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公开(公告)号：US06662662B1
公开(公告)日：2003-12-16
申请号：US09564506
申请日：2000-05-04
申请人： Christina A. Nord , David A. Horky , Kenneth G. Guttsen , Thomas E. Johnson , Matthew G. Sherin , Kevin P. Szafranski , William J. Ballot , Renae M. Patrick , Donald E. Harasyn , Ryan R. Eidenschink , Todd W. Schansberg , Mark G. Romo , Steven M. Behm , Bennett L. Louwagie , Robert C. Hedtke , Stanley E. Rud, Jr. , Jeffrey C. Brekken
发明人： Christina A. Nord , David A. Horky , Kenneth G. Guttsen , Thomas E. Johnson , Matthew G. Sherin , Kevin P. Szafranski , William J. Ballot , Renae M. Patrick , Donald E. Harasyn , Ryan R. Eidenschink , Todd W. Schansberg , Mark G. Romo , Steven M. Behm , Bennett L. Louwagie , Robert C. Hedtke , Stanley E. Rud, Jr. , Jeffrey C. Brekken
IPC分类号： G01L708
CPC分类号： G01L19/0645 , G01L19/0618 , G01L19/0663
摘要： A pressure transmitter with a fluid isolator that includes a sensor tube and a fill tube that have “D” shaped ends that connect together in a port internal to the transmitter. The shaped ends can be brazed into the port for sealing. Fitting both the sensor tube and the fill tube in the same port provides a low cost isolator with reduced isolator liquid volume. The fluid isolator has an isolator diaphragm with a central diaphragm region overlying a central backing plate that includes a annular groove. The annular groove avoids slow response of the isolator after an overpressure condition.
摘要翻译： 具有流体隔离器的压力变送器，其包括传感器管和填充管，其具有在发射器内部的端口中连接在一起的“D”形端。 成型端可以钎焊到端口中进行密封。 将传感器管和填充管同时连接在同一个端口，可提供低成本的隔离器，减少隔离液体积。 流体隔离器具有隔离隔膜，隔膜隔膜具有覆盖中心背板的中心隔膜区域，该中心隔板包括环形槽。 环形槽避免了超压条件下隔离器的响应缓慢。
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公开(公告)号：US5760310A
公开(公告)日：1998-06-02
申请号：US770916
申请日：1996-12-20
CPC分类号： G01L19/0672 , G01L19/0092 , G01L19/0645 , G01M3/16
摘要： A pressure transmitter has a pressure sensor coupled to an isolator diaphragm by a fill fluid such as oil. According to the invention, means are provided for measuring the position of the isolator diaphragm and comparing the measured position with an expected position to give an indication of fill fluid leakage. Non-contact arrangements such as capacitive and ultrasonic techniques are disclosed for measuring isolator diaphragm position, as well as contacting arrangements such as switches. The fill fluid loss arrangement can be incorporated into a two-wire transmitter, which transmitter can be made to send a warning signal to a control unit when fill fluid loss is detected.
摘要翻译： 压力变送器具有通过诸如油的填充液体耦合到隔离膜的压力传感器。 根据本发明，提供了用于测量隔离膜片的位置并将测量位置与预期位置进行比较的装置，以给出填充流体泄漏的指示。 公开了诸如电容和超声波技术的非接触布置用于测量隔离膜的位置以及诸如开关的接触布置。 填充流体损失布置可以并入双线式发射器中，当检测到填充液体损失时，该发射器可以被发送给控制单元的警告信号。
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公开(公告)号：US4777826A
公开(公告)日：1988-10-18
申请号：US23962
申请日：1987-03-10
CPC分类号： G01L9/0051 , G01L1/2281 , G01L9/0055 , G01L9/045
摘要： A strain gauge sensor for providing an electrical output responsive to a parameter applied to a substrate. A homogenous thin film circuit is deposited on an insulating layer which is deposited on a substrate of single-crystal material. The thin film circuit includes a strain gauge responsive to strain transferred through the insulating layer from the substrate and resistance trimming networks trimmed by removal of thin film material from the trimming networks to adjust zero and gain. A diaphragm is etched in the substrate to form a pressure sensor. An optional support layer may be added to the sensor for mounting the sensor to a surface.
