Microphotonic waveguide including core/cladding interface layer
    1.
    发明授权
    Microphotonic waveguide including core/cladding interface layer 有权
    微波导管包括芯/包层界面层

    公开(公告)号:US07831123B2

    公开(公告)日:2010-11-09

    申请号:US11899234

    申请日:2007-09-05

    IPC分类号: G02B6/10

    摘要: The invention provides a waveguide with a waveguide core having longitudinal sidewall surfaces, a longitudinal top surface, and a longitudinal bottom surface that is disposed on a substrate. An interface layer is disposed on at least one longitudinal sidewall surface of the waveguide core. A waveguide cladding layer is disposed on at least the waveguide core sidewall and top surfaces, over the interface layer. The waveguide of the invention can be produced by forming a waveguide undercladding layer on a substrate, and then forming a waveguide core on the undercladding layer. An interface layer is then formed on at least a longitudinal sidewall surface of the waveguide core, and an upper cladding layer is formed on a longitudinal top surface and on longitudinal sidewall surfaces of the waveguide core, over the interface layer.

    摘要翻译: 本发明提供一种具有波导芯的波导,波导芯具有纵向侧壁表面,纵向顶表面和设置在基底上的纵向底表面。 界面层设置在波导芯的至少一个纵向侧壁表面上。 至少在波导芯侧壁和顶表面上,在界面层上设置波导覆层。 本发明的波导可以通过在基板上形成波导管下封层,然后在下封层上形成波导芯来制造。 然后在波导芯的至少纵向侧壁表面上形成界面层,并且在该界面层上的纵向顶表面和波导芯的纵向侧壁表面上形成上覆层。

    Microphotonic waveguide including core/cladding interface layer
    2.
    发明申请
    Microphotonic waveguide including core/cladding interface layer 有权
    微波导管包括芯/包层界面层

    公开(公告)号:US20080253728A1

    公开(公告)日:2008-10-16

    申请号:US11899234

    申请日:2007-09-05

    IPC分类号: G02B6/10 C03B37/022

    摘要: The invention provides a waveguide with a waveguide core having longitudinal sidewall surfaces, a longitudinal top surface, and a longitudinal bottom surface that is disposed on a substrate. An interface layer is disposed on at least one longitudinal sidewall surface of the waveguide core. A waveguide cladding layer is disposed on at least the waveguide core sidewall and top surfaces, over the interface layer. The waveguide of the invention can be produced by forming a waveguide undercladding layer on a substrate, and then forming a waveguide core on the undercladding layer. An interface layer is then formed on at least a longitudinal sidewall surface of the waveguide core, and an upper cladding layer is formed on a longitudinal top surface and on longitudinal sidewall surfaces of the waveguide core, over the interface layer.

    摘要翻译: 本发明提供一种具有波导芯的波导,波导芯具有纵向侧壁表面,纵向顶表面和设置在基底上的纵向底表面。 界面层设置在波导芯的至少一个纵向侧壁表面上。 至少在波导芯侧壁和顶表面上,在界面层上设置波导覆层。 本发明的波导可以通过在基板上形成波导管下封层,然后在下封层上形成波导芯来制造。 然后在波导芯的至少纵向侧壁表面上形成界面层,并且在该界面层上的纵向顶表面和波导芯的纵向侧壁表面上形成上覆层。

    Multiple oxidation smoothing method for reducing silicon waveguide roughness
    5.
    发明授权
    Multiple oxidation smoothing method for reducing silicon waveguide roughness 有权
    减少硅波导粗糙度的多重氧化平滑法

    公开(公告)号:US07123805B2

    公开(公告)日:2006-10-17

    申请号:US10869636

    申请日:2004-06-16

    IPC分类号: G02B6/10 H01L21/00

    摘要: The light-guiding structure includes a waveguide structure that comprises a substrate and a low refractive index underclad material. The waveguide structure is oxidized to form an oxidized layer on a surface of the waveguide structure. The oxidized layer is isotropically etched after the reaction-limited oxidation regime is approaching the diffusion-limited regime and repeatedly oxidized and etched so that the waveguide structure is continuously oxidized in the reaction-limited regime, reducing the overall time of oxidation and volume of oxidized material so that the waveguide structure has its sidewall roughness reduced efficiently enabling high transmission rates of guided light.

    摘要翻译: 导光结构包括波导结构,其包括基底和低折射率底层材料。 波导结构被氧化以在波导结构的表面上形成氧化层。 在反应限制氧化态接近扩散限制状态后,氧化层进行各向同性蚀刻,并被反复氧化和蚀刻,使得波导结构在反应限制状态下连续氧化,减少氧化的总时间和氧化的体积 材料,使得波导结构的侧壁粗糙度有效地降低,导致导光的高透射率。