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12 条记录 (耗时 0.023 秒)

    Capacitive sensing scheme for digital control state detection in optical switches
    1.
    发明授权
    Capacitive sensing scheme for digital control state detection in optical switches 有权
    光开关中数字控制状态检测的电容感测方案

    公开(公告)号：US06788520B1

    公开(公告)日：2004-09-07

    申请号：US09724948

    申请日：2000-11-28

    申请人： Behrang Behin ,  Michael J. Daneman ,  Meng-Hsiung Kiang ,  Kam-Yin Lau ,  Timothy E. Beerling

    发明人： Behrang Behin ,  Michael J. Daneman ,  Meng-Hsiung Kiang ,  Kam-Yin Lau ,  Timothy E. Beerling

    IPC分类号： G02B2608

    CPC分类号： G02B6/358 ,  G02B6/3512 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/359

    摘要： Disclosed is an apparatus and method for detecting whether rotatable MEMS elements are in the “on” or “off” position. Embodiments of the invention have application in devices switches that employ mirrors that move between an “on” or “off” position, wherein they reflect light from an input fiber into an output fiber in the “on” position, and allow the light to pass in the “off” position. Electrodes are positioned in the device such that the mirrors are close to, and therefor capacitively coupled to, a different electrode depending on whether they are in the “on” or “off” position. This invention is especially useful for switches that already employ electrodes for electrostatic clamping of mirrors in one or more positions, since those same electrodes can be used both to electrostatically clamp the mirrors and to sense their position. The method described in this invention comprises sensing of the capacitance between the mirrors and the one or more electrodes used to clamp the mirrors in its one or more position in order to detect which of the positions the mirrors are clamped in. Furthermore, the magnitude of the capacitances can be monitored to detect improper clamping.

    摘要翻译： 公开了一种用于检测可旋转MEMS元件是处于“开”还是“关”位置的装置和方法。 本发明的实施例可应用于使用在“开”或“关”位置之间移动的反射镜的装置开关中，其中它们将来自输入光纤的光反射到处于“开”位置的输出光纤，并允许光通过 在“关”位置。 电极被定位在设备中，使得反射镜接近并因此电容耦合到不同的电极，这取决于它们是处于“开”还是“关”位置。 本发明对于已经使用用于在一个或多个位置中的反射镜的静电夹持的电极的开关特别有用，因为这些相同的电极可以用于静电夹紧反射镜并感测其位置。 本发明描述的方法包括检测反射镜之间的电容和用于将反射镜夹持在其一个或多个位置中的一个或多个电极，以便检测反射镜夹在哪一个位置。此外， 可以监控电容以检测不正确的夹紧。

    Tiling of optical MEMS devices
    2.
    发明授权
    Tiling of optical MEMS devices 有权
    光学MEMS器件的平铺

    公开(公告)号：US06873756B2

    公开(公告)日：2005-03-29

    申请号：US09949210

    申请日：2001-09-07

    申请人： Timothy E. Beerling ,  Michael J. Daneman

    发明人： Timothy E. Beerling ,  Michael J. Daneman

    IPC分类号： G02B26/08 ,  G02B6/26

    CPC分类号： G02B26/0841

    摘要： An optical microelectromechanical system (MEMS) device and a method for making it are disclosed. The device generally includes a substrate with two or more device dies attached to the substrate. Each device die includes one or more MEMS optical elements. A common clamping die is attached to the device dies such that each MEMS optical element aligns with a corresponding clamping surface on the common clamping die. The single larger clamping die, which covers all the elements on the smaller device dies, forces mirrors contained thereon to register accurately, in the “ON” state. Such a device may be made by attaching two or more device dies to a substrate, and attaching a common clamping die to the two or more device dies. The device dies may be attached to the substrate before attaching the common clamping die to the device dies. Alternatively, the common clamping die may be attached to the device dies before the device dies are attached to the substrate. High yields may be achieved since simple semiconductor process may be used to fabricate the larger clamping die.

    摘要翻译： 公开了一种光学微机电系统（MEMS）装置及其制造方法。 该装置通常包括具有附接到基板的两个或更多个器件裸片的衬底。 每个器件管芯包括一个或多个MEMS光学元件。 常见的夹紧模具附接到器件管芯，使得每个MEMS光学元件与公共夹紧模具上的对应夹紧表面对准。 覆盖较小器件裸片上的所有元件的单个较大的夹紧裸片在“ON”状态下迫使容纳在其上的反射镜准确地进行寄存。 这样的装置可以通过将两个或更多个器件管芯附接到衬底并且将公共夹紧管芯附接到两个或更多个器件管芯来制造。 在将公共夹紧模具附接到器件裸片之前，器件管芯可以附接到衬底。 或者，在将器件管芯附接到衬底之前，可以将公共夹紧模具附接到器件管芯。 可以实现高产率，因为可以使用简单的半导体工艺来制造更大的夹紧模具。

    Method of forming electrical connection for fluid ejection device
    5.
    发明授权
    Method of forming electrical connection for fluid ejection device 失效
    形成流体喷射装置电气连接的方法

    公开(公告)号：US06935023B2

    公开(公告)日：2005-08-30

    申请号：US10318430

    申请日：2002-12-12

    申请人： Timothy E. Beerling ,  Timothy L. Weber ,  Melissa D. Boyd

    发明人： Timothy E. Beerling ,  Timothy L. Weber ,  Melissa D. Boyd

    IPC分类号： B41J2/155 ,  B41J2/16 ,  B21D53/76 ,  H05K3/10

    CPC分类号： B41J2/1643 ,  B41J2/155 ,  B41J2/1601 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2202/18 ,  B41J2202/19 ,  B41J2202/20 ,  Y10T29/49083 ,  Y10T29/49155 ,  Y10T29/49165 ,  Y10T29/49401

    摘要： A method of forming an electrical connection for a fluid ejection device including a fluid channel communicating with a first side and a second side of the fluid ejection device and an array of drop ejecting elements formed on the first side of the fluid ejection device includes forming a trench in the second side of the fluid ejection device, depositing a conductive material in the trench, forming a first opening in the fluid ejection device between the first side of the fluid ejection device and the conductive material in the trench, depositing a conductive material in the first opening, and forming a conductive path between the conductive material in the first opening and a wiring line of one of the drop ejecting elements.

