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    Stepper motor device with compensating non-sinusoidal driving values and method of producing the driving values
    1.
    发明授权
    Stepper motor device with compensating non-sinusoidal driving values and method of producing the driving values 有权
    具有补偿非正弦驱动值的步进电机装置和产生驱动值的方法

    公开(公告)号：US08030876B2

    公开(公告)日：2011-10-04

    申请号：US12240777

    申请日：2008-09-29

    申请人： Christopher C. Chang ,  Edward Li ,  Thomas Judge

    发明人： Christopher C. Chang ,  Edward Li ,  Thomas Judge

    IPC分类号： H02P8/00

    CPC分类号： H02P8/12

    摘要： A stepper motor device uses compensating non-sinusoidal driving values to compensate for operational non-sinusoidal drive characteristics of a motor of the device due to at least design and manufacturing imperfections in the motor. The compensating non-sinusoidal driving values may be derived using back electromagnetic force produced from the motor or using measured rotational positions of the motor when the motor is driven using known driving values.

    摘要翻译： 步进电机装置使用补偿的非正弦驱动值来补偿由于电动机至少设计和制造缺陷而导致的装置的电动机的非正弦驱动特性。 可以使用从电动机产生的反电磁力或使用已知的驱动值来驱动电动机时使用电动机的测量的旋转位置来导出补偿非正弦驱动值。

    STEPPER MOTOR DEVICE WITH COMPENSATING NON-SINUSOIDAL DRIVING VALUES AND METHOD OF PRODUCING THE DRIVING VALUES
    2.
    发明申请
    STEPPER MOTOR DEVICE WITH COMPENSATING NON-SINUSOIDAL DRIVING VALUES AND METHOD OF PRODUCING THE DRIVING VALUES 有权
    具有补偿非SINUSOIDAL驱动值的步进电机和产生驱动值的方法

    公开(公告)号：US20090085509A1

    公开(公告)日：2009-04-02

    申请号：US12240777

    申请日：2008-09-29

    申请人： Christopher C. Chang ,  Edward Li ,  Thomas Judge

    发明人： Christopher C. Chang ,  Edward Li ,  Thomas Judge

    IPC分类号： H02P8/22 ,  G06F19/00

    CPC分类号： H02P8/12

    摘要： A stepper motor device uses compensating non-sinusoidal driving values to compensate for operational non-sinusoidal drive characteristics of a motor of the device due to at least design and manufacturing imperfections in the motor. The compensating non-sinusoidal driving values may be derived using back electromagnetic force produced from the motor or using measured rotational positions of the motor when the motor is driven using known driving values.

    摘要翻译： 步进电机装置使用补偿的非正弦驱动值来补偿由于电动机至少设计和制造缺陷而导致的装置的电动机的非正弦驱动特性。 可以使用从电动机产生的反电磁力或使用已知的驱动值来驱动电动机时使用电动机的测量的旋转位置来导出补偿非正弦驱动值。

    CORROSION RESISTANT COMPONENT OF SEMICONDUCTOR PROCESSING EQUIPMENT AND METHOD OF MANUFACTURE THEREOF
    3.
    发明申请
    CORROSION RESISTANT COMPONENT OF SEMICONDUCTOR PROCESSING EQUIPMENT AND METHOD OF MANUFACTURE THEREOF 有权
    半导体加工设备的耐腐蚀性成分及其制造方法

    公开(公告)号：US20100003826A1

    公开(公告)日：2010-01-07

    申请号：US12559177

    申请日：2009-09-14

    申请人： ROBERT J. O'DONNELL ,  Christopher C. Chang ,  John E. Daugherty

    发明人： ROBERT J. O'DONNELL ,  Christopher C. Chang ,  John E. Daugherty

    IPC分类号： H01L21/3065

    CPC分类号： H01J37/32467 ,  H01J37/32477 ,  H01J37/32559

    摘要： A corrosion resistant component of a plasma chamber includes a liquid crystalline polymer. In a preferred embodiment, the liquid crystalline polymer (LCP) is provided on an aluminum component having an anodized or non-anodized surface. The liquid crystalline polymer can also be provided on an alumina component. The liquid crystalline polymer can be deposited by a method such as plasma spraying. The liquid crystalline polymer may also be provided as a preformed sheet or other shape adapted to cover the exposed surfaces of the reaction chamber. Additionally, the reactor components may be made entirely from liquid crystalline polymer by machining the component from a solid block of liquid crystalline polymer or molding the component from the polymer. The liquid crystalline polymer may contain reinforcing fillers such as glass or mineral fillers.

