公开(公告)号：US20170212166A1

公开(公告)日：2017-07-27

申请号：US15007459

申请日：2016-01-27

Applicant: Cascade Microtech, Inc.

Inventor： Brandon Liew

IPC: G01R31/28 ,  G01R1/073

CPC classification number: G01R31/2891

Abstract: Probe head assemblies with constrained internal motion and probe systems including the probe head assemblies are disclosed herein. The probe head assemblies include a contacting structure, an orientation-regulating structure, and a support frame. The contacting structure includes a plurality of conductive probes configured to physically and electrically contact corresponding contact pads on the DUT. The support frame is configured to support the contacting structure and the orientation-regulating structure. The orientation-regulating structure supports the contacting structure and is configured to permit translational motion of the contacting structure relative to the support frame along a contacting axis. The orientation-regulating structure further is configured to resist translational motion of the contacting structure relative to the support frame in any direction that is at least substantially perpendicular to the contacting axis. The orientation-regulating structure may include a compound linear flexure.

公开(公告)号：US20170330677A1

公开(公告)日：2017-11-16

申请号：US15152177

申请日：2016-05-11

Applicant: Cascade Microtech, Inc.

Inventor： Jay Salmon ,  Roy E. Swart ,  Brandon Liew

IPC: H01F27/28 ,  H01F41/04

CPC classification number: H01F27/2804 ,  G01R1/07378 ,  G01R3/00 ,  G01R31/2889 ,  H01F41/041 ,  H05K3/368 ,  H05K3/4007 ,  H05K2201/10378

Abstract: Space transformers, planarization layers for space transformers, methods of fabricating space transformers, and methods of planarizing space transformers are disclosed herein. In one embodiment, the space transformers include a space transformer assembly including a first rigid space transformer layer, a second rigid space transformer layer, and an attachment layer that extends between the first rigid space transformer layer and the second rigid space transformer layer. In another embodiment, the space transformers include a space transformer body and a flex cable assembly. The planarization layer includes an interposer, a resilient dielectric layer, a planarized rigid dielectric layer, a plurality of holes, and an electrically conductive paste extending within the plurality of holes. In one embodiment, the methods include methods of fabricating the space transformer assembly. In another embodiment, the methods include methods of planarizing a space transformer.

公开(公告)号：US10120020B2

公开(公告)日：2018-11-06

申请号：US15184374

申请日：2016-06-16

Applicant: Cascade Microtech, Inc.

Inventor： Jay Salmon ,  Roy E. Swart ,  Brandon Liew

IPC: G01R31/28 ,  G01R1/073

Abstract: Probe head assemblies and probe systems for testing integrated circuit devices are disclosed herein. In one embodiment, the probe head assemblies include a contacting structure and a space transformer assembly. In another embodiment, the probe head assemblies include a contacting structure, a suspension system, a flex cable interface, and a space transformer including a space transformer body and a flex cable assembly. In another embodiment, the probe head assemblies include a contacting structure, a space transformer, and a planarization layer. In another embodiment, the probe head assemblies include a contacting structure, a space transformer, a suspension system, a platen, a printed circuit board, a first plurality of signal conductors configured to convey a first plurality of signals external to the space transformer, and a second plurality of signal conductors configured to convey a second plurality of signals via the space transformer. The probe systems include the probe head assemblies.