摘要:
A showerhead for chemical vapor deposition (CVD) includes a head storing reaction gas flowing thereinto and feeding the stored reaction gas to a reaction chamber, and at least one support member passing through and coupled with the head and the reaction chamber so as to support the head.
摘要:
There is provided a chemical vapor deposition apparatus including: a chamber including a reactor where a deposition object is deposited; a first supplier including a plurality of gas pipes allowing a first gas to be jetted into the reactor in a substantially horizontal direction; a second supplier including a plurality of holes of a predetermined size having the gas pipes inserted therein, respectively; a supply flow path formed between each of the gas pipes and each of the holes, the supply flow path allowing a second gas to be supplied into the reactor in a substantially horizontal direction.
摘要:
Provided is a showerhead that can inject a reaction gas into a reaction chamber in a manner such that the injected reaction gas form a spiral vortex flow field. Therefore, the injected reaction gas can be mixed within a shorter distance, and thus the effective deposition radius of a wafer can be increased so that uniform-density deposition can be performed on the entire surface of the wafer using the mixed reaction gas.
摘要:
Provided is a chemical vapor deposition apparatus. The apparatus includes a reaction chamber, a gas introduction unit, and a gas exhaust unit. The reaction chamber includes a susceptor on which a wafer is loaded and a reaction furnace in which the wafer is processed by chemical vapor deposition. The gas introduction unit is disposed at an outer wall of the reaction chamber to supply reaction gas from an outside of the reaction furnace to a center portion of the reaction furnace. The gas exhaust unit is disposed at a center portion of the reaction chamber to discharge the reaction gas to an upper or lower outside of the reaction chamber after the reaction gas is used for a reaction in the reaction furnace. Therefore, the gas density inside the chamber can be kept at a substantially uniform state even when process pressure is increased for growing a high-temperature deposition layer.
摘要:
There is provided a chemical vapor deposition apparatus improved in structure such that a reaction gas introduced into a reactor where deposition is performed flows at a substantially uniform rate to ensure a thin film is grown substantially uniformly on the deposition object. The chemical vapor deposition apparatus includes: a chamber; a reactor provided in the chamber to have a deposition object deposited therein; and a reservoir storing a reaction gas fed from the outside to introduce the reaction gas to the reactor, the reservoir having a cross-sectional area changing according to a flow path of the introduced reaction gas.
摘要:
Provided is a chemical vapor deposition apparatus including a reaction chamber; a susceptor that is provided in the reaction chamber and has a plurality of wafers mounted thereon; a rotation driving unit that rotates the susceptor; a gas inlet that is provided in the reaction chamber and introduces reaction gas into the reaction chamber from the outside of the reaction chamber; a gas outlet that is provided in the reaction chamber and discharges the reaction gas, of which the reaction is finished, from the inside of the reaction chamber along the rotation-axis direction of the susceptor; and a variable gas-flow adjusting unit that is provided between the gas inlet and the gas outlet and is formed by superimposing a plurality of gas jetting plates having a plurality of holes.
摘要:
Disclosed herein is a switched reluctance motor in which an outer rotor provided with a plurality of salient poles protruded at equidistance along an inner peripheral surface thereof; and a stator provided in the outer rotor, provided with a plurality of stator cores including main salient poles protruded toward the salient poles of the outer rotor and including coils wound therearound and auxiliary salient poles positioned at both sides of the main salient poles, and having phase windings in which the coils are wound around the main salient poles are provided, a magnetic flux is bisected in the main salient pole and flows into the auxiliary salient poles of adjacent phase windings, such that a short magnetic flux route is implemented, thereby making it possible to reduce core loss, and a magnet is also provided, thereby making it possible to improve torque characteristics.
摘要:
There are disclosed a microfluidic ejection device and a method of manufacturing the same. The microfluidic ejection device includes a flow path plate having an inlet into which a microfluid is drawn, a pressure chamber connected with the inlet and having formed therein, a plurality of chamber units divided by a plurality of partitions, and a nozzle connected with the pressure chamber and ejecting the microfluid by integrating the microfluid, having passed through the plurality of chamber units, into a single flow path; and actuators formed on an upper portion of the flow path plate so as to respectively correspond to the plurality of chamber units and providing driving force for ejecting the microfluid from the pressure chamber to the nozzle. The microfluidic ejection device has superior microfluidic ejection performance because variations in pressure within the pressure chamber can be accurately adjusted.
摘要:
An apparatus is provided for driving wheels for an in-wheel system, including: a driving shaft which is the center of rotatable driving; a fixation supporter rotatably supporting the driving shaft and coupled to the driving shaft; an in-wheel motor generating rotational power, which is coupled to the inside of a wheel in which a tire is mounted on one driving shaft in a shaft direction of the fixation supporter; and a balancing member formed on the other driving shaft in the shaft direction of the fixation supporter and formed at a position corresponding to the wheel coupled with the in-wheel motor. According to the present invention, an eccentricity phenomenon which is caused due to inclination of a wheel and a motor in one direction of a fixation supporter can he prevented in an apparatus of driving wheels for an in-wheel system.
摘要:
Disclosed herein is a switched reluctance motor comprising: an outer rotor provided with a plurality of salient poles protruded at equidistance along an inner peripheral surface thereof; and a stator provided in the outer rotor, including a plurality of stator cores including a pair of stator salient poles protruded toward the salient pole of the outer rotor and a stator yoke connecting and supporting stator salient poles to each other, and having phase windings in which coils are wound around the stator salient poles, wherein a magnetic flux generated by applying a current to the phase winding flows through the pair of stator salient poles and the salient pole of the outer rotor.