    摘要翻译： 等离子体室的耐腐蚀组分包括液晶聚合物。 在优选的实施方案中，液晶聚合物（LCP）设置在具有阳极化或非阳极氧化表面的铝组分上。 液晶聚合物也可以提供在氧化铝组分上。 液晶聚合物可以通过诸如等离子喷涂的方法沉积。 液晶聚合物也可以被提供为预成型片或适于覆盖反应室暴露表面的其它形状。 此外，反应器组分可以通过从液晶聚合物的固体块中加工组分或从聚合物模塑组分而完全由液晶聚合物制成。 液晶聚合物可以含有增强填料如玻璃或矿物填料。

    Multi-camera system and method of calibrating the multi-camera system
    7.
    发明授权
    Multi-camera system and method of calibrating the multi-camera system 有权
    多摄像机系统和校准多摄像机系统的方法

    公开(公告)号：US09066024B2

    公开(公告)日：2015-06-23

    申请号：US13492750

    申请日：2012-06-08

    申请人： Christopher C. Chang ,  Joshua Minsung Chang

    发明人： Christopher C. Chang ,  Joshua Minsung Chang

    IPC分类号： H04N5/247 ,  H04N5/262 ,  H04N17/00

    CPC分类号： H04N5/247 ,  H04N5/2627 ,  H04N17/002

    摘要： A multi-camera system and method of calibrating the multi-camera system uses at least one timer to synchronize cameras of the multi-camera system with respect to time. The cameras are used to capture images of the at least one timer. The images are then analyzed to adjust an image-capture timing parameter of at least one of the cameras to time synchronize the cameras.

    摘要翻译： 多摄像机系统和校准多摄像机系统的方法使用至少一个定时器来相对于时间同步多摄像机系统的摄像机。 相机用于捕获至少一个定时器的图像。 然后分析图像以调整至少一个相机的图像拍摄时序参数，以便对相机进行时间同步。

    OPTICAL ENCODER AND METHOD FOR MEASURING DISPLACEMENT INFORMATION USING MULTIPLE OPTICAL TRACKS OF DIFFRACTIVE OPTICAL REGIONS HAVING DIFFERENT PERIODICITIES
    9.
    发明申请
    OPTICAL ENCODER AND METHOD FOR MEASURING DISPLACEMENT INFORMATION USING MULTIPLE OPTICAL TRACKS OF DIFFRACTIVE OPTICAL REGIONS HAVING DIFFERENT PERIODICITIES 失效
    光学编码器和使用多个具有不同周期的衍射光学区域的光学轨迹测量位移信息的方法

    公开(公告)号：US20100213358A1

    公开(公告)日：2010-08-26

    申请号：US12711156

    申请日：2010-02-23

    申请人： Christopher C. Chang

    发明人： Christopher C. Chang

    IPC分类号： G01D5/347

    CPC分类号： G01D5/3473 ,  G01D5/34715 ,  G01D5/38

    摘要： An optical encoder and method for measuring displacement information uses an encoder member that includes multiple optical tracks of diffractive optical regions having different periodicities with respect to consecutive identical diffractive optical regions to produce diffracted beams of light from at least one beam of light emitted from a light source. The diffracted beams of light are received at photodetectors, which produce electrical signals in response to the received beams of light. The electrical signals are related to the displacement information being measured.

    摘要翻译： 用于测量位移信息的光学编码器和方法使用编码器构件，该编码器构件包括相对于连续的相同衍射光学区域具有不同周期性的衍射光学区域的多个光学轨迹，以产生从光发射的至少一束光的衍射光束 资源。 衍射光束在光电检测器处被接收，其响应于所接收的光束而产生电信号。 电信号与被测量的位移信息有关。

    Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof
    10.
    发明授权
    Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof 有权
    氧化锆增韧陶瓷部件和半导体加工设备中的涂层及其制造方法

    公开(公告)号：US07255898B2

    公开(公告)日：2007-08-14

    申请号：US10442980

    申请日：2003-05-22

    申请人： Robert J. O'Donnell ,  Christopher C. Chang ,  John E. Daugherty

    发明人： Robert J. O'Donnell ,  Christopher C. Chang ,  John E. Daugherty

    IPC分类号： B05D1/02 ,  C23C16/40

    CPC分类号： H01J37/32477 ,  C23C14/083 ,  C23C16/405 ,  Y10T428/265

    摘要： A corrosion resistant component of semiconductor processing equipment such as a plasma chamber comprises zirconia toughened ceramic material as an outermost surface of the component. The component can be made entirely of the ceramic material or the ceramic material can be provided as a coating on a substrate such as aluminum or aluminum alloy, stainless steel, or refractory metal. The zirconia toughened ceramic can be tetragonal zirconia polycrystalline (TZP) material, partially-stabilized zirconia (PSZ), or a zirconia dispersion toughened ceramic (ZTC) such as zirconia-toughened alumina (tetragonal zirconia particles dispersed in Al2O3). In the case of a ceramic zirconia toughened coating, one or more intermediate layers may be provided between the component and the ceramic coating. To promote adhesion of the ceramic coating, the component surface or the intermediate layer surface may be subjected to a surface roughening treatment prior to depositing the ceramic coating.

    摘要翻译： 诸如等离子体室的半导体加工设备的耐腐蚀部件包括作为部件的最外表面的氧化锆增韧陶瓷材料。 该组件可以完全由陶瓷材料制成，或者陶瓷材料可以作为涂层提供在诸如铝或铝合金，不锈钢或难熔金属的基底上。 氧化锆增韧陶瓷可以是四方晶氧化锆多晶（TZP）材料，部分稳定的氧化锆（PSZ）或氧化锆分散体增韧陶瓷（ZTC），如氧化锆增韧的氧化铝（分散在Al 2+中的四方晶氧化锆颗粒） SUB> O 3 3）。 在陶瓷氧化锆增韧涂层的情况下，可以在组件和陶瓷涂层之间提供一个或多个中间层。 为了促进陶瓷涂层的粘合，可以在沉积陶瓷涂层之前对组分表面或中间层表面进行表面粗糙化处理。