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公开(公告)号：US08891240B2
公开(公告)日：2014-11-18
申请号：US13222454
申请日：2011-08-31
IPC分类号： H05K7/20 , H01L21/66 , H01L23/473 , G01N21/00
CPC分类号： H01L23/473 , F28F3/12 , G01N21/00 , H01L22/30 , H01L2924/0002 , H05K7/20218 , H05K7/20254 , H05K7/2039 , H05K7/20436 , H05K7/20445 , H05K7/20454 , H05K7/2049 , H01L2924/00
摘要： An apparatus and method for cooling a semiconductor device. The apparatus comprises a chamber configured for receiving a cooling fluid; and a plurality of contact elements comprising respective first ends disposed within the chamber; wherein, during operation, respective second ends of contact elements contact a surface of the semiconductor device for transferring heat generated in the semiconductor device to the cooling fluid.
摘要翻译： 一种用于冷却半导体器件的设备和方法。 该装置包括：一个构造成容纳冷却流体的腔室; 以及多个接触元件，包括设置在所述腔室内的相应的第一端部; 其中，在操作期间，接触元件的相应第二端接触半导体器件的表面，用于将在半导体器件中产生的热传递到冷却流体。
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2.发明授权Method and system for measuring laser induced phenomena changes in a semiconductor device 有权用于测量半导体器件中的激光诱发现象变化的方法和系统公开(公告)号：US07456032B2
公开(公告)日：2008-11-25
申请号：US11158945
申请日：2005-06-21
IPC分类号： G01R31/26
CPC分类号： G01R31/311 , G01R17/105
摘要： A method and system for measuring laser induced phenomena changes of at least one of a resistance, a capacitance and an inductance in a semiconductor device. The method comprises interconnecting an electrical bridge circuit across the semiconductor device, the semiconductor device being connected as one of at least four circuit elements of the bridge circuit; inducing the changes in the semiconductor; and monitoring a balance condition of the bridge circuit.
摘要翻译： 一种用于测量半导体器件中的电阻，电容和电感中的至少一个的激光感应现象变化的方法和系统。 该方法包括跨越半导体器件互连电桥电路，该半导体器件被连接为桥接电路的至少四个电路元件之一; 引起半导体的变化; 并监测桥接电路的平衡状态。
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公开(公告)号：US07623982B2
公开(公告)日：2009-11-24
申请号：US11935401
申请日：2007-11-05
申请人： Choon Meng Chua , Alfred Cheng Teck Quah , Soon Huat Tan , Lian Ser Koh , Jacob Chee Hong Phang
发明人： Choon Meng Chua , Alfred Cheng Teck Quah , Soon Huat Tan , Lian Ser Koh , Jacob Chee Hong Phang
CPC分类号： G06F11/24 , G01R31/311
摘要： A method of testing an electronic circuit is provided. The method comprises radiating a laser beam onto the electronic circuit, and determining a plurality of samples of a response signal output by the electronic circuit during the period when the laser beam is radiated. The method further comprises accumulating the plurality of samples to generate a value, and generating a test result based on the value.
摘要翻译： 提供一种测试电子电路的方法。 该方法包括将激光束照射到电子电路上，并且确定在激光束照射期间由电子电路输出的响应信号的多个样本。 该方法还包括累积多个采样以产生一个值，并且基于该值产生测试结果。
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4.发明授权Portable high resolution scanning electron microscope column using permanent magnet electron lenses 失效便携式高分辨率扫描电子显微镜柱，采用永磁电子透镜公开(公告)号：US06320194B1
公开(公告)日：2001-11-20
申请号：US09563117
申请日：2000-05-02
IPC分类号： H01J3718
CPC分类号： H01J37/28 , H01J37/14 , H01J2237/16
摘要： A detachable, portable SEM column that is easily disconnected from the electron gun assembly and specimen chamber of the system, allowing different column designs to be used in a given SEM system. As an alternate design, the electron gun and column are configured as a single detachable, portable assembly. The column of the present invention contains a condenser lens and an objective lens, both designed employing permanent magnet elements for primary field generation. Relatively small coils are used for scanning and precise adjustment of focus.
摘要翻译： 可拆卸的便携式SEM柱，易于与系统的电子枪组件和样品室断开，允许在给定SEM系统中使用不同的色谱柱设计。 作为替代设计，电子枪和柱被配置为单个可拆卸的便携式组件。 本发明的列包含聚光透镜和物镜，它们均采用永磁体元件进行设计，用于初级场产生。 相对小的线圈用于扫描和精确调整焦点。
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5.发明授权Portable high resolution scanning electron microscope column using permanent magnet electron lenses 失效便携式高分辨率扫描电子显微镜柱，采用永磁电子透镜
公开(公告)号：US6057553A
公开(公告)日：2000-05-02
申请号：US016593
申请日：1998-01-30
CPC分类号： H01J37/28 , H01J37/14 , H01J2237/16
摘要： A detachable, portable SEM column that is easily disconnected from the electron gun assembly and specimen chamber of the system, allowing different column designs to be used in a given SEM system. As an alternate design, the electron gun and column are configured as a single detachable, portable assembly. The column of the present invention contains a condenser lens and an objective lens, both designed employing permanent magnet elements for primary field generation. Relatively small coils are used for scanning and precise adjustment of focus.
摘要翻译： 可拆卸的便携式SEM柱，易于与系统的电子枪组件和样品室断开，允许在给定SEM系统中使用不同的色谱柱设计。 作为替代设计，电子枪和柱被配置为单个可拆卸的便携式组件。 本发明的列包含聚光透镜和物镜，它们均采用永磁体元件进行设计，用于初级场产生。 相对小的线圈用于扫描和精确调整焦点。
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6.发明授权Integrated emission microscope for panchromatic imaging, continuous wavelength spectroscopy and selective area spectroscopic mapping 失效用于全色成像，连续波长光谱和选择性区域光谱映射的集成放射显微镜
公开(公告)号：US5724131A
公开(公告)日：1998-03-03
申请号：US511351
申请日：1995-08-04
IPC分类号： H01J37/244 , G01N21/71
CPC分类号： H01J37/244 , H01J37/228 , H01J2237/2445 , H01J2237/2808
摘要： An integrated emission microscope with an emitted radiation detection system for collecting and analyzing radiation from a device under test. A semi-ellipsoidal mirror of high ellipticity directs emitted radiation from the device under test through an aperture to a radiation guide, Which transmits the radiation to spectral analyzer. The device under test may be mounted on a scanning stage. The system permits high spatial resolution selected area spectroscopic analysis, panchromatic imaging, and spectroscopic mapping of the emitted radiation from the device under test.
摘要翻译： 一种具有发射辐射检测系统的集成放射显微镜，用于收集和分析来自被测器件的辐射。 高椭圆率的半椭球镜将被测器件的辐射通过孔径引导到辐射导向器，辐射导向器将辐射传输到光谱分析仪。 被测设备可以安装在扫描台上。 该系统允许高空间分辨率选择的区域光谱分析，全色成像和来自被测器件的发射辐射的光谱映射。
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