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公开(公告)号：US4777826A
公开(公告)日：1988-10-18
申请号：US23962
申请日：1987-03-10
CPC分类号： G01L9/0051 , G01L1/2281 , G01L9/0055 , G01L9/045
摘要： A strain gauge sensor for providing an electrical output responsive to a parameter applied to a substrate. A homogenous thin film circuit is deposited on an insulating layer which is deposited on a substrate of single-crystal material. The thin film circuit includes a strain gauge responsive to strain transferred through the insulating layer from the substrate and resistance trimming networks trimmed by removal of thin film material from the trimming networks to adjust zero and gain. A diaphragm is etched in the substrate to form a pressure sensor. An optional support layer may be added to the sensor for mounting the sensor to a surface.
摘要翻译： 一种应变计传感器，用于响应于施加到衬底的参数提供电输出。 均匀的薄膜电路沉积在沉积在单晶材料的衬底上的绝缘层上。 薄膜电路包括响应于从衬底传输通过绝缘层的应变的应变计和通过从修整网络去除薄膜材料而修整的电阻修剪网络，以调整零和增益。 在衬底中蚀刻隔膜以形成压力传感器。 可以向传感器添加可选的支撑层，以将传感器安装到表面。
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公开(公告)号：US06425290B2
公开(公告)日：2002-07-30
申请号：US09780033
申请日：2001-02-09
IPC分类号： G01L708
CPC分类号： G01L9/0007 , G01L9/0055 , G01L9/0072 , G01L9/0073 , G01L9/0075 , G01L9/0076 , G01L11/02 , G01L13/026
摘要： A pressure sensor is provided for measuring a pressure difference between two fluids which does not require isolation fluid. The pressure sensor includes a diaphragm support member having an outer periphery and diaphragms coupled thereto. Movement of the diaphragms are the movement of a moveable member. The movement can be sensed to determine the applied differential pressure. The coupling member is joined to the outer periphery with a web. The web is recessed from opposed outwardly facing surfaces of the outer periphery, and first and second diaphragms disposed on opposite sides of the diaphragm support member. Each diaphragm is joined to the outer periphery and to the coupling member.
摘要翻译： 提供了用于测量不需要隔离流体的两种流体之间的压力差的压力传感器。 压力传感器包括具有外周边的隔膜支撑构件和与其连接的隔膜。 隔膜的移动是可移动构件的运动。 可以感测运动以确定施加的压差。 联接构件与腹板连接到外周。 腹板从外周的相对的向外的表面凹陷，并且设置在隔膜支撑构件的相对侧上的第一和第二隔膜。 每个隔膜连接到外周和联接构件。
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公开(公告)号：US06662662B1
公开(公告)日：2003-12-16
申请号：US09564506
申请日：2000-05-04
申请人： Christina A. Nord , David A. Horky , Kenneth G. Guttsen , Thomas E. Johnson , Matthew G. Sherin , Kevin P. Szafranski , William J. Ballot , Renae M. Patrick , Donald E. Harasyn , Ryan R. Eidenschink , Todd W. Schansberg , Mark G. Romo , Steven M. Behm , Bennett L. Louwagie , Robert C. Hedtke , Stanley E. Rud, Jr. , Jeffrey C. Brekken
发明人： Christina A. Nord , David A. Horky , Kenneth G. Guttsen , Thomas E. Johnson , Matthew G. Sherin , Kevin P. Szafranski , William J. Ballot , Renae M. Patrick , Donald E. Harasyn , Ryan R. Eidenschink , Todd W. Schansberg , Mark G. Romo , Steven M. Behm , Bennett L. Louwagie , Robert C. Hedtke , Stanley E. Rud, Jr. , Jeffrey C. Brekken
IPC分类号： G01L708
CPC分类号： G01L19/0645 , G01L19/0618 , G01L19/0663
摘要： A pressure transmitter with a fluid isolator that includes a sensor tube and a fill tube that have “D” shaped ends that connect together in a port internal to the transmitter. The shaped ends can be brazed into the port for sealing. Fitting both the sensor tube and the fill tube in the same port provides a low cost isolator with reduced isolator liquid volume. The fluid isolator has an isolator diaphragm with a central diaphragm region overlying a central backing plate that includes a annular groove. The annular groove avoids slow response of the isolator after an overpressure condition.
摘要翻译： 具有流体隔离器的压力变送器，其包括传感器管和填充管，其具有在发射器内部的端口中连接在一起的“D”形端。 成型端可以钎焊到端口中进行密封。 将传感器管和填充管同时连接在同一个端口，可提供低成本的隔离器，减少隔离液体积。 流体隔离器具有隔离隔膜，隔膜隔膜具有覆盖中心背板的中心隔膜区域，该中心隔板包括环形槽。 环形槽避免了超压条件下隔离器的响应缓慢。
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4.发明授权Grain growth of electrical interconnection for microelectromechanical systems (MEMS) 有权微机电系统（MEMS）电互连的晶粒生长公开(公告)号：US06516671B2
公开(公告)日：2003-02-11
申请号：US09755346
申请日：2001-01-05
IPC分类号： G01L912
CPC分类号： G01L9/0075 , B81B7/0006
摘要： A sensor has an electrical interconnect grown in a cavity between first and second layers that are bonded together. Electrically conductive grain growth material is selectively deposited on at least one of two electrically conductive film interconnect regions that face one another across the cavity. The grain growth material is then grown upon predetermined conditions to form the electrical interconnect between the two interconnect regions. A sensor element deposited in the cavity is electrically coupled between the layers by the interconnect. The grain growth material can be tantalum that is heated after the layers are bonded to grow grains that interconnect the electrically conductive films.
