公开(公告)号：US20060070231A1

公开(公告)日：2006-04-06

申请号：US10956221

申请日：2004-09-30

申请人： Amanda Baer ,  Hamid Balamane ,  Daniel Bedell ,  Jyh-Shuey Lo ,  Vladimir Nikitin ,  Aron Pentek ,  Yvette Winton

发明人： Amanda Baer ,  Hamid Balamane ,  Daniel Bedell ,  Jyh-Shuey Lo ,  Vladimir Nikitin ,  Aron Pentek ,  Yvette Winton

IPC分类号： G11B5/187

CPC分类号： G11B5/1871 ,  G11B5/3163 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49034 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： Methods for creating a write head by forming a bump after the top pole is formed are provided. In one embodiment, a bottom pole is created out of a first layer. A non-magnetic gap material is applied to the surface of the wafer. A top pole is created out of a second layer. After creating the top pole, a bump is created. The bump is used to protect at least a portion of the first layer while etching to create a stray flux absorber.

摘要翻译： 提供了通过在形成顶极之后形成凸块来创建写入头的方法。 在一个实施例中，从第一层产生底极。 将非磁隙材料施加到晶片的表面。 第二层创建顶杆。 创建顶极后，会创建一个凸起。 凸块用于在蚀刻时保护第一层的至少一部分以产生杂散通量吸收体。

公开(公告)号：US20070183092A1

公开(公告)日：2007-08-09

申请号：US11347356

申请日：2006-02-03

申请人： Daniel Bedell ,  Vladimir Nikitin ,  Aron Pentek

发明人： Daniel Bedell ,  Vladimir Nikitin ,  Aron Pentek

IPC分类号： G11B5/147

CPC分类号： G11B5/3116 ,  G11B5/3163 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A multi-step process for notching the P1 pole of the write head element of a magnetic head. In a first step following the fabrication of the P2 pole tip, a layer of protective material is deposited on the approximately vertical side surfaces of the P2 pole tip. Thereafter, a first ion milling step, utilizing a species such as argon, is performed to mill through the write gap layer and to notch into the P1 pole layer therebelow. The removal of redeposited material from the side surfaces of the P2 pole tip is thereafter accomplished and the protective material formed on the side surfaces of the P2 pole tip protects the P2 pole tip during the redeposition clean up step. Thereafter, the protective material is removed from the side surfaces of the P2 pole tip, and a second ion milling step is performed to further notch the P1 pole material.

摘要翻译： 用于切割磁头的写入头元件的P1极的多步骤过程。 在制造P2极尖之后的第一步骤中，在P2极尖的大致垂直侧表面上沉积有一层保护材料。 此后，进行利用物质如氩的第一离子研磨步骤，通过写入间隙层研磨并陷入其下方的P1极层。 然后，从P2极尖端的侧面去除再沉积材料，并且形成在P2极端部的侧表面上的保护材料在再沉积清洁步骤期间保护P2极尖。 然后，从P2极端部的侧面除去保护材料，进行第二离子研磨工序，进一步切断P1极材料。

公开(公告)号：US08108985B2

公开(公告)日：2012-02-07

申请号：US11934687

申请日：2007-11-02

申请人： Yi Zheng ,  Yimin Hsu ,  Wen-Chien David Hsiao ,  Ming Jiang ,  Aron Pentek ,  Sue Siyang Zhang ,  Edward Hin Pong Lee ,  Hung-Chin Guthrie ,  Ning Shi ,  Vladimir Nikitin ,  Prabodh Ratnaparkhi ,  Yinshi Liu

发明人： Yi Zheng ,  Yimin Hsu ,  Wen-Chien David Hsiao ,  Ming Jiang ,  Aron Pentek ,  Sue Siyang Zhang ,  Edward Hin Pong Lee ,  Hung-Chin Guthrie ,  Ning Shi ,  Vladimir Nikitin ,  Prabodh Ratnaparkhi ,  Yinshi Liu

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3166 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052 ,  Y10T428/11 ,  Y10T428/1186

摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method includes forming a write pole, and then depositing a refill layer. A mask structure can be formed over the writ pole and refill layer, the mask structure being configured to define a stitched pole. An ion milling or reactive ion milling can then be performed to remove portions of the refill layer that are not protected by the mask structure. Then a magnetic material can be deposited to form a stitched write pole that defines a secondary flare point. The stitched pole can also be self aligned with an electrical lapping guide in order to accurately locate the front edge of the secondary flare point relative to the air bearing surface of the write head.

摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法包括形成写极，然后沉积补充层。 掩模结构可以形成在写极和再填充层上，掩模结构被配置为限定缝合极。 然后可以执行离子铣或反应离子研磨以去除未被掩模结构保护的部分填充层。 然后可以沉积磁性材料以形成限定二次闪光点的缝合写入极。 缝合的杆也可以与电动研磨引导件自对准，以便相对于写入头的空气轴承表面精确地定位二次扩张点的前边缘。

公开(公告)号：US07506431B2

公开(公告)日：2009-03-24

申请号：US11744022

申请日：2007-05-03

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method allows the write head to be formed with a write pole having a concave trailing edge. The method further allows the amount of concavity of the trailing edge to be accurately and carefully controlled both within a wafer and between wafers. A write pole is formed using a mask that includes a hard mask, a RIEable layer and an endpoint detection layer. A layer of non-magnetic material (ALD layer) is deposited, and then, an ion milling process is used to remove a portion of the ALD layer disposed over the write pole and mask. A reactive ion etch process is performed to remove the RIEable layer leaving the ALD layer to form non-magnetic side walls with upper portions that extend above the write pole. Another ion milling is then performed, preferably at an angle relative to normal, such that shadowing from the upper portions of the non-magnetic side walls causes the ion milling to form the write pole with a concave trailing edge.

摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法允许写头形成有具有凹形后缘的写入极。 该方法还允许在晶片内和晶片之间精确地和仔细地控制后缘的凹陷量。 使用包括硬掩模，RIEable层和端点检测层的掩模形成写入极。 沉积一层非磁性材料（ALD层），然后使用离子铣削工艺去除设置在写入极和掩模上的ALD层的一部分。 执行反应离子蚀刻工艺以去除离开ALD层的RIEable层以形成非磁性侧壁，其上部在写极上方延伸。 然后进行另一个离子铣削，优选以相对于法线成一角度，使得来自非磁性侧壁的上部的阴影使得离子铣削形成具有凹形后缘的写入极。

公开(公告)号：US20080271308A1

公开(公告)日：2008-11-06

申请号：US11744022

申请日：2007-05-03

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127 ,  C23C14/00

CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method allows the write head to be formed with a write pole having a concave trailing edge. The method further allows the amount of concavity of the trailing edge to be accurately and carefully controlled both within a wafer and between wafers. A write pole is formed using a mask that includes a hard mask, a RIEable layer and an endpoint detection layer. A layer of non-magnetic material (ALD layer) h deposited, and then, an ion milling process is used to remove a portion of the ALD layer disposed over the write pole and mask. A reactive ion etch process is performed to remove the RIEable layer leaving the ALD layer to form non-magnetic side walls with upper portions that extend above the write pole. Another ion milling is then performed, preferably at an angle relative to normal, such that shadowing from the upper portions of the non-magnetic side walls causes the ion milling to form the write pole with a concave trailing edge.

摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法允许写头形成有具有凹形后缘的写入极。 该方法还允许在晶片内和晶片之间精确地和仔细地控制后缘的凹陷量。 使用包括硬掩模，RIEable层和端点检测层的掩模形成写入极。 沉积一层非磁性材料（ALD层），然后使用离子铣削工艺去除设置在写入极和掩模上的一部分ALD层。 执行反应离子蚀刻工艺以去除离开ALD层的RIEable层以形成非磁性侧壁，其上部在写极上方延伸。 然后进行另一个离子铣削，优选以相对于法线成一角度，使得来自非磁性侧壁的上部的阴影使得离子铣削形成具有凹形后缘的写入极。

公开(公告)号：US20080141522A1

公开(公告)日：2008-06-19

申请号：US11611829

申请日：2006-12-15

申请人： Amanda Baer ,  Vladimir Nikitin ,  Aron Pentek ,  Neil Leslie Robertson

发明人： Amanda Baer ,  Vladimir Nikitin ,  Aron Pentek ,  Neil Leslie Robertson

IPC分类号： G11B5/127 ,  B05D5/12 ,  H04R31/00

CPC分类号： G11B5/3166 ,  G11B5/102 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/3169 ,  G11B5/3173 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： An optical lapping guide for determining an amount of lapping performed on a row of sliders in a process for manufacturing sliders for magnetic data recording. The optical lapping guide is constructed with a front edge that is at an angle with respect to an air bearing surface plane ABS plane, such that a portion of the lapping guides is in front of the ABS and portion of the lapping guide is behind the ABS. As lapping progresses, an increasing amount of the lapping guide will be exposed at the ABS and visible for inspection. Therefore, after a lapping process has been performed, the optical lapping guide can be inspected to determine the amount of material removed by lapping. The greater the amount of the lapping guide that is exposed and visible, the greater the amount of material removed by lapping.

