摘要:
Disclosed embodiments include a surface acoustic wave device having electrode period, electrode width, and/or ratio of electrode width to electrode period varied in a prescribed manner.
摘要:
A SAW filter includes a piezoelectric substrate of a single crystal LiNbO3 and SAW resonators having an electrode thickness ranging from about 8% to about 9% of an acoustic wavelength of a high velocity SAW excited on the surface of the substrate. The piezoelectric substrate has an orientation defined by Euler angles (&lgr;, &mgr;, &thgr;), with angle &lgr; in a range from −5° to +5°, angle &mgr; in a range from about 75° to about 85°, and angle &thgr; in a range from 85° to 95°. A metalization ratio for the resonators ranges from about 0.3 to about 0.9, with resonators in a parallel arm of the filter having a metalization ratio from 1.1-1.4 times larger than the metalization ratio for resonators in the series arm of the filter. Such orientations simultaneously combined with an optimized electrode thickness and optimized metalization ratios provide an improved performance in RF applications.
摘要:
A surface acoustic wave device includes a piezoelectric substrate of a single crystal LiNbO3 and an electrode pattern provided on a surface of the piezoelectric substrate which forms a resonator having an electrode thickness in a range of about 0.1% to about 8% of an acoustic wavelength of a surface acoustic wave excited on the surface of the substrate. The piezoelectric substrate has an orientation defined by Euler angles (&lgr;,&mgr;,&thgr;), with angle &lgr; in a range from −20° to +20°, angle &mgr; in a range from about −45° to about −10°, and angle &thgr; in a range from about (−1.16&lgr;−1.5)° to (−1.16&lgr;+1.5)°, wherein one of angle &lgr; and &thgr; is not equal to zero degrees. Such orientations simultaneously combined with an optimized propagation loss at resonant and anti-resonant frequencies provide for improved performance in RF applications.
摘要:
Disclosed embodiments include a surface acoustic wave device having electrode period, electrode width, and/or ratio of electrode width to electrode period varied in a prescribed manner.
摘要:
A surface acoustic wave device with improved temperature characteristics includes a piezoelectric substrate of a single crystal of symmetry 3m, providing propagation of a SAW having an electromechanical coupling factor exceeding 5%, an electrode pattern on a substrate surface forming a resonator, and a SiOx overlay covering the electrode pattern. An optimized thickness of the electrodes combined with an SiOx overlay provide improved performance in RF applications with improved temperature characteristics. To suppress spurious responses the SiOx thickness is varied depending upon the relative thickness and period of the electrodes. The electrode pattern forms resonators with the silicon oxide thickness over the electrodes inversely related to the period of the electrodes of the resonators.
摘要:
A SAW device includes a LiNbO3 single crystal piezoelectric substrate having an orientation defined by Euler angles (λ,μ,θ), with angle λ ranging from −5° to +5°, angle μ ranging from about −74° to about −65°, and angle θ ranging from −5° to +5°. Electrode patterns on a surface of the substrate form element resonators having a metallization ratio ranging from about 0.3 to about 0.8 and electrode thicknesses ranging from about 12% to about 17.5% of an acoustic wavelength of a strongly coupled non-leaky surface acoustic wave, excited on the surface of the substrate, if Al is used as electrode material, and in a range from about 6% to about 10% of an acoustic wavelength, if Cu is used as electrode material. Such orientations simultaneously combined with an optimized electromechanical coupling of spurious surface acoustic mode provide for improved performance in RF applications with a widened passband.
摘要:
A surface acoustic wave device includes a piezoelectric substrate of a single crystal LiTaO3 and an electrode pattern provided on a surface of the piezoelectric substrate which forms a resonator having an electrode thickness in a range of about 1% to about 15% of an acoustic wavelength of a surface acoustic wave excited on the surface of the substrate. The piezoelectric substrate has an orientation defined by Euler angles (&lgr;, &mgr;, &thgr;), with angle &lgr; in a range from −4° to +4°, angle &mgr; in a range from about −52° to about −36°, and angle &thgr; in a range from about (−1.365 &lgr;−4)° to (−1.365 &lgr;+4)°. Such orientations simultaneously combined with an optimized propagation loss at resonant and anti-resonant frequencies provide for improved performance in RF applications.
摘要:
A SAW filter includes a piezoelectric substrate of Lithium Niobate or optionally Lithium Tantalate having a thickness of at least twice an acoustic wavelength. The piezoelectric substrate is bonded to a surrogate substrate of a silicon material. The surrogate substrate is characterized by a resisitivity of at least 100 ohm-cm and an expansion coefficient compatible with the piezoelectric substrate. A catalytic bonding film between the piezoelectric substrate and the surrogate substrate is formed from a first catalytic bonding film deposited onto a surface of the piezoelectric substrate and a second catalytic bonding film deposited onto a surface of the surrogate substrate. The piezoelectric substrate is bonded to the surrogate substrate through a compression force sufficient for providing a bonding at a normal temperature.
摘要:
A surface-acoustic-wave die includes a generally rectangular die that comprises a piezoelectric material, atop which is positioned a surface-acoustic-wave electrode pattern. The pattern has a generally rectangular footprint, and the footprint has a top edge that is positioned at an acute, nonzero angle to a top end of the die. A pair of generally rectangular electrode pads are both in electrical contact with the electrode pattern, each pad adjacent diametrically opposed corners of the die. The device addresses the inefficiency in the conventional die layout technique, and provides a method for reducing the width of the die for SAW coupled resonator filters resulting in a smaller package.
摘要:
A Lithium Tantalate crystal, defined by the Euler angles lambda (.lambda.) equal to about 0.degree. and mu (.mu.) equal to about 90.degree. with an acoustic wave propagation direction angle theta (.theta.) in the range of plus 130.degree. to plus 150.degree. and preferably equal to about plus 141.25.degree., offers unique properties for surface acoustic wave device applications.