摘要翻译： 传感器具有在第一和第二层之间的空腔中生长的电互连结合在一起。 导电晶粒生长材料被选择性地沉积在两个相互面对的导电膜互连区域中的至少一个上。 晶粒生长材料然后在预定条件下生长以形成两个互连区域之间的电互连。 沉积在空腔中的传感器元件通过互连电耦合在层之间。 晶粒生长材料可以是在层被结合之后被加热以生长互连导电膜的晶粒的钽。
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公开(公告)号：US4773269A
公开(公告)日：1988-09-27
申请号：US891261
申请日：1986-07-28
申请人： Thomas A. Knecht , Mark G. Romo
发明人： Thomas A. Knecht , Mark G. Romo
CPC分类号： G01L19/147 , G01L13/025 , G01L19/0038 , Y10S73/04
摘要： A deflecting diaphragm differential pressure sensor is formed so all electrical elements and connections from external circuitry to the sensor are isolated from the pressure media. The deflecting, pressure sensing diaphragm is made of a semi-conductor material, having piezoresistors disposed on a surface thereof to form strain gages to sense deflection of the diaphragm. The strain gage resistors are media isolated by a layer that overlies the strain gage resistors. All forms of the invention provide environmental protection for the electrical connections for external circuitry, which are subject to corrosion from the pressure media.
摘要翻译： 形成偏转隔膜差压传感器，使得所有电气元件和从外部电路到传感器的连接与压力介质隔离。 偏转压力感测隔膜由半导体材料制成，其上设置有压敏电阻器，以形成应变计来感测隔膜的偏转。 应变计电阻器是通过覆盖应变计电阻器的层隔离的介质。 本发明的所有形式为外部电路的电连接提供环境保护，外部电路将受到来自压力介质的腐蚀。
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公开(公告)号：US4790192A
公开(公告)日：1988-12-13
申请号：US100488
申请日：1987-09-24
申请人： Thomas A. Knecht , Mark G. Romo
发明人： Thomas A. Knecht , Mark G. Romo
CPC分类号： G01L19/147 , G01L19/0038 , G01L19/143 , G01L19/148 , G01L9/0054 , Y10S73/04
摘要： A pressure sensor that provides for multiple diaphragm sensing regions in a side by side configuration which can be formed into a stacked monolithic batch fabricated form. The multiple pressure sensor can be constructed to sense differential or absolute pressure as desired. In preferred forms of the invention, the pressure inlets are all on the same side of the monolithic structure to easily isolate the corrosive pressure media from the sensing means, which as shown comprise strain gage sensors on the sensing diaphragms as well as from the conductors carrying signals from the sensing means. The variable strain gage resistors on the sensor diaphragms are segregated from the media in several differet ways using isolating layers. The stacked sensor configuration insures that the device can be batched fabricated so that a number of sensors can be formed on chips that are stacked and bonded together, and then separated into individual sensors.
摘要翻译： 压力传感器，其以并排构造提供多个光阑感测区域，其可以形成为堆叠的单片批量制造形式。 可以构造多压力传感器以根据需要感测差压或绝对压力。 在本发明的优选形式中，压力入口都在整体结构的同一侧，以容易地将腐蚀性压力介质与感测装置隔离，如图所示，感测膜片上的应变计传感器以及承载的导体 来自感测装置的信号。 传感器隔膜上的可变应变计电阻器使用隔离层以几种不同的方式与介质隔离。 层叠的传感器构造确保了可以批量地制造器件，使得可以在堆叠并结合在一起的芯片上形成多个传感器，然后分离成单独的传感器。
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公开(公告)号：US20080229838A1
公开(公告)日：2008-09-25
申请号：US11724618
申请日：2007-03-15
申请人： Lowell A. Kleven , Mark G. Romo
发明人： Lowell A. Kleven , Mark G. Romo
IPC分类号： G01L9/04
CPC分类号： G01L19/003 , G01L19/0061 , G01L19/0084 , G01L19/0645
摘要： A pressure transmitter comprises a metal wall separating a process pressure chamber from an electronics compartment. The metal wall has a stepped bore with a bore shelf facing the process pressure chamber. A metal header has a stepped outer rim with a header shelf that contacts the bore shelf. The metal header includes at least one electrical feedthrough with a glass-to-metal seal adjacent the stepped outer rim. A welded seal seals the stepped outer rim to the stepped bore.
