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    Linear Stage for Reflective Electron Beam Lithography
    4.
    发明申请
    Linear Stage for Reflective Electron Beam Lithography 有权
    反射电子束光刻线性阶段

    公开(公告)号：US20130293865A1

    公开(公告)日：2013-11-07

    申请号：US13824079

    申请日：2012-09-06

    申请人： Upendra Ummethala ,  Layton Hale ,  Joshua Clyne ,  Samir Nayfeh ,  Mark Williams ,  Joseph A. Di Regolo ,  Andrew Wilson

    发明人： Upendra Ummethala ,  Layton Hale ,  Joshua Clyne ,  Samir Nayfeh ,  Mark Williams ,  Joseph A. Di Regolo ,  Andrew Wilson

    IPC分类号： G03F7/20

    CPC分类号： G03F7/70716 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/70758 ,  G03F7/70766 ,  H01J37/20 ,  H01J37/3174 ,  H01J2237/20221 ,  H01J2237/31774 ,  H01J2237/31789

    摘要： A linear stacked stage suitable for REBL may include a first upper fast stage configured to translate a first plurality of wafers in a first direction along a first axis, the first upper fast stage configured to secure a first plurality of wafers; a second upper fast stage configured to translate a second plurality of wafers in a second direction along the first axis, the second upper fast stage configured to secure the second plurality of wafers, the second direction opposite to the first direction, wherein the translation of the first upper fast stage and the translation of the second upper fast stage are configured to substantially eliminate inertial reaction forces generated by motion of the first upper fast stage and the second upper fast stage; and a carrier stage configured to translate the first and second upper fast stages along a second axis.

    摘要翻译： 适用于REBL的线性堆叠级可以包括第一上部快速级，其被配置为沿着第一轴沿第一方向平移第一多个晶片，所述第一上部快速级被配置为固定第一多个晶片; 第二上快速级，被配置为沿第一轴在第二方向上平移第二多个晶片，第二上快速级被配置为固定第二多个晶片，第二方向与第一方向相反，其中， 第一上快速阶段和第二上快速阶段的平移被配置为基本上消除由第一上快速阶段和第二上快速阶段的运动产生的惯性反作用力; 以及载体台，其构造成沿着第二轴平移所述第一和第二上部快速级。

    Modular weaving for short production runs
    5.
    发明申请
    Modular weaving for short production runs 失效
    模块化编织短期生产运行

    公开(公告)号：US20060249217A1

    公开(公告)日：2006-11-09

    申请号：US11113510

    申请日：2005-04-25

    申请人： Samir Nayfeh ,  Jonathan Robrs

    发明人： Samir Nayfeh ,  Jonathan Robrs

    IPC分类号： D03D41/00

    CPC分类号： D03D33/00 ,  D03D41/00 ,  D03D49/16

    摘要： A modular weaving machine includes a loom chassis and a plurality of modular warp units. The warp units are each configured for being pre-loaded with a plurality of warp threads. The loom chassis is configured to receivably support the warp units thereon, so that the warp threads are disposed in parallel, spaced relation to one another, extending in a downstream direction. A plurality of shedding actuators are coupled to the loom chassis and configured to form a shed with warp threads of each of the warp units. A weft insertion module is configured to insert a weft thread through the shed.

    摘要翻译： 模块化织造机包括织机底盘和多个模块化经线单元。 经线单元各自被配置为预加载有多个经线。 织机底盘被配置为可接收地支撑其上的经纱单元，使得经线彼此平行地设置成彼此间隔开，并沿下游方向延伸。 多个脱落致动器联接到织机底盘并且构造成形成具有每个经线单元的经线的梭口。 引纬模块被配置成将纬纱插入梭口。

    GAS BEARING ELECTROSTATIC CHUCK
    6.
    发明申请
    GAS BEARING ELECTROSTATIC CHUCK 有权
    气体轴承静电卡盘

    公开(公告)号：US20090273878A1

    公开(公告)日：2009-11-05

    申请号：US12113091

    申请日：2008-04-30

    申请人： William David Lee ,  Marvin Raymond LaFontaine ,  Ashwin Madhukar Purohit ,  Joseph Daniel Gillespie ,  Donovan Beckel ,  Teng Chao Tao ,  Alexander Henry Slocum ,  Samir Nayfeh

