公开(公告)号：US08141712B2

公开(公告)日：2012-03-27

申请号：US11787082

申请日：2007-04-13

申请人： Brian Wiseman ,  Michael Peterson ,  Tony Simpson

发明人： Brian Wiseman ,  Michael Peterson ,  Tony Simpson

IPC分类号： B65D85/00

CPC分类号： H01L21/6732 ,  H01L21/67383 ,  Y10S206/832

摘要： A plastic insert is configured to provide support of thin wafers in wafer carriers configured to provide peripheral wafer support. The invention includes the insert, the insert in combination with a wafer carrier, and the methods of supporting the thin wafers as provided by the insert and the wafer carrier. The inserts, in preferred embodiments, utilize tabs that fit into the side wall recesses and have an interference fit in said recesses to secure the insert in place. In preferred embodiments the inserts have a top surface with a plurality of ribs positioned inwardly from the wafer periphery for supporting the wafers with minimal contact. In preferred embodiments the insert has a lower surface having strengthening structure providing rigidity to the insert. The top surface ribs may preferably be oriented parallel to the insertion and withdrawal direction of the wafers and extend upwardly to position the supported wafer in the slot immediately above the slot defined by the recesses in which the tabs are positioned. Thus, the inserts may be inserted into alternate slots in the carrier. The insert, in preferred embodiments may have an h-shape offering an optimal combination of support of each wafer and precise positioning of the wafer while minimizing the amount of plastic and correspondingly the weight of the insert.

摘要翻译： 塑料插入件构造成在晶片载体中提供薄晶片的支撑，其构造成提供外围晶片支撑。 本发明包括插入件，与晶片载体组合的插入件以及由插入件和晶片载体提供的支撑薄晶片的方法。 在优选实施例中，插入件使用嵌入侧壁凹部中的突出部，并且在所述凹部中具有过盈配合以将插入件固定就位。 在优选实施例中，插入件具有顶表面，其具有从晶片周边向内定位的多个肋，用于以最小的接触来支撑晶片。 在优选实施例中，插入件具有下表面，该下表面具有为插入件提供刚性的加强结构。 顶表面肋可以优选地平行于晶片的插入和退出方向定向并向上延伸，以将受支撑的晶片定位在紧邻由突出部定位的凹槽限定的槽的上方的槽中。 因此，插入件可以插入到载体中的交替槽中。 在优选实施例中，插入件可以具有h形，其提供每个晶片的支撑的最佳组合以及晶片的精确定位，同时最小化塑料的量并相应地减小插入件的重量。

公开(公告)号：US20060260978A1

公开(公告)日：2006-11-23

申请号：US11364562

申请日：2006-02-26

申请人： Barry Gregerson ,  David Halbmaier ,  Stephen Sumner ,  Brian Wiseman ,  Anthony Tieben ,  Justin Strike

发明人： Barry Gregerson ,  David Halbmaier ,  Stephen Sumner ,  Brian Wiseman ,  Anthony Tieben ,  Justin Strike

IPC分类号： B65D85/00

CPC分类号： H01L21/67353 ,  G03F1/66 ,  G03F7/70741 ,  H01L21/67359 ,  H01L21/67369 ,  H01L21/67376 ,  H01L21/67386

摘要： The present invention provides a reticle container that is equipped with a secondary container which houses the reticle and is housed in the primary container. The secondary container is held within the primary container with shock and vibration isolation members so that the secondary container has multiple degrees of freedom of motion within the primary container. The reticle is secured inside the secondary container such that shock and vibration transmission from the reticle container to the reticle is substantially attenuated.

公开(公告)号：US20060201958A1

公开(公告)日：2006-09-14

申请号：US11364812

申请日：2006-02-26

申请人： Anthony Tieben ,  Christian Andersen ,  Brian Wiseman

发明人： Anthony Tieben ,  Christian Andersen ,  Brian Wiseman

IPC分类号： B65D43/14 ,  B65D45/16 ,  B65D6/28

CPC分类号： G03F7/70741 ,  G03F1/66 ,  H01L21/67353 ,  H01L21/67359 ,  H01L21/67373

摘要： A hinged mask-package container with a spring latch for use in the transportation and storage of substrates. The container has a base and lid secured by a slidable spring latch that accepts the container's lid by sliding along the rail when the lid is pressed down to meet the base and then secures the lid and base by sliding back into its original position. The container also employs a living hinge made by an overmolding process whereby the hinge is formed in a first mold and then the container lid and base are formed and joined to the hinge in a second mold.

