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公开(公告)号：US5569533A
公开(公告)日：1996-10-29
申请号：US212151
申请日：1994-03-14
申请人： Brij B. Lal , Allen J. Bourez , Tadashi Shinohara
发明人： Brij B. Lal , Allen J. Bourez , Tadashi Shinohara
CPC分类号： G11B5/7325 , Y10S428/90 , Y10T428/12465 , Y10T428/12639 , Y10T428/12771 , Y10T428/12778 , Y10T428/12812 , Y10T428/12826 , Y10T428/12861 , Y10T428/12931 , Y10T428/26 , Y10T428/265
摘要： A longitudinal magnetic recording medium formed on a non-metallic substrate and a method of forming the medium is disclosed. A sublayer formed of a chromium alloy having a thickness between 3-50 .ANG. is deposited on the substrate, followed by a chromium-based underlayer. A cobalt-based magnetic recording layer is sputtered over the underlayer. The medium is characterized by improved coercivity, HF signal amplitude and signal-to-noise ratio.
摘要翻译： 公开了一种形成在非金属基底上的纵向磁记录介质和形成介质的方法。 由厚度在3-50安格姆之间的铬合金形成的子层沉积在基底上，随后是铬基底层。 钴基磁记录层溅射在底层上。 该介质的特征在于矫顽力，HF信号幅度和信噪比的改善。
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公开(公告)号：US5512150A
公开(公告)日：1996-04-30
申请号：US401449
申请日：1995-03-09
申请人： Allen J. Bourez , Brij B. Lal , Michael A. Russak
发明人： Allen J. Bourez , Brij B. Lal , Michael A. Russak
CPC分类号： H01J37/3429 , C23C14/3407 , C23C14/35 , G11B5/851 , H01J37/3408 , H01J37/3426 , H01J37/3458
摘要： A target assembly for use in fabricating magnetic recording media is described. The target assembly has inner and outer concentric targets for sputter depositing on a substrate first and second layers having different compositions. Disposed adjacent each target is a magnetic means, and at least one which is reversible in magnetic-pole polarity. One polarity produces a magnetic flux sufficient to ignite a sputtering plasma in the inner target only, when power is supplied to the inner target at a preselected level. The opposite polarity produces a magnetic flux sufficient to ignite a sputtering plasma in the outer target only, when power is supplied to the outer target at a preselected level.
摘要翻译： 描述了用于制造磁记录介质的目标组件。 目标组件具有用于溅射沉积在衬底上的内部和外部同心靶，第一层和第二层具有不同的组成。 设置在每个目标附近是磁性装置，并且至少一个磁极极性是可逆的。 一个极性产生足够的磁通量，用于仅在内部靶中点燃溅射等离子体，当电力以预选的电平供应到内部靶子时。 相反的极性产生足够的磁通量，以在外部目标物体中以预定的水平向外部靶供电。
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公开(公告)号：US5174880A
公开(公告)日：1992-12-29
申请号：US740436
申请日：1991-08-05
申请人： Allen J. Bourez , Brij B. Lal , Atef H. Eltoukhy
发明人： Allen J. Bourez , Brij B. Lal , Atef H. Eltoukhy
CPC分类号： H01J37/3452 , C23C14/3407 , H01J37/3405
摘要： A target assembly is provided having a circular flat target with an inner ring and an outer ring extending from the sputtering surface. A ferromagnetic outer pole member surrounds the target and the outer ring. A ferromagnetic inner pole member is surrounded by the target and the inner ring. A ferromagnetic backing member is positioned against the base surface of the target and has an outer portion positioned against the outer pole member, and an inner portion positioned against the inner pole member. These are positioned relative to the source of the magnetic field for conducting flux in a first path through the outer portion and the outer pole member, across the sputtering surface between the outer and inner rings, and through the inner pole member and inner portion. The backing member further includes a shunt portion intermediate between and magnetically spaced from the inner and outer portions. This shunt portion extends away from the target toward the source of the magnetic field associated with the inner portion for conducting magnetic flux in a second path through a portion of the target intermediate the inner and outer surfaces, and across the sputtering surface toward the outer ring.
摘要翻译： 提供了具有圆形平面靶的目标组件，其具有从所述溅射表面延伸的内环和外环。 铁磁外极构件围绕靶和外环。 铁磁内极构件被靶和内圈包围。 铁磁背衬构件抵靠着靶的基面定位，并且具有抵靠外磁极构件定位的外部部分和抵靠内极构件定位的内部部分。 它们相对于磁场源定位，用于在通过外部部分和外部磁极部件的第一路径中穿过外部和内部环之间的溅射表面，以及穿过内部磁极部件和内部部分。 背衬构件还包括在内部和外部之间中间并且与磁性间隔开的分流部分。 该分路部分远离目标向与内部部分相关的磁场源延伸，用于在通过内表面和外表面之间的目标的一部分的第二路径中传导磁通量，并且穿过溅射表面朝向外环 。
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公开(公告)号：US5693197A
公开(公告)日：1997-12-02
申请号：US319862
申请日：1994-10-06
CPC分类号： G11B5/851 , C23C14/352
摘要： A method of producing a magnetic recording medium by sputtering a layer onto a substrate by DC-magnetron sputtering from a target while exposing the target to an RF signal is described. The RF signal is effective to extend the target utilization without significantly decreasing the sputtering rate. Also disclosed is an apparatus for use forming a medium in accordance with the method of the invention.
