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公开(公告)号：US20200276608A1
公开(公告)日：2020-09-03
申请号：US16648086
申请日：2018-08-23
摘要： A surface treatment apparatus for subjecting a workpiece immersed at least partly in a solution to a surface treatment has: a spray nozzle facing the workpiece for spraying a treatment solution towards a working surface of the workpiece. The surface treatment apparatus has at least one of: a spray nozzle rotator to rotate the spray nozzle in a plane parallel to the working surface of the workpiece; or a workpiece rotator to rotate the workpiece in a plane perpendicular to a spraying direction of the treatment solution sprayed from the spray nozzle.
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公开(公告)号：US20180100237A1
公开(公告)日：2018-04-12
申请号：US15696499
申请日：2017-09-06
发明人： Masayuki UTSUMI , Nobuhiko NAKA
摘要： To provide surface treatment that can reduce occurrence of defects caused by incorporation of dust. Rollers 40 are rotatably fixed to rotating shafts 72 provided to protrude from lateral protective walls 49. The lateral protective walls 49 are fixed perpendicularly to lower protective walls 47 fixed to outer walls 39. Hanging plates 64 of a hanger 50 extend through a space 43 between both lower protective walls 47 and support clips 52. A liquid 41, such as water, is filled in spaces defined by the lateral protective walls 49, the lower protective walls 47, and the outer walls 39. The liquid 41 is filled to cover about half of each rotating shaft 72. Thus, fine dust generated by a transferring mechanism is captured by the liquid 41 and prevented from drifting from the space 34 toward the substrate 54.
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公开(公告)号：US20200080204A1
公开(公告)日：2020-03-12
申请号：US16680693
申请日：2019-11-12
发明人： Masayuki UTSUMI , Nobuhiko NAKA
摘要： To provide surface treatment that can reduce occurrence of defects caused by incorporation of dust. Rollers 40 are rotatably fixed to rotating shafts 72 provided to protrude from lateral protective walls 49. The lateral protective walls 49 are fixed perpendicularly to lower protective walls 47 fixed to outer walls 39. Hanging plates 64 of a hanger 50 extend through a space 43 between both lower protective walls 47 and support clips 52. A liquid 41, such as water, is filled in spaces defined by the lateral protective walls 49, the lower protective walls 47, and the outer walls 39. The liquid 41 is filled to cover about half of each rotating shaft 72. Thus, fine dust generated by a transferring mechanism is captured by the liquid 41 and prevented from drifting from the space 34 toward the substrate 54.
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公开(公告)号：US20140053774A1
公开(公告)日：2014-02-27
申请号：US13951947
申请日：2013-07-26
CPC分类号： B05C3/09 , B05B16/20 , B05C3/00 , B05C5/002 , B05C11/11 , B08B3/041 , C23C18/1619 , Y10T137/8593
摘要： A tank body 100 includes a liquid receiving part 2 for receiving processing solution Q applied to a plate-like work 10 and a liquid retaining part 4 for retaining liquids to be applied to the plate-like work 10 and a liquid outflowing part 6 for causing a flow of the processing solution Q which is spilled out of the liquid retaining part 4 and traveled down toward the plate-like work 10, wherein a tip 6a of the liquid outflowing part 6 is projected from a connecting part 5 connecting to the liquid retaining part 4 (or the liquid receiving part 2).
摘要翻译： 罐体100包括用于接收施加到板状工件10的处理液Q的液体接收部分2和用于保持施加到板状工件10的液体的液体保持部分4和用于引起 处理液Q从液体保持部分4溢出并朝着板状工件10向下移动，其中液体流出部分6的尖端6a从连接到液体保持部分的液体保持部分 部分4（或液体接收部分2）。
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公开(公告)号：US20200224314A1
公开(公告)日：2020-07-16
申请号：US16727302
申请日：2019-12-26
发明人： Masayuki UTSUMI , Masaharu TAKEUCHI
摘要： In a flow down type surface treating apparatus, a scattering amount of a processing solution Q is reduced.A honeycomb member 60 is provided vertically below a transport hanger 16. The honeycomb member 60 consists of a plurality of tubular members with hexagonal holes connected together. When the processing solution Q falls in a vertical direction (in the direction of an arrow α), the processing solution Q passes through through-holes of the honeycomb member 60. When the processing solution Q hits liquid level H, a part of it is reflected. Since a part of the reflected processing solution Q is reflected obliquely, it collides with an inner wall of the through-hole of the honeycomb member 60. As a result, the amount of the treatment liquid Q that emerges again on an upper surface of the through-holes is reduced. Thereby, the honeycomb member 60 exhibits a scattering prevention function.
