF SE
Inventor: Christian DAESCHLEIN , Max SIEBERT , Michael LAUTER , Leonardus LEUNISSEN , Ivan GARCIA ROMERO , Haci Osman GUEVENC , Peter PRZYBYLSKI , Julian PROELSS , Andreas KLIPP
Abstract: Described is a post chemical-mechanical-polishing (post-CMP) cleaning composition comprising or consisting of: (A) one or more water-soluble nonionic copolymers of the general formula (I) and mixtures thereof, formula (I) wherein R1 and R3 are idependently from each other hydrogen, methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-Butyl, or sec-butyl, R2 is methyl and x and y are an integer,1 (B)poly(acrylic acid) (PAA) oracrylic acid-maleic acid copolymer with a mass average molar mass (Mw) of up to 10,000 g/mol, and (C)water, wherein the pH of the composition is in the range of from 7.0 to 10.5.
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公开(公告)号:US20200299547A1
公开(公告)日:2020-09-24
申请号:US16765665
申请日:2018-11-12
Applicant: BASF SE
Inventor: Christian DAESCHLEIN , Max SIEBERT , Yongqing LAN , Michael LAUTER , Sheik Ansar USMAN IBRAHIM , Reza M GOLZARIAN , Te Yu WEI , Haci Osman GUEVENC , Julian PROELSS , Leonardus LEUNISSEN
IPC: C09G1/02 , H01L21/321
Abstract: The presently claimed subject matter is directed to a chemical mechanical polishing (CMP) composition comprising inorganic particles, at least one organic compound comprising an amino group and/or at least one acid group (Y), potassium persulfate, at least one corrosion inhibitor and an aqueous medium for polishing substrates of the semiconductor industry comprising cobalt and/or a cobalt alloy and TiN and/or TaN.
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公开(公告)号:US20190002802A1
公开(公告)日:2019-01-03
申请号:US16064686
申请日:2016-12-20
Applicant: BASF SE
Inventor: Christian DAESCHLEIN , Max SIEBERT , Michael LAUTER , Piotr PRZYBYLSKI , Julian PROELSS , Andreas KLIPP , Haci Osman GUEVENC , Leonardus LEUNISSEN , Roelf-Peter BAUMANN , Te Yu WEI
IPC: C11D7/26 , C11D7/32 , C11D3/00 , H01L21/321 , H01L21/02
Abstract: Described is a post chemical-mechanical-polishing (post-CMP) cleaning composition comprising or consisting of: (A) one or more nonionic polymers selected from the group consisting of poly-acrylamides, polyhydroxyethyl(meth)acrylates (PHE(M)A), polyvinylpyrrolidone (PVP), polyvinyl alcohol (PVA), polymers of formula (I), and mixtures thereof, wherein R1 is hydrogen, methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, or sec-butyl, R2 is hydrogen or methyl, and n is an integer, (B) poly(acrylic acid) (PAA) or acrylic acid-maleic acid copolymer with a mass average molar mass (Mw) of up to 10,000 g/mol, and (C) water, wherein the pH of the composition is in the range of from 7.0 to 10.5.
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公开(公告)号:US20180371371A1
公开(公告)日:2018-12-27
申请号:US16064918
申请日:2016-12-20
Applicant: BASF SE
Inventor: Christian DAESCHLEIN , Max SIEBERT , Michael LAUTER , Peter PRZYBYLSKI , Julian PROELSS , Andreas KLIPP , Haci Osman GUEVENC , Leonardus LEUNISSEN , Roelf-Peter BAUMANN , Te Yu WEI
Abstract: A post chemical-mechanical-polishing (post-CMP) cleaning composition including: (A) polyethylene glycol (PEG) with a mass average molar mass (Mw) in the range of from 400 to 8,000 g/mol, (B) an anionic polymer selected from poly(acrylic acid) (PAA), acrylic acid-maleic acid copolymers, polyaspartic acid (PASA), polyglutamic acid (PGA), polyvinylphosphonic acid, polyvinylsulfonic acid, poly(styrenesulfonic acid), polycarboxylate ethers (PCE), PEG-phosphorous acids, and copolymers of the polymers thereof, and (C) water, where the pH of the composition is from 7.0 to 10.5.
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