摘要翻译： 描述了一种通过从目标的DC-磁控溅射将层溅射到衬底上的磁性记录介质的方法，同时将目标曝光到RF信号。 RF信号有效地延长目标利用率而不显着降低溅射速率。 还公开了根据本发明的方法形成介质的装置。
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5.发明授权Cathode assembly having rotating magnetic-field shunt and method of making magnetic recording media 失效具有旋转磁场分流的阴极组件和制造磁记录介质的方法
公开(公告)号：US5685959A
公开(公告)日：1997-11-11
申请号：US736980
申请日：1996-10-25
CPC分类号： H01J37/3458 , C23C14/3407 , H01J37/3408
摘要： A cathode assembly having a magnetic-field shunt for use in a magnetron sputtering apparatus is described. The magnetic-field shunt disposed between a sputtering target and a source of magnetic flux, and the shunt is moveable between first and second positions to effect preferential target erosion at first and second target regions, respectively. A method of using the assembly for preparation of a magnetic recording medium is also described.
摘要翻译： 描述了一种用于磁控溅射装置的具有磁场分流器的阴极组件。 设置在溅射靶和磁通源之间的磁场分流器，并且分流可在第一和第二位置之间移动，以分别在第一和第二目标区域处实现优先目标侵蚀。 还描述了使用该组件来制备磁记录介质的方法。
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公开(公告)号：US08791391B2
公开(公告)日：2014-07-29
申请号：US13781478
申请日：2013-02-28
申请人： Allen J. Bourez
发明人： Allen J. Bourez
IPC分类号： F27D5/00
CPC分类号： F27D11/00 , C23C14/541 , C23C14/566 , C23C14/568 , G11B5/851
摘要： A disk processing system having a plurality of processing chambers, a load chamber comprising a heater, and a disk transport system coupled to the plurality of processing chambers and the load chamber to transport a disk there among.
摘要翻译： 具有多个处理室的盘处理系统，包括加热器的装载室和耦合到多个处理室的盘传送系统和装载室，以便在其间传送盘。
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公开(公告)号：US20130175252A1
公开(公告)日：2013-07-11
申请号：US13781478
申请日：2013-02-28
申请人： Allen J. Bourez
发明人： Allen J. Bourez
IPC分类号： F27D11/00
CPC分类号： F27D11/00 , C23C14/541 , C23C14/566 , C23C14/568 , G11B5/851
摘要： A disk processing system having a plurality of processing chambers, a load chamber comprising a heater, and a disk transport system coupled to the plurality of processing chambers and the load chamber to transport a disk there among.
摘要翻译： 具有多个处理室的盘处理系统，包括加热器的装载室和耦合到多个处理室的盘传送系统和装载室，以便在其间传送盘。
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公开(公告)号：US08919279B1
公开(公告)日：2014-12-30
申请号：US12895653
申请日：2010-09-30
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306
CPC分类号： C23C16/50 , C23C16/26 , H01J37/32532 , H01J37/3266
摘要： A processing system for and a method of producing ions inside a process chamber and shielding the ions from a magnetic field by directing the magnetic field through a magnet keeper is described.
摘要翻译： 描述了一种处理系统和一种在处理室内产生离子的方法，并且通过将磁场引导通过磁力保持器来将离子与磁场屏蔽。
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公开(公告)号：US08399809B1
公开(公告)日：2013-03-19
申请号：US12652709
申请日：2010-01-05
申请人： Allen J. Bourez
发明人： Allen J. Bourez
IPC分类号： F27D5/00
CPC分类号： F27D11/00 , C23C14/541 , C23C14/566 , C23C14/568 , G11B5/851
摘要： A disk processing system having a plurality of processing chambers, a load chamber comprising a heater, and a disk transport system coupled to the plurality of processing chambers and the load chamber to transport a disk there among.
摘要翻译： 具有多个处理室的盘处理系统，包括加热器的装载室和耦合到多个处理室的盘传送系统和装载室，以便在其间传送盘。
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10.发明授权Target assembly for use in forming an overcoat in a magnetic recording medium 失效用于在磁记录介质中形成外涂层的目标组件
公开(公告)号：US5736020A
公开(公告)日：1998-04-07
申请号：US575163
申请日：1995-12-19
摘要： A target assembly for use in forming a protective overcoat in a magnetic recording medium is described. The assembly includes a centrally positioned target with inner and outer magnetic means adjacent the target. A sputtering shield is positioned between the target and the medium for controlling the amount and angle of material deposition on the medium. The assembly is effective to deposit an overcoat having a greater thickness in the inner landing zone of the medium than in the outer data zone. A method of using the assembly is also disclosed.
摘要翻译： 描述了用于在磁记录介质中形成保护性外涂层的目标组件。 该组件包括一个中心定位的目标，内部和外部磁性装置邻近目标。 溅射屏蔽位于靶和介质之间，用于控制介质上材料沉积的量和角度。 组合件有效地在介质的内着陆区域中沉积具有比在外部数据区域中更大厚度的外涂层。 还公开了一种使用组件的方法。
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