摘要翻译： 一种应变计传感器，用于响应于施加到衬底的参数提供电输出。 均匀的薄膜电路沉积在沉积在单晶材料的衬底上的绝缘层上。 薄膜电路包括响应于从衬底传输通过绝缘层的应变的应变计和通过从修整网络去除薄膜材料而修整的电阻修剪网络，以调整零和增益。 在衬底中蚀刻隔膜以形成压力传感器。 可以向传感器添加可选的支撑层，以将传感器安装到表面。
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公开(公告)号：US06425290B2
公开(公告)日：2002-07-30
申请号：US09780033
申请日：2001-02-09
IPC分类号： G01L708
CPC分类号： G01L9/0007 , G01L9/0055 , G01L9/0072 , G01L9/0073 , G01L9/0075 , G01L9/0076 , G01L11/02 , G01L13/026
摘要： A pressure sensor is provided for measuring a pressure difference between two fluids which does not require isolation fluid. The pressure sensor includes a diaphragm support member having an outer periphery and diaphragms coupled thereto. Movement of the diaphragms are the movement of a moveable member. The movement can be sensed to determine the applied differential pressure. The coupling member is joined to the outer periphery with a web. The web is recessed from opposed outwardly facing surfaces of the outer periphery, and first and second diaphragms disposed on opposite sides of the diaphragm support member. Each diaphragm is joined to the outer periphery and to the coupling member.
摘要翻译： 提供了用于测量不需要隔离流体的两种流体之间的压力差的压力传感器。 压力传感器包括具有外周边的隔膜支撑构件和与其连接的隔膜。 隔膜的移动是可移动构件的运动。 可以感测运动以确定施加的压差。 联接构件与腹板连接到外周。 腹板从外周的相对的向外的表面凹陷，并且设置在隔膜支撑构件的相对侧上的第一和第二隔膜。 每个隔膜连接到外周和联接构件。
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5.发明授权Grain growth of electrical interconnection for microelectromechanical systems (MEMS) 有权微机电系统（MEMS）电互连的晶粒生长公开(公告)号：US06516671B2
公开(公告)日：2003-02-11
申请号：US09755346
申请日：2001-01-05
IPC分类号： G01L912
CPC分类号： G01L9/0075 , B81B7/0006
摘要： A sensor has an electrical interconnect grown in a cavity between first and second layers that are bonded together. Electrically conductive grain growth material is selectively deposited on at least one of two electrically conductive film interconnect regions that face one another across the cavity. The grain growth material is then grown upon predetermined conditions to form the electrical interconnect between the two interconnect regions. A sensor element deposited in the cavity is electrically coupled between the layers by the interconnect. The grain growth material can be tantalum that is heated after the layers are bonded to grow grains that interconnect the electrically conductive films.
摘要翻译： 传感器具有在第一和第二层之间的空腔中生长的电互连结合在一起。 导电晶粒生长材料被选择性地沉积在两个相互面对的导电膜互连区域中的至少一个上。 晶粒生长材料然后在预定条件下生长以形成两个互连区域之间的电互连。 沉积在空腔中的传感器元件通过互连电耦合在层之间。 晶粒生长材料可以是在层被结合之后被加热以生长互连导电膜的晶粒的钽。
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6.发明授权公开(公告)号：US06473711B1
公开(公告)日：2002-10-29
申请号：US09373930
申请日：1999-08-13
IPC分类号： G01L1300
CPC分类号： G01L15/00 , Y10T137/87249
摘要： A pressure transmitter with first and second absolute pressure sensors receives process pressures from corresponding first and second process inlets. A transmitter circuit coupled to the first and second absolute pressure sensors generates a differential pressure type output. A third absolute pressure sensor coupled to the transmitter circuit receives atmospheric pressure from a third inlet. The transmitter circuit generates a second type of transmitter output that can be a gage or absolute pressure type. Single crystal. sapphire pressure sensors are preferred to provide enough accuracy for measuring accurately over 200:1 pressure range.
摘要翻译： 具有第一和第二绝对压力传感器的压力变送器接收来自相应的第一和第二进程入口的过程压力。 耦合到第一和第二绝对压力传感器的发射器电路产生压差型输出。 耦合到发射器电路的第三绝对压力传感器从第三入口接收大气压力。 发射机电路产生可以是量规或绝对压力类型的第二类型的发射器输出。 单晶。 优选的蓝宝石压力传感器提供足够的精度用于精确测量超过200：1的压力范围。
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7.发明授权Extended measurement capability transmitter having shared overpressure protection means 失效具有共享超压保护装置的扩展测量能力发射机
公开(公告)号：US5022270A
公开(公告)日：1991-06-11
申请号：US530024
申请日：1990-05-29
申请人： Stanley E. Rud, Jr.
