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1.发明授权Method of manufacturing a III-V semiconductor device using a self-biased substrate and a plasma containing an electronegative species 失效使用自偏置衬底和含有电负性物质的等离子体制造III-V半导体器件的方法
公开(公告)号：US5223458A
公开(公告)日：1993-06-29
申请号：US954607
申请日：1992-09-30
IPC分类号： H01L21/316 , H01L21/338 , H01L23/29 , H01L29/06 , H01L29/08 , H01L29/40
CPC分类号： H01L29/408 , H01L21/0217 , H01L21/022 , H01L21/02211 , H01L21/02241 , H01L21/02252 , H01L21/02274 , H01L21/31608 , H01L21/31654 , H01L23/291 , H01L29/0891 , H01L29/66871 , H01L2924/0002 , H01L2924/13063 , Y10S148/065 , Y10S438/91 , Y10S438/958
摘要： A passivation technique which significantly reduces degradation in reverse breakdown voltage characteristics usually introduced by passivation of active regions of field effect transistors is described. The technique uses a surface treatment in a plasma to introduce into the surface an electro-negative species to maintain negative surface potential of the surface subsequent to encapsulation by the passivation material.
摘要翻译： 描述了通常通过场效应晶体管的有源区域的钝化引入的反向击穿电压特性的降低的钝化技术。 该技术使用等离子体中的表面处理将电离负极物质引入表面，以在钝化材料封装之后保持表面的负表面电位。
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2.发明授权Devices, systems, and methods for controlling the temperature of resonant elements 有权用于控制谐振元件温度的器件，系统和方法公开(公告)号：US08248173B2
公开(公告)日：2012-08-21
申请号：US12768501
申请日：2010-04-27
CPC分类号： H03L1/04 , H01L35/325
摘要： A thermoelectric device transfers heat away from or toward an object using the Peltier effect. In some embodiments, the length of at least one thermoelectric element is at least ten times greater than a combined average cross-sectional dimension, orthogonal to the length, of two thermoelectric elements.
摘要翻译： 热电装置使用珀耳帖效应将热量从物体或朝向物体传递。 在一些实施例中，至少一个热电元件的长度是与两个热电元件的长度正交的组合平均截面尺寸的至少十倍。
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3.发明授权Devices, systems, and methods for controlling the temperature of resonant elements 有权用于控制谐振元件温度的器件，系统和方法公开(公告)号：US08653897B2
公开(公告)日：2014-02-18
申请号：US13567915
申请日：2012-08-06
CPC分类号： H03L1/04 , H01L35/325
摘要： A thermoelectric device transfers heat away from or toward an object using the Peltier effect. In some embodiments, the length of at least one thermoelectric element is at least ten times greater than a combined average cross-sectional dimension, orthogonal to the length, of two thermoelectric elements.
摘要翻译： 热电装置使用珀耳帖效应将热量从物体或朝向物体传递。 在一些实施例中，至少一个热电元件的长度是与两个热电元件的长度正交的组合平均截面尺寸的至少十倍。
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公开(公告)号：US20070254411A1
公开(公告)日：2007-11-01
申请号：US11799333
申请日：2007-05-01
CPC分类号： H01L25/0652 , B81C1/0023 , B82Y20/00 , B82Y30/00 , H01L21/6835 , H01L23/473 , H01L23/5389 , H01L24/24 , H01L24/82 , H01L24/97 , H01L2221/68354 , H01L2221/68359 , H01L2224/16 , H01L2224/24137 , H01L2224/24226 , H01L2224/32225 , H01L2224/73267 , H01L2224/82039 , H01L2224/92244 , H01L2224/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01011 , H01L2924/01013 , H01L2924/01019 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/01049 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/10329 , H01L2924/12041 , H01L2924/14 , H01L2924/15153 , H01L2924/18162 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/30105 , H01L2924/30107 , H01L2924/3025 , H01L2224/82 , H01L2924/00
摘要： A method for forming a device, comprising providing a first substrate carrying a first set of components disposed in a first encapsulating layer over the first set of components, providing a second substrate carrying a second set of components disposed in a second encapsulating layer over the second set of components, bonding the first and second substrates and functionally interconnecting at least one of the predefined components in the first set of components with at least one of the components in the second set of components.
摘要翻译： 一种用于形成器件的方法，包括提供第一衬底，所述第一衬底承载设置在所述第一组件上的第一封装层中的第一组元件，提供第二衬底，所述第二衬底承载设置在所述第二封装层上的第二封装层 组合部件，将第一和第二基板结合并使第一组部件中的至少一个预定部件与第二组部件中的至少一个部件互连。
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5.发明授权公开(公告)号：US06525880B2
公开(公告)日：2003-02-25
申请号：US09797529
申请日：2001-03-01
IPC分类号： G02B2700
CPC分类号： G02B26/001 , G01J3/26 , G02B26/00 , G02B26/02 , Y10S359/90
摘要： A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.
摘要翻译： 可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。 光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。 施加到跨过静电腔的电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。 具有可移动膜的过滤器可以通过微结构的光刻和制造工艺从集成器件结构中的半导体材料形成。 膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。 系绳图案可以使得直的或径向的系绳将内膜与外部主体连接。 或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。
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6.发明申请DEVICES, SYSTEMS, AND METHODS FOR CONTROLLING THE TEMPERATURE OF RESONANT ELEMENTS 有权用于控制谐振元件温度的器件，系统和方法公开(公告)号：US20120299662A1
公开(公告)日：2012-11-29
申请号：US13567915
申请日：2012-08-06
IPC分类号： H03B1/02
CPC分类号： H03L1/04 , H01L35/325
摘要： A thermoelectric device transfers heat away from or toward an object using the Peltier effect. In some embodiments, the length of at least one thermoelectric element is at least ten times greater than a combined average cross-sectional dimension, orthogonal to the length, of two thermoelectric elements.
