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1.发明授权公开(公告)号：US06525880B2
公开(公告)日：2003-02-25
申请号：US09797529
申请日：2001-03-01
IPC分类号： G02B2700
CPC分类号： G02B26/001 , G01J3/26 , G02B26/00 , G02B26/02 , Y10S359/90
摘要： A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.
摘要翻译： 可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。 光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。 施加到跨过静电腔的电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。 具有可移动膜的过滤器可以通过微结构的光刻和制造工艺从集成器件结构中的半导体材料形成。 膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。 系绳图案可以使得直的或径向的系绳将内膜与外部主体连接。 或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。
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2.发明授权公开(公告)号：US06836366B1
公开(公告)日：2004-12-28
申请号：US09645200
申请日：2000-08-25
申请人： Dale C. Flanders , Peter S. Whitney , Michael F. Miller , Stanley R. Shanfield , David B. West , Minh Van Le
发明人： Dale C. Flanders , Peter S. Whitney , Michael F. Miller , Stanley R. Shanfield , David B. West , Minh Van Le
IPC分类号： G02B528
CPC分类号： G02B26/001 , G01J3/26 , G02B26/00 , G02B26/02 , Y10S359/90
摘要： A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.
摘要翻译： 可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。 光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。 施加到跨过静电腔的电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。 具有可移动膜的过滤器可以通过微结构的光刻和制造工艺由集成器件结构中的半导体材料形成。 膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。 系绳图案可以使得直的或径向的系绳将内膜与外部主体连接。 或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。
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公开(公告)号：US06341039B1
公开(公告)日：2002-01-22
申请号：US09648060
申请日：2000-08-25
IPC分类号： G02B2700
CPC分类号： G02B26/02 , G01J3/26 , G02B7/188 , G02B26/00 , G02B26/001
摘要： A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.
摘要翻译： 可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。 光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。 施加到跨过静电腔的电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。 具有可移动膜的过滤器可以通过微结构的光刻和制造工艺从集成器件结构中的半导体材料形成。 膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。 系绳图案可以使得直的或径向的系绳将内膜与外部主体连接。 或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。
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公开(公告)号：US06608711B2
公开(公告)日：2003-08-19
申请号：US09734420
申请日：2000-12-11
IPC分类号： G02B2600
CPC分类号： G01J3/26 , G02B26/00 , G02B26/001 , G02B26/02
摘要： A process for fabricating an optical membrane device comprises providing a handle wafer and then oxidizing a surface of the handle wafer to form an insulating layer. A device wafer is then bonded to the handle wafer. An optical membrane structure is formed in this device wafer. The insulating layer is selectively removed to release the membrane structure. This device wafer can be manufactured from silicon wafer material. Such material typically has a low number of dislocations yielding a stable mechanical membrane structure. The insulating layer defines the electrical cavity across which electrical fields are established that are used to electrostatically deflect the membrane structure. The insulating layer is between 3 and 6 micrometers (&mgr;m) in thickness.
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公开(公告)号：US08515221B2
公开(公告)日：2013-08-20
申请号：US12693181
申请日：2010-01-25
IPC分类号： G02B6/26
CPC分类号： G01Q60/22 , A61B5/0066 , A61B5/0084 , A61B5/02007 , A61B2562/12 , G02B23/2469
摘要： An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
摘要翻译： 用于在体内发射和/或接收光的光学探针包括传输和/或接收光信号的光纤，包括纵向延伸的光纤槽的硅光学台，其保持光纤的光纤端接和反射 表面，其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法，其包括在诸如SOI（绝缘体上硅）晶片的复合晶片材料的第一层中形成折射透镜，并且沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
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6.发明授权Optical system active alignment process including alignment structure attach, position search, and deformation 有权光学系统主动对准过程包括对准结构连接，位置搜索和变形公开(公告)号：US06559464B1
公开(公告)日：2003-05-06
申请号：US09648148
申请日：2000-08-25
申请人： Dale C. Flanders , Peter S. Whitney
发明人： Dale C. Flanders , Peter S. Whitney
IPC分类号： G01N2186
CPC分类号： G02B27/62 , G02B6/32 , G02B6/327 , G02B6/3586 , G02B6/3636 , G02B6/3644 , G02B6/3656 , G02B6/3692 , G02B6/4201 , G02B6/4225 , G02B6/4226 , G02B6/4237 , G02B6/4238 , G02B6/4243 , G02B6/4249 , G02B6/4256 , G02B7/003
摘要： Mounting and alignment structures for optical components allow optical components to be connected to an optical bench and then subsequently aligned, i.e., either passively or actively, in a manufacturing or subsequent calibration or recalibration, alignment or realignment processes. The structures comprise quasi-extrusion portions. This portion is “quasi-extrusion” in the sense that it has a substantially constant cross section in a z-axis direction as would be yielded in an extrusion manufacturing process. The structures further comprise at least one base, having a laterally-extending base surface, and an optical component interface. At least one armature connects the optical component interface with the base. In the preferred embodiment, the base surface is securable to an optical bench.