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公开(公告)号：US20190301048A1
公开(公告)日：2019-10-03
申请号：US16252903
申请日：2019-01-21
发明人： Teruyuki HOTTA , Kouji SHIMIZU , Masayuki UTSUMI , Masato ARATANI
摘要： A rotational surface treating device with a high treatment efficiency that allows a treatment liquid to be discharged in a short time is provided. When a treatment bath 2 is rotated, parts 20 contact an electrode 50 to be electroplated. In this event, a plating liquid 16 is used as circulated by a pump P. The plating liquid 16 is discharged to the outside through a gap in a side wall 80 for replacement of the plating liquid 16 or the like. During discharge, the plating liquid 16 is not circulated by the pump P. The gap 8 which is formed in the side wall 80 is formed to be smaller than the minimum dimension of the parts 20 on the inner side. The gap 8 is formed to be wider toward the outer side. Thus, water is discharged immediately.
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公开(公告)号：US20180133760A1
公开(公告)日：2018-05-17
申请号：US15800751
申请日：2017-11-01
发明人： Hisamitsu YAMAMOTO , Masayuki UTSUMI , Yoshikazu SAIJO , Tomoji OKUDA , Yutaka NISHINAKA , Yoshinori NAKANISHI
IPC分类号： B08B3/12
CPC分类号： B08B3/123
摘要： An ultrasonic treatment apparatus including: an ultrasonic bath for performing an ultrasonic treatment on a treatment target object; a first ultrasonic vibrator provided on the front surface side of the treatment target object; and a second ultrasonic vibrator provided on the back surface side of the treatment target object; wherein the first ultrasonic vibrator does not face the second ultrasonic vibrator.
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公开(公告)号：US20180110128A1
公开(公告)日：2018-04-19
申请号：US15785938
申请日：2017-10-17
IPC分类号： H05K3/22
摘要： A drying apparatus of the present invention includes a drying tank for performing drying processing of a workpiece, a fixture for the workpiece, heating means opposed to a front surface of the workpiece, and heating means opposed to a back surface of the workpiece, wherein each heating means is inclined from a horizontal line in its longitudinal direction.
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公开(公告)号：US20140116334A1
公开(公告)日：2014-05-01
申请号：US14038340
申请日：2013-09-26
发明人： Teruyuki HOTTA , Hisamitsu YAMAMOTO , Takahiro ISHIZAKI , Masayuki UTSUMI , Takuya OKAMACHI , Syunsaku HOSHI , Fujio ASA , Junji MIZUMOTO
IPC分类号： C23C18/16
CPC分类号： C23C18/1619 , C23C18/1628 , H05K3/0085 , H05K3/181 , H05K2203/1518
摘要： An tank such as an electroless copper plating tank 200, includes a liquid squirting part 4 having a squirt port 6 for squirting the processing solution Q from the squirt port 6 toward the treatment object obliquely upward to a horizontal plane, and hitting the processing solution Q on the upper area of the plate-like work 10 so that the processing solution Q runs down the plate-like work 10.
摘要翻译： 诸如化学镀铜罐200的罐包括具有喷嘴6的液体喷射部分4，用于将喷嘴6的处理液Q向处理对象倾斜向上喷射到水平面，并且撞击处理溶液Q 在板状工件10的上部区域上，使处理液Q沿板状工件10向下延伸。
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公开(公告)号：US20200224315A1
公开(公告)日：2020-07-16
申请号：US16727390
申请日：2019-12-26
发明人： Masayuki UTSUMI , Masaharu TAKEUCHI
摘要： In a flow down type surface treating apparatus, a scattering amount of a processing solution is reduced.A film forming mechanism 110 is provided on an inlet side and an outlet side of each treatment chamber.The film forming mechanism 110 ejects a continuous laminar liquid under pressure of about 0.01 MPa at a flow rate of 5 to 10 L/min. Such a liquid film prevents droplets reflected on a surface of an antiscattering member 60 from splashing and entering the adjacent treatment chamber. When a plate-like work 10 is shaken to collide with the liquid film, the film flows down along the plate-like work 10 since the film formed by the film forming mechanism 110 is liquid. Thereby, a shake of the plate-like work 10 is converged. An amount of air flowing in toward a transport direction in each treatment chamber is reduced.
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