摘要翻译： 压力变送器包括将过程压力室与电子室隔开的金属壁。 金属壁具有阶梯孔，其中孔架面向过程压力室。 金属集管具有阶梯式外缘，其具有接触孔架的集管架。 金属集管包括至少一个带有与阶梯状外边缘相邻的玻璃 - 金属密封件的电馈通。 焊接密封将阶梯式外缘密封到阶梯孔。
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8.发明申请DIFFERENTIAL PRESSURE SENSOR ISOLATION IN A PROCESS FLUID PRESSURE TRANSMITTER 有权过程流体压力变送器中的差压传感器分离公开(公告)号：US20090078054A1
公开(公告)日：2009-03-26
申请号：US11903068
申请日：2007-09-20
申请人： Mark G. Romo
发明人： Mark G. Romo
IPC分类号： G01L9/00
CPC分类号： G01L13/026 , G01L19/04 , G01L19/0645
摘要： A differential pressure transmitter includes first and second process fluid inlets. A differential pressure sensor is disposed within the transmitter and has first and second sensor inlets. A first isolator diaphragm is located proximate the first process fluid inlet and is operably coupled to the first sensor inlet through a first fill fluid volume. A second isolator diaphragm is located proximate the second process fluid inlet and is operably coupled to the second sensor inlet through a second fill fluid volume. Measurement circuitry is operably coupled to the differential pressure sensor and configured to measure an electrical parameter of the sensor and provide an indication of the measured parameter. A third fluid volume substantially surrounds the differential pressure sensor. The third fluid volume exerts a compressive force on the differential pressure sensor.
摘要翻译： 差压变送器包括第一和第二过程流体入口。 差压传感器设置在变送器内，并具有第一和第二传感器入口。 第一隔离隔膜位于第一工艺流体入口附近，并且通过第一填充流体体积可操作地联接到第一传感器入口。 第二隔离膜隔膜位于第二过程流体入口附近，并且通过第二填充流体体积可操作地联接到第二传感器入口。 测量电路可操作地耦合到差压传感器并且被配置为测量传感器的电参数并提供测量参数的指示。 第三流体体积基本上围绕差压传感器。 第三流体体积在压差传感器上施加压缩力。
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公开(公告)号：US20130068029A1
公开(公告)日：2013-03-21
申请号：US13440163
申请日：2012-04-05
CPC分类号： G01L7/082 , B23K20/08 , G01L13/026 , G01L19/0046 , G01L19/0645
摘要： A process device has a process seal for coupling to an industrial process. The process device includes a process device body having an isolation cavity and an isolation passageway extending from the isolation cavity to a pressure sensor. The isolation cavity and isolation passageway filled with an isolation fluid. An isolation diaphragm is positioned to isolate the isolation cavity from process fluid. The isolation diaphragm has a process fluid side and an isolation fluid side. A weld ring is positioned around a periphery of the process fluid side of the isolation diaphragm. The weld ring is formed of a first material compatible with the isolation diaphragm and a second material compatible with the process device body. A weld secures the weld ring to the process device body.
摘要翻译： 处理装置具有用于耦合到工业过程的过程密封件。 处理装置包括具有隔离腔和从隔离腔延伸到压力传感器的隔离通道的过程装置主体。 隔离腔和隔离通道填充有隔离流体。 定位隔离隔离隔离隔离腔与过程流体。 隔离膜具有工艺流体侧和隔离流体侧。 焊接环围绕隔离隔膜的工艺流体侧的周边定位。 焊接环由与隔离膜相容的第一材料和与过程装置本体相容的第二材料形成。 焊接将焊接环固定到过程装置主体。
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公开(公告)号：US20110079086A1
公开(公告)日：2011-04-07
申请号：US12571611
申请日：2009-10-01
申请人： Mark G. Romo
发明人： Mark G. Romo
IPC分类号： G01L7/00
CPC分类号： G01L19/146 , G01L19/0007
摘要： A pressure transmitter with pressure sensor mount includes pressure measurement circuitry. A metal body of the pressure transmitter has a pressure coupling configured to couple to a process pressure. A pressure sensor is configured to provide an output related to an applied pressure to the pressure measurement circuitry. A conduit is coupled to the pressure sensor and configured to apply an applied pressure corresponding to the process pressure to pressure sensor. A non-conductive spacer is configured to electrically isolate the conduit from the metal body. The non-conductive spacer has an opening formed therein and is arranged to convey the applied from the metal body to the conduit.
摘要翻译： 带压力传感器座的压力变送器包括压力测量电路。 压力变送器的金属体具有被配置为耦合到过程压力的压力耦合。 压力传感器被配置为向压力测量电路提供与施加的压力相关的输出。 导管联接到压力传感器并且构造成将对应于过程压力的施加压力施加到压力传感器。 非导电间隔件构造成将导管与金属体电隔离。 非导电间隔件具有形成在其中的开口，并且布置成将从金属体施加的导管传送到导管。
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