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1.发明授权Electron beam apparatus with adjusting mechanism for a thermally emitting cathod tip 失效具有用于发热阴极尖端的调节机构的电子束装置
公开(公告)号：US5001385A
公开(公告)日：1991-03-19
申请号：US316393
申请日：1989-02-27
IPC分类号： H01J1/15 , H01J1/18 , H01J37/06 , H01J37/067
摘要： In order to avoid undesired variations in the emission current intensity of a clamping device for a thermally emitting cathode tip constructed from pyrolytice graphite, a resilient coupling compensating the thermal stresses n the graphite is provided in an electron beam apparatus.
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公开(公告)号：US5588963A
公开(公告)日：1996-12-31
申请号：US240665
申请日：1994-04-29
CPC分类号： G05D7/0676 , A61M5/1689 , G01F3/00 , A61M2205/3306
摘要： In a method to determine or regulate flows or flow rates of liquids such as those used in medical infusion systems, optical imaging means are used for real flow measuring. The increase in volume of drops hanging at an outlet and the increase of volume of liquid gathered in a container can be measured by image acquisition and image processing. This increase of volume represents a real time flow. As an example, signals obtained from these measurements can be used to control or adjust volume flow for medical treatment or medical diagnosis. An apparatus to carry out such a method can be composed of devices well known per se.
摘要翻译： PCT No.PCT / NL92 / 00193 Sec。 371日期1994年04月29日 102（e）日期1994年4月29日PCT提交1992年10月28日PCT公布。 出版物WO93 / 09407 日期1993年5月13日在用于确定或调节诸如用于医用输液系统中的液体的流量或流速的方法中，光学成像装置用于实际流量测量。 可以通过图像获取和图像处理来测量悬挂在出口处的液滴的体积增加和聚集在容器中的液体的体积增加。 体积的增加代表实时流量。 作为示例，从这些测量获得的信号可用于控制或调节用于医疗或医疗诊断的体积流量。 执行这种方法的装置可以由本身公知的装置组成。
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公开(公告)号：US4568833A
公开(公告)日：1986-02-04
申请号：US740308
申请日：1985-06-03
IPC分类号： H01J37/22 , H01J37/30 , H01J37/317 , H01L21/027 , H01J3/16 , H01J29/60 , H01J37/302
CPC分类号： H01J37/317 , H01J37/3007
摘要： For forming an array or series of elementary beams of charged particles, a beam exposure device includes a mirror system having a matrix of sub-mirrors. Using such a composite mirror, a multiple beam image is formed in a location which deviates from the position of the cross-over of principal rays of the elementary beams. Consequently, the elementary beams, which may alternatively be ion beams, can be separated modulated and controlled. For suitable imaging, such as the writing of patterns for a micro-electronic circuit element, the images and the cross-over of the principal rays of the elementary beams are combined. For this purpose, use is made of a second mirror whose sub-mirrors have an optical effect which opposes that of the first mirror.
摘要翻译： 为了形成带电粒子的阵列或一系列基本束，束曝光装置包括具有子反射镜矩阵的反射镜系统。 使用这种复合反射镜，在偏离基本光束的主光线的交叉位置的位置处形成多光束图像。 因此，可以分离调制和控制基本光束，其也可以是离子束。 对于合适的成像，例如写入微电子电路元件的图案，组合基本光束的图像和主光线的交叉。 为此，使用第二反射镜，其副反射镜具有与第一反射镜相反的光学效果。
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