摘要翻译： 具有用于运输和储存基材的弹簧闩锁的铰接式面罩包装容器。 容器具有通过可滑动的弹簧闩锁固定的底座和盖子，该盖子通过沿着导轨按压而沿着轨道滑动而接收容器的盖子，以便与基座相接触，然后通过滑回到其初始位置来固定盖子和底座。 容器还采用通过包覆成型工艺制成的活动铰链，由此在第一模具中形成铰链，然后在第二模具中形成容器盖和基座并将其接合到铰链。

公开(公告)号：US5944194A

公开(公告)日：1999-08-31

申请号：US913260

申请日：1997-09-10

申请人： Barry Gregerson ,  Gary Gallagher ,  Brian Wiseman

发明人： Barry Gregerson ,  Gary Gallagher ,  Brian Wiseman

IPC分类号： B65D85/48 ,  B65D20060101 ,  G11B33/04 ,  G11B33/14 ,  H01L21/673 ,  H01L21/677 ,  B65D85/90

CPC分类号： H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67396 ,  G11B33/0405 ,  G11B33/14 ,  H01L21/67763

摘要： A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.

摘要翻译： PCT No.PCT / US95 / 12516 Sec。 371日期：1997年9月10日 102（e）1997年9月10日PCT PCT 1995年10月13日PCT公布。 公开号WO97 / 13710PC。 日期1997年04月17日公开了一种用于创建微环境的容器。 容器包括壳体，门和具有独特设计的多个支撑件，其用于以间隔开的平行关系可靠地保持诸如硅晶片的物品。 支架是可移动的。 提供电路以使支撑件接地。 还提供运动耦合结构用于将容器定位在表面上，以便例如将门与晶片处理工具的端口正确对准。

公开(公告)号：US20100307957A1

公开(公告)日：2010-12-09

申请号：US12303789

申请日：2007-06-12

申请人： Brian Wiseman

发明人： Brian Wiseman

IPC分类号： H01L21/673 ,  B65D85/90

CPC分类号： H01L21/67369

摘要： A container for holding a plurality of substrates includes an enclosure portion defining an interior space. The enclosure has a plurality of slots for receiving the substrates, and a door (26) for sealingly closing an open side A cushion (62) is received on the door.

摘要翻译： 用于保持多个基板的容器包括限定内部空间的外壳部分。 外壳具有用于接收基板的多个槽，并且用于密封地封闭敞开侧的缓冲垫（62）的门（26）被收纳在门上。

公开(公告)号：USRE41231E1

公开(公告)日：2010-04-20

申请号：US10310069

申请日：1995-10-13

申请人： Barry Gregerson ,  Gary Gallagher ,  Brian Wiseman

发明人： Barry Gregerson ,  Gary Gallagher ,  Brian Wiseman

IPC分类号： B65D85/90

CPC分类号： H01L21/67369 ,  G11B33/0405 ,  G11B33/14 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67396 ,  H01L21/67763

摘要： A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.

摘要翻译： 公开了一种用于创建微环境的容器。 容器包括壳体，门和具有独特设计的多个支撑件，其用于以间隔开的平行关系可靠地保持诸如硅晶片的物品。 支架是可移动的。 提供电路以使支撑件接地。 还提供运动耦合结构用于将容器定位在表面上，以便例如将门与晶片处理工具的端口正确对准。

公开(公告)号：US20060244942A1

公开(公告)日：2006-11-02

申请号：US11364860

申请日：2006-02-26

申请人： Barry Gregerson ,  David Halbmaier ,  Stephen Sumner ,  Brian Wiseman ,  Anthony Tieben ,  Justin Strike

发明人： Barry Gregerson ,  David Halbmaier ,  Stephen Sumner ,  Brian Wiseman ,  Anthony Tieben ,  Justin Strike

