利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

8 条记录 (耗时 0.129 秒)

    Method for processing and/or for observing an object, and particle beam device for carrying out the method
    1.
    发明授权
    Method for processing and/or for observing an object, and particle beam device for carrying out the method 有权
    用于处理和/或观察物体的方法以及用于执行该方法的粒子束装置

    公开(公告)号：US09251997B2

    公开(公告)日：2016-02-02

    申请号：US14462808

    申请日：2014-08-19

    申请人： Carl Zeiss Microscopy GmbH

    发明人： Josef Biberger ,  Ralph Pulwey ,  Katja Tsyrulin ,  Roland Salzer

    IPC分类号： B82Y10/00 ,  H01J37/302 ,  H01J37/28 ,  H01J37/305 ,  H01J37/304

    CPC分类号： H01J37/302 ,  H01J37/28 ,  H01J37/304 ,  H01J37/3056 ,  H01J2237/30488 ,  H01J2237/31745 ,  H01J2237/31749

    摘要： A method is provided for processing and/or observing an object using at least one particle beam that is scanned over the object. A scan region on the object is determined, the scan region having scan lines, and the particle beam is moved in a first scanning direction along one of the scan lines. The first scanning direction is changed to a second scanning direction at a change-of-direction time. Changing from the first scanning direction to the second scanning direction comprises setting of a point of rotation in that scan line of the scan region in which the particle beam is situated at the change-of-direction time, with an axis of rotation extending through the point of rotation. The first scanning direction is changed into the second scanning direction by rotating the scan region about the axis of rotation, with the point of rotation being selected dependent on the direction of rotation.

    摘要翻译： 提供了一种用于使用在物体上扫描的至少一个粒子束来处理和/或观察物体的方法。 确定物体上的扫描区域，具有扫描线的扫描区域和粒子束沿着扫描线沿第一扫描方向移动。 第一扫描方向在改变时间方向上改变为第二扫描方向。 从第一扫描方向到第二扫描方向的变化包括在扫描区域的扫描区域中设置旋转点，其中粒子束位于改变方向时间，旋转轴线延伸穿过 旋转点。 通过围绕旋转轴线旋转扫描区域，根据旋转方向选择旋转点，将第一扫描方向改变为第二扫描方向。

    METHOD OF PROCESSING A MATERIAL-SPECIMEN
    2.
    发明申请
    METHOD OF PROCESSING A MATERIAL-SPECIMEN 有权
    处理材料样品的方法

    公开(公告)号：US20140131315A1

    公开(公告)日：2014-05-15

    申请号：US14077535

    申请日：2013-11-12

    申请人： Carl Zeiss Microscopy GmbH

    发明人： Roland Salzer

    IPC分类号： H01J37/305 ,  H01L21/02

    CPC分类号： H01J37/3053 ,  B23K26/03 ,  B23K26/14 ,  B23K26/361 ,  B23K26/362 ,  G01N1/32 ,  H01J37/3056 ,  H01J2237/3174 ,  H01J2237/31744 ,  H01L21/02

    摘要： A method for generating a smooth surface in a material-specimen includes generating a substantially smooth, first surface region by removing a first material-volume by particle beam etching. The first material-volume is partially defined by the first surface region. An angle between a beam direction and a surface normal of the first surface region is greater than 80° and less than 90°. The method also includes generating a substantially smooth, second surface region by removing a second material-volume. The second material-volume is partially defined by the first surface region and is partially defined by the second surface region. An angle between the beam direction and a surface normal of the second surface region is less than 60°.

    摘要翻译： 用于在材料样品中产生光滑表面的方法包括通过通过粒子束蚀刻去除第一材料体积而产生基本平滑的第一表面区域。 第一材料体积由第一表面区域部分地限定。 第一表面区域的光束方向和表面法线之间的角度大于80°且小于90°。 该方法还包括通过去除第二材料体积来产生基本平滑的第二表面区域。 第二材料体积部分地由第一表面区域限定，并且部分地由第二表面区域限定。 光束方向与第二表面区域的表面法线之间的角度小于60°。

    METHOD FOR PROCESSING AND/OR FOR OBSERVING AN OBJECT, AND PARTICLE BEAM DEVICE FOR CARRYING OUT THE METHOD
    3.
    发明申请
    METHOD FOR PROCESSING AND/OR FOR OBSERVING AN OBJECT, AND PARTICLE BEAM DEVICE FOR CARRYING OUT THE METHOD 有权
    用于处理和/或观察对象的方法以及用于实施该方法的粒子束装置

