摘要:
Craft (11) generally and in particular the transport aircraft (11) which are used for humanitarian purposes and for supplying crisis reaction forces over militarily unknown territory and which have comparatively little manoeuverability are particularly endangered by partisans who operate out of cover with modern portable guided missiles (12), against whose homing heads (13) the flares which were previously discharged from aircraft (11) no longer afford an effective defence. Therefore those and other potentially endangered craft (11) are provided with easily interchangeably and autarchically equipped containers (17) from which the defence beam (16) of a laser source (21) in accordance with pre-guidance by a warning sensor (10), are directed by way of the tracking optical system (19) of a target tracking system (20) on to the approaching guided missile (12) whose homing head (13) is already locked on to heat sources such as for example the engines of the craft (11) to be protected. For quickly and reliably detecting the guided missile (12) which is initially only in the form of a point, against the clutter background, the tracking camera is so-to-speak scanned stroboscopically on to the pulsating reflections of the defence beam (16) at the missile (12). The energy which is emitted towards the attacking missile (12) disturbs the optronic detector function in the homing head (13) by the clock of a pulsed beam (16). Superimposed thereon, in the event of a closer approach, is overloading of the IR-detector by the beam frequency which is in the working band of the homing head (13) and finally thermal destruction of the homing head (13) if the attacking missile (12) has not already previously deflected out of its path of attack due to the failure of its target tracking regulating loop. A continuous-wave illumination beam (40) of lower power and which is spectrally adjacent and which tracks on to a glint somewhat away from the defence beam (16) also serves with its reflection energy for actuation of the topography of an adaptive optical system (42) for compensating for atmospheric propagation disturbances.
摘要:
A simulator to be used in ophthalmological measurements includes a display apparatus and a control device. The control device is adapted to control the display apparatus in such a manner that the display apparatus displays an image that is adapted to simulate the arrangement of a pupillary midpoint relative to a reference structure.
摘要:
An apparatus for processing material with focused electromagnetic radiation, comprises: a source emitting electromagnetic radiation, means for directing the radiation onto the material, means for focusing the radiation on or in the material, a unit for generating a pattern in the optical path of the electromagnetic radiation, an at least partially reflective surface in the optical path before the focus of the focused radiation, said pattern being imaged onto said at least partially reflective surface through at least part of said directing means and said focusing means, at least one detector onto which an image of the pattern is reflected by said surface and which generates electrical signals corresponding to said image, said image containing information on the position of the focus, a computer receiving said electrical signals and programmed to process said image so as to generate an electrical signal depending on the focal position, and a divergence adjustment element arranged in said optical path and adapted to receive said electrical signal of the computer so as to change a divergence of the electromagnetic radiation depending on said signal.
摘要:
The disclosure relates to microlithography systems, such as EUV micro-lithography illumination systems, as well as related components, systems and methods.
摘要:
A facet mirror (10) is provided with a number of mirror facets (11), in which the mirror facets (11) respectively have a spherical or conical facet body (17) with a reflecting surface (12). The side of the facet body (17) averted from the reflecting surface (12) is mounted in a bearing device (15).
摘要:
The present invention relates to a laser apparatus, system, and method for determining a depth of a focus point of a laser beam. An interface device is coupleable to the laser apparatus and has an applanation element comprising a front surface and a back surface. A laser beam having a predefined shape is focussed through the applanation element at a focus point. A superimposed image of a spurious reflection, which is reflected from the front surface of the applanation element, with a standard reflection, which is reflected from the back surface of the applanation element, is detected. The spurious reflection is then filtered out of the superimposed image. Based on the remaining standard reflection, the depth of the focus point of the laser beam can be determined.
摘要:
The disclosure relates to microlithography systems, such as EUV micro-lithography illumination systems, as well as related components, systems and methods.
摘要:
Illumination optics for EUV microlithography guide an illumination light bundle from a radiation source to an object field with an extension ratio between a longer field dimension and a shorter field dimension, where the ratio is considerably greater than 1.
摘要:
An illumination system of a microlithographic projection exposure apparatus includes a primary light source, a system pupil surface and a mirror array. The mirror array is arranged between the primary light source and the system pupil surface. The mirror array includes a plurality of adaptive mirror elements. Each mirror element includes a mirror support and a reflective coating. Each mirror element is configured to direct light produced by the primary light source towards the system pupil surface. The mirror elements can be tiltably mounted with respect to a support structure. The mirror elements include structures having a different coefficient of thermal expansion and being fixedly attached to one another. A temperature control device is configured to variably modify the temperature distribution within the structures to change the shape of the mirror elements.
摘要:
An illumination system of a microlithographic projection exposure apparatus includes a primary light source, a system pupil surface and a mirror array. The mirror array is arranged between the primary light source and the system pupil surface. The mirror array includes a plurality of adaptive mirror elements. Each mirror element includes a mirror support and a reflective coating. Each mirror element is configured to direct light produced by the primary light source towards the system pupil surface. The mirror elements can be tiltably mounted with respect to a support structure. The mirror elements include structures having a different coefficient of thermal expansion and being fixedly attached to one another. A temperature control device is configured to variably modify the temperature distribution within the structures to change the shape of the mirror elements.