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1.发明授权公开(公告)号：US06525880B2
公开(公告)日：2003-02-25
申请号：US09797529
申请日：2001-03-01
IPC分类号： G02B2700
CPC分类号： G02B26/001 , G01J3/26 , G02B26/00 , G02B26/02 , Y10S359/90
摘要： A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.
摘要翻译： 可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。 光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。 施加到跨过静电腔的电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。 具有可移动膜的过滤器可以通过微结构的光刻和制造工艺从集成器件结构中的半导体材料形成。 膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。 系绳图案可以使得直的或径向的系绳将内膜与外部主体连接。 或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。
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2.发明授权公开(公告)号：US06836366B1
公开(公告)日：2004-12-28
申请号：US09645200
申请日：2000-08-25
申请人： Dale C. Flanders , Peter S. Whitney , Michael F. Miller , Stanley R. Shanfield , David B. West , Minh Van Le
发明人： Dale C. Flanders , Peter S. Whitney , Michael F. Miller , Stanley R. Shanfield , David B. West , Minh Van Le
IPC分类号： G02B528
CPC分类号： G02B26/001 , G01J3/26 , G02B26/00 , G02B26/02 , Y10S359/90
摘要： A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.
摘要翻译： 可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。 光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。 施加到跨过静电腔的电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。 具有可移动膜的过滤器可以通过微结构的光刻和制造工艺由集成器件结构中的半导体材料形成。 膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。 系绳图案可以使得直的或径向的系绳将内膜与外部主体连接。 或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。
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3.发明授权Process for integrating dielectric optical coatings into micro-electromechanical devices 有权将介电光学涂层集成到微机电装置中的工艺公开(公告)号：US06790698B2
公开(公告)日：2004-09-14
申请号：US09954861
申请日：2001-09-18
IPC分类号： H01L2100
CPC分类号： B81B3/0083 , B81B2201/042 , B81B2201/047 , B81C1/0038 , B81C2201/0159 , B81C2201/053 , B81C2201/056 , G02B26/001
摘要： A process for patterning dielectric layers of the type typically found in optical coatings in the context of MEMS manufacturing is disclosed. A dielectric coating is deposited over a device layer, which has or will be released, and patterned using a mask layer. In one example, the coating is etched using the mask layer as a protection layer. In another example, a lift-off process is shown. The primary advantage of photolithographic patterning of the dielectric layers in optical MEMS devices is that higher levels of consistency can be achieved in fabrication, such as size, location, and residual material stress. Competing techniques such as shadow masking yield lower quality features and are difficult to align. Further, the minimum feature size that can be obtained with shadow masks is limited to ˜100 &mgr;m, depending on the coating system geometry, and they require hard contact with the surface of the wafer, which can lead to damage and/or particulate contamination.
摘要翻译： 公开了一种用于在MEMS制造的上下文中通常在光学涂层中发现的类型的介电层图案的工艺。 电介质涂层沉积在器件层上，器件层已经或将被释放，并使用掩模层进行图案化。 在一个实例中，使用掩模层作为保护层来蚀刻涂层。 在另一示例中，示出了剥离过程。 光学MEMS器件中电介质层的光刻图案的主要优点是可以在诸如尺寸，位置和残余材料应力的制造中实现更高水平的稠度。 诸如阴影掩蔽的竞争技术产生较低的质量特征并且难以对准。 此外，根据涂层系统的几何形状，使用荫罩可获得的最小特征尺寸限制在〜100μm，并且它们需要与晶片的表面硬接触，这可能导致损坏和/或微粒污染。
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4.发明授权Process for integrating dielectric optical coatings into micro-electromechanical devices 有权将介电光学涂层集成到微机电装置中的工艺公开(公告)号：US06271052B1
公开(公告)日：2001-08-07
申请号：US09692639
申请日：2000-10-19
IPC分类号： H01L2100
CPC分类号： B81B3/0083 , B81B2201/042 , B81C1/00476 , B81C1/00666 , B81C2201/0109 , B81C2201/053 , G02B26/001
摘要： A process for fabricating an optical membrane from polycrystalline silicon comprises first forming a sacrificial layer on a handle wafer. Concavities are etched into the sacrificial layer. Polycrystalline silicon membrane layer is then formed on the sacrificial layer. The polycrystalline membrane layer is subsequently polished to achieve the predetermined membrane thickness and surface smoothness, annealed, and then patterned. Finally, the sacrificial layer is removed to release the membrane. The concavities in the sacrificial layer yield convexities in the polysilicon layer to prevent stiction adhesion to the handle wafer. During processing, a mask used to pattern the membrane layer functions to protect an highly reflecting (HR) coating for the membrane.
