Surface acoustic wave filter
    2.
    发明授权
    Surface acoustic wave filter 有权
    表面声波滤波器

    公开(公告)号:US06833774B2

    公开(公告)日:2004-12-21

    申请号:US10414058

    申请日:2003-04-15

    IPC分类号: H03H916

    CPC分类号: H03H9/02559 H03H9/6483

    摘要: A SAW filter includes a piezoelectric substrate of a single crystal LiNbO3 and SAW resonators having an electrode thickness ranging from about 8% to about 9% of an acoustic wavelength of a high velocity SAW excited on the surface of the substrate. The piezoelectric substrate has an orientation defined by Euler angles (&lgr;, &mgr;, &thgr;), with angle &lgr; in a range from −5° to +5°, angle &mgr; in a range from about 75° to about 85°, and angle &thgr; in a range from 85° to 95°. A metalization ratio for the resonators ranges from about 0.3 to about 0.9, with resonators in a parallel arm of the filter having a metalization ratio from 1.1-1.4 times larger than the metalization ratio for resonators in the series arm of the filter. Such orientations simultaneously combined with an optimized electrode thickness and optimized metalization ratios provide an improved performance in RF applications.

    摘要翻译: SAW滤波器包括单晶LiNbO 3的压电基片和具有在衬底表面上激发的高速SAW的声波的约8%至约9%的电极厚度的SAW谐振器。 压电衬底具有由欧拉角(λ,μ,θ)限定的取向,角度λ在-5°至+ 5°的范围内,角度μ在约75°至约85°的范围内,角度θ 在85°至95°的范围内。 谐振器的金属化比范围为约0.3至约0.9,其中滤波器的并联臂中的谐振器的金属化比例为滤波器的串联臂中的谐振器的金属化率的1.1-1.4倍。 这种取向同时与优化的电极厚度和优化的金属化比组合提供了RF应用中改进的性能。

    Surface acoustic wave devices using optimized cuts of lithium niobate (LiNbO3)
    3.
    发明授权
    Surface acoustic wave devices using optimized cuts of lithium niobate (LiNbO3) 有权
    使用铌酸锂(LiNbO3)优化切割的表面声波器件

    公开(公告)号:US06661313B2

    公开(公告)日:2003-12-09

    申请号:US10003060

    申请日:2001-10-25

    IPC分类号: H03H964

    CPC分类号: H03H9/02559

    摘要: A surface acoustic wave device includes a piezoelectric substrate of a single crystal LiNbO3 and an electrode pattern provided on a surface of the piezoelectric substrate which forms a resonator having an electrode thickness in a range of about 0.1% to about 8% of an acoustic wavelength of a surface acoustic wave excited on the surface of the substrate. The piezoelectric substrate has an orientation defined by Euler angles (&lgr;,&mgr;,&thgr;), with angle &lgr; in a range from −20° to +20°, angle &mgr; in a range from about −45° to about −10°, and angle &thgr; in a range from about (−1.16&lgr;−1.5)° to (−1.16&lgr;+1.5)°, wherein one of angle &lgr; and &thgr; is not equal to zero degrees. Such orientations simultaneously combined with an optimized propagation loss at resonant and anti-resonant frequencies provide for improved performance in RF applications.

    摘要翻译: 表面声波装置包括单晶LiNbO 3的压电基片和设置在压电基片的表面上的电极图案,该电极图形成电极厚度在声波波长的约0.1%至约8%的范围内的谐振器 在衬底的表面上激发表面声波。 压电衬底具有由欧拉角(λ,μ,θ)限定的取向,角度λ在-20°至+ 20°的范围内,角度μ在约-45°至约-10°的范围内;以及 角度θ在约(-1.16λ-1.5)°至(-1.16λ+ 1.5)°的范围内,其中角度λ和θ之一不等于零度。 同时与谐振和反谐振频率下的优化传播损耗相结合的这种取向提供了射频应用中改进的性能。

    High coupling, low loss saw filter and associated method
    5.
    发明授权
    High coupling, low loss saw filter and associated method 有权
    高耦合,低损耗滤波器及相关方法

    公开(公告)号:US08294330B1

    公开(公告)日:2012-10-23

    申请号:US12414706

    申请日:2009-03-31

    IPC分类号: H03H9/25

    CPC分类号: H03H9/02834

    摘要: A surface acoustic wave device with improved temperature characteristics includes a piezoelectric substrate of a single crystal of symmetry 3m, providing propagation of a SAW having an electromechanical coupling factor exceeding 5%, an electrode pattern on a substrate surface forming a resonator, and a SiOx overlay covering the electrode pattern. An optimized thickness of the electrodes combined with an SiOx overlay provide improved performance in RF applications with improved temperature characteristics. To suppress spurious responses the SiOx thickness is varied depending upon the relative thickness and period of the electrodes. The electrode pattern forms resonators with the silicon oxide thickness over the electrodes inversely related to the period of the electrodes of the resonators.