摘要翻译： 用于光学部件的安装和对准结构允许光学部件连接到光学平台，然后在制造或随后的校准或重新校准，对准或重新对准过程中随后对准，即被动地或主动地对准。 该结构包括准挤压部分。 在挤出制造过程中将产生在z轴方向上具有基本恒定的横截面的意义上，该部分是“准挤压”。 所述结构还包括至少一个具有横向延伸的基面的基座和光学部件接口。 至少一个电枢将光学部件接口与基座连接。 在优选实施例中，基座表面可固定到光学平台。
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公开(公告)号：US06416937B1
公开(公告)日：2002-07-09
申请号：US09648349
申请日：2000-08-25
申请人： Dale C. Flanders , Peter S. Whitney
发明人： Dale C. Flanders , Peter S. Whitney
IPC分类号： C25D100
CPC分类号： G02B6/32 , G02B6/327 , G02B6/3636 , G02B6/3644 , G02B6/3656 , G02B6/3692 , G02B6/4225 , G02B6/4226 , G02B6/4237 , G02B6/4238 , G02B6/4244 , G02B6/4249 , G02B7/003 , G02B27/62
摘要： Mounting and alignment structures for optical components allow optical components to be connected to an optical bench and then subsequently aligned, i.e., either passively or actively, in a manufacturing or subsequent calibration or recalibration, alignment or realignment processes. The structures comprise quasi-extrusion portions. This portion is “quasi-extrusion” in the sense that it has a substantially constant cross section in a z-axis direction as would be yielded in an extrusion manufacturing process. The structures further comprise at least one base, having a laterally-extending base surface, and an optical component interface. At least one armature connects the optical component interface with the base. In the preferred embodiment, the base surface is securable to an optical bench.
摘要翻译： 用于光学部件的安装和对准结构允许光学部件连接到光学平台，然后在制造或随后的校准或重新校准，对准或重新对准过程中随后对准，即被动地或主动地对准。 该结构包括准挤压部分。 在挤出制造过程中将产生在z轴方向上具有基本恒定的横截面的意义上，该部分是“准挤压”。 所述结构还包括至少一个具有横向延伸的基面的基座和光学部件接口。 至少一个电枢将光学部件接口与基座连接。 在优选实施例中，基座表面可固定到光学平台。
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公开(公告)号：US06407376B1
公开(公告)日：2002-06-18
申请号：US09648267
申请日：2000-08-25
申请人： Jeffrey Korn , Dale C. Flanders , Peter S. Whitney
发明人： Jeffrey Korn , Dale C. Flanders , Peter S. Whitney
IPC分类号： H04B1008
CPC分类号： G02B6/29358 , G02B6/29361 , G02B6/29395 , G02B6/4226 , G02B6/4246 , H04B10/077 , H04B10/07955 , H04B2210/078
摘要： An optical monitoring system provides for out-of-band calibration. As a result, calibration can be performed simultaneously with monitoring. This can be used to accomplish faster and/or more accurate scanning. In addition, the need for complex switching and/or multiplexing capabilities can be avoided. The system comprises a signal source of an optical signal having spectrally separated channels, which are distributed within a spectral band, such as a WDM signal. A reference source generates a reference signal outside of the spectral band. A tunable filter filters the optical signal and the reference signal. A reference signal detector then detects the filtered reference signal, while an optical signal detector detects the filtered optical signal.
摘要翻译： 光学监控系统提供带外校准。 因此，可以同时监视校准。 这可以用于实现更快和/或更准确的扫描。 此外，可以避免对复杂的开关和/或复用能力的需要。 该系统包括具有频谱分离的信道的光信号的信号源，其分布在诸如WDM信号的频谱带内。 参考源在频谱带外产生参考信号。 可调谐滤波器对光信号和参考信号进行滤波。 参考信号检测器然后检测滤波的参考信号，而光信号检测器检测滤波的光信号。
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公开(公告)号：US06892444B1
公开(公告)日：2005-05-17
申请号：US09667186
申请日：2000-09-21
CPC分类号： G02B6/4226 , G02B6/4225 , G02B6/4227 , G02B6/4237 , G02B6/4238 , Y10T29/49764 , Y10T29/49769 , Y10T29/49771 , Y10T29/49778 , Y10T29/4978 , Y10T29/49895 , Y10T29/49902 , Y10T29/53061 , Y10T29/53083 , Y10T29/53087 , Y10T29/53091 , Y10T29/53222 , Y10T29/53261 , Y10T29/53265
摘要： An optical component manipulation system has two opposed jaws, which can each be independently positioned relative to each other in a coordinate plane to thereby effect the desired positioning of optical components within the larger system. Z-axis rigidity is provided by air-bearings. Laser heating of the jaws is used for solder, or similar heat driven bonding, processes.
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公开(公告)号：US06776536B1
公开(公告)日：2004-08-17
申请号：US09648413
申请日：2000-08-25
申请人： Dale C. Flanders , Peter S. Whitney
发明人： Dale C. Flanders , Peter S. Whitney
IPC分类号： G02B636
CPC分类号： H04B10/07955 , G02B6/29362 , G02B6/29395 , G02B6/4215 , G02B6/4226 , G02B6/4246 , H04B10/077
摘要： An integrated optical monitoring system comprises a hermetic package and an optical bench sealed within a package. An optical fiber pigtail enters the package via a feed-through to connect and terminate above the bench. A tunable filter is connected to the top of the bench and filters an optical signal transmitted by the fiber pigtail. A detector, also connected to the bench, detects the filtered signal from the tunable filter. Thus, the entire system is integrated together, on a single bench within a preferably small package. This configuration makes the system useful as a subsystem, for example, in a larger system offering higher levels of functionality and optical signal processing capability.
摘要翻译： 集成光学监控系统包括密封包装和密封在包装内的光学工作台。 光纤尾纤通过馈通进入包装，以在工作台上方连接和终止。 可调谐滤波器连接到台架的顶部，并对由纤维尾纤传输的光信号进行滤波。 也连接到工作台的检测器检测来自可调谐滤波器的滤波信号。 因此，整个系统集成在一起，在一个优选的小包装内的单个工作台上。 该配置使得该系统可用作子系统，例如在较大的系统中提供更高水平的功能和光信号处理能力。
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