摘要:
An insert ring for a wafer support inside a processing chamber for the processing, particularly dry etching, of semiconductor wafer substrates. The insert ring has a generally step-shaped cross-sectional configuration which defines a perpendicular gap or flow space between the insert ring and the wafer support. In the etching of substrates on the wafer support, the perpendicular gap or flow space defines a perpendicular flow path for plasma species. Consequently, flow of heavy plasma species against the outer wall of the wafer support is substantially hindered or reduced to reduce accumulation of polymer material on the inner surface of the insert ring and/or the outer wall of the wafer support.
摘要:
An insert ring for a wafer support inside a processing chamber for the processing, particularly dry etching, of semiconductor wafer substrates. The insert ring has a generally step-shaped cross-sectional configuration which defines a perpendicular gap or flow space between the insert ring and the wafer support. In the etching of substrates on the wafer support, the perpendicular gap or flow space defines a perpendicular flow path for plasma species. Consequently, flow of heavy plasma species against the outer wall of the wafer support is substantially hindered or reduced to reduce accumulation of polymer material on the inner surface of the insert ring and/or the outer wall of the wafer support.
摘要:
A removable cover system for protecting solar cells from exposure to moisture during fabrication processes. The cover system includes a cover having a configuration that complements the configuration of a solar cell substrate to be processed in an apparatus where moisture is present. A resiliently deformable seal member attached to the cover is positionable with the cover to engage and seal the top surface of the substrate. In one embodiment, the cover is dimensioned and arranged so that the seal member engages the peripheral angled edges and corners of the substrate for preventing the ingress of moisture beneath the cover. An apparatus for fabricating a solar cell using the cover and associated method are also disclosed.
摘要:
A microstructure diffuser includes a light-entering surface, a light-emitting surface, and a plurality of microstructure portions having a first microstructure unit and a second microstructure unit. The first microstructure unit includes a first side surface, a second side surface, a top surface, a first pitch (P1), a second pitch (P2), and a height (H). The second microstructure unit has a curve function shape and is located at the light-emitting surface. The first side surface and the second side surface of the first microstructure unit receive the light beam of the light source to form a first optical path. The top surface of the first microstructure unit receives the light beam of the light source to form a second optical path. The second microstructure unit receives the light beam of the light source to form a third optical path.
摘要:
An inner ring signal and an outer ring signal according to specific patterns formed on the label side of the optical disc are generated. Timing starts when the outer ring signal reveals the end of a positioning pattern and stops to obtain a timing value when the inner ring signal reveals the start of a square wave defining a specified spoke. A starting spoke is defined according to the inner ring signal and the specified spoke. A deviation bit value is calculated according to the timing value and a bit number of a data to be marked on a certain track of the optical disc. The data is rotated according to the deviation bit value, and then marked on the certain track, starting with the starting spoke.
摘要:
A testing method and related system enables a power management device to power-on or power-off a second electrical device via a first transmission interface of a first electrical device. The first electrical device sets power-on and power off times of the power management device. The first electrical device sends a power-on or a power-off control instruction to the power management device via the first transmission interface based on the set power-on and power-off times to power-on or power-off the power management device, and the first electrical device performs a timing process. The second electrical device executes a corresponding power-on or power-off process based on power statuses of the power management device. The first electrical device determines whether the second electrical device returns with a power-on or a power-off testing signal as a testing result within a predetermined time during the process of timing.
摘要:
A wavelength division multiplexer (WDM) and a type of fiber arrangement for the WDM are provided. In the WDM according to the invention, a filter having dielectric coating is used to allow lights within a specific band of wavelength to pass but reflect lights not within the specific band of wavelength. A reflection mirror is then used to reflect the lights passing through the filter to pass through the filter for a second time. Because of the two filtering, the WDM provided by the invention has very high adjacent channel isolation. In particular, the WDM contains a fiber pigtail having a fiber bundle and a ferrule with a square aperture in the center. By carefully arranging the common input fiber, the reflection output fiber, and the transmission output fiber inside the aperture, the lights in the specific band of wavelength have identical wavelength bandwidth when passing through the filter twice, and the insertion loss for both the transmission output and the reflection output is minimum. Having identical wavelength bandwidth implies that the wavelength bandwidth of lights emitted out of the transmission output is not reduced because the lights pass through the filter twice and cancel out each other. On the other hand, minimum insertion loss for both the reflection output and the transmission output implies that the performance of the WDM is optimal.
摘要:
A data storing method for a solid state drive is used to preserve data integrity after a power failure. The solid state drive has a flash memory with plural blocks. Each block includes plural pages. One of the plural blocks is set as an old open block. The data storing method includes the following steps. Firstly, the solid state drive is powered on again. Then, the valid data in the old open block are stored into a new open block.
摘要:
A method of patterning a metal alloy material layer having hafnium and molybdenum. The method includes forming a patterned mask layer on a metal alloy material layer having hafnium and molybdenum on a substrate. The patterned mask layer is used as a mask and an etching process is performed using an etchant on the metal alloy material layer having hafnium and molybdenum so as to form a metal alloy layer having hafnium and molybdenum. The etchant includes at least nitric acid, hydrofluoric acid and sulfuric acid. The patterned mask layer is removed.
摘要:
A method for measuring degree of packet congestion on a channel of a packet communication network. The method includes: during a training mode, generating an mathematical relationship between the degree of packet congestion on the channel and a plurality of measurable features of the network over a plurality of network conditions; and, during a subsequent normal operating mode, periodically measuring the plurality of measurable features and applying the generated mathematical relationship to such periodically measured plurality of measurable features to determine actual degree of congestion on the channel; and comparing the actual degree of congestion on the channel with a predetermined channel congestion threshold level. The degree of packet congestion on the channel is saturation level. The measurable features include: lime delay between transmission starts and terminations of the previously transmitted packet; the fraction of time the channel is busy; and. average number of packet transmission retries.