摘要翻译： 从多晶硅制造光学膜的方法包括首先在处理晶片上形成牺牲层。 凹陷蚀刻到牺牲层中。 然后在牺牲层上形成多晶硅膜层。 随后抛光多晶膜层以实现预定的膜厚度和表面光滑度，退火，然后图案化。 最后，去除牺牲层以释放膜。 牺牲层中的凹部产生多晶硅层中的凸起以防止对手柄晶片的粘附。 在加工过程中，用于图案膜层的掩模起到保护膜的高反射（HR）涂层的作用。
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公开(公告)号：US06341039B1
公开(公告)日：2002-01-22
申请号：US09648060
申请日：2000-08-25
IPC分类号： G02B2700
CPC分类号： G02B26/02 , G01J3/26 , G02B7/188 , G02B26/00 , G02B26/001
摘要： A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.
摘要翻译： 可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。 光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。 施加到跨过静电腔的电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。 具有可移动膜的过滤器可以通过微结构的光刻和制造工艺从集成器件结构中的半导体材料形成。 膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。 系绳图案可以使得直的或径向的系绳将内膜与外部主体连接。 或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。
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公开(公告)号：US06608711B2
公开(公告)日：2003-08-19
申请号：US09734420
申请日：2000-12-11
IPC分类号： G02B2600
CPC分类号： G01J3/26 , G02B26/00 , G02B26/001 , G02B26/02
摘要： A process for fabricating an optical membrane device comprises providing a handle wafer and then oxidizing a surface of the handle wafer to form an insulating layer. A device wafer is then bonded to the handle wafer. An optical membrane structure is formed in this device wafer. The insulating layer is selectively removed to release the membrane structure. This device wafer can be manufactured from silicon wafer material. Such material typically has a low number of dislocations yielding a stable mechanical membrane structure. The insulating layer defines the electrical cavity across which electrical fields are established that are used to electrostatically deflect the membrane structure. The insulating layer is between 3 and 6 micrometers (&mgr;m) in thickness.
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公开(公告)号：US07450862B2
公开(公告)日：2008-11-11
申请号：US10392353
申请日：2003-03-19
申请人： Dale C. Flanders , Walid Atia , Eric E. Fitch , Minh Van Le , Randal A. Murdza , Robert L. Payer , Jeffrey A. Korn , Xiaomei Wang , Walter R. Buchwald , L. James Newman, III
发明人： Dale C. Flanders , Walid Atia , Eric E. Fitch , Minh Van Le , Randal A. Murdza , Robert L. Payer , Jeffrey A. Korn , Xiaomei Wang , Walter R. Buchwald , L. James Newman, III
IPC分类号： H04B10/06
CPC分类号： H01S5/02216 , H01S5/02248 , H01S5/02284 , H01S5/0683
摘要： A detector system for a fiber optic component is insensitive to stray light. Specifically, the invention comprises a detector chip, which converts received light into an electric signal. A baffle substrate is positioned over the detector chip. This baffle substrate has a transmission port through which an optical signal is transmitted to the detector chip. As a result, light that is not directed to be transmitted through the port is blocked by the baffle substrate. In this way, it rejects stray light that may be present in the hermetic package. A detector substrate is provided on which the detector chip is mounted. This detector substrate preferably comprises electrical traces to which the detector chip is electrically connected. The detector substrate can further comprise bond pads for wire bonding to make electrical connections to the electrical traces.