摘要翻译： 光学研磨引导件，用于确定在用于制造用于磁数据记录的滑块的过程中对一排滑块执行的研磨量。 光学研磨引导件的前边缘相对于空气轴承表面平面ABS平面成一定角度，使得研磨导轨的一部分在ABS的前面，研磨导轨的一部分在ABS后面 。 随着研磨的进行，越来越多的研磨导轨将暴露在ABS处并可见以供检查。 因此，在进行研磨处理之后，可以检查光学研磨导向件以确定通过研磨去除的材料的量。 暴露和可见的研磨导轨的量越大，通过研磨去除的材料量就越大。

公开(公告)号：US20080072417A1

公开(公告)日：2008-03-27

申请号：US11525788

申请日：2006-09-21

申请人： Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek

发明人： Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a write pole for a perpendicular magnetic write head. The method includes forming a mask structure over a full film layer of magnetic write pole material. A layer of hard mask material such as conformally deposited alumina is then deposited full film over the mask and write pole material. An ion mill, such as in an Ar or CHF3 chemistry is then used to preferentially remove horizontally disposed portions of the alumina layer (hard mask layer), thereby forming vertical hard mask walls at the sides of the mask structure. An ion mill is then used to form the write pole, with the alumna side walls providing excellent masking for forming well defined write pole edges. A relatively gentle clean up process can then be performed to remove the remaining mask material and side walls. The use of the alumina side walls eliminated the need to use an alumina hard mask that extends over the entire top of the write pole, Because of this, after forming the write pole, a relatively gentle clean up such as TMAH etch and NMP can be used to remove the remaining mask and alumina walls from the write pole.

摘要翻译： 一种用于制造用于垂直磁写头的写极的方法。 该方法包括在磁性写入磁极材料的全部薄膜层上形成掩模结构。 然后将诸如保形沉积氧化铝的硬掩模材料层沉积在掩模上并写入极材料。 然后使用诸如Ar或CHF 3化学中的离子磨机来优先除去氧化铝层（硬掩模层）的水平设置的部分，从而在掩模结构的侧面形成垂直的硬掩模壁。 然后使用离子磨机形成写柱，校准侧壁为形成良好定义的写极边缘提供了优​​异的掩模。 然后可以执行相对温和的清理过程以除去剩余的掩模材料和侧壁。 使用氧化铝侧壁消除了使用在写入极的整个顶部上延伸的氧化铝硬掩模的需要。因此，在形成写入极之后，可以进行相对温和的清洁，例如TMAH蚀刻和NMP可以 用于从写入极上去除剩余的掩模和氧化铝壁。

公开(公告)号：US08503131B2

公开(公告)日：2013-08-06

申请号：US13339310

申请日：2011-12-28

申请人： Yi Zheng ,  Yimin Hsu ,  Wen-Chien David Hsiao ,  Ming Jiang ,  Aron Pentek ,  Sue Siyang Zhang ,  Edward Hin Pong Lee ,  Hung-chin Guthrie ,  Ning Shi ,  Vladimir Nikitin ,  Prabodh Ratnaparkhi ,  Yinshi Liu

发明人： Yi Zheng ,  Yimin Hsu ,  Wen-Chien David Hsiao ,  Ming Jiang ,  Aron Pentek ,  Sue Siyang Zhang ,  Edward Hin Pong Lee ,  Hung-chin Guthrie ,  Ning Shi ,  Vladimir Nikitin ,  Prabodh Ratnaparkhi ,  Yinshi Liu

IPC分类号： G11B5/147

CPC分类号： G11B5/3166 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052 ,  Y10T428/11 ,  Y10T428/1186

摘要： A magnetic write head for perpendicular magnetic data recording. The write head includes a substrate and a magnetic write pole formed on the substrate, the write pole having a trailing edge and first and second sides. A magnetic stitched pole is formed over a portion of the magnetic write pole, the stitched pole having a front edge that defines a secondary flare point. First and second non-magnetic side walls are formed at the first and second sides of the write pole. The non-magnetic side walls extend from the substrate at least to the trailing edge of the write pole in a first region near an air bearing surface and wherein the first and second non-magnetic side walls extend from the substrate to a point between the substrate and the trailing edge, allowing the stitched magnetic pole to extend partially over the sides of the write pole.