发明人： Stanley E. Rud, Jr.
CPC分类号： G01L19/0618 , G01F1/383 , G01L11/02 , G01L15/00 , G01L19/0092 , G01L19/02 , G01L19/083 , G01L9/0022 , G01L9/0073 , G01L9/0075
摘要： A transmitter measures pressures and has a pressure sensor and an additional pressure sensor providing additional measurement capability to the transmitter, such as an extended measurement range or measurement redundancy. Both pressure sensors share an overpressure protection device which protects them from pressures exceeding a preselected pressure limit. The pressure sensors are batch fabricated and are formed in a single piece of brittle material.
摘要翻译： 变送器测量压力，并具有压力传感器和额外的压力传感器，为变送器提供额外的测量能力，例如扩展的测量范围或测量冗余度。 两个压力传感器共享超压保护装置，保护它们免受超过预选压力极限的压力。 压力传感器是批量制造的，并且形成为单片脆性材料。
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公开(公告)号：US4944187A
公开(公告)日：1990-07-31
申请号：US289207
申请日：1988-12-23
CPC分类号： G02B26/001 , G01L9/0042 , G01L9/0052 , G01L9/0072 , G01L9/0073 , G01L9/0079
摘要： A pressure sensor utilizes the effect of different elastic moduli between layers or sections of different material that are bonded together to form a body, so that when the bonded material unit is subjected to a uniform hydrostatic external pressure, the differences in the elastic moduli of each of the materials will cause the materials to deflect in a predictable manner proportional to pressure. The amount of warpage or deflection of the body of material can be measured as a function of pressure. Specifically, two layers of materials, such as silicon and borosilicate glass, which have substantially different elastic moduli can be bonded across an interface surface to form an assembly, and when subjected to a substantially uniform pressure on the exterior surfaces the assembly will deflect for indicating applied pressure at relatively high pressure ranges. The bonded material assembly is placed in a fluid to provide a substantially uniform applied hydrostatic pressure on all exposed surfaces of the bonded material assembly.
摘要翻译： 压力传感器利用结合在一起的不同材料的层或不同部分之间的不同弹性模量的作用形成一体，使得当粘合材料单元经受均匀的静水压力时，每个弹性模量的差异 的材料将导致材料以与压力成比例的可预测的方式偏转。 可以测量材料体的翘曲或挠曲量作为压力的函数。 具体地说，具有基本上不同的弹性模量的两层材料，例如硅和硼硅酸盐玻璃，可跨接口界面结合，形成组件，当在外表面受到基本上均匀的压力时，组件将偏转以指示 在相对高的压力范围施加压力。 粘合材料组件被放置在流体中以在粘合材料组件的所有暴露表面上提供基本均匀的施加的静水压力。
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公开(公告)号：US4120206A
公开(公告)日：1978-10-17
申请号：US759837
申请日：1977-01-17
申请人： Stanley E. Rud, Jr.
发明人： Stanley E. Rud, Jr.
CPC分类号： G01L9/0072 , G01L19/02
摘要： A capacitance type differential pressure sensor which includes isolation diaphragms and incompressible fluid filling so that the sensing element does not have to be exposed to hostile fluids for pressure sensing and which isolation diaphragms are arranged in a manner to minimize sensitivity to acceleration forces encountered during use.
摘要翻译： 一种电容式差压传感器，其包括隔离膜片和不可压缩流体填充物，使得感测元件不必暴露于用于压力感测的敌对流体，并且以使得在使用期间遇到的加速力的敏感度最小化的方式布置隔离膜片。
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公开(公告)号：US06612174B2
公开(公告)日：2003-09-02
申请号：US09780148
申请日：2001-02-09
IPC分类号： G01L900
CPC分类号： G01L9/0007 , G01L9/0055 , G01L9/0072 , G01L9/0073 , G01L9/0075 , G01L9/0076 , G01L11/02 , G01L13/026
摘要： A pressure sensor configured to sense an applied pressure, comprising a diaphragm support structure, a diaphragm coupled to the diaphragm support structure and configured to deflect in response to applied pressure, a moveable member coupled to the diaphragm and configured to move in response to deflection of the diaphragm, and an optical interference element coupled to the moveable member and configured to interfere with incident light, wherein the interference is a function of position of the moveable member.
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