IPC分类号： G03B27/58

CPC分类号： G03B27/58 ,  H01L21/67353 ,  H01L21/67376 ,  H01L21/67386 ,  H01L21/67393

摘要： The present invention is a pod for containing a particulate sensitive substrate and for providing pressure equalization between the exterior and an interior environment of the pod and for minimizing gaseous fluid flow inside adjacent to the particulate sensitive substrate. The pod comprises a primary pod, a diaphragm positioned in a cover, the diaphragm having a normal undeflected position, the diaphragm deflectable from the normal undeflected position. Preferably, the pod comprises a secondary pod disposed in the primary pod defining a second enclosure for containing the particulate sensitive substrate. The pod may comprise a filter attached to the pod and providing gaseous fluid communication between the exterior of the pod and the interior of the pod. The diaphragm is responsive to rapid pressure changes and the filter is responsive to slower pressure changes and allows the diaphragm to return to its normal undeflected position.

公开(公告)号：USD383898S

公开(公告)日：1997-09-23

申请号：US45221

申请日：1995-10-13

申请人： Kelly Peterson ,  Brian Wiseman ,  Gary Gallagher ,  Barry Gregerson

设计人： Kelly Peterson ,  Brian Wiseman ,  Gary Gallagher ,  Barry Gregerson

公开(公告)号：US08528738B2

公开(公告)日：2013-09-10

申请号：US12303789

申请日：2007-06-12

申请人： Brian Wiseman

发明人： Brian Wiseman

IPC分类号： B65D85/86 ,  B65D81/02

CPC分类号： H01L21/67369

摘要： A container for holding a plurality of substrates includes an enclosure portion defining an interior space. The enclosure has a pluralit of slots for receiving the substrates, and a door (26) for sealingly closing an open side A cushion (62) is received on the door.

摘要翻译： 用于保持多个基板的容器包括限定内部空间的外壳部分。 外壳具有用于接收基板的多个槽，并且用于密封地封闭敞开侧的缓冲垫（62）的门（26）被接纳在门上。

公开(公告)号：US20070193921A1

公开(公告)日：2007-08-23

申请号：US11787082

申请日：2007-04-13

申请人： Brian Wiseman ,  Michael Peterson ,  Tony Simpson

发明人： Brian Wiseman ,  Michael Peterson ,  Tony Simpson

IPC分类号： B65D85/00

CPC分类号： H01L21/6732 ,  H01L21/67383 ,  Y10S206/832

摘要： A plastic insert is configured to provide support of thin wafers in wafer carriers configured to provide peripheral wafer support. The invention includes the insert, the insert in combination with a wafer carrier, and the methods of supporting the thin wafers as provided by the insert and the wafer carrier. The inserts, in preferred embodiments, utilize tabs that fit into the side wall recesses and have an interference fit in said recesses to secure the insert in place. In preferred embodiments the inserts have a top surface with a plurality of ribs positioned inwardly from the wafer periphery for supporting the wafers with minimal contact. In preferred embodiments the insert has a lower surface having strengthening structure providing rigidity to the insert. The top surface ribs may preferably be oriented parallel to the insertion and withdrawal direction of the wafers and extend upwardly to position the supported wafer in the slot immediately above the slot defined by the recesses in which the tabs are positioned. Thus, the inserts may be inserted into alternate slots in the carrier. The insert, in preferred embodiments may have an h-shape offering an optimal combination of support of each wafer and precise positioning of the wafer while minimizing the amount of plastic and correspondingly the weight of the insert.

摘要翻译： 塑料插入件构造成在晶片载体中提供薄晶片的支撑，其构造成提供外围晶片支撑。 本发明包括插入件，与晶片载体组合的插入件以及由插入件和晶片载体提供的支撑薄晶片的方法。 在优选实施例中，插入件使用嵌入侧壁凹部中的突出部，并且在所述凹部中具有过盈配合以将插入件固定就位。 在优选实施例中，插入件具有顶表面，其具有从晶片周边向内定位的多个肋，用于以最小的接触来支撑晶片。 在优选实施例中，插入件具有下表面，该下表面具有为插入件提供刚性的加强结构。 顶表面肋可以优选地平行于晶片的插入和退出方向定向并向上延伸，以将受支撑的晶片定位在紧邻由突出部定位的凹槽限定的槽的上方的槽中。 因此，插入件可以插入到载体中的交替槽中。 在优选实施例中，插入件可以具有h形，其提供每个晶片的支撑的最佳组合以及晶片的精确定位，同时最小化塑料的量并相应地减小插入件的重量。