摘要翻译： 用于垂直磁数据记录的磁写头。 写入头包括形成在衬底上的衬底和磁性写入磁极，写入极具有后缘和第一和第二侧。 在磁性写入磁极的一部分上形成有磁性的缝合磁极，缝合的磁极具有限定二次闪光点的前部边缘。 第一和第二非磁性侧壁形成在写入极的第一和第二侧。 所述非磁性侧壁在靠近空气支承表面的第一区域中从所述基板至少延伸到所述写柱的后缘，并且其中所述第一和第二非磁性侧壁从所述基板延伸到所述基板之间的点 和后缘，允许缝合的磁极部分地延伸在写柱的侧面上。

公开(公告)号：US08085497B2

公开(公告)日：2011-12-27

申请号：US12341834

申请日：2008-12-22

申请人： Wen-Chien David Hsiao ,  Vladimir Nikitin ,  Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Vladimir Nikitin ,  Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/3163

摘要： A system according to one embodiment includes a magnetic pole; a bump structure above the pole, the bump structure having a first surface oriented at a first angle between 1° and 89° from a plane of deposition of the pole, and a second surface oriented at a second angle between 1° and 89° from the plane of deposition of the pole, wherein the second angle is greater than the first angle; and a shield above the bump structure. A method according to one embodiment includes forming a bump layer above a magnetic pole; removing a portion of the bump layer for forming a step therein; and milling the bump layer for defining thereon a first surface oriented at a first angle between 1° and 89° from a plane of deposition of the bump layer, and a second surface oriented at a second angle between 1° and 89° from the plane of deposition of the bump layer, wherein the second angle is greater than the first angle.

摘要翻译： 根据一个实施例的系统包括磁极; 所述凸起结构具有从所述极的沉积平面以1°至89°之间的第一角度定向的第一表面，并且所述第一表面以与所述极的沉积的平面成1°至89°之间的第二角度定向 所述极的沉积平面，其中所述第二角度大于所述第一角度; 和凸块结构之上的屏蔽。 根据一个实施例的方法包括在磁极上形成凸起层; 去除所述凸起层的一部分以在其中形成台阶; 并且研磨所述凸起层，以在其上限定从凸起层的沉积平面以1°至89°之间的第一角度定向的第一表面，以及从该平面以1°至89°之间的第二角度定向的第二表面 所述凸起层的沉积，其中所述第二角度大于所述第一角度。

公开(公告)号：US07848054B2

公开(公告)日：2010-12-07

申请号：US11744054

申请日：2007-05-03

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127

CPC分类号： G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

摘要： A perpendicular magnetic write head having a conformal wrap around trailing shield. The write head includes a write pole that can be configured with a trapezoidal shape as viewed from the Air Bearing Surface (ABS) and which includes a wrap around trailing magnetic shield. The magnetic shield has a trailing portion that is separated from the leading edge of the write pole by a non-magnetic trailing gap, and has side shield portions that are separated from first and second side portions of the write pole by first and second non-magnetic side gaps. The magnetic shield can be configured with notches at either side of the trailing portion of magnetic shield. These notches can extend in the trailing direction by a distance that is preferably ¼ to 1 times the trailing gap thickness. The width of the straight, trailing portion of the shield is preferable ½ to 1 times of the main pole width.

摘要翻译： 垂直磁性写头，其具有围绕后屏蔽的保形包裹。 写入头包括写入极，其可以被配置为从空气轴承表面（ABS）观察到的梯形形状，并且包括围绕尾部磁屏蔽的包裹。 磁屏蔽具有通过非磁性拖尾间隔与写入极的前端分离的后部，并且具有通过第一和第二非间隙与写入极的第一和第二侧部分离的侧面屏蔽部分， 磁侧隙。 磁屏蔽可以在磁屏蔽的尾部的任一侧配置有凹口。 这些凹口可以在拖尾方向上延伸一段距离，优选为后缘间隙厚度的1/4至1倍。 屏蔽的直的后部的宽度优选为主极宽度的1/2至1倍。