    公开(公告)号：US20150048248A1

    公开(公告)日：2015-02-19

    申请号：US14462808

    申请日：2014-08-19

    申请人： Carl Zeiss Microscopy GmbH

    发明人： Josef Biberger ,  Ralph Pulwey ,  Katja Tsyrulin ,  Roland Salzer

    IPC分类号： H01J37/302 ,  H01J37/305 ,  H01J37/28

    CPC分类号： H01J37/302 ,  H01J37/28 ,  H01J37/304 ,  H01J37/3056 ,  H01J2237/30488 ,  H01J2237/31745 ,  H01J2237/31749

    摘要： A method is provided for processing and/or observing an object using at least one particle beam that is scanned over the object. A scan region on the object is determined, the scan region having scan lines, and the particle beam is moved in a first scanning direction along one of the scan lines. The first scanning direction is changed to a second scanning direction at a change-of-direction time. Changing from the first scanning direction to the second scanning direction comprises setting of a point of rotation in that scan line of the scan region in which the particle beam is situated at the change-of-direction time, with an axis of rotation extending through the point of rotation. The first scanning direction is changed into the second scanning direction by rotating the scan region about the axis of rotation, with the point of rotation being selected dependent on the direction of rotation.

    摘要翻译： 提供了一种用于使用在物体上扫描的至少一个粒子束来处理和/或观察物体的方法。 确定物体上的扫描区域，具有扫描线的扫描区域和粒子束沿着扫描线沿第一扫描方向移动。 第一扫描方向在改变时间方向上改变为第二扫描方向。 从第一扫描方向到第二扫描方向的变化包括在扫描区域的扫描区域中设置旋转点，其中粒子束位于改变方向时间，旋转轴线延伸穿过 旋转点。 通过围绕旋转轴线旋转扫描区域，根据旋转方向选择旋转点，将第一扫描方向改变为第二扫描方向。

    METHOD FOR STRUCTURING AN OBJECT AND ASSOCIATED PARTICLE BEAM SYSTEM
    4.
    发明申请
    METHOD FOR STRUCTURING AN OBJECT AND ASSOCIATED PARTICLE BEAM SYSTEM 有权

    公开(公告)号：US20170263416A1

    公开(公告)日：2017-09-14

    申请号：US15451655

    申请日：2017-03-07

    申请人： Carl Zeiss Microscopy GmbH

    发明人： Josef Biberger ,  Roland Salzer

    IPC分类号： H01J37/304 ,  H01J37/26 ,  H01J37/317

    CPC分类号： H01J37/3045 ,  H01J37/26 ,  H01J37/28 ,  H01J37/3177 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749 ,  H01J2237/31798

    摘要： A includes arranging a substrate in a working region of a first particle beam column and a second particle beam column; producing a desired target structure on the substrate by directing a first particle beam generated by the first particle beam column at a multiplicity of sites of the substrate to deposit material thereon or to remove material therefrom;repeatedly interrupting the production of the desired target structure and producing a marking on the substrate by directing the first particle beam onto the substrate and continuing the production of the desired target structure; and capturing positions of the markings on the substrate by directing a second particle beam produced by the second particle beam column onto the markings on the substrate, and detecting particles or radiation which are produced in the process by the second particle beam on the substrate.

    Method of processing a material-specimen
    7.
    发明授权
    Method of processing a material-specimen 有权
    材料标本处理方法

    公开(公告)号：US09543117B2

    公开(公告)日：2017-01-10

    申请号：US14077535

    申请日：2013-11-12

    申请人： Carl Zeiss Microscopy GmbH

    发明人： Roland Salzer

    IPC分类号： B44C1/22 ,  H01J37/305 ,  H01L21/02 ,  B23K26/03 ,  B23K26/14 ,  B23K26/36 ,  G01N1/32

    CPC分类号： H01J37/3053 ,  B23K26/03 ,  B23K26/14 ,  B23K26/361 ,  B23K26/362 ,  G01N1/32 ,  H01J37/3056 ,  H01J2237/3174 ,  H01J2237/31744 ,  H01L21/02

    摘要： A method for generating a smooth surface in a material-specimen includes generating a substantially smooth, first surface region by removing a first material-volume by particle beam etching. The first material-volume is partially defined by the first surface region. An angle between a beam direction and a surface normal of the first surface region is greater than 80° and less than 90°. The method also includes generating a substantially smooth, second surface region by removing a second material-volume. The second material-volume is partially defined by the first surface region and is partially defined by the second surface region. An angle between the beam direction and a surface normal of the second surface region is less than 60°.

    摘要翻译： 用于在材料样品中产生光滑表面的方法包括通过通过粒子束蚀刻去除第一材料体积而产生基本平滑的第一表面区域。 第一材料体积由第一表面区域部分地限定。 第一表面区域的光束方向和表面法线之间的角度大于80°且小于90°。 该方法还包括通过去除第二材料体积来产生基本平滑的第二表面区域。 第二材料体积部分地由第一表面区域限定，并且部分地由第二表面区域限定。 光束方向与第二表面区域的表面法线之间的角度小于60°。