    发明人： William David Lee ,  Marvin Raymond LaFontaine ,  Ashwin Madhukar Purohit ,  Joseph Daniel Gillespie ,  Donovan Beckel ,  Teng Chao Tao ,  Alexander Henry Slocum ,  Samir Nayfeh

    IPC分类号： H02N13/00

    CPC分类号： H01L21/6831

    摘要： An electrostatic clamp is provided having a clamping plate, wherein the clamping plate has a central region and an annulus region. A plurality of gas supply orifices are defined in the central region of the clamping plate, wherein the plurality of gas supply orifices are in fluid communication with a pressurized gas supply, and wherein the pressurized gas supply is configured to provide a cushion of gas between the clamping surface and the workpiece in the central region of the clamping plate via the plurality of gas supply orifices. One or more gas return orifices defined in one or more of the central region and annulus region of the clamping plate, wherein the one or more gas return orifices are in fluid communication with a vacuum source, therein generally defining an exhaust path for the cushion of gas. A seal is disposed in the annulus region of the clamping plate, wherein the seal is configured to generally prevent a leakage of the cushion of gas from the central region to an environment external to the annulus region. One or more electrodes are further electrically connected to a first voltage potential to provide a first clamping force.

    摘要翻译： 提供具有夹板的静电夹具，其中夹持板具有中心区域和环形区域。 多个气体供给孔限定在夹紧板的中心区域中，其中多个气体供应孔与加压气体源流体连通，并且其中，加压气体供应构造成在气体供应孔之间提供气垫 通过多个气体供应孔在夹紧板的中心区域中夹持表面和工件。 限定在夹板的一个或多个中心区域和环形区域中的一个或多个气体返回孔，其中一个或多个气体返回孔与真空源流体连通，其中通常限定用于衬垫的衬垫的排气路径 加油站。 密封件设置在夹紧板的环空区域中，其中密封件构造成大体上防止气垫从中心区域泄漏到环形区域外部的环境。 一个或多个电极进一步电连接到第一电压电位以提供第一夹紧力。

    Gas bearing electrostatic chuck
    7.
    发明授权
    Gas bearing electrostatic chuck 有权
    气体轴承静电吸盘

    公开(公告)号：US09036326B2

    公开(公告)日：2015-05-19

    申请号：US12113091

    申请日：2008-04-30

    申请人： William David Lee ,  Marvin Raymond LaFontaine ,  Ashwin Madhukar Purohit ,  Joseph Daniel Gillespie ,  Donovan Beckel ,  Teng Chao Tao ,  Alexander Henry Slocum ,  Samir Nayfeh

    发明人： William David Lee ,  Marvin Raymond LaFontaine ,  Ashwin Madhukar Purohit ,  Joseph Daniel Gillespie ,  Donovan Beckel ,  Teng Chao Tao ,  Alexander Henry Slocum ,  Samir Nayfeh

    IPC分类号： H01L21/683

    CPC分类号： H01L21/6831

    摘要： An electrostatic clamp is provided having a clamping plate, wherein the clamping plate has a central region and an annulus region. A plurality of gas supply orifices are defined in the central region of the clamping plate, wherein the plurality of gas supply orifices are in fluid communication with a pressurized gas supply, and wherein the pressurized gas supply is configured to provide a cushion of gas between the clamping surface and the workpiece in the central region of the clamping plate via the plurality of gas supply orifices. One or more gas return orifices defined in one or more of the central region and annulus region of the clamping plate, wherein the one or more gas return orifices are in fluid communication with a vacuum source, therein generally defining an exhaust path for the cushion of gas. A seal is disposed in the annulus region of the clamping plate, wherein the seal is configured to generally prevent a leakage of the cushion of gas from the central region to an environment external to the annulus region. One or more electrodes are further electrically connected to a first voltage potential to provide a first clamping force.