摘要翻译： 用于光纤部件的检测器系统对杂散光不敏感。 具体地，本发明包括将接收的光转换成电信号的检测器芯片。 挡板基板位于检测器芯片上。 该挡板基板具有传输端口，通过该传输端口将光信号传输到检测器芯片。 结果，不被透射通过端口的光被挡板衬底阻挡。 以这种方式，它拒绝可能存在于密封包装中的杂散光。 设置有检测器芯片安装在其上的检测器基板。 该检测器基板优选地包括检测器芯片电连接到的电迹线。 检测器基板还可以包括用于引线键合的接合焊盘以与电迹线进行电连接。
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公开(公告)号：US08515221B2
公开(公告)日：2013-08-20
申请号：US12693181
申请日：2010-01-25
IPC分类号： G02B6/26
CPC分类号： G01Q60/22 , A61B5/0066 , A61B5/0084 , A61B5/02007 , A61B2562/12 , G02B23/2469
摘要： An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
摘要翻译： 用于在体内发射和/或接收光的光学探针包括传输和/或接收光信号的光纤，包括纵向延伸的光纤槽的硅光学台，其保持光纤的光纤端接和反射 表面，其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法，其包括在诸如SOI（绝缘体上硅）晶片的复合晶片材料的第一层中形成折射透镜，并且沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
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9.发明授权Optical system active alignment process including alignment structure attach, position search, and deformation 有权光学系统主动对准过程包括对准结构连接，位置搜索和变形公开(公告)号：US06559464B1
公开(公告)日：2003-05-06
申请号：US09648148
申请日：2000-08-25
申请人： Dale C. Flanders , Peter S. Whitney
发明人： Dale C. Flanders , Peter S. Whitney
IPC分类号： G01N2186
CPC分类号： G02B27/62 , G02B6/32 , G02B6/327 , G02B6/3586 , G02B6/3636 , G02B6/3644 , G02B6/3656 , G02B6/3692 , G02B6/4201 , G02B6/4225 , G02B6/4226 , G02B6/4237 , G02B6/4238 , G02B6/4243 , G02B6/4249 , G02B6/4256 , G02B7/003
摘要： Mounting and alignment structures for optical components allow optical components to be connected to an optical bench and then subsequently aligned, i.e., either passively or actively, in a manufacturing or subsequent calibration or recalibration, alignment or realignment processes. The structures comprise quasi-extrusion portions. This portion is “quasi-extrusion” in the sense that it has a substantially constant cross section in a z-axis direction as would be yielded in an extrusion manufacturing process. The structures further comprise at least one base, having a laterally-extending base surface, and an optical component interface. At least one armature connects the optical component interface with the base. In the preferred embodiment, the base surface is securable to an optical bench.
摘要翻译： 用于光学部件的安装和对准结构允许光学部件连接到光学平台，然后在制造或随后的校准或重新校准，对准或重新对准过程中随后对准，即被动地或主动地对准。 该结构包括准挤压部分。 在挤出制造过程中将产生在z轴方向上具有基本恒定的横截面的意义上，该部分是“准挤压”。 所述结构还包括至少一个具有横向延伸的基面的基座和光学部件接口。 至少一个电枢将光学部件接口与基座连接。 在优选实施例中，基座表面可固定到光学平台。
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公开(公告)号：US06416937B1
公开(公告)日：2002-07-09
申请号：US09648349
申请日：2000-08-25
申请人： Dale C. Flanders , Peter S. Whitney
发明人： Dale C. Flanders , Peter S. Whitney
IPC分类号： C25D100
CPC分类号： G02B6/32 , G02B6/327 , G02B6/3636 , G02B6/3644 , G02B6/3656 , G02B6/3692 , G02B6/4225 , G02B6/4226 , G02B6/4237 , G02B6/4238 , G02B6/4244 , G02B6/4249 , G02B7/003 , G02B27/62
摘要： Mounting and alignment structures for optical components allow optical components to be connected to an optical bench and then subsequently aligned, i.e., either passively or actively, in a manufacturing or subsequent calibration or recalibration, alignment or realignment processes. The structures comprise quasi-extrusion portions. This portion is “quasi-extrusion” in the sense that it has a substantially constant cross section in a z-axis direction as would be yielded in an extrusion manufacturing process. The structures further comprise at least one base, having a laterally-extending base surface, and an optical component interface. At least one armature connects the optical component interface with the base. In the preferred embodiment, the base surface is securable to an optical bench.
摘要翻译： 用于光学部件的安装和对准结构允许光学部件连接到光学平台，然后在制造或随后的校准或重新校准，对准或重新对准过程中随后对准，即被动地或主动地对准。 该结构包括准挤压部分。 在挤出制造过程中将产生在z轴方向上具有基本恒定的横截面的意义上，该部分是“准挤压”。 所述结构还包括至少一个具有横向延伸的基面的基座和光学部件接口。 至少一个电枢将光学部件接口与基座连接。 在优选实施例中，基座表面可固定到光学平台。
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