    摘要翻译: 具有改善的温度特性的表面声波装置包括具有对称性3m的单晶的压电基片,提供机电耦合系数超过5%的SAW的传播,形成谐振器的基板表面上的电极图案,和SiOx覆盖层 覆盖电极图案。 与SiOx覆盖层结合的电极的优化厚度在具有改进的温度特性的RF应用中提供改进的性能。 为了抑制杂散响应,SiO x厚度根据电极的相对厚度和周期而变化。 电极图案形成在电极上的氧化硅厚度与谐振器的电极的周期成反比的谐振器。

    Surface acoustic wave devices using surface acoustic waves with strong piezoelectric coupling
    6.
    发明授权
    Surface acoustic wave devices using surface acoustic waves with strong piezoelectric coupling 有权
    表面声波装置使用表面声波与强耦合

    公开(公告)号:US07446453B1

    公开(公告)日:2008-11-04

    申请号:US11773151

    申请日:2007-07-03

    IPC分类号: H03H9/25

    CPC分类号: H03H9/02559 H03H9/14538

    摘要: A SAW device includes a LiNbO3 single crystal piezoelectric substrate having an orientation defined by Euler angles (λ,μ,θ), with angle λ ranging from −5° to +5°, angle μ ranging from about −74° to about −65°, and angle θ ranging from −5° to +5°. Electrode patterns on a surface of the substrate form element resonators having a metallization ratio ranging from about 0.3 to about 0.8 and electrode thicknesses ranging from about 12% to about 17.5% of an acoustic wavelength of a strongly coupled non-leaky surface acoustic wave, excited on the surface of the substrate, if Al is used as electrode material, and in a range from about 6% to about 10% of an acoustic wavelength, if Cu is used as electrode material. Such orientations simultaneously combined with an optimized electromechanical coupling of spurious surface acoustic mode provide for improved performance in RF applications with a widened passband.

    摘要翻译: SAW器件包括具有由欧拉角(λ,μ,θ)限定的取向,角度λ为-5°至+ 5°的取向的LiNbO 3单晶压电基片, 约-74°至约-65°,角度θ为-5°至+ 5°。 衬底表面上的电极图案形成金属化率范围为约0.3至约0.8的元件谐振器和强耦合的非泄漏表面声波的声波的约12%至约17.5%的电极厚度,激发 如果使用Cu作为电极材料,则在基板的表面上,如果使用Al作为电极材料,并且在约6%至约10%的声波长的范围内。 这种取向同时与优化的机电耦合的杂散表面声学模式相结合,提供了具有加宽通带的RF应用中的改进的性能。

    Surface acoustic wave devices using optimized cuts of a piezoelectric substrate
    7.
    发明授权
    Surface acoustic wave devices using optimized cuts of a piezoelectric substrate 有权
    使用优化的压电基片的表面声波装置

    公开(公告)号:US06556104B2

    公开(公告)日:2003-04-29

    申请号:US09848714

    申请日:2001-05-03

    IPC分类号: H03H964

    CPC分类号: H03H9/6483 H03H9/02559

    摘要: A surface acoustic wave device includes a piezoelectric substrate of a single crystal LiTaO3 and an electrode pattern provided on a surface of the piezoelectric substrate which forms a resonator having an electrode thickness in a range of about 1% to about 15% of an acoustic wavelength of a surface acoustic wave excited on the surface of the substrate. The piezoelectric substrate has an orientation defined by Euler angles (&lgr;, &mgr;, &thgr;), with angle &lgr; in a range from −4° to +4°, angle &mgr; in a range from about −52° to about −36°, and angle &thgr; in a range from about (−1.365 &lgr;−4)° to (−1.365 &lgr;+4)°. Such orientations simultaneously combined with an optimized propagation loss at resonant and anti-resonant frequencies provide for improved performance in RF applications.

    摘要翻译: 表面声波装置包括单晶LiTaO 3的压电衬底和设置在压电衬底的表面上的电极图案,该电极图形成电极厚度在声波波长的约1%至约15%的范围内的谐振器 在衬底的表面上激发表面声波。 压电衬底具有由欧拉角(兰德,mu,θ)限定的取向,角度范围在-4°至+ 4°之间,角度μ在约-52°至约-36°的范围内;以及 角度θ在约(-1.365 lambd-4)°至(-1.365 lambd + 4)°的范围内。 同时与谐振和反谐振频率下的优化传播损耗相结合的这种取向提供了射频应用中改进的性能。

    Die layout for SAW devices and associated methods

    公开(公告)号:US06566980B2

    公开(公告)日:2003-05-20

    申请号:US09823270

    申请日:2001-03-30

    IPC分类号: H03H964

    摘要: A surface-acoustic-wave die includes a generally rectangular die that comprises a piezoelectric material, atop which is positioned a surface-acoustic-wave electrode pattern. The pattern has a generally rectangular footprint, and the footprint has a top edge that is positioned at an acute, nonzero angle to a top end of the die. A pair of generally rectangular electrode pads are both in electrical contact with the electrode pattern, each pad adjacent diametrically opposed corners of the die. The device addresses the inefficiency in the conventional die layout technique, and provides a method for reducing the width of the die for SAW coupled resonator filters resulting in a smaller package.