    摘要翻译： 提供具有夹板的静电夹具，其中夹持板具有中心区域和环形区域。 多个气体供给孔限定在夹紧板的中心区域中，其中多个气体供应孔与加压气体源流体连通，并且其中加压气体供应构造成在气体供应孔之间提供气垫 通过多个气体供应孔在夹紧板的中心区域中夹持表面和工件。 限定在夹板的一个或多个中心区域和环形区域中的一个或多个气体返回孔，其中一个或多个气体返回孔与真空源流体连通，其中通常限定用于衬垫的衬垫的排气路径 加油站。 密封件设置在夹紧板的环空区域中，其中密封件构造成大体上防止气垫从中心区域泄漏到环形区域外部的环境。 一个或多个电极进一步电连接到第一电压电位以提供第一夹紧力。

    Bias weaving machine
    8.
    发明申请
    Bias weaving machine 失效
    偏心织机

    公开(公告)号：US20050274426A1

    公开(公告)日：2005-12-15

    申请号：US10928971

    申请日：2004-08-27

    申请人： Samir Nayfeh ,  Jonathan Rohrs ,  Osamah Rifai ,  Sappinandana Akamphon ,  Mauricio Diaz ,  Emily Warman

    发明人： Samir Nayfeh ,  Jonathan Rohrs ,  Osamah Rifai ,  Sappinandana Akamphon ,  Mauricio Diaz ,  Emily Warman

    IPC分类号： D03D41/00

    CPC分类号： D03D41/004 ,  Y10S139/01

    摘要： A bias-weaving machine is provided. In one embodiment, the bias-weaving machine includes a plurality of yarn carriers, each holding a yarn under tension that extends in a downstream direction towards a woven product. The yarn carriers are translatable in at least one direction other than the downstream direction. The apparatus further includes a plurality of reeds disposed to comb the yarns in a downstream direction. The reeds have a range of motion extending between positions upstream and downstream of the yarn carriers. Embodiment of this invention may advantageously be utilized to weave three-dimensional woven products, such as textile preforms for aerospace composites.

    摘要翻译： 提供偏心织机。 在一个实施例中，偏压编织机包括多个纱线架，每个纱线架保持在下游方向上朝向织造产品延伸的张力的纱线。 纱线载体可以在除了下游方向之外的至少一个方向上平移。 该装置还包括设置成沿着下游方向梳理纱线的多个簧片。 簧片具有在纱线载体的上游和下游位置之间延伸的运动范围。 本发明的实施例可以有利地用于编织三维织造产品，例如用于航空航天复合材料的织物预制件。

    Modular weaving system with individual yarn control
    10.
    发明申请
    Modular weaving system with individual yarn control 失效
    具有单独纱线控制的模块化编织系统

    公开(公告)号：US20070107796A1

    公开(公告)日：2007-05-17

    申请号：US11598347

    申请日：2006-11-13

    申请人： Samir Nayfeh ,  Jonathan Rohrs

    发明人： Samir Nayfeh ,  Jonathan Rohrs

    IPC分类号： D03D41/00

    CPC分类号： D03D41/00 ,  D03C13/00 ,  D03D49/02 ,  D03D49/20 ,  D03D49/22 ,  D03D49/60 ,  D03D49/68 ,  D03J1/001 ,  D03J1/14

    摘要： A modular weaving machine includes a loom chassis and a plurality of modular warp units. The warp units are each configured for supporting a plurality of removable bobbins thereon, the bobbins being pre-loadable with a plurality of warp threads. The loom chassis is configured to receivably support the warp units thereon, so that the warp threads are disposed in parallel, spaced relation to one another, extending in a downstream direction. A plurality of shedding actuators are coupled to the loom chassis and configured to form a shed with warp threads of each of the warp units. A weft insertion module is configured to insert a weft thread through the shed.

    摘要翻译： 模块化织造机包括织机底盘和多个模块化经线单元。 经线单元各自构造成用于在其上支撑多个可移除的筒管，所述线轴可由多根经线预先加载。 织机底盘被配置为可接收地支撑其上的经纱单元，使得经线彼此平行地设置成彼此间隔开，并沿下游方向延伸。 多个脱落致动器联接到织机底盘并且构造成形成具有每个经线单元的经线的梭口。 引纬模块被配置成将纬纱插入梭口。