摘要翻译： 热电装置使用珀耳帖效应将热量从物体或朝向物体传递。 在一些实施例中，至少一个热电元件的长度是与两个热电元件的长度正交的组合平均截面尺寸的至少十倍。
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7.发明申请DEVICES, SYSTEMS, AND METHODS FOR CONTROLLING THE TEMPERATURE OF RESONANT ELEMENTS 有权用于控制谐振元件温度的器件，系统和方法公开(公告)号：US20110260800A1
公开(公告)日：2011-10-27
申请号：US12768501
申请日：2010-04-27
CPC分类号： H03L1/04 , H01L35/325
摘要： A thermoelectric device transfers heat away from or toward an object using the Peltier effect. In some embodiments, the length of at least one thermoelectric element is at least ten times greater than a combined average cross-sectional dimension, orthogonal to the length, of two thermoelectric elements.
摘要翻译： 热电装置使用珀耳帖效应将热量从物体或朝向物体传递。 在一些实施例中，至少一个热电元件的长度是与两个热电元件的长度正交的组合平均截面尺寸的至少十倍。
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公开(公告)号：US4440108A
公开(公告)日：1984-04-03
申请号：US423454
申请日：1982-09-24
IPC分类号： C04B35/5831 , C23C16/34 , C23C16/509 , H01J37/08 , H01J37/32 , C23C13/08
CPC分类号： H01J37/32431 , C04B35/5831 , C23C16/342 , C23C16/509 , H01J37/08
摘要： A coating apparatus and method for coating industrial cutting and turning tools of any desired shape and configuration and the like significantly to improve the tools' working properties. The coating is formed of cubic boron nitride, with a preferred thickness not exceeding ten microns. The coating apparatus includes an rf excited plasma source chamber having a gas feed ring for ionizing a gas admitted into the chamber via the ring. The preferred feed gas is a borazine and benzene vapor mixture. A coating chamber is mounted adjacent to and contiguous with the plasma source chamber via a neck portion. The coating chamber includes a vacuum interlock to permit the entry and removal of a tool transport. At least one vacuum pump is operatively connected to the chamber. Preferably, a plurality of permanent magnets and electron supply filaments are arranged circumferentially about the plasma source chamber. Preferably, the tool transport is rotatable during coating. Preferably, the apparatus is microprocessor controlled.
摘要翻译： 一种涂覆设备和方法，用于显着地涂覆任何所需形状和构造等的工业切割和车刀，以改善工具的工作性能。 涂层由立方氮化硼形成，优选厚度不超过10微米。 涂覆装置包括具有气体进料环的rf激发等离子体源室，该气体供给环用于经由环离子化进入该室的气体。 优选的进料气体是环硼氮烷和苯蒸气混合物。 涂覆室经由颈部部分与等离子体源室相邻并邻接地安装。 涂覆室包括真空互锁以允许进入和移除工具输送。 至少一个真空泵可操作地连接到腔室。 优选地，围绕等离子体源室周向地布置多个永磁体和电子供应细丝。 优选地，刀具输送在涂覆期间是可旋转的。 优选地，该装置是微处理器控制的。
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公开(公告)号：US07727806B2
公开(公告)日：2010-06-01
申请号：US11799333
申请日：2007-05-01
IPC分类号： H01L21/00
CPC分类号： H01L25/0652 , B81C1/0023 , B82Y20/00 , B82Y30/00 , H01L21/6835 , H01L23/473 , H01L23/5389 , H01L24/24 , H01L24/82 , H01L24/97 , H01L2221/68354 , H01L2221/68359 , H01L2224/16 , H01L2224/24137 , H01L2224/24226 , H01L2224/32225 , H01L2224/73267 , H01L2224/82039 , H01L2224/92244 , H01L2224/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01011 , H01L2924/01013 , H01L2924/01019 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/01049 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/10329 , H01L2924/12041 , H01L2924/14 , H01L2924/15153 , H01L2924/18162 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/30105 , H01L2924/30107 , H01L2924/3025 , H01L2224/82 , H01L2924/00
摘要： A method for forming a device, comprising providing a first substrate carrying a first set of components disposed in a first encapsulating layer over the first set of components, providing a second substrate carrying a second set of components disposed in a second encapsulating layer over the second set of components, bonding the first and second substrates and functionally interconnecting at least one of the predefined components in the first set of components with at least one of the components in the second set of components.
摘要翻译： 一种用于形成器件的方法，包括提供第一衬底，所述第一衬底承载设置在所述第一组件上的第一封装层中的第一组元件，提供第二衬底，所述第二衬底承载设置在所述第二封装层上的第二封装层 组合部件，将第一和第二基板结合并使第一组部件中的至少一个预定部件与第二组部件中的至少一个部件互连。
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10.发明授权公开(公告)号：US06836366B1
公开(公告)日：2004-12-28
申请号：US09645200
申请日：2000-08-25
申请人： Dale C. Flanders , Peter S. Whitney , Michael F. Miller , Stanley R. Shanfield , David B. West , Minh Van Le
发明人： Dale C. Flanders , Peter S. Whitney , Michael F. Miller , Stanley R. Shanfield , David B. West , Minh Van Le
IPC分类号： G02B528
CPC分类号： G02B26/001 , G01J3/26 , G02B26/00 , G02B26/02 , Y10S359/90
摘要： A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.
摘要翻译： 可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。 光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。 施加到跨过静电腔的电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。 具有可移动膜的过滤器可以通过微结构的光刻和制造工艺由集成器件结构中的半导体材料形成。 膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。 系绳图案可以使得直的或径向的系绳将内膜与外部主体连接。 或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。
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