    摘要翻译： 形成用于流体喷射装置的电连接的方法包括与流体喷射装置的第一侧和第二侧连通的流体通道和形成在流体喷射装置的第一侧上的液滴喷射元件阵列包括形成 在流体喷射装置的第二侧中的沟槽，在沟槽中沉积导电材料，在流体喷射装置的第一侧和沟槽中的导电材料之间的流体喷射装置中形成第一开口，将导电材料沉积在 第一开口，并且在第一开口中的导电材料和一个液滴喷射元件的布线之间形成导电路径。

    Fluid ejecting device with varied nozzle spacing
    7.
    发明授权
    Fluid ejecting device with varied nozzle spacing 失效
    流体喷射装置具有不同的喷嘴间距

    公开(公告)号：US06394579B1

    公开(公告)日：2002-05-28

    申请号：US09379946

    申请日：1999-08-24

    申请人： Melissa D. Boyd ,  Mark E. Gorzynski ,  Timothy E. Beerling ,  Evan P. Smouse ,  Kenneth R Williams

    发明人： Melissa D. Boyd ,  Mark E. Gorzynski ,  Timothy E. Beerling ,  Evan P. Smouse ,  Kenneth R Williams

    IPC分类号： B41J214

    CPC分类号： B41J2/2103 ,  B41J2/15

    摘要： A fluid ejecting device with a body defining an array of nozzles. The nozzles are arranged in an array along an array axis. The array has a first portion in which the nozzles are spaced apart along the array axis by a first pitch, and a second portion in which the nozzles are spaced apart by a different second pitch. The array may have a third portion between the first and second portions with a third pitch different from the first and second pitch. An assembly may include two or more of such fluid ejection devices, and the second portion of one print head may be aligned with the first portion of the other print head. Printers incorporating the fluid ejection devices and printing methods are also disclosed.

    摘要翻译： 具有限定喷嘴阵列的主体的流体喷射装置。 喷嘴沿着阵列轴排列成阵列。 阵列具有第一部分，其中喷嘴沿着阵列轴线间隔开第一节距，以及第二部分，其中喷嘴以不同的第二节距隔开。 阵列可以具有在第一和第二部分之间的第三部分，具有不同于第一和第二间距的第三间距。 组件可以包括这种流体喷射装置中的两个或更多个，并且一个打印头的第二部分可以与另一打印头的第一部分对准。 还公开了结合流体喷射装置和打印方法的打印机。

    Electrical interconnect for an inkjet die
    9.
    发明授权
    Electrical interconnect for an inkjet die 失效
    喷墨模具的电气互连

    公开(公告)号：US06692111B2

    公开(公告)日：2004-02-17

    申请号：US10081802

    申请日：2002-02-22

    申请人： Timothy E. Beerling ,  Marvin G. Wong ,  Wan Sin Ng ,  Juliana Arifin ,  Jiansan Sun ,  Arief Budiman Suriadi ,  Naoto Kawamura

    发明人： Timothy E. Beerling ,  Marvin G. Wong ,  Wan Sin Ng ,  Juliana Arifin ,  Jiansan Sun ,  Arief Budiman Suriadi ,  Naoto Kawamura

    IPC分类号： B41S205

    CPC分类号： B41J2/1628 ,  B41J2/14024 ,  B41J2/14072 ,  B41J2/14129 ,  B41J2/1603 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1643 ,  B41J2/1646

    摘要： An electrical interconnect for an inkjet printhead comprising an ink-ejecting semiconductor die is described. The ink-ejecting die further comprises a substrate having an opposing upper surface, lower surface, and a thin film stack. The upper surface of the substrate is beveled on at least one edge such that a lower portion of the bevel is below an upper portion of the bevel. A conductive material trace is disposed on top of at least a portion of the upper surface and the thin film stack and on the bevel towards the lower portion of the bevel. An electrical conductor is coupled to the conductive material trace at a predetermined location below the upper portion of the bevel. In a preferred embodiment of the current invention, the conductive material trace is substantially below the surface of the printhead thereby creating a robust printhead having several advantages including but not limited to: (1) electrical interconnects that are solidified in an encapsulant and therefore protected from chemical etching of the ink and vibrational/physical forces generated by the printer, (2) minimized die to printing medium distance and (3) minimized ESD effects on the beveled die.

    摘要翻译： 描述了一种用于包括喷墨半导体管芯的喷墨打印头的电互连。 喷墨模具还包括具有相对的上表面，下表面和薄膜叠层的基板。 基板的上表面在至少一个边缘上倾斜，使得斜面的下部在斜面的上部下方。 导电材料迹线设置在上表面和薄膜堆叠的至少一部分的顶部上，并且朝向斜面的下部的斜面上。 电导体在斜面的上部下方的预定位置处联接到导电材料迹线。 在本发明的优选实施例中，导电材料迹线基本上在打印头的表面下方，从而形成具有若干优点的坚固的打印头，包括但不限于：（1）在密封剂中固化的电互连， 油墨的化学蚀刻以及打印机产生的振动/物理力，（2）使模具与打印介质距离最小化，（3）最